CN101666911A - Widening device of high-power laser beam and method thereof - Google Patents
Widening device of high-power laser beam and method thereof Download PDFInfo
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- CN101666911A CN101666911A CN 200910186152 CN200910186152A CN101666911A CN 101666911 A CN101666911 A CN 101666911A CN 200910186152 CN200910186152 CN 200910186152 CN 200910186152 A CN200910186152 A CN 200910186152A CN 101666911 A CN101666911 A CN 101666911A
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Abstract
The invention discloses a widening device of a high-power laser beam and a method thereof. The device comprises a continuous laser, a sector reflection focusing lens, a deflection-type oscillating mirror, a high-speed motor and a computer. One side of the deflection-type oscillating mirror is connected with a rotation shaft of the high-speed motor. The high-speed motor is connected with the computer. The deflection-type oscillating mirror and the sector reflection focusing lens are placed oppositely. The laser beams emitted by the continuous laser are homocentric with a turning center O of thesector reflection focusing lens at a reflecting point C of the deflection-type oscillating mirror. The method causes the continuous laser beam output by the continuous laser to form continuous scanning beams in the sector region with a certain scanning angle alpha after being reflected by the deflection-type oscillating mirror rotating at high speed, wherein the scanning beams form continuous arcscanning focusing light bands on the surface of the processed work piece after being reflected and focused by the sector reflection focusing lens. Compared with the prior art, the device can widen the high-power laser beam in a wider range (20-500mm) and the widened width is continuously controllable.
Description
Technical field
The present invention relates to Laser Processing and optoelectronic applications field, particularly a kind of apparatus for widen of high-power laser beam and method.
Background technology
The laser focusing point of high-energy-density will can be formed after the original high power laser light beam focusing, this focus point with high-energy-density is acted on metal material surface, can handle metal material surface, as deposited, thermal treatment of: metal surface etc., make its metal surface form a kind of special superficial layer, to strengthen the features such as wearing quality, corrosion resistivity, fatigue resistence, thermotolerance and creep resistance of metal material surface.Adopting laser to carry out the heat treated advantage of material surface mainly comprises: the zone that the thermal deformation district that processing speed is fast, processed is little, can realize Local treatment optionally, processing flexibility is good, widely applicable, can handle irregularly shaped parts and be difficult to arrive.Adopt parts that laser heat-treats as piston ring groove, meter slide block, cylinder jacket, gear, turbine blade, camera shutter, oil pump cylinder, internal combustion engine valve and bearing etc.
When utilizing laser to carry out material surface thermal treatment, often require the width and the processed workpiece coupling of laser beam, occur the overlap joint between the thermal treatment band in the time of can avoiding thermal treatment like this, realize the homogeneity of thermal treatment thickness.By guiding device, can realize control easily, to realize the Laser Processing of highly flexible to the laser beam transmission direction through particular design.Utilize this characteristic of laser beam, can realize the broadband scanning of laser beam.For example patent " a kind of laser broadband scanning mirror " (patent No. ZL02245662.7) has been described a kind of device that utilizes laser rotary mirror the laser beam broadening to be become the ribbon beam of certain width.Compare with the processing of common laser bundle, broadband scanning can make Temperature Distribution more even, so the distortion that thermal treatment causes is littler, and one number percent to preceding one heat affecting also reduces down.This device has been applied to laser broadband thermal treatment and deposited, proves a kind of effective method.But the laser beam flying width of this device is subjected to the restriction of its complex optical path design, can only realize the broadening of laser beam in limited scope, and for example present adjustable laser scanning width only is 20-40mm.
Summary of the invention
The present invention seeks at the deficiencies in the prior art and defective, providing a kind of can (carry out broadening to high-power laser beam in 20～500mm), and the apparatus for widen and the method for the high-power laser beam of broadening width continuous controllable in wideer scope.
Technical scheme of the present invention is: the present invention at first provides a kind of apparatus for widen of high-power laser beam, and it comprises continuous wave laser, fan-shaped reflect focalization mirror, gauche form galvanometer, high-speed electric expreess locomotive and computing machine; A side that it is characterized in that described gauche form galvanometer links to each other with the rotating shaft of high-speed electric expreess locomotive, and high-speed electric expreess locomotive then links to each other with computing machine; Gauche form galvanometer and fan-shaped reflect focalization mirror are staggered relatively, and the reflection spot C of laser beam on the gauche form galvanometer that described continuous wave laser sends is concentric with the centre of gyration O of described fan-shaped reflect focalization mirror.
Shape to described fan-shaped reflect focalization mirror among the present invention further limits as follows:
Following formula is satisfied in arbitrfary point on the reflecting surface camber line AB of this fan-shaped reflect focalization mirror in plane right-angle coordinate:
-y+5f/2=x
2/ 2f, and following formula is satisfied in the arbitrfary point on the fan-shaped reflect focalization mirror reflection face in rectangular coordinate system in space:
The value of f described in the present invention is 50～500mm.
The galvanometer of gauche form described in the present invention is made by red copper, and preferably is coated with one deck gold film on its reflecting surface, with further raising light reflectivity and prevent surface oxidation.
The apparatus for widen of high-power laser beam of the present invention also comprises cooling cycle system, has the cooling duct in the described gauche form galvanometer, and described cooling duct links to each other with described cooling cycle system.Chilled water is carried and by described cooling duct by cooling cycle system, thereby the heat on the gauche form galvanometer is taken away, cross cause thermal damage to prevent the gauche form galvanometer.
The present invention provides a kind of apparatus for widen of above-mentioned high-power laser beam that adopts as follows to the method that high-power laser beam carries out broadening on the other hand: the continuous laser beam that makes continuous wave laser output is through forming the continuous sweep light beam in the sector region with certain scanning angle α after the gauche form vibration mirror reflected of high speed rotating, after this scanning light beam focuses on through fan-shaped reflect focalization mirror reflection, form continuous are scan on the processed workpiece surface and focus on light belt, workpiece is carried out laser surface thermal treatment.
Above-mentioned method for widening is by the deflection angle β size of computer control gauche form galvanometer, and then the surface sweeping angle [alpha] size of the interior continuous sweep light beam of change sector region, just can realize the continuous controllable for the laser scanning width.
Among the present invention, just can reach control for gauche form galvanometer deflection angle β by parameter preset in computing machine, concrete certainly parameter setting and relevant control technology are technology well-known to those skilled in the art.
Advantage of the present invention is:
The present invention compared with prior art mainly has the following advantages:
(1) can be in wide region (20～500mm) realize high-power laser beam is carried out broadening, and the width of beam broadening can be set arbitrarily.
(2) the fan-shaped reflect focalization mirror of Cai Yonging is focused into an are scan with the continuous sweep light beam in the sector region and focuses on light belt, can make the heat treated effect of laser surface more even.
(3) focus on light belt by adjusting the are scan that scanning angle α just can obtain different arc, thereby realize continuous variable broadening high-power laser beam, therefore can make apparatus structure simply, working stability.
In a word, the present invention can realize (the controlled broadening of 20～500mm) high-power laser beams in the wide region, and the device that is provided is compared with existing apparatus, structure is simple more, more stable work, working (machining) efficiency height and laser energy utilizing rate height, and especially having overcome prior art need be by changing the deficiency that optical device change the beam broadening width.
Description of drawings
Below in conjunction with drawings and Examples the present invention is further described:
Fig. 1 is the apparatus for widen structural representation of high-power laser beam of the present invention;
Fig. 2 is fan-shaped reflect focalization mirror front view among the present invention;
Fig. 3 is centre section (the being the E-E section) structural representation (being in the rectangular coordinate system in space) of fan-shaped reflect focalization mirror among the present invention;
Fig. 4 realizes the principle schematic of beam flying for gauche form galvanometer among the present invention.
Wherein: 1, continuous wave laser; 2, fan-shaped reflect focalization mirror; 3, gauche form galvanometer; 4, high-speed electric expreess locomotive; 5, computing machine; 6, cooling cycle system; 7, scanning light beam; 8, workpiece; 9, are scan focuses on light belt.
Embodiment
Embodiment: at first as shown in Figure 1, the apparatus for widen of the high-power laser beam that present embodiment provides mainly is made up of continuous wave laser 1, fan-shaped reflect focalization mirror 2, gauche form galvanometer 3, high-speed electric expreess locomotive 4, computing machine 5 and cooling cycle system 6.One side of described gauche form galvanometer 3 links to each other with the rotating shaft of high-speed electric expreess locomotive 4, and high-speed electric expreess locomotive 4 links to each other with computing machine 5, just can reach control for gauche form galvanometer 3 deflection angle β by parameter preset in computing machine 5.Have the cooling duct in the described gauche form galvanometer 3, this cooling duct links to each other with described cooling cycle system 6.Described gauche form galvanometer 3 and fan-shaped reflect focalization mirror 2 are staggered relatively, and the reflection spot C of laser beam on gauche form galvanometer 3 that makes continuous wave laser 1 send is concentric with the centre of gyration O of described fan-shaped reflect focalization mirror 2.
The core of the apparatus for widen of the described high-power laser beam of present embodiment is described fan-shaped reflect focalization mirror 2, further combined with Fig. 2, shown in Figure 3, these fan-shaped reflect focalization mirror 2 front view profiles are fan-shaped, and aforementioned centre of gyration O also is the center of circle (specifically as shown in Figure 2) of fan-shaped place circle.And the fan-shaped central angle of this fan-shaped reflect focalization mirror 2 is θ, and reflecting surface is parabolic, and it is a camber line AB that this parabola is reflected on the centre section (also being the E-E section) of fan-shaped reflect focalization mirror 2.Specifically as shown in Figure 3, suppose with the x axle as revolving shaft, parallel beam with the angle at 45 incident of the reflecting surface of fan-shaped reflect focalization mirror 2 accumulates in focal point F after reflection so, this focal point F is positioned on the y axle, and apart from revolving shaft (x axle) length is 2f, f is a focal length, and the central point O ' of reflecting surface also is 2f apart from the distance of revolving shaft (x axle), and the reflecting surface camber line AB of so described fan-shaped reflect focalization mirror 2 adopts non-standard parabolic equation to be expressed as follows :-y+5f/2=x
2/ 2f.And the every bit on described fan-shaped reflect focalization mirror 2 reflectings surface all satisfies equation in rectangular coordinate system in space:
As shown in Figure 4, with the continuous laser beam of continuous wave laser 1 output, direct projection reflexes to D point in the image field through this gauche form galvanometer 3 again to gauche form galvanometer 3; When this gauche form galvanometer 3 under high-speed electric expreess locomotive 4 drives, during with the reciprocal uniform angular velocity deflection of certain deflection angle β, reflection ray will at the uniform velocity back and forth rotate with two times of angular velocity, to realize the shuttle-scanning of reflection ray, be in the image field luminous point D to the shuttle-scanning between luminous point D ', thereby form continuous sweep light beam 7 in the sector region with certain scanning angle α.Gauche form galvanometer 3 materials are red copper in the present embodiment, can bear the high power laser light irradiation, and for further improving light reflectivity and preventing surface oxidation, can be coated with one deck gold film on the reflecting surface of gauche form galvanometer 3.And in the process of laser beam prolonged exposure gauche form galvanometer 3, chilled water is carried and by the cooling duct in the gauche form galvanometer 3 by cooling cycle system 5, thereby the heat on the gauche form galvanometer 3 is taken away, cross cause thermal damage to prevent gauche form galvanometer 3.
In conjunction with shown in Figure 1, it is as follows that the present invention uses the apparatus for widen of above-mentioned high-power laser beam to carry out the method for broadening: the continuous laser beam that at first makes continuous wave laser 1 output forms continuous sweep light beam 7 in the sector region with certain scanning angle α through gauche form galvanometer 3 reflection backs, after this scanning light beam 7 focuses on through fan-shaped reflect focalization mirror 2, form continuous arc scanning focus band 9 on pending workpiece 8 surfaces with certain arc length, cooperate pending workpiece 8 along relative motion, finish the thermal treatment on 8 surfaces to workpiece to be handled perpendicular to the direction of scanning.
Described are scan focuses on the arc length of light belt 9 and the focal distance f and the fan-shaped central angle of fan-shaped reflect focalization mirror 2 is θ, and the scanning angle α of sector display light beam 7 is all relevant.When described fan-shaped reflect focalization mirror 2 parameter constants, the arc length of described are scan focusing light belt 9 is only relevant with the scanning angle α of scanning light beam 7, and controlled by the deflection angle β to gauche form galvanometer 3 among the present invention, just can obtain the sector display light beam 7 of scanning angle α continuous variable, the arc length that makes are scan focus on light belt 9 constantly changes, thereby realizes the continuous controllable broadening for high-power laser beam.
Claims (7)
1. the apparatus for widen of a high-power laser beam comprises continuous wave laser (1), fan-shaped reflect focalization mirror (2), gauche form galvanometer (3), high-speed electric expreess locomotive (4) and computing machine (5); A side that it is characterized in that described gauche form galvanometer (3) links to each other with the rotating shaft of high-speed electric expreess locomotive (4), and high-speed electric expreess locomotive (4) then links to each other with computing machine (5); Gauche form galvanometer (3) is staggered relatively with fan-shaped reflect focalization mirror (2), and the reflection spot C of laser beam on gauche form galvanometer (3) that described continuous wave laser (1) sends is concentric with the centre of gyration O of described fan-shaped reflect focalization mirror (2).
2. the apparatus for widen of high-power laser beam according to claim 1 is characterized in that following formula is satisfied in the arbitrfary point on the reflecting surface camber line AB of described fan-shaped reflect focalization mirror (2) in plane right-angle coordinate:
-y+5f/2=x
2/ 2f, and following formula is satisfied in the arbitrfary point on fan-shaped reflect focalization mirror (2) reflecting surface in rectangular coordinate system in space:
3. the apparatus for widen of high-power laser beam according to claim 2 is characterized in that described f=50～500mm.
4. the apparatus for widen of high-power laser beam according to claim 1 is characterized in that the material of described gauche form galvanometer (3) is a red copper, and is coated with one deck gold film on its reflecting surface.
5. the apparatus for widen of high-power laser beam according to claim 1 is characterized in that also comprising cooling cycle system (5), has the cooling duct in the described gauche form galvanometer (3), and described cooling duct links to each other with described cooling cycle system (5).
6. an apparatus for widen that adopts the described high-power laser beam of claim 1 carries out the method for broadening to high-power laser beam, it is characterized in that the continuous laser beam that continuous wave laser (1) is exported has the interior continuous sweep light beam (7) of sector region of certain scanning angle α through gauche form galvanometer (3) the reflection back formation of high speed rotating, behind this scanning light beam (7) process fan-shaped reflect focalization mirror (2) reflect focalization, form continuous are scan on processed workpiece (8) surface and focus on light belt (9), workpiece (8) is carried out laser surface thermal treatment.
7. the apparatus for widen of the described high-power laser beam of employing claim 1 according to claim 6 carries out the method for broadening to high-power laser beam, it is characterized in that deflection angle β size by computing machine (5) control gauche form galvanometer (3), and then the surface sweeping angle [alpha] size of the interior continuous sweep light beam of change sector region, to realize continuous controllable to the laser scanning width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910186152 CN101666911B (en) | 2009-09-29 | 2009-09-29 | Widening device of high-power laser beam and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910186152 CN101666911B (en) | 2009-09-29 | 2009-09-29 | Widening device of high-power laser beam and method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN101666911A true CN101666911A (en) | 2010-03-10 |
| CN101666911B CN101666911B (en) | 2011-03-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910186152 Expired - Fee Related CN101666911B (en) | 2009-09-29 | 2009-09-29 | Widening device of high-power laser beam and method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829846A (en) * | 2010-05-11 | 2010-09-15 | 苏州市博海激光科技有限公司 | Integrated focusing texturing processing method and device of high-power laser roll surface |
| CN101913026A (en) * | 2010-06-30 | 2010-12-15 | 苏州市博海激光科技有限公司 | Double-head integrated laser drilling device for cigarette tipping paper |
| CN103240524A (en) * | 2013-05-23 | 2013-08-14 | 广东工业大学 | Time and focus dividing device and method based on scanning galvanometer |
| CN105116553A (en) * | 2015-09-08 | 2015-12-02 | 上海嘉强自动化技术有限公司 | Single-galvanometer uniform-speed scanning-based uniform linear light spot optical path system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3511359B2 (en) * | 1998-02-27 | 2004-03-29 | 三菱電機株式会社 | Laser processing equipment |
| JP3420956B2 (en) * | 1998-12-18 | 2003-06-30 | 松下電器産業株式会社 | Optical scanning device, image reading device and image forming device using the same |
| CN2522092Y (en) * | 2001-04-02 | 2002-11-27 | 华中科技大学 | Laser variable-focus transmission lattice scanning unit |
| CN2573142Y (en) * | 2002-08-12 | 2003-09-17 | 天津工业大学 | Laser wide-band scanning rotary mirror |
| US7184187B2 (en) * | 2003-10-20 | 2007-02-27 | Lexmark International, Inc. | Optical system for torsion oscillator laser scanning unit |
-
2009
- 2009-09-29 CN CN 200910186152 patent/CN101666911B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829846A (en) * | 2010-05-11 | 2010-09-15 | 苏州市博海激光科技有限公司 | Integrated focusing texturing processing method and device of high-power laser roll surface |
| CN101913026A (en) * | 2010-06-30 | 2010-12-15 | 苏州市博海激光科技有限公司 | Double-head integrated laser drilling device for cigarette tipping paper |
| CN103240524A (en) * | 2013-05-23 | 2013-08-14 | 广东工业大学 | Time and focus dividing device and method based on scanning galvanometer |
| CN105116553A (en) * | 2015-09-08 | 2015-12-02 | 上海嘉强自动化技术有限公司 | Single-galvanometer uniform-speed scanning-based uniform linear light spot optical path system |
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| CN101666911B (en) | 2011-03-16 |
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