CN101570886B - High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials - Google Patents
High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials Download PDFInfo
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- CN101570886B CN101570886B CN 200910064015 CN200910064015A CN101570886B CN 101570886 B CN101570886 B CN 101570886B CN 200910064015 CN200910064015 CN 200910064015 CN 200910064015 A CN200910064015 A CN 200910064015A CN 101570886 B CN101570886 B CN 101570886B
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Abstract
The invention provides a high-frequency coil structure capable of drawing 22 silicon cores or other crystal materials, and relates to the technical field of high-frequency coil. The high-frequency coil structure comprises radical splitter boxes (14) for current diversion, splitter boxes (16) and inner bores (8), wherein 8 of the 22 inner bores (8) are inner bores (8) arranged in the middle; another 7 inner bores (8) are uniformly distributed on the periphery of the middle inner bores (8) in a petal shape; and a barbell shaped inner bore (8) connecting the splitter boxes (16) between every two inner bores is arranged between every two inner bores (8) of the 7 inner bores (8) on the periphery of the 8 inner bores (8). The high-frequency coil structure can promote current to operate around the inner bores distributed in petal shape and 14 barbell shaped inner bores uniformly under the splitting action of the splitter boxes, and lead current to be distributed on the periphery of the 22 inner bores more uniformly assisted by the splitter boxes, thereby realizing the aim that the current is distributed uniformly on the periphery of the 22 inner bores.
Description
Technical field:
The present invention relates to the radio-frequency coil technical field; Especially relating to a kind of electric current that makes is evenly distributed on around the endoporus; Through electric current silicon core or other crystalline material are heated evenly, and once can draw the high-frequency coil structure of 22 silicon cores or other crystalline material.
Background technology:
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced; What use mostly is a kind of monocular radio-frequency coil, and its principle of work is following: through feeding high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating during work; Fuel rod upper end after the heating forms melt zone; With the brilliant melting area of inserting of son, slowly promote young crystalline substance then, the raw material after the fusing will be followed young brilliant the rising; Form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I am through repeatedly experiment discovery; Because existing radio-frequency coil layout is unreasonable not to the utmost wants once to draw simultaneously that young crystalline substance almost is impossible more than ten; Directly have influence on input-output ratio and once draw young brilliant what, what of benefit are depended on fully and draw young brilliant what, because the electric current operation of existing radio-frequency coil around endoporus do not reach its intended purposes; It is more with the endoporus electric current operation that is connected diagonal cut joint the middle part to have occurred removing; In addition several endoporus receive the influence of high-frequency current operation logic around electric current, make most of endoporus temperature far below near or connect the temperature (just electric current takes a shorter way) of diagonal cut joint endoporus because the phenomenon that takes a shorter way of electric current; The consequence that is produced is that the young brilliant diameter great disparity that raises up is very big, thereby causes the significantly increase of imperfections quantity.
Summary of the invention:
In order to overcome the deficiency in the background technology; The invention discloses a kind of high-frequency coil structure that can draw 22 silicon cores or other crystalline material; 22 endoporus of the present invention are that the middle part is provided with an endoporus; The endoporus at middle part connects seven by radial splitter box and is the endoporus that petal-shaped distributes; 14 endoporus in addition are between the petal-shaped distribution endoporus endoporus at described seven two endoporus that are the barbell shape are set respectively; Impel electric current when operation under the shunting action of splitter box evenly around described the petal-shaped endoporus that distributes and 14 endoporus operations that are the barbell shape, and the splitter box auxiliary current more is evenly distributed in around 22 endoporus, realized electric current equally distributed purpose around 22 endoporus.
In order to realize the purpose of foregoing invention, the present invention adopts following technical scheme:
A kind of high-frequency coil structure that can draw 22 silicon cores or other crystalline material; Described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A and electric current to carry and water coolant is carried copper pipe B; Be the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil; Be provided with below the radio-frequency coil of described radio-frequency coil to the central position cave in trapezoidal, the cooling water channel ring is embedded in the periphery of radio-frequency coil; Described high-frequency coil structure comprises radial splitter box, splitter box and the endoporus that is used for the electric current water conservancy diversion; 22 endoporus wherein eight for the middle part endoporus is set; Other seven endoporus be petal-shaped be evenly distributed on the middle part endoporus around, between peripheral seven endoporus of described eight endoporus, be respectively equipped with the endoporus that is the barbell shape that connects splitter box between two endoporus.
The described high-frequency coil structure that can draw 22 silicon cores or other crystalline material, any of being in the petal-shaped uniform distribution endoporus in diagonal cut joint connection perforation to eight seven of endoporus peripheries of electric current conveying and water coolant conveying copper pipe A and electric current conveying and water coolant conveying copper pipe B one side.
Because adopt technique scheme, the present invention has following meliority:
The high-frequency coil structure that can draw 22 silicon cores or other crystalline material of the present invention; 22 endoporus of the present invention are that the middle part is provided with an endoporus; The endoporus at middle part connects seven by radial splitter box and is the endoporus that petal-shaped distributes; 14 endoporus in addition are between the petal-shaped distribution endoporus endoporus at described seven two endoporus that are the barbell shape are set respectively; Under the shunting action of splitter box, evenly center on described the petal-shaped endoporus that distributes and 14 endoporus operations that are the barbell shape when impelling the electric current operation; And the splitter box auxiliary current more is evenly distributed in around 22 endoporus, has realized electric current equally distributed purpose around 22 endoporus; The Heating temperature of 22 endoporus is basic identical, and the design has broken through the highest existing limitation that can only pull out eight silicon cores, has realized electric current equally distributed purpose around 22 endoporus, improves capacity usage ratio, reduces production costs and reduces fraction defective; The present invention and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce is easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is a principle of work synoptic diagram of the present invention.
Fig. 2 is a two dimensional structure synoptic diagram of the present invention.
Fig. 3 is the A-A diagrammatic sketch of Fig. 2.
Fig. 4 is an electric current distribution diagram of the present invention.
In the drawings: 1, fuel rod; 2, magneticline of force; 3, radio-frequency coil; 4, cooling water channel; 5, silicon core; 6, young brilliant; 7, young brilliant chuck; 8, endoporus; 9, above the radio-frequency coil; 10, below the radio-frequency coil; 11, electric current is carried and water coolant conveying copper pipe A; 12, electric current is carried and water coolant conveying copper pipe B; 13, diagonal cut joint; 14, radial splitter box; 15, electric current; 16, splitter box.
Embodiment:
Embodiment with reference to following can explain the present invention in more detail; But the present invention is not limited to these embodiment.
In Fig. 1,2,3,4; A kind of high-frequency coil structure that can draw 22 silicon cores or other crystalline material; Described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil 3 and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried copper pipe B12; 9 are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil 3; Below the radio-frequency coil of described radio-frequency coil 3 10 be provided with to the central position cave in trapezoidal, cooling water channel 4 ring is embedded in the periphery of radio-frequency coil 3; Described high-frequency coil structure comprises splitter box 16, radial splitter box 14 and the endoporus 8 that is used for the electric current water conservancy diversion; 22 endoporus 8 wherein eight for the middle part endoporus 8 is set; Other seven endoporus 8 be petal-shaped be evenly distributed on middle part endoporus 8 around, between peripheral seven endoporus 8 of described eight endoporus 8, be respectively equipped with the endoporus that is the barbell shape 8 that connects splitter box 16 between two endoporus 8.
The described high-frequency coil structure that can draw 22 silicon cores or other crystalline material, any of being in the petal-shaped uniform distribution endoporus 8 in diagonal cut joint 13 connection perforation to eight endoporus 8 seven of peripheries of electric current conveying and water coolant conveying copper pipe A11 and electric current conveying and water coolant conveying copper pipe B12 one side.
Use is described below: in Fig. 1; Earlier fuel rod 1 is delivered to radio-frequency coil 3 bottoms; Fuel rod 1 is good more closely more apart from radio-frequency coil 3, but must not contact with radio-frequency coil 3, and the electric current on radio-frequency coil 3 is carried and water coolant carries copper pipe A11 energising to send water and another root electric current to carry and water coolant is carried the copper pipe B12 draining of switching on then; Electric current 15 impels radio-frequency coil 3 to produce powerful magneticline of force 2; Make raw material silicon rod 1 upper end utilize magneticline of force 2 to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel 4 gives radio-frequency coil 3 coolings, and diagonal cut joint 13 connects one of them in perforation to eight endoporus 8 peripheral seven endoporus 8.
In Fig. 2,3 or 4; Carry copper pipe A11 and electric current conveying and water coolant to carry the diagonal cut joint 13 of copper pipe B12 one side to connect one of them in perforation to eight endoporus 8 peripheral seven endoporus 8 in electric current conveying and water coolant; This radial splitter box 14 extends out to other seven endoporus 8 by middle part endoporus 8; And at the described endoporus that is the barbell shape 8 that between seven endoporus 8 of described eight endoporus 8 peripheries, is respectively equipped with connection splitter box 16 between two endoporus 8; Its major function is to make fuel rod 1 thermally equivalent in order to make high-frequency current can form to use or intersect at boundary, and can realize the effect of auxiliaryization material; After melt near 10 position below the radio-frequency coil termination of raw material silicon rod 1; Young brilliant chuck 7 is being with young brilliant 6 to descend; Make young crystalline substance 6 pass through the melting areas of inserting fuel rods 1 behind 22 endoporus 8, promote son's crystalline substance 6 then, the melt cognition on fuel rod 1 top is followed young brilliant 6 risings; Also corresponding the following synchronously of the lower shaft of its fuel rod 1 bottom slowly risen, but its fuel rod 1 must not contact with radio-frequency coil 3; Because the end of fuel rod 1 maybe be not too smooth; So 10 are designed to the step that caves in below the radio-frequency coil, its role is to make as much as possible the bottom surfaces 10 of raw material silicon rod more than 1 near radio-frequency coil; It is 9 slopes that are designed to from outside to inside above radio-frequency coil; Its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 3, to realize being heated effect of uniform; The melting area on raw material silicon rod 1 top is in the sticking and drive of young crystalline substance 6 and through behind radio-frequency coil 3 endoporus 8; Because weakening and condensation of magneticline of force 2; Just form a new column type crystal, its young brilliant chuck 7 is carried young brilliant 6 secretly and is slowly risen, and just can form the finished silicon core 5 of desired length.
The embodiment that selects for use in this article for open the object of the invention currently thinks to suit, but making of should be appreciated that, and the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.
Claims (1)
1. high-frequency coil structure that can draw 22 silicon cores or other crystalline material; Described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil (3) and water coolant carries copper pipe A (11) and electric current to carry and water coolant is carried copper pipe B (12); (9) are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil (3); Below the radio-frequency coil of described radio-frequency coil (3) (10) be provided with to the central position cave in trapezoidal, cooling water channel (4) ring is embedded in the periphery of radio-frequency coil (3); It is characterized in that: described high-frequency coil structure comprises the splitter box (16) that is used for the electric current water conservancy diversion, radial splitter box (14) and endoporus (8); 22 endoporus (8) wherein eight for the middle part endoporus (8) is set; Other seven endoporus (8) be petal-shaped be evenly distributed on middle part endoporus (8) around, and the endoporus (8) that the middle part is provided with connects peripheral seven endoporus (8) through radial splitter box (14) respectively; Between seven endoporus (8) of periphery, be respectively equipped with two endoporus (8), be connected with splitter box (16) between two endoporus (8), form by two endoporus (8) and splitter box (16) and be barbell shape structure; An endoporus of corresponding diagonal cut joint (13) one sides in seven endoporus that are the petal-shaped distribution in described eight endoporus of diagonal cut joint (13) connection perforation of electric current conveying and water coolant conveying copper pipe A (11) and electric current conveying and water coolant conveying copper pipe B (12) one sides.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910064015 CN101570886B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials |
| PCT/CN2009/074838 WO2010060349A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| EP09828609.9A EP2366814A4 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| JP2011529439A JP5313354B2 (en) | 2008-11-25 | 2009-11-06 | Arrangement of high-frequency coil drawing holes for manufacturing multiple silicon cores |
| US13/125,973 US20110204044A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| KR1020107026853A KR101324582B1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910064015 CN101570886B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials |
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| Publication Number | Publication Date |
|---|---|
| CN101570886A CN101570886A (en) | 2009-11-04 |
| CN101570886B true CN101570886B (en) | 2012-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200910064015 Active CN101570886B (en) | 2008-11-25 | 2009-01-06 | High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101324582B1 (en) * | 2008-11-25 | 2013-11-04 | 루오양 진누오 메캐니컬 엔지니어링 씨오., 엘티디 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| CN103668430B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 16 or 17 silicon cores |
| CN103668429B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 13 or 14 silicon cores |
| CN103668433B (en) * | 2012-09-09 | 2018-02-02 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 12 or 13 silicon cores |
| CN103668439B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 12 or 13 silicon cores |
| CN103668434B (en) * | 2012-09-09 | 2018-02-02 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 15 or 16 silicon core |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201001208Y (en) * | 2007-01-19 | 2008-01-02 | 刘朝轩 | High-frequency coil capable of meanwhile producing three silicon cores or other crystal materials |
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- 2009-01-06 CN CN 200910064015 patent/CN101570886B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201001208Y (en) * | 2007-01-19 | 2008-01-02 | 刘朝轩 | High-frequency coil capable of meanwhile producing three silicon cores or other crystal materials |
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Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111116 |
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Effective date of registration: 20111116 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Applicant after: Luoyang Jinnuo Mechanical Engineering Co., Ltd. Address before: 471000 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Applicant before: Liu Chaoxuan |
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Denomination of invention: High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials Effective date of registration: 20170915 Granted publication date: 20120829 Pledgee: Luoyang Hua Ze small loan Co., Ltd. Pledgor: Luoyang Jinnuo Mechanical Engineering Co., Ltd. Registration number: 2017410000026 |
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