CN101457391B - High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material - Google Patents
High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material Download PDFInfo
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- CN101457391B CN101457391B CN2008101820549A CN200810182054A CN101457391B CN 101457391 B CN101457391 B CN 101457391B CN 2008101820549 A CN2008101820549 A CN 2008101820549A CN 200810182054 A CN200810182054 A CN 200810182054A CN 101457391 B CN101457391 B CN 101457391B
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Abstract
The invention discloses a high-frequency coil structure capable of simultaneously producing four silicon cores and other crystalline materials, and relates to the technical field of the high-frequency coils. The high-frequency coil structure comprises splitter boxes (14) for guiding current (15), and four inner bores one inner bore (8) of which is arranged at the middle part of the high-frequency coil and three inner bores of which are evenly distributed around the inner bore at the middle part; an oblique opening (13) arranged on one side of a current delivery and cooling water delivery copper pipe A(11) and a current delivery and cooling water delivery copper pipe B(12) is in through connection with the inner bore at the middle part; and the splitter boxes extend outwards to the position between every two inner bores except for the oblique opening from the inner bore at the middle part. The oblique opening is connected with the inner bore at the middle part, and the two splitter boxes extend upwards to the position between two inner bores without the oblique openings from the inner bore at the middle part, which causes the current to evenly surround the four inner bores for running under the current splitting action of the splitter boxes while the current is running, thus realizing the purpose that the current is evenly distributed around the four inner bores.
Description
Technical field:
The present invention relates to the radio-frequency coil technical field, especially relate to a kind of electric current that makes and be evenly distributed on around the endoporus, by electric current silicon core or other crystalline material are heated evenly, and can produce the novel high-frequency loop construction of four silicon cores and other crystalline material simultaneously.
Background technology:
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: pass through during work to feed high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating, fuel rod upper end after the heating forms melt zone, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I am by repeatedly experiment discovery, and formerly the patent layout is unreasonable; For example I am at two utility model patents of first to file;
Wherein patent 1: patent name, a kind of radio-frequency coil that once can produce four silicon cores or other crystalline material; The applying date, on January 19th, 2007; Granted publication number, CN201001209Y;
Wherein patent 2: patent name, a kind of radio-frequency coil that once can produce four silicon cores or other crystalline material; The applying date, on February 13rd, 2007; Granted publication number, CN201024228Y;
By this use in 2 years, electric current operation around endoporus does not reach its intended purposes, structure as shown in above-mentioned two patent application document figure, electric current is around each endoporus operation the time, the electric current operation that the middle part endoporus can occur is more, other three endoporus be subjected to the influence of high-frequency current operation logic around electric current, make the temperature of middle part endoporus far above two side lower part endoporus and top endoporus (just electric current takes a shorter way) because the phenomenon that takes a shorter way of electric current, the consequence that is produced is that the young brilliant diameter great disparity that raises up is very big, thereby causes the increase of defect ware quantity.
Summary of the invention:
In order to overcome the deficiency in the background technology, the invention discloses a kind of high-frequency coil structure that can produce four silicon cores and other crystalline material simultaneously, diagonal cut joint of the present invention connects the middle part endoporus, article two, splitter box is extended upwardly between the endoporus of two no diagonal cut joints by the middle part endoporus, under the shunting action of splitter box, evenly move when making the electric current operation around four endoporus, and the splitter box auxiliary current more is evenly distributed in around four endoporus, has realized electric current equally distributed purpose around four endoporus.
In order to realize the purpose of foregoing invention, the present invention adopts following technical scheme:
A kind of high-frequency coil structure that can produce four silicon cores and other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A and electric current to carry and water coolant is carried copper pipe B, be the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, the cooling water channel ring is embedded in the outside of radio-frequency coil; Described high-frequency coil structure comprises the splitter box that is used for the electric current water conservancy diversion, four endoporus are that the middle part is provided with an endoporus, other three endoporus are evenly distributed around the endoporus of middle part, carry and water coolant carries copper pipe A and electric current to carry and water coolant is carried the diagonal cut joint of copper pipe B one side to connect to be used to lead to and connect the middle part endoporus at electric current, described splitter box is extended out between per two endoporus except diagonal cut joint by the middle part endoporus.
The described high-frequency coil structure that can produce four silicon cores and other crystalline material simultaneously, described endoporus can be set to rounding of angle endoporus, trilateral endoporus, the interior rounding of angle endoporus of trilateral, Polygons endoporus, irregular polygon endoporus, rhombus endoporus, the interior rounding of angle endoporus of rhombus, trapezoidal endoporus, trapezoidal interior rounding of angle endoporus, Long Circle endoporus or oval endoporus in circular inner hole, square inner bore, square interior rounding of angle endoporus, rectangle endoporus, the rectangle.
Because adopt technique scheme, the present invention has following superiority:
Diagonal cut joint of the present invention connects the middle part endoporus, splitter box outwards is distributed between per two peripheral endoporus by the middle part endoporus, under the shunting action of splitter box, evenly move when making the electric current operation around four endoporus, and the splitter box auxiliary current more is evenly distributed in around four endoporus, reach test by experiment, proved that the present invention improves after-current and can move around each endoporus uniformly under the water conservancy diversion of splitter box, the Heating temperature of four endoporus is basic identical, realized electric current equally distributed purpose around four endoporus, improve capacity usage ratio, reduce production costs and reduce fraction defective; The present invention and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce is easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is an electric current distribution diagram of the present invention.
Fig. 2 is a two dimensional structure synoptic diagram of the present invention.
Fig. 3 is the A-A diagrammatic sketch of Fig. 2.
Fig. 4 is a principle of work synoptic diagram of the present invention.
In the drawings: 1, fuel rod; 2, magnetic line of force; 3, radio-frequency coil; 4, cooling water channel; 5, silicon core; 6, young brilliant; 7, young brilliant chuck; 8, endoporus; 9, above the radio-frequency coil; 10, below the radio-frequency coil; 11, electric current is carried and water coolant conveying copper pipe A; 12, electric current is carried and water coolant conveying copper pipe B; 13, diagonal cut joint; 14, splitter box; 15, electric current.
Embodiment:
With reference to the following examples, can explain the present invention in more detail; But the present invention is not limited to these embodiment.
In Fig. 1,2,3,4; A kind of high-frequency coil structure that can produce four silicon cores and other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried copper pipe B12,9 are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, cooling water channel 4 ring is embedded in the outside of radio-frequency coil 3; Described high-frequency coil structure comprises the splitter box 14 that is used for electric current 15 water conservancy diversion, four endoporus 8 are provided with an endoporus 8 for the middle part, other three endoporus 8 are evenly distributed around middle part endoporus 8, carry and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried the diagonal cut joint 13 of copper pipe B12 one side to connect to be used to lead to and connect middle part endoporus 8 at electric current, described splitter box 14 is extended out between per two endoporus 8 except diagonal cut joint 13 by middle part endoporus 8.
The described high-frequency coil structure that can produce four silicon cores and other crystalline material simultaneously, described endoporus 8 can be set to rounding of angle endoporus 8, trilateral endoporus 8, the interior rounding of angle endoporus 8 of trilateral, Polygons endoporus 8, irregular polygon endoporus 8, rhombus endoporus 8, the interior rounding of angle endoporus 8 of rhombus, trapezoidal endoporus 8, trapezoidal interior rounding of angle endoporus 8, Long Circle endoporus 8 or oval endoporus 8 in circular inner hole 8, square inner bore 8, square interior rounding of angle endoporus 8, rectangle endoporus 8, the rectangle.
Use is as described below: in Fig. 4, earlier fuel rod 1 is delivered to radio-frequency coil 3 bottoms, fuel rod 1 is near more good more apart from radio-frequency coil 3, but must not contact with radio-frequency coil 3, electric current on radio-frequency coil 3 is carried and water coolant carries copper pipe A11 energising to send water and another root electric current to carry and water coolant is carried copper pipe B12 energising draining then, electric current 15 impels radio-frequency coil 3 to produce powerful magnetic line of force 2, make raw material silicon rod 1 upper end utilize magnetic line of force 2 to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel 4 gives radio-frequency coil 3 coolings, and diagonal cut joint 13 is made angle and is used to pass to middle part endoporus 8.
In Fig. 1,2 or 4, carry and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried the diagonal cut joint 13 of copper pipe B12 one side to connect to be used to lead to and connect middle part endoporus 8 at electric current, this splitter box 14 is extended out between per two endoporus 8 except diagonal cut joint 13 by middle part endoporus 8, its major function is to make fuel rod 1 thermally equivalent in order to make high-frequency current can form to intersect at boundary, and can realize the effect of auxiliaryization material; After melt at 10 position below the close radio-frequency coil in the termination of raw material silicon rod 1, young brilliant chuck 7 is being with young brilliant 6 to descend, make young brilliant 6 melting areas by four endoporus, 8 back insertion fuel rods 1, promote young brilliant 6 then, the melt cognition on fuel rod 1 top is followed young brilliant 6 and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod 1 bottom slowly risen, but its fuel rod 1 must not contact with radio-frequency coil 3; Because the end of fuel rod 1 may be not too smooth, so, 10 are designed to the step that caves in below the radio-frequency coil, its role is to make as much as possible the bottom surfaces 10 of raw material silicon rod more than 1 near radio-frequency coil, it is 9 slopes that are designed to from outside to inside above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 3, with the effect that realizes being heated evenly; The melting area on raw material silicon rod 1 top is in the sticking and drive of young crystalline substance 6 and by behind radio-frequency coil 3 endoporus 8, because weakening and condensation of magnetic line of force 2, just form a new column type crystal, its young brilliant chuck 7 is carried young brilliant 6 secretly and is slowly risen, and just can form the finished silicon core 5 of desired length.
The embodiment that selects for use in this article in order to disclose purpose of the present invention currently thinks to suit, but making of should be appreciated that, and the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.
Claims (1)
1. the high-frequency coil structure that can produce four silicon cores or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A (11) and electric current to carry and water coolant is carried copper pipe B (12), (9) are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, cooling water channel (4) ring is embedded in the outside of radio-frequency coil (3); It is characterized in that: described high-frequency coil structure comprises the splitter box (14) that is used for electric current (15) water conservancy diversion, four endoporus (8) are provided with an endoporus (8) for the middle part, other three endoporus (8) are evenly distributed around middle part endoporus (8), carry and water coolant carries copper pipe A (11) and electric current to carry and water coolant carries the diagonal cut joint (13) of copper pipe B (12) one sides to connect to connect middle part endoporus (8) at electric current, described splitter box (14) is extended out between per two endoporus (8) except diagonal cut joint (13) by middle part endoporus (8).
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101820549A CN101457391B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material |
| JP2011529439A JP5313354B2 (en) | 2008-11-25 | 2009-11-06 | Arrangement of high-frequency coil drawing holes for manufacturing multiple silicon cores |
| KR1020107026853A KR101324582B1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| PCT/CN2009/074838 WO2010060349A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| US13/125,973 US20110204044A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| EP09828609.9A EP2366814A4 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101820549A CN101457391B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101457391A CN101457391A (en) | 2009-06-17 |
| CN101457391B true CN101457391B (en) | 2011-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101820549A Expired - Fee Related CN101457391B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material |
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| CN (1) | CN101457391B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010060349A1 (en) * | 2008-11-25 | 2010-06-03 | Liu Chaoxuan | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| CN103993349A (en) * | 2014-05-06 | 2014-08-20 | 洛阳金诺机械工程有限公司 | High-frequency coil for drawing of silicon single crystal rods by using zone-melting method |
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2008
- 2008-11-25 CN CN2008101820549A patent/CN101457391B/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN101457391A (en) | 2009-06-17 |
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Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111115 |
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Free format text: CORRECT: ADDRESS; FROM: 471000 LUOYANG, HENAN PROVINCE TO: 471009 LUOYANG, HENAN PROVINCE |
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Effective date of registration: 20111115 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Patentee after: LUOYANG JINNUO MECHANICAL ENGINEERING Co.,Ltd. Address before: 471000 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Patentee before: Liu Chaoxuan |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110622 Termination date: 20211125 |
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| CF01 | Termination of patent right due to non-payment of annual fee |