CN101570883A - High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously - Google Patents
High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously Download PDFInfo
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- CN101570883A CN101570883A CNA200910064012XA CN200910064012A CN101570883A CN 101570883 A CN101570883 A CN 101570883A CN A200910064012X A CNA200910064012X A CN A200910064012XA CN 200910064012 A CN200910064012 A CN 200910064012A CN 101570883 A CN101570883 A CN 101570883A
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- endoporus
- frequency coil
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- inner bores
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Abstract
The invention provides a high-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously, and relates to the technical field of high-frequency coil. The high-frequency coil structure comprises radical splitter boxes (14) for current diversion, splitter boxes (16) and inner bores (8), wherein 7 of the 19 inner bores (8) are inner bores (8) arranged in the middle; another 6 inner bores (8) are uniformly distributed on the periphery of the middle inner bores (8) in a petal shape; and a barbell shaped inner bore (8) connecting the splitter boxes (16) between every two inner bores (8) is arranged between every two inner bores (8) of the 6 inner bores (8) on the periphery of the 7 inner bores (8). The high-frequency coil structure of the invention can promote current to operate uniformly around the inner bores distributed in petal shape and the barbell shaped 12 inner bores uniformly under the splitting action of the splitter boxes, and lead the current to be distributed on the periphery of the 19 inner bores more uniformly assisted by the splitter boxes, thereby realizing the aim that the current is distributed uniformly on the periphery of the 19 inner bores.
Description
Technical field:
The present invention relates to the radio-frequency coil technical field, especially relating to a kind of electric current that makes is evenly distributed on around the endoporus, by electric current silicon core or other crystalline material are heated evenly, and can once can draw the high-frequency coil structure of 19 silicon cores or other crystalline material simultaneously.
Background technology
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: pass through during work to feed high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating, fuel rod upper end after the heating forms melt zone, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I am through repeatedly experiment discovery, because existing radio-frequency coil layout is unreasonable not to the utmost wants once to draw simultaneously that young crystalline substance almost is impossible more than ten, directly have influence on input-output ratio and once draw young brilliant what, what of benefit are depended on fully and draw young brilliant what, because the electric current operation of existing radio-frequency coil around endoporus do not reach its intended purposes, it is more with the endoporus electric current operation that is connected diagonal cut joint the middle part to have occurred removing, several endoporus is subjected to the influence of high-frequency current operation logic around electric current in addition, make most of endoporus temperature far below near or connect the temperature (just electric current takes a shorter way) of diagonal cut joint endoporus, because the phenomenon that takes a shorter way of electric current, the consequence that is produced is that the young brilliant diameter great disparity that raises up is very big, thereby causes the significantly increase of defect ware quantity.
Summary of the invention:
In order to overcome the deficiency in the background technology, the invention discloses a kind of high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously, nineteen endoporus of the present invention is that the middle part is provided with an endoporus, the endoporus at middle part connects six by radial splitter box and is the endoporus that petal-shaped distributes, 12 endoporus in addition are between the petal-shaped distribution endoporus endoporus at described six two endoporus that are the barbell shape are set respectively, under the shunting action of splitter box, evenly center on described the petal-shaped endoporus that distributes and 12 endoporus operations that are the barbell shape when impelling the electric current operation, and the splitter box auxiliary current more is evenly distributed in around the nineteen endoporus, has realized electric current equally distributed purpose around the nineteen endoporus.
In order to realize the purpose of foregoing invention, the present invention adopts following technical scheme:
A kind of high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A and electric current to carry and water coolant is carried copper pipe B, be the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of described radio-frequency coil to the central position cave in trapezoidal, the cooling water channel ring is embedded in the periphery of radio-frequency coil; Described high-frequency coil structure comprises radial splitter box, splitter box and the endoporus that is used for the electric current water conservancy diversion, the nineteen endoporus wherein seven for the middle part endoporus is set, other six endoporus be petal-shaped be evenly distributed on the middle part endoporus around, between six endoporus of described seven endoporus peripheries, be respectively equipped with between two endoporus the endoporus that is the barbell shape that connects splitter box.
The described high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously carries copper pipe A and electric current conveying and water coolant to carry the diagonal cut joint connection of copper pipe B one side to be used to pass to six any one that are in the petal-shaped uniform distribution endoporus in seven endoporus peripheries in electric current conveying and water coolant.
Because adopt technique scheme, the present invention has following superiority:
The high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously of the present invention, nineteen endoporus of the present invention is that the middle part is provided with an endoporus, the endoporus at middle part connects six by radial splitter box and is the endoporus that petal-shaped distributes, 12 endoporus in addition are between the petal-shaped distribution endoporus endoporus at described six two endoporus that are the barbell shape are set respectively, under the shunting action of splitter box, evenly center on described the petal-shaped endoporus that distributes and 12 endoporus operations that are the barbell shape when impelling the electric current operation, and the splitter box auxiliary current more is evenly distributed in around the nineteen endoporus, has realized electric current equally distributed purpose around the nineteen endoporus; The Heating temperature of nineteen endoporus is basic identical, and the design has broken through the highest existing limitation that can only pull out eight silicon cores, has realized electric current equally distributed purpose around the nineteen endoporus, improves capacity usage ratio, reduces production costs and reduces fraction defective; The present invention and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce is easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is a principle of work synoptic diagram of the present invention.
Fig. 2 is a two dimensional structure synoptic diagram of the present invention.
Fig. 3 is the A-A diagrammatic sketch of Fig. 2.
Fig. 4 is an electric current distribution diagram of the present invention.
In the drawings: 1, fuel rod; 2, magnetic line of force; 3, radio-frequency coil; 4, cooling water channel; 5, silicon core; 6, young brilliant; 7, young brilliant chuck; 8, endoporus; 9, above the radio-frequency coil; 10, below the radio-frequency coil; 11, electric current is carried and water coolant conveying copper pipe A; 12, electric current is carried and water coolant conveying copper pipe B; 13, diagonal cut joint; 14, radial splitter box; 15, electric current; 16, splitter box.
Embodiment:
With reference to the following examples, can explain the present invention in more detail; But the present invention is not limited to these embodiment.
In Fig. 1,2,3,4; A kind of high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil 3 and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried copper pipe B12,9 are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil 3, below the radio-frequency coil of described radio-frequency coil 3 10 be provided with to the central position cave in trapezoidal, cooling water channel 4 ring is embedded in the periphery of radio-frequency coil 3; Described high-frequency coil structure comprises radial splitter box 14, splitter box 16 and the endoporus 8 that is used for the electric current water conservancy diversion, nineteen endoporus 8 wherein seven for the middle part endoporus 8 is set, other six endoporus 8 be petal-shaped be evenly distributed on middle part endoporus 8 around, between six endoporus 8 of described seven endoporus 8 peripheries, be respectively equipped with between two endoporus 8 endoporus that is the barbell shape 8 that connects splitter box 16.
The described high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously carries copper pipe A11 and electric current conveying and water coolant to carry diagonal cut joint 13 connections of copper pipe B12 one side to be used to pass to six any one that are in the petal-shaped uniform distribution endoporus 8 in seven endoporus, 8 peripheries in electric current conveying and water coolant.
Use is as described below: in Fig. 1, earlier fuel rod 1 is delivered to radio-frequency coil 3 bottoms, fuel rod 1 is near more good more apart from radio-frequency coil 3, but must not contact with radio-frequency coil 3, electric current on radio-frequency coil 3 is carried and water coolant carries copper pipe A11 energising to send water and another root electric current to carry and water coolant is carried copper pipe B12 energising draining then, electric current 15 impels radio-frequency coil 3 to produce powerful magnetic line of force 2, make raw material silicon rod 1 upper end utilize magnetic line of force 2 to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel 4 gives radio-frequency coil 3 coolings, and diagonal cut joint 13 connects one of them of being used to pass in seven endoporus, 8 peripheral six endoporus 8.
At Fig. 2, in 3 or 4, carry the diagonal cut joint 13 of copper pipe A11 and electric current conveying and water coolant conveying copper pipe B12 one side to connect one of them of being used to pass in six endoporus 8 in seven endoporus, 8 peripheries in electric current conveying and water coolant, this radial splitter box 14 extends out to other six endoporus 8 by middle part endoporus 8, and between described six endoporus 8, be respectively equipped with between two endoporus 8 endoporus that is the barbell shape 8 that connects splitter box 16 in described seven endoporus 8 peripheries, its major function is to make fuel rod 1 thermally equivalent in order to make high-frequency current can form to use or intersect at boundary, and can realize the effect of auxiliaryization material; After melt at 10 position below the close radio-frequency coil in the termination of raw material silicon rod 1, young brilliant chuck 7 is being with young brilliant 6 to descend, make young brilliant 6 melting areas by nineteen endoporus 8 back insertion fuel rods 1, promote young brilliant 6 then, the melt cognition on fuel rod 1 top is followed young brilliant 6 and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod 1 bottom slowly risen, but its fuel rod 1 must not contact with radio-frequency coil 3; Because the end of fuel rod 1 may be not too smooth, so, 10 are designed to the step that caves in below the radio-frequency coil, its role is to make as much as possible the bottom surfaces 10 of raw material silicon rod more than 1 near radio-frequency coil, it is 9 slopes that are designed to from outside to inside above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 3, with the effect that realizes being heated evenly; The melting area on raw material silicon rod 1 top is in the sticking and drive of young crystalline substance 6 and by behind radio-frequency coil 3 endoporus 8, because weakening and condensation of magnetic line of force 2, just form a new column type crystal, its young brilliant chuck 7 is carried young brilliant 6 secretly and is slowly risen, and just can form the finished silicon core 5 of desired length.
The embodiment that selects for use in this article in order to disclose purpose of the present invention currently thinks to suit, but making of should be appreciated that, and the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.
Claims (2)
1, a kind of high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil (3) and water coolant carries copper pipe A (11) and electric current to carry and water coolant is carried copper pipe B (12), (9) are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil (3), below the radio-frequency coil of described radio-frequency coil (3) (10) be provided with to the central position cave in trapezoidal, cooling water channel (4) ring is embedded in the periphery of radio-frequency coil (3); It is characterized in that: described high-frequency coil structure comprises radial splitter box (14), splitter box (16) and the endoporus (8) that is used for the electric current water conservancy diversion, nineteen endoporus (8) wherein seven for the middle part endoporus (8) is set, other six endoporus (8) be petal-shaped be evenly distributed on middle part endoporus (8) around, between peripheral six endoporus (8) of described seven endoporus (8), be respectively equipped with the endoporus that is the barbell shape (8) that connects splitter box (16) between two endoporus (8).
2, the high-frequency coil structure that can draw 19 silicon cores or other crystalline material simultaneously as claimed in claim 1 is characterized in that: carry copper pipe A (11) and electric current conveying and water coolant to carry diagonal cut joint (13) connection of copper pipe B (12) one sides to be used to pass to six any one that are in the petal-shaped uniform distribution endoporus (8) in seven endoporus (8) periphery in electric current conveying and water coolant.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910064012XA CN101570883B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously |
| PCT/CN2009/074838 WO2010060349A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| JP2011529439A JP5313354B2 (en) | 2008-11-25 | 2009-11-06 | Arrangement of high-frequency coil drawing holes for manufacturing multiple silicon cores |
| KR1020107026853A KR101324582B1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| EP09828609.9A EP2366814A4 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910064012XA CN101570883B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101570883A true CN101570883A (en) | 2009-11-04 |
| CN101570883B CN101570883B (en) | 2011-06-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910064012XA Expired - Fee Related CN101570883B (en) | 2008-11-25 | 2009-01-06 | High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously |
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| CN (1) | CN101570883B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010060349A1 (en) * | 2008-11-25 | 2010-06-03 | Liu Chaoxuan | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201001208Y (en) * | 2007-01-19 | 2008-01-02 | 刘朝轩 | High-frequency coil capable of meanwhile producing three silicon cores or other crystal materials |
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2009
- 2009-01-06 CN CN200910064012XA patent/CN101570883B/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010060349A1 (en) * | 2008-11-25 | 2010-06-03 | Liu Chaoxuan | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
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| Publication number | Publication date |
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| CN101570883B (en) | 2011-06-29 |
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Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111116 |
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Effective date of registration: 20111116 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Patentee after: LUOYANG JINNUO MECHANICAL ENGINEERING Co.,Ltd. Address before: 471009 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Patentee before: Liu Chaoxuan |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110629 Termination date: 20220106 |