CN105116555B - A kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning - Google Patents
A kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning Download PDFInfo
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- CN105116555B CN105116555B CN201510566786.8A CN201510566786A CN105116555B CN 105116555 B CN105116555 B CN 105116555B CN 201510566786 A CN201510566786 A CN 201510566786A CN 105116555 B CN105116555 B CN 105116555B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
Abstract
The invention provides a kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning,By off-axis paraboloidal mirror,Off-axis parabolic mirror,Oblique multifaceted prism,Oblique cylindrical-surface parabolic reflector,Off-axis parabolic mirror composition,Suitable for the optical fiber output class laser of power on a large scale,The laser on a large scale such as carbon dioxide laser,Obtain focus on light beam transmission direction consistent,The substantially homogeneous strip linear light spot of the coplanar Energy distribution in focal beam spot position,Hot spot in laser quenching can be reduced or even eliminate to repeat superposition cool time is extremely short because interval time is long and the softening layer problem that causes,Ensure hardening strength,Simultaneously because the lines spot length for obtaining is up to millimeters up to a hundred,Energy distribution is uniform,Multifaceted prism sweep speed exceeds the speed limit,Under the premise of depth of focus is ensured,Can be used for the large area high-rate laser quenching of two dimensional surface or general three-dimension curved surface,Laser melting coating and laser cleaning.
Description
Technical field：
The present invention relates to it is a kind of for power on a large scale, on a large scale laser based on multifaceted prism superelevation uniform speed scanning
Light path system, more particularly to a kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning.
Background technology：
In industry is laser machined, laser quenching quickly heats steel material surface using the laser beam after focusing, makes it
Undergo phase transition, form martensite quench-hardened case；Laser melting coating adds cladding material by substrate surface, and using high-energy-density
Laser beam is allowed to the consolidation together with substrate surface thin layer, is formed and the filling cladding layer that it is metallurgical binding in substrate surface；Swash
Light cleaning is efficient to material surface implementation, efficiently removes corrosion, pollutant, plays a part of to purify surface.
Above-mentioned three kinds of laser technologies, particularly laser quenching and laser melting coating generally requires to carry out uniformly material surface
Heating, to meet process requirements, conventional has defocus method, vibratory drilling method with integration focusing.
Defocus method is to carry out more uniform heating to material by using focal beam spot defocus section, but this relatively depends on laser
Device Output mode, and even cleaned for large-area laser quenching or cladding etc., speed is relatively slow.
Vibratory drilling method is generally based on biplate vibration mirror scanning, and focus on light beam direction is transferred, and one is met in galvanometer rotation
Determine under relation condition, obtain that Energy distribution is high and more uniform lines hot spot, while the phase of given certain linear light spot and material
To speed, the Laser Processing of larger area is realized, had the disadvantage, focus on light beam is not entered in galvanometer rotary course with same angle
Material surface is mapped to, while motor drives rotating speed limited and needs rotating, it is impossible to realize the laser processing procedure of ultrahigh speed stabilization.
Integration focusing has reflective and two kinds of transmission-type, and reflective eyeglass is typical with KUGLER integral mirrors as representative,
Transmission-type, to beam shaping, will carry out the Laser Processing of large area frequently with the unconventional eyeglass such as lens array, and integration hot spot is got over
It is long, it is meant that energy gets over dispersion, and the laser quenching/cladding of high speed large area is not suitable for equally.
In order to overcome above existing issue, while considering laser quenching repetition superposition transition time long and cool time pole
It is short to occur softening layer phenomenon, reduce hardening quality.I scans feature using multifaceted prism, with reference to current air supporting high-speed main spindle electricity
Machine stabilization revolution is up to more than 200000RPM, designs a kind of light path system based on multifaceted prism superelevation uniform speed scanning, can obtain
More than the up to a hundred millimeters scanning line hot spots of homogeneous energy distribution, it is adaptable to large-area laser quenching, laser melting coating and swash
Light is cleaned.
The content of the invention：
Add to overcome existing laser quenching, laser melting coating and laser cleaning light path effectively to carry out large area high-speed
Work, while consider laser quenching characteristic, more than up to a hundred millimeters homogeneous energy distributions is obtained in that the invention provides a kind of
Scanning line hot spot, it is adaptable to the technical scheme of large-area laser quenching, laser melting coating and laser cleaning：
A kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning, all eyeglasses are reflective mirror
Piece, light channel structure with non-metallic-membrane plating reflector as reference data, respectively off-axis parabolic collimating mirror, off-axis parabolic mirror, tiltedly it is many
Face prism, oblique cylindrical-surface parabolic reflector and off-axis parabolic mirror, off-axis paraboloidal mirror, off-axis parabolic mirror and oblique multifaceted prism
At grade, the beam Propagation direction after off-axis parabolic mirror is focused on is total to beam center with multifaceted prism central axis
Face, the beam center of oblique cylindrical-surface parabolic reflector and off-axis parabolic mirror is at grade；Oblique multifaceted prism one side and its center
Axle clamp angle is 4 ° -5 °, and oblique cylindrical-surface parabolic reflector beam deflection angle is consistent with oblique multifaceted prism, and make use of parabola to diverging
The collimation property of light, obtain transmission direction identical collimated light beam bundle, oblique multifaceted prism sweep limits and with oblique cylindrical-surface parabolic reflector
Spacing determines oblique cylindrical-surface parabolic reflector length, and width depends on spot size, oblique cylindrical-surface parabolic reflector parabolic after the reflection of oblique multifaceted prism
Structure direction parameter depends on collimation hot spot direction and characteristic；Off-axis parabolic mirror is unidirectionally focused on, and forms linear light spot, oblique multiaspect
When prism at the uniform velocity rotates, realize that focus on light beam transmission direction is basically identical, focal position is coplanar, can obtain homogeneous energy distribution
Lines hot spot long；Off-axis focus lamp uses 90 ° of beam deflection angle eyeglasses；Oblique cylindrical-surface parabolic reflector is bi-directional configuration, long to being parabolic
Structure, it is wide to being oblique line structure.
Preferably, form lines hot spot long mainly including the following steps that：
A, outgoing diverging light are collimated by off-axis paraboloidal mirror, obtain collimated light beam；
B, collimated light beam are focused into linear light spot by off-axis parabolic mirror；
C, focusing Line beam incide oblique multifaceted prism, it is necessary to meet linear light spot cross section strip direction and oblique multifaceted prism
Central shaft is parallel, and focal line hot spot falls on oblique multifaceted prism surface substantially, is in by the focus on light beam after the reflection of oblique multifaceted prism
, on the premise of oblique multifaceted prism is rotated, there is the focus on light beam after reflection and is scanned into fan shape and oblique in existing unidirectional diversity
Transmission；
D, fan beam are collimated by oblique cylindrical-surface parabolic reflector one direction, realize in scanning process beam Propagation direction it is consistent and
The light beam for collimating；
E, finally focused on by off-axis parabolic mirror, obtain the fabulous strip line of the linearity of unidirectional focal line beam spot scans
Hot spot.
The beneficial effects of the present invention are：
(1) present invention obtains the superelevation at the uniform velocity strip linear light spot that focus on light beam transmission direction is consistent, focal position is coplanar,
Energy distribution is substantially uniform, can both improve scan period repeatability to improve or even eliminate laser quenching after light beam is overlapped and soften layer
Problem, but can large area at a high speed material is processed, be applicable to laser quenching, laser melting coating and laser cleaning.According to
Last a piece of off-axis parabolic mirror focal length is different, can realize the linear light spot of different depths of focus, cannot be only used for two-dimensional laser and adds
Work, can be also used for general Three-dimension process.
(2) it is to form lines light after high-power laser beam is focused on that off-axis parabolic mirror unidirectionally focuses on purpose in the present invention
Spot, energy dispersive distribution, is conducive to the protection of oblique multifaceted prism, while not influenceing light beam performance.
Brief description of the drawings：
Fig. 1 is light path principle figure of the invention；
Fig. 2 is the rearview of Fig. 1 artworks；
Fig. 3 is the top view of Fig. 1 artworks；
Fig. 4 is that Fig. 1 removes light path lens structure figure；
Fig. 5 is the structure chart of oblique cylindrical-surface parabolic reflector in Fig. 1；
Fig. 6 is oblique cylindrical-surface parabolic reflector sectional view in Fig. 1；
Fig. 7 is the structure chart of off-axis parabolic mirror in Fig. 1；
Fig. 8 is off-axis parabolic mirror front view in Fig. 1；
Fig. 9 is off-axis parabolic mirror side view in Fig. 1.
Specific embodiment：
To make goal of the invention of the invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing to of the invention
Implementation method is described in further detail.
As shown in Fig. 1-9, a kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning, Suo Youjing
Piece is reflective eyeglass, and light channel structure is respectively off-axis parabolic collimating mirror 1, off-axis with non-metallic-membrane plating reflector as reference data
Parabolic mirror 2, oblique multifaceted prism 3, oblique cylindrical-surface parabolic reflector 4 and off-axis parabolic mirror 5, off-axis paraboloidal mirror 1, off-axis parabolic cylinder
Face mirror 2 and tiltedly multifaceted prism 3 beam center at grade, off-axis parabolic mirror 2 focus on after beam Propagation side
To coplanar with the central axis of multifaceted prism 3, the beam center of oblique cylindrical-surface parabolic reflector and off-axis parabolic mirror is on the same plane
On, off-axis parabolic collimating mirror 1 is selected according to laser；It is high-power laser beam that off-axis parabolic mirror 2 unidirectionally focuses on purpose
Lines hot spot is formed after focusing, energy dispersive distribution is conducive to the protection of oblique multifaceted prism 3, while not influenceing light beam performance；Tiltedly
The beam deflection angle of multifaceted prism 3 is moderate, it is ensured that light beam performance, while ensuring that Design of Mechanical Structure is smoothed out；Batter post face parabolic
The beam deflection angle of mirror 4 is consistent with oblique multifaceted prism 3, make use of parabola to the collimation property of diverging light, obtains transmission direction
Identical collimated light beam bundle；Off-axis parabolic mirror 2 is unidirectionally focused on, and forms linear light spot, real when oblique multifaceted prism 3 at the uniform velocity rotates
Existing focus on light beam transmission direction is basically identical, and focal position is coplanar, can obtain the lines hot spot long of homogeneous energy distribution.
Lines hot spot long is formed to mainly include the following steps that：
A, outgoing diverging light are collimated by off-axis paraboloidal mirror 1, obtain collimated light beam；
B, collimated light beam are focused into linear light spot by off-axis parabolic mirror 2；
C, focusing Line beam incide oblique multifaceted prism 3, it is necessary to meet linear light spot cross section strip direction and oblique polygonal prism
The central shaft of mirror 3 is parallel, and focal line hot spot falls on the surface of oblique multifaceted prism 3 substantially, the focusing light after the reflection of oblique multifaceted prism 3
The unidirectional diversities of Shu Chengxian, on the premise of oblique multifaceted prism 3 is rotated, occur the focus on light beam after reflection be scanned into fan shape and
Oblique transmission；
D, fan beam are collimated by the one direction of oblique cylindrical-surface parabolic reflector 4, and beam Propagation direction is consistent in realizing scanning process
And the light beam for collimating；
E, finally focused on by off-axis parabolic mirror 5, obtain the fabulous strip of the linearity of unidirectional focal line beam spot scans
Linear light spot.
Off-axis focus lamp uses 90 ° of beam deflection angle eyeglasses in the present embodiment, it is contemplated that volume reasonability, by off-axis throwing
Object lens 1, off-axis parabolic mirror 2 and tiltedly multifaceted prism 3 beam center at grade, by off-axis parabolic mirror
2 focus on after beam Propagation direction it is coplanar with the central axis of multifaceted prism 3, the one side of oblique multifaceted prism 3 and central shaft angle
It it is 4 ° -5 °, the beam deflection angle of oblique cylindrical-surface parabolic reflector 4 is consistent with oblique multifaceted prism 3, the bi-directional configuration of oblique cylindrical-surface parabolic reflector 4 is long
It is wide to being oblique line structure to being parabolic structure.And make use of parabola to the collimation property of diverging light, obtain transmission direction identical
Collimated light beam bundle, the sweep limits of oblique multifaceted prism 3 and determine the oblique length of cylindrical-surface parabolic reflector 4 with the spacing of oblique cylindrical-surface parabolic reflector 4, it is wide
Degree depends on spot size after institute's multifaceted prism 3 reflects, and the parabolic structure direction parameter of oblique cylindrical-surface parabolic reflector 4 depends on collimation hot spot
Direction and characteristic, while when oblique multifaceted prism 3 is motionless, being focused to short-term hot spot, linear light spot is long to be revolved to direction with oblique multifaceted prism 3
The lines hot spot direction long formed when turning is consistent, and when the ultrahigh speed of oblique multifaceted prism 3 rotates, lines hot spot long is spatially deposited
Intuitively, laser carries the hot spot that feux rouges shows strip true under the light path, and laser output laser exists
When being acted on combustible material under the light path, instantaneously there is strip vestige.
In fig. 4, to optical fiber output class laser, off-axis paraboloidal mirror 1, the spacing of off-axis parabolic mirror 2 depend on machinery
Structure design needs；To nearly directional light output class laser, cancel off-axis paraboloidal mirror 1.Off-axis paraboloidal mirror 1, off-axis parabolic cylinder
The size of mirror 2 depends on collimated light beam/nearly collimated light beam diameter, and the focal length of off-axis paraboloidal mirror 1 is sent out depending on optical fiber output class laser
Angle is dissipated with collimation spot diameter requirement.Mechanical structure is limited, and off-axis parabolic mirror 2 unidirectionally focuses on focal length should not be too small, to light
Fine output class laser, off-axis paraboloidal mirror 1, the collocation of the focal length of off-axis parabolic mirror 2, each mirror spacing and laser parameter are determined
Focal line spot width；To nearly directional light class laser, off-axis parabolic mirror 2, waist and the spacing of off-axis parabolic mirror 2 with
And laser parameter determines focal line spot width.Focal line spot size, required scan angle, can select the face of oblique multifaceted prism 3
Number, each side size of inclined-plane trapezoidal faces.The oblique beam deflection angle of multifaceted prism 3 is identical with the batter post face angle of oblique cylindrical-surface parabolic reflector 4, oblique multiaspect
The sweep limits of prism 3 and the oblique length of cylindrical-surface parabolic reflector 4 is determined with the spacing of oblique cylindrical-surface parabolic reflector 4, width depends on oblique multifaceted prism 3
Spot size after reflection, the parabolic structure direction parameter of oblique cylindrical-surface parabolic reflector 4 depends on then collimation hot spot direction and characteristic, batter post
Face parabolic lens 4 depends on Design of Mechanical Structure, off-axis parabolic mirror 5 and to be only capable of alignment with the spacing of off-axis parabolic mirror 5
Collimated optical beam is unidirectionally focused on, and is focused on focal length and is depended on processing needs, and focal beam spot width is determined by each eyeglass focal length combination collocation, swept
The lines homogeneous energy distribution spot length long for describing then is thrown by the scan angle of oblique multifaceted prism 3 and oblique multifaceted prism 3 with batter post face
Depending on the spacing of object lens 4.
The beneficial effects of the present invention are：Acquisition focus on light beam transmission direction of the invention is consistent, focal position is coplanar surpasses
At the uniform velocity strip linear light spot high, Energy distribution is substantially uniform, can both improve scan period repeatability to improve or even eliminate light beam
Laser quenching softens layer problem after overlap, and energy large area is processed material at a high speed, is applicable to laser quenching, laser and melts
Coated with and laser cleaning.It is different according to last a piece of off-axis parabolic mirror focal length, the linear light spot of different depths of focus can be realized, no
Two-dimensional laser processing is can only be used to, general Three-dimension process is can be also used for.
Above-described embodiment is presently preferred embodiments of the present invention, is not the limitation to technical solution of the present invention, as long as
Without the technical scheme that creative work can be realized on the basis of above-described embodiment, it is regarded as falling into patent of the present invention
Rights protection scope in.
Claims (2)
1. a kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning, it is characterised in that：All eyeglasses are equal
Be reflective eyeglass, light channel structure with non-metallic-membrane plating reflector as reference data, respectively off-axis parabolic collimating mirror, off-axis parabolic cylinder
Face mirror, oblique multifaceted prism, oblique cylindrical-surface parabolic reflector and off-axis parabolic mirror, the off-axis paraboloidal mirror, the off-axis parabolic cylinder
The beam center of mirror and the oblique multifaceted prism at grade, the off-axis parabolic mirror focus on after beam Propagation
Direction is coplanar with the multifaceted prism central axis, in the oblique cylindrical-surface parabolic reflector and the light beam of the off-axis parabolic mirror
The heart is at grade；The oblique multifaceted prism one side and central shaft angle are 4 ° -5 °, the oblique cylindrical-surface parabolic reflector light beam
Deflection angle is consistent with the oblique multifaceted prism, and make use of parabola to the collimation property of diverging light, obtains transmission direction phase
With collimated light beam bundle, the oblique multifaceted prism sweep limits and determine that oblique cylindrical-surface parabolic reflector is long with oblique cylindrical-surface parabolic reflector spacing
Degree, width depends on spot size after the oblique multifaceted prism reflection, and oblique cylindrical-surface parabolic reflector parabolic structure direction parameter is depended on
Collimation hot spot direction and characteristic；The off-axis parabolic mirror is unidirectionally focused on, and forms linear light spot, and the oblique multifaceted prism at the uniform velocity revolves
When turning, realize that focus on light beam transmission direction is basically identical, focal position is coplanar, the lines light long of homogeneous energy distribution can be obtained
Spot；The off-axis focus lamp uses 90 ° of beam deflection angle eyeglasses；The oblique cylindrical-surface parabolic reflector is bi-directional configuration, long to being parabolic
Structure, it is wide to being oblique line structure.
2. a kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning according to claim 1, its
It is characterised by：Lines hot spot long is formed to mainly include the following steps that：
A, outgoing diverging light are collimated by the off-axis paraboloidal mirror, obtain collimated light beam；
B, collimated light beam are focused into linear light spot by the off-axis parabolic mirror；
C, focusing Line beam incide the oblique multifaceted prism, it is necessary to meet linear light spot cross section strip direction with the oblique multiaspect
Prism centers axle is parallel, and focal line hot spot falls on the surface of oblique multifaceted prism 3 substantially, by poly- after the reflection of oblique multifaceted prism
Defocused laser beam is presented unidirectional diversity, on the premise of the oblique multifaceted prism is rotated, the focus on light beam after reflection occurs and is scanned into
Fan shape and oblique transmission；
D, fan beam are collimated by the oblique cylindrical-surface parabolic reflector one direction, realize in scanning process beam Propagation direction it is consistent and
The light beam for collimating；
E, it is last focused on by the off-axis parabolic mirror, obtain the fabulous strip line of the linearity of unidirectional focal line beam spot scans
Hot spot.
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| CN201510566786.8A CN105116555B (en) | 2015-09-08 | 2015-09-08 | A kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510566786.8A CN105116555B (en) | 2015-09-08 | 2015-09-08 | A kind of uniform line hot spot light path system based on multifaceted prism superelevation uniform speed scanning |
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| CN105116555B true CN105116555B (en) | 2017-06-30 |
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| CN109465542B (en) * | 2019-01-07 | 2020-01-07 | 哈尔滨工业大学 | High-efficient belt cleaning device of overlength line facula laser |
| CN111560612B (en) * | 2020-06-18 | 2022-03-01 | 河北光束激光科技有限公司 | Laser cladding device and method capable of changing non-uniform distribution of Gaussian light energy |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH01134981A (en) * | 1987-11-19 | 1989-05-26 | Mitsubishi Electric Corp | Laser beam shape varying mechanism |
| CN101573204B (en) * | 2006-12-27 | 2014-01-15 | 罗伯特.博世有限公司 | Laser-beam working device and method for adjusting the focal position |
| DE102011005835A1 (en) * | 2011-03-21 | 2012-09-27 | Trumpf Laser Gmbh + Co. Kg | Device and method for expanding a laser beam |
| CN103399405B (en) * | 2013-07-17 | 2016-07-06 | 苏州大学 | A kind of laser wide-band cladding device and method |
| CN103955061B (en) * | 2014-04-22 | 2016-03-30 | 北京航天控制仪器研究所 | A kind of uniform light spots Surface scan device of laser cleaning machine |
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