CN101590655A - Topping machanism - Google Patents
Topping machanism Download PDFInfo
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- CN101590655A CN101590655A CNA2009101412830A CN200910141283A CN101590655A CN 101590655 A CN101590655 A CN 101590655A CN A2009101412830 A CNA2009101412830 A CN A2009101412830A CN 200910141283 A CN200910141283 A CN 200910141283A CN 101590655 A CN101590655 A CN 101590655A
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- smear metal
- cutting
- fluid
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- 239000002184 metal Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 238000005520 cutting process Methods 0.000 claims abstract description 48
- 239000007788 liquid Substances 0.000 claims abstract description 41
- 239000002173 cutting fluid Substances 0.000 claims abstract description 37
- 238000003754 machining Methods 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 11
- 238000012423 maintenance Methods 0.000 claims abstract description 10
- 239000007921 spray Substances 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000013022 venting Methods 0.000 claims description 21
- 239000012530 fluid Substances 0.000 claims description 20
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000000280 densification Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
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- Auxiliary Devices For Machine Tools (AREA)
- Dicing (AREA)
Abstract
The invention provides a kind of topping machanism, pipe arrangement that it need not high-pressure pump and high pressure specification etc. just can be removed the smear metal that produces reliably when machining.The front end jet hole (24a) that nozzle (24) is removed in smear metal forms flat pattern, and the cross section of this front end jet hole has and the major axis of maintenance face (12a) almost parallel of chuck table (12), remove nozzle (24) near the both sides atomizing of liquids the processing stand (P) from this smear metal, thus, pipe arrangement that need not high-pressure pump and high pressure specification etc. just can be and sprays the liquid that has improved flow velocity planely, thereby can remove the smear metal that produces when machining reliably.At this moment, be provided in the opposition side that rotation because of cutting tool (21) has the side that cutting fluid splashes by nozzle of cutting fluid (23) is removed nozzle (24) with smear metal, can also prevent the smear metal that to remove of the splashing and the unfavorable condition of nozzle of cutting fluid (23) collision along with remove the liquid that nozzle (24) ejects from smear metal.
Description
Technical field
The present invention relates to remove reliably topping machanism in the smear metal of using cutting tool to produce when for example csp substrate is implemented machining.
Background technology
Integrated circuit), (large-scale integration: semiconductor device has proposed the requirement of further miniaturization to LSI large scale integrated circuit) etc. be accompanied by the densification and the miniaturization of electronic equipment, to the employed IC of this electronic equipment (integrated circuit:.In order to satisfy this requirement, semiconductor device has adopted following mode: internal circuit is dwindled, and change method for packing significantly so that reduced profile.As the ring of one in such flow process, begin employing and be called CSP (ChipSize Package: the size method for packing much at one of appearance and size size chip size packages), that make the product of finishing and bare chip (BareChip).About this method, at first on the substrate of glass epoxy resin etc., connect and wait the bare chip that a plurality of semiconductor devices are installed, and use the resin unification to carry out molding and form wafer-like by convex type (bump).Then, use topping machanism that this wafer-like CSP is cut into one by one the product of finishing chip.
Add man-hour in the cut-out of carrying out such wafer-like CSP, can produce the smear metals such as (コ Application ミ) of a large amount of tailings or dirt, major part wherein is cut liquid and washes away or blow away.But, sometimes not all smear metal all is flushed away, can produce for example bigger tailing and remain on the csp substrate, and attached to being cut on the chip one by one that comes by machining or in cutting process, contacting unfavorable conditions such as making the cutting tool wearing and tearing with cutting tool.In addition, dirt in a single day adhere to and former state be fixed up, the cleaning etc. that then is difficult to by is after this removed fully.
Therefore, in the past, the cleaning fluid by for example inject high pressure waits removes smear metal (for example, patent documentation 1).
Patent documentation 1: TOHKEMY 2003-168659 communique
But, in the reply way of patent documentation 1, except topping machanism, also need high-pressure pump, on this basis, also needing to make the pipe arrangement in the topping machanism is the high pressure specification, the problem that exists cost to raise.
Summary of the invention
The present invention finishes in view of the above problems, and its purpose is to provide a kind of pipe arrangement that need not high-pressure pump and high pressure specification etc. just can remove the topping machanism of the smear metal that produces reliably when machining.
In order to address the above problem, to achieve the goal, topping machanism of the present invention comprises: chuck table, and it keeps machined object; And cutting member, it cuts the machined object that remains on the above-mentioned chuck table, and above-mentioned topping machanism is characterised in that above-mentioned cutting member comprises: discoid cutting tool, it is supported to and can rotates freely, and is driven in rotation; And cutter hood, it centers on above-mentioned cutting tool, and above-mentioned cutter hood comprises: a pair of nozzle of cutting fluid, they spray cutting fluid respectively to the two sides of above-mentioned cutting tool; Remove nozzle with a pair of smear metal, they are near the difference atomizing of liquids of the both sides above-mentioned cutting tool and the contacted processing stand of machined object, to remove the smear metal that produces when the machining, above-mentioned a pair of nozzle of cutting fluid and a pair of smear metal are removed nozzle and are provided in opposition side above-mentioned cutter hood, that the side that cutting fluid splashes is arranged because of the rotation of above-mentioned cutting tool, the front end jet hole that the atomizing of liquids of nozzle is removed in above-mentioned smear metal forms flat pattern, and the cross section of above-mentioned front end jet hole has the major axis with the maintenance face almost parallel of above-mentioned chuck table.
In addition, topping machanism of the present invention is characterized in that according to foregoing invention, above-mentioned topping machanism comprises the fluid hydrid component with liquid and air mixing, this fluid hydrid component has: discharge portion, and it is removed nozzle with above-mentioned smear metal and is communicated with, and discharges liquid and Air mixing fluid; The water flowing passage, it is communicated with liquid supply member with the pressure feed liquid of running water degree; Venting channels, it is communicated with air supply member with the pressure feed air of 0.3MPa～0.8MPa; Fluidic junction, it converges above-mentioned venting channels and above-mentioned water flowing passage; And restriction, it is formed between above-mentioned fluidic junction and the above-mentioned venting channels, and above-mentioned water flowing passage is bent to form and is communicated with above-mentioned discharge portion, and above-mentioned venting channels, above-mentioned restriction, above-mentioned fluidic junction and above-mentioned discharge portion set point-blank.
In addition, topping machanism of the present invention is characterized in that according to foregoing invention above-mentioned water flowing passage, above-mentioned venting channels and above-mentioned restriction form the general cylindrical shape shape, and the internal diameter of above-mentioned restriction is littler than the internal diameter of above-mentioned water flowing passage and above-mentioned venting channels.
In the topping machanism of the present invention, the front end jet hole that nozzle is removed in smear metal forms flat pattern, and the cross section of above-mentioned front end jet hole has the major axis with the maintenance face almost parallel of chuck table, remove near the both sides atomizing of liquids of nozzle processing stand from this smear metal, thus, pipe arrangement that need not high-pressure pump and high pressure specification etc. just can be and sprays the liquid that has improved flow velocity planely, thereby can remove the smear metal that when machining, produces reliably, at this moment, because the nozzle of cutting fluid that will spray cutting fluid to cutting tool is removed nozzle with smear metal and is provided in the opposition side that rotation because of cutting tool has the side that cutting fluid splashes, therefore has the effect that the unfavorable condition that the smear metal that should remove of splashing and nozzle of cutting fluid are collided along with remove the liquid that nozzle ejection goes out from smear metal can not take place yet.
Description of drawings
Fig. 1 is the stereoscopic figure of an example of the topping machanism of expression embodiments of the present invention.
Fig. 2 is the general principal view of the structure example of expression cutter hood that cutting tool is centered on.
Fig. 3 is the summary left view of Fig. 2.
Fig. 4 is that the stereogram of the front end shape of nozzle is removed in the expression smear metal.
Fig. 5 is the cutaway view that amplifies the structure example of expression fluid hydrid component.
Fig. 6 is the general principal view of the structure example of the cutter hood that illustrates of expression with comprising supply member.
Label declaration
10: topping machanism; 11: machined object; 12: chuck table; 12a: maintenance face; 20: cutting member; 21: cutting tool; 22: cutter hood; 23: nozzle of cutting fluid; 24: nozzle is removed in smear metal; 24a: front end jet hole; 26: the fluid hydrid component; 26a: outlet; 26b: water flowing passage; 26c: venting channels; 26d: fluidic junction; 26e: restriction; 27: the liquid supply member; 28: the air supply member; P: processing stand.
The specific embodiment
Below, with reference to accompanying drawing to describing for the topping machanism that is used to implement best mode of the present invention.
Fig. 1 is the stereoscopic figure of an example of the topping machanism of expression embodiments of the present invention.The topping machanism 10 of present embodiment is along cutting apart the device that preset lines is cut the machined objects such as csp substrate 11 as the cutting object, and as schematic configuration, as shown in Figure 1, it comprises chuck table 12, shooting member 13 and cutting member 20.
Then, to describing as near the structure example the cutting tool 21 of the feature of present embodiment.Fig. 2 is the general principal view of the structure example of expression cutter hood that cutting tool is centered on, Fig. 3 is its summary left view, Fig. 4 is that the stereogram of the front end shape of nozzle is removed in the expression smear metal, Fig. 5 is the cutaway view that amplifies the structure example of expression fluid hydrid component, and Fig. 6 is the general principal view of the structure example of the cutter hood that illustrates of expression with comprising supply member.
The cutter hood 22 of present embodiment comprises that a pair of nozzle of cutting fluid 23 and a pair of smear metal remove nozzle 24.A pair of nozzle of cutting fluid 23 is used for the cutting fluid that usefulness was used and cleaned in cooling is sprayed on the two sides of cutting tool 21 respectively, and as shown in Figure 6, this a pair of nozzle of cutting fluid 23 is connected with cutting fluid supply member 25.This a pair of nozzle of cutting fluid 23 is provided in rotation because of cutting tool 21 (under the situation of Fig. 2, be clockwise rotation) opposition side (being the right side under the situation at Fig. 2) of the side that cutting fluid splashes (being the left side under the situation of Fig. 2) is arranged, and constitute cutting tool 21 is sprayed cutting fluid from oblique upper.
A pair of smear metal is removed nozzle 24 and is used near the atomizing of liquids respectively of the both sides cutting tool 21 and the machined object 11 contacted processing stand P, to remove smear metals such as the tailing that produces when the machining of machined object 11 and dirt.It is also the same with nozzle of cutting fluid 23 that nozzle 24 is removed in this a pair of smear metal, being provided in rotation because of cutting tool 21 (being clockwise rotation under the situation of Fig. 2) has the opposition side (being the right side under the situation at Fig. 2) of the side (being the left side under the situation at Fig. 2) that cutting fluid splashes, and constitutes near the both sides the processing stand P from the oblique upper atomizing of liquids.Herein, as Fig. 2～shown in Figure 4, the front end jet hole 24a that the atomizing of liquids of nozzle 24 is removed in a pair of smear metal forms the flat pattern of contraction, and the cross section of above-mentioned front end jet hole 24a has the major axis with the maintenance face 12a of chuck table 12 (thereby, the surface of machined object 11) almost parallel.
Herein, in the present embodiment, a pair of smear metal is removed nozzle 24 and is supplied to fluid-mixing as liquid, and this a pair of smear metal is removed nozzle 24 and is connected with fluid hydrid component 26.As shown in Figure 5, fluid hydrid component 26 comprises discharge portion 26a, water flowing passage 26b, venting channels 26c, fluidic junction 26d and restriction 26e.Discharge portion 26a removes nozzle 24 with smear metal and is communicated with, and is used to discharge liquid and Air mixing fluid, and this discharge portion 26a forms the efferent of fluid hydrid component 26.Water flowing passage 26b and liquid supply member 27 are provided with communicatively, and this liquid supply member 27 is with running water degree (the about liquid such as pressure feed water of 0.2MPa～0.3MPa).As shown in Figure 5, this water flowing passage 26b forms and for example is crooked 90 degree in L font ground and is communicated with discharge portion 26a.Yet the angle of bend of water flowing passage 26b is not limited to 90 degree, can be suitably set arbitrarily angled, in a word, as long as be not provided on the straight line with respect to discharge portion 26a.
In addition, venting channels 26c and air supply member 28 are provided with communicatively, and this air supply member 28 is with the pressure feed air of the 0.3MPa～0.8MPa of the degree higher slightly than running water.Fluidic junction 26d is used to interconnecting part that venting channels 26c and water flowing passage 26b are converged.In addition, restriction 26e is formed between fluidic junction 26d and the venting channels 26c.Herein, water flowing passage 26b, venting channels 26c and restriction 26e form the general cylindrical shape shape, and the internal diameter of restriction 26e is set at: not only the internal diameter than venting channels 26c is little, and littler than the internal diameter of water flowing passage 26b.In addition, venting channels 26c, restriction 26e, fluidic junction 26d and discharge portion 26a set point-blank.
In such structure,,, carry out the machining of machined object 11 by being positioned processing stand P by cutting tool 21 with rotation driving at a high speed about the machined object 11 on the maintenance face 12a that remains on chuck table 12.In such machining, can produce tailing and dirt.On the other hand, when carrying out such machining,, carry out the cooling and the cleaning of cutting tool 21 by spraying cutting fluid respectively from the two sides of 23 pairs of cutting tools 21 of a pair of nozzle of cutting fluid.
Simultaneously, remove the front end jet hole 24a of nozzle 24 near the both sides atomizing of liquids the processing stand P from a pair of smear metal.Herein, the pressure of the liquid of supplying with from liquid supply member 27 is the pressure of running water degree, yet, in fluid hydrid component 26, venting channels 26c, restriction 26e, fluidic junction 26d and discharge portion 26a set point-blank, and with the pressure of the degree bigger slightly than tap water pressure from the passage air supply of air supply member 28 on this straight line, and then make liquid and converge by carry out the air that throttling makes flow velocity increase with the internal diameter restriction 26d littler than the internal diameter of water flowing passage 26b, and discharge from discharge portion 26a, thus, the flow velocity of liquid is improved significantly.In addition, because the flat pattern that the front end jet hole 24a of nozzle 24 forms contraction is removed in smear metal, and the cross sectional shape of this front end jet hole 24a forms the major axis that has with the maintenance face 12a almost parallel of chuck table 12, is near the both sides of planely spraying to processing stand P from this front end jet hole 24a with the major axis corresponding width with front end jet hole 24a so improved the liquid (fluid) of flow velocity.Thus, according to present embodiment, pipe arrangement that need not high-pressure pump and high pressure specification etc. just can be the liquid (fluid) that has improved flow velocity near the both sides of spraying processing stand P planely, can remove the smear metal that produces when machining reliably.
Herein, if nozzle of cutting fluid is provided in the side that the rotation because of cutting tool has cutting fluid to splash, then can produce following problem: the smear metal that should remove is along with cutting fluid flows and remove the flowing of liquid that nozzle ejection goes out and collide with nozzle of cutting fluid from smear metal, thereby nozzle of cutting fluid is stopped up or breakage, and in the present embodiment, the unfavorable condition that the smear metal that should remove of splashing and nozzle of cutting fluid 23 are collided along with remove the liquid that nozzle 24 ejects from smear metal because being removed nozzle 24 with smear metal, nozzle of cutting fluid 23 is provided in the opposition side that rotation because of cutting tool 21 has the side that cutting fluid splashes, so can not take place.In addition, owing to remove from smear metal liquid that nozzle 24 sprays to smear metal to remove the direction that direction and cutting fluid follow the rotation of cutting tool 21 to splash consistent, so removing of smear metal is effective.
The present invention is not limited to above-mentioned embodiment, as long as in the scope that does not break away from purport of the present invention, can carry out various distortion.For example, in the present embodiment, in order further to rise to the flow velocity of the liquid of removing smear metal and spraying, use fluid hydrid component 26 that this liquid-to-air is mixed, but also can constitute: do not use the fluid-mixing (not using fluid hydrid component 26 and air supply member 28) that mixes with air, but directly remove nozzle 24 feed fluids, and make the liquid that has improved flow velocity from forming the front end jet hole 24a ejection of flat pattern to smear metal from liquid supply member 27.
Claims (3)
1. topping machanism, it comprises: chuck table, it keeps machined object; And cutting member, it cuts the machined object that remains on the above-mentioned chuck table, and above-mentioned topping machanism is characterised in that,
Above-mentioned cutting member comprises: discoid cutting tool, and it is supported to and can rotates freely, and is driven in rotation; And cutter hood, it centers on above-mentioned cutting tool,
Above-mentioned cutter hood comprises: a pair of nozzle of cutting fluid, and they spray cutting fluid respectively to the two sides of above-mentioned cutting tool; Remove nozzle with a pair of smear metal, they are near the difference atomizing of liquids of the both sides above-mentioned cutting tool and the contacted processing stand of machined object, to remove the smear metal that produces when the machining, above-mentioned a pair of nozzle of cutting fluid and a pair of smear metal are removed nozzle and are provided in opposition side above-mentioned cutter hood, that the side that cutting fluid splashes is arranged because of the rotation of above-mentioned cutting tool
The front end jet hole that the atomizing of liquids of nozzle is removed in above-mentioned smear metal forms flat pattern, and the cross section of above-mentioned front end jet hole has the major axis with the maintenance face almost parallel of above-mentioned chuck table.
2. topping machanism as claimed in claim 1 is characterized in that,
Above-mentioned topping machanism comprises the fluid hydrid component that liquid and air are mixed, and this fluid hydrid component has: discharge portion, and it is removed nozzle with above-mentioned smear metal and is communicated with, and discharge liquid and Air mixing fluid; The water flowing passage, it is communicated with liquid supply member with the pressure feed liquid of running water degree; Venting channels, it is communicated with air supply member with the pressure feed air of 0.3MPa～0.8MPa; Fluidic junction, it converges above-mentioned venting channels and above-mentioned water flowing passage; And restriction, it is formed between above-mentioned fluidic junction and the above-mentioned venting channels,
Above-mentioned water flowing passage is bent to form and is communicated with above-mentioned discharge portion, and above-mentioned venting channels, above-mentioned restriction, above-mentioned fluidic junction and above-mentioned discharge portion set point-blank.
3. topping machanism as claimed in claim 2 is characterized in that,
Above-mentioned water flowing passage, above-mentioned venting channels and above-mentioned restriction form the general cylindrical shape shape, and the internal diameter of above-mentioned restriction is littler than the internal diameter of above-mentioned water flowing passage and above-mentioned venting channels.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008140093 | 2008-05-28 | ||
| JP2008140093A JP2009285769A (en) | 2008-05-28 | 2008-05-28 | Cutting device |
| JP2008-140093 | 2008-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101590655A true CN101590655A (en) | 2009-12-02 |
| CN101590655B CN101590655B (en) | 2013-04-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910141283 Active CN101590655B (en) | 2008-05-28 | 2009-05-18 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2009285769A (en) |
| CN (1) | CN101590655B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2009285769A (en) | 2009-12-10 |
| CN101590655B (en) | 2013-04-17 |
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