CN101487136B - High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time - Google Patents
High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time Download PDFInfo
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- CN101487136B CN101487136B CN2008101819984A CN200810181998A CN101487136B CN 101487136 B CN101487136 B CN 101487136B CN 2008101819984 A CN2008101819984 A CN 2008101819984A CN 200810181998 A CN200810181998 A CN 200810181998A CN 101487136 B CN101487136 B CN 101487136B
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Abstract
The invention provides a high-frequency coil structure which can produce six silica cores and other crystal materials simultaneously, relating to the technical field of high-frequency coils. The high-frequency coil structure comprises a radial shunt trough (14) which is used for diversion of current (15), and six internal holes (8), wherein, one internal hole is arranged at the middle part and other five internal holes are uniformly distributed around the middle internal hole in a petal-shape; an inclined opening (13) at one side of a copper pipe A(11) for conveying current and cooled water and a copper pipe B(12) for conveying current and cooled water is connected and communicated with the middle internal hole; the radial shunt trough extends out from the middle internal hole to a position between every two internal holes except the inclined opening; the inclined opening is connected with the middle internal hole; and the radial shunt trough is radially distributed between every two peripheral internal holes by the middle internal hole, thus leading the current to uniformly run by surrounding the six internal holes under the shunt effect of the shunt trough during the running process and achieving the objects that the current is uniformly distributed around the six internal holes.
Description
Technical field:
The present invention relates to the radio-frequency coil technical field, especially relate to a kind of electric current that makes and be evenly distributed on around the endoporus, silicon core or other crystalline material are heated evenly by electric current, and the novel high-frequency loop construction of the silicon core of the production six roots of sensation simultaneously and other crystalline material.
Background technology:
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: pass through during work to feed high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating, fuel rod upper end after the heating forms melt zone, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I am by repeatedly experiment discovery, because layout is unreasonable; As my two utility model patents in first to file;
Wherein patent 1: but the radio-frequency coil of patent name, a kind of once production six roots of sensation silicon core or other crystalline material; The applying date, on January 19th, 2007; Granted publication number, CN200999269Y;
Wherein patent 2: but the radio-frequency coil of patent name, a kind of once production six roots of sensation silicon core or other crystalline material; The applying date, on February 13rd, 2007; Granted publication number, CN201024225Y;
Above-mentioned patent is by this use in 2 years, electric current operation around endoporus does not reach its intended purposes, as the structure of being explained in above-mentioned two patent application documents, the endoporus radiation shape is arranged, occurred moving more except that the endoporus electric current of middle part connection diagonal cut joint, other five endoporus be subjected to the influence of high-frequency current operation logic around electric current, make most of endoporus temperature far below near or connect the temperature (just electric current takes a shorter way) of diagonal cut joint endoporus, because the phenomenon that takes a shorter way of electric current, the consequence that is produced is that the young brilliant diameter great disparity that raises up is very big, thereby causes the increase of defect ware quantity.
Summary of the invention:
In order to overcome the deficiency in the background technology, the invention discloses the high-frequency coil structure of a kind of silicon core of the production six roots of sensation simultaneously and other crystalline material, diagonal cut joint of the present invention connects the middle part endoporus, endoporus is radial in the middle part of the radial splitter box utilization is distributed between per two peripheral endoporus, under the shunting action of splitter box, evenly move when making the electric current operation around six endoporus, and the splitter box auxiliary current more is evenly distributed in around six endoporus, has realized electric current equally distributed purpose around six endoporus.
In order to realize the purpose of foregoing invention, the present invention adopts following technical scheme:
The high-frequency coil structure of a kind of silicon core of the production six roots of sensation simultaneously and other crystalline material, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A and electric current to carry and water coolant is carried copper pipe B, be the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, the cooling water channel ring is embedded in the outside of radio-frequency coil; Described high-frequency coil structure comprises the radial splitter box that is used for the electric current water conservancy diversion, six endoporus are that the middle part is provided with an endoporus, other five endoporus be petal-shaped be evenly distributed on the middle part endoporus around, carry and water coolant carries copper pipe A and electric current to carry and water coolant is carried the diagonal cut joint of copper pipe B one side to connect to be used to lead to and connect the middle part endoporus at electric current, described radial splitter box is extended out between per two endoporus except diagonal cut joint by the middle part endoporus.
The high-frequency coil structure of the described silicon core of the production six roots of sensation simultaneously and other crystalline material, described endoporus can be set to rounding of angle endoporus, trilateral endoporus, the interior rounding of angle endoporus of trilateral, Polygons endoporus, irregular polygon endoporus, rhombus endoporus, the interior rounding of angle endoporus of rhombus, trapezoidal endoporus, trapezoidal interior rounding of angle endoporus, Long Circle endoporus or oval endoporus in circular inner hole, square inner bore, square interior rounding of angle endoporus, rectangle endoporus, the rectangle.
Because adopt technique scheme, the present invention has following superiority:
Diagonal cut joint of the present invention connects the middle part endoporus, endoporus is radial in the middle part of the radial splitter box utilization is distributed between per two peripheral endoporus, under the shunting action of splitter box, evenly move when making the electric current operation around six endoporus, and the splitter box auxiliary current more is evenly distributed in around six endoporus, reach test by experiment, proved that the present invention improves after-current and can move around each endoporus uniformly under the water conservancy diversion of radial splitter box, the Heating temperature of six endoporus is basic identical, realized electric current equally distributed purpose around six endoporus, improve capacity usage ratio, reduce production costs and reduce fraction defective; The present invention and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce is easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is an electric current distribution diagram of the present invention.
Fig. 2 is a two dimensional structure synoptic diagram of the present invention.
Fig. 3 is the A-A diagrammatic sketch of Fig. 2.
Fig. 4 is a principle of work synoptic diagram of the present invention.
In the drawings: 1, fuel rod; 2, magnetic line of force; 3, radio-frequency coil; 4, cooling water channel; 5, silicon core; 6, young brilliant; 7, young brilliant chuck; 8, endoporus; 9, above the radio-frequency coil; 10, below the radio-frequency coil; 11, electric current is carried and water coolant conveying copper pipe A; 12, electric current is carried and water coolant conveying copper pipe B; 13, diagonal cut joint; 14, radial splitter box; 15, electric current.
Embodiment:
With reference to the following examples, can explain the present invention in more detail; But the present invention is not limited to these embodiment.
In Fig. 1,2,3,4; The high-frequency coil structure of a kind of silicon core of the production six roots of sensation simultaneously and other crystalline material, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried copper pipe B12,9 are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, cooling water channel 4 ring is embedded in the outside of radio-frequency coil 3; Described high-frequency coil structure comprises the radial splitter box 14 that is used for electric current 15 water conservancy diversion, six endoporus 8 are provided with an endoporus 8 for the middle part, other five endoporus 8 be petal-shaped be evenly distributed on the middle part endoporus 8 around, carry and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried the diagonal cut joint 13 of copper pipe B12 one side to connect to be used to lead to and connect middle part endoporus 8 at electric current, described radial splitter box 14 is extended out between per two endoporus 8 except diagonal cut joint 13 by middle part endoporus 8.
The high-frequency coil structure of the described silicon core of the production six roots of sensation simultaneously and other crystalline material, described endoporus 8 can be set to rounding of angle endoporus 8, trilateral endoporus 8, the interior rounding of angle endoporus 8 of trilateral, Polygons endoporus 8, irregular polygon endoporus 8, rhombus endoporus 8, the interior rounding of angle endoporus 8 of rhombus, trapezoidal endoporus 8, trapezoidal interior rounding of angle endoporus 8, Long Circle endoporus 8 or oval endoporus 8 in circular inner hole 8, square inner bore 8, square interior rounding of angle endoporus 8, rectangle endoporus 8, the rectangle.
Use is as described below: in Fig. 4, earlier fuel rod 1 is delivered to radio-frequency coil 3 bottoms, fuel rod 1 is near more good more apart from radio-frequency coil 3, but must not contact with radio-frequency coil 3, electric current on radio-frequency coil 3 is carried and water coolant carries copper pipe A11 energising to send water and another root electric current to carry and water coolant is carried copper pipe B12 energising draining then, electric current 15 impels radio-frequency coil 3 to produce powerful magnetic line of force 2, make raw material silicon rod 1 upper end utilize magnetic line of force 2 to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel 4 gives radio-frequency coil 3 coolings, and diagonal cut joint 13 is made angle and is used to pass to middle part endoporus 8.
In Fig. 1,2 or 4, carry and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried the diagonal cut joint 13 of copper pipe B12 one side to connect to be used to lead to and connect middle part endoporus 8 at electric current, this radial splitter box 14 is extended out between per two endoporus 8 except diagonal cut joint 13 by middle part endoporus 8, its major function is to make fuel rod 1 thermally equivalent in order to make high-frequency current can form to intersect at boundary, and can realize the effect of auxiliaryization material; After melt at 10 position below the close radio-frequency coil in the termination of raw material silicon rod 1, young brilliant chuck 7 is being with young brilliant 6 to descend, make young brilliant 6 melting areas by six endoporus, 8 back insertion fuel rods 1, promote young brilliant 6 then, the melt cognition on fuel rod 1 top is followed young brilliant 6 and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod 1 bottom slowly risen, but its fuel rod 1 must not contact with radio-frequency coil 3; Because the end of fuel rod 1 may be not too smooth, so, 10 are designed to the step that caves in below the radio-frequency coil, its role is to make as much as possible the bottom surfaces 10 of raw material silicon rod more than 1 near radio-frequency coil, it is 9 slopes that are designed to from outside to inside above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 3, with the effect that realizes being heated evenly; The melting area on raw material silicon rod 1 top is in the sticking and drive of young crystalline substance 6 and by behind radio-frequency coil 3 endoporus 8, because weakening and condensation of magnetic line of force 2, just form a new column type crystal, its young brilliant chuck 7 is carried young brilliant 6 secretly and is slowly risen, and just can form the finished silicon core 5 of desired length.
The embodiment that selects for use in this article in order to disclose purpose of the present invention currently thinks to suit, but making of should be appreciated that, and the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.
Claims (1)
1. the high-frequency coil structure of the silicon core of the production six roots of sensation simultaneously or other crystalline material, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A (11) and electric current to carry and water coolant is carried copper pipe B (12), (9) are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of radio-frequency coil to the central position cave in trapezoidal, cooling water channel (4) ring is embedded in the outside of radio-frequency coil (3); It is characterized in that: described high-frequency coil structure comprises the radial splitter box (14) that is used for electric current (15) water conservancy diversion, six endoporus (8) are provided with an endoporus (8) for the middle part, other five endoporus (8) be petal-shaped be evenly distributed on the middle part endoporus (8) around, carry and water coolant carries copper pipe A (11) and electric current to carry and water coolant carries the diagonal cut joint (13) of copper pipe B (12) one sides to connect to connect middle part endoporus (8) at electric current, described radial splitter box (14) is extended out between per two endoporus (8) except diagonal cut joint (13) by middle part endoporus (8).
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101819984A CN101487136B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time |
| KR1020107026853A KR101324582B1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| JP2011529439A JP5313354B2 (en) | 2008-11-25 | 2009-11-06 | Arrangement of high-frequency coil drawing holes for manufacturing multiple silicon cores |
| RU2010145474/05A RU2459891C2 (en) | 2008-11-25 | 2009-11-06 | High-frequency inductor with draw plates for production of multiple siliceous bars |
| US13/125,973 US20110204044A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| PCT/CN2009/074838 WO2010060349A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| EP09828609.9A EP2366814A4 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101819984A CN101487136B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101487136A CN101487136A (en) | 2009-07-22 |
| CN101487136B true CN101487136B (en) | 2011-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101819984A Active CN101487136B (en) | 2008-11-25 | 2008-11-25 | High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101324582B1 (en) * | 2008-11-25 | 2013-11-04 | 루오양 진누오 메캐니컬 엔지니어링 씨오., 엘티디 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| CN101754508B (en) * | 2009-12-29 | 2011-11-09 | 杭州四达电炉成套设备有限公司 | Induction heater for reinforcing steel bar surface coating |
| CN101892519B (en) * | 2010-07-20 | 2012-02-08 | 西安理工晶体科技有限公司 | Silicon core furnace repeatedly pulling multiple silicon cores in one heat |
| WO2013040735A1 (en) * | 2011-09-20 | 2013-03-28 | 洛阳金诺机械工程有限公司 | High frequency coil drawing hole structure capable of producing 5 to 10 silicon cores simultaneously |
| CN108179462B (en) * | 2016-12-08 | 2020-09-18 | 有研半导体材料有限公司 | Heating coil for preparing zone-melting large-diameter single crystal |
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2008
- 2008-11-25 CN CN2008101819984A patent/CN101487136B/en active Active
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| CN101487136A (en) | 2009-07-22 |
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| C14 | Grant of patent or utility model | ||
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Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20110517 |
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Free format text: CORRECT: ADDRESS; FROM: 471000 ROOM 101, UNIT 1, BUILDING 24, FAMILY RESIDENTIAL YARD OF MONOCRYSTALINE SILICON FACTORY, YARD 1, SHANGYANG ROAD, XIGONG DISTRICT, LUOYANG CITY, HE'NAN PROVINCE TO: 471009 LUOYANG JINNUO MECHANICAL ENGINEERING CO., LTD., NO. 2, JINXIN ROAD, NATIONAL NEW + HIGH TECHNOLOGY INDUSTRY DEVELOPMENT ZONE, LUOYANG, HE'NAN PROVINCE |
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Effective date of registration: 20110517 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Patentee after: Luoyang Jinnuo Mechanical Engineering Co., Ltd. Address before: 471000 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Patentee before: Liu Chaoxuan |
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| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20090722 Assignee: LUOYANG AUTOMATION INSTITUTE Co.,Ltd. Assignor: LUOYANG JINNUO MECHANICAL ENGINEERING Co.,Ltd. Contract record no.: X2020980007508 Denomination of invention: High frequency coil structure that can produce six silicon cores or other crystal materials at the same time Granted publication date: 20110413 License type: Common License Record date: 20201103 |