CN101570884B - High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously - Google Patents
High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously Download PDFInfo
- Publication number
- CN101570884B CN101570884B CN2009100640134A CN200910064013A CN101570884B CN 101570884 B CN101570884 B CN 101570884B CN 2009100640134 A CN2009100640134 A CN 2009100640134A CN 200910064013 A CN200910064013 A CN 200910064013A CN 101570884 B CN101570884 B CN 101570884B
- Authority
- CN
- China
- Prior art keywords
- frequency coil
- endoporus
- radio
- inner bores
- electric current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a high-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously, and relates to the technical field of high-frequency coil. The high-frequency coil structure comprises radical splitter boxes (14) for current diversion, splitter boxes (16) and inner bores (8), wherein 6 of the 16 inner bores (8) are inner bores (8) arranged in the middle; another 5 inner bores (8) are uniformly distributed on the periphery of the middle inner bores (8) in a petal shape; and a barbell shaped inner bore (8) connecting the splitter boxes (16) between everytwo inner bores is arranged between every two inner bores (8) of the 5 inner bores (8) on the periphery of the 6 inner bores (8). The technical proposal of the high-frequency coil can promote current to operate around the inner bores distributed in petal shape and 10 barbell shaped inner bores uniformly under the splitting action of the splitter boxes, and lead current to be distributed on the pe riphery of the 16 inner bores more uniformly assisted by the splitter boxes, thereby realizing the aim that the current is distributed uniformly on the periphery of the 16 inner bores.
Description
Technical field:
The present invention relates to the radio-frequency coil technical field, especially relate to a kind of electric current that makes and be evenly distributed on around the endoporus, silicon core or other crystalline material are heated evenly by electric current, and can be once the radio-frequency coil of drawing 16 silicon core or other crystalline material simultaneously.
Background technology:
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced, what use mostly is a kind of monocular radio-frequency coil, its principle of work is as follows: pass through during work to feed high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating, fuel rod upper end after the heating forms melt zone, then with the brilliant melting area of inserting of son, slowly promote young brilliant, raw material after the fusing will be followed young brilliant the rising, form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I am through repeatedly experiment discovery, because existing radio-frequency coil layout is unreasonable not to the utmost wants once to draw simultaneously that young crystalline substance almost is impossible more than ten, directly have influence on input-output ratio and once draw young brilliant what, what of benefit are depended on fully and draw young brilliant what, because the electric current operation of existing radio-frequency coil around endoporus do not reach its intended purposes, it is more with the endoporus electric current operation that is connected diagonal cut joint the middle part to have occurred removing, several endoporus is subjected to the influence of high-frequency current operation logic around electric current in addition, make most of endoporus temperature far below near or connect the temperature (just electric current takes a shorter way) of diagonal cut joint endoporus, because the phenomenon that takes a shorter way of electric current, the consequence that is produced is that the young brilliant diameter great disparity that raises up is very big, thereby causes the significantly increase of defect ware quantity.
Summary of the invention:
In order to overcome the deficiency in the background technology, the invention discloses a kind of once radio-frequency coil of drawing 16 silicon core or other crystalline material simultaneously, 16 endoporus of the present invention are that the middle part is provided with an endoporus, the endoporus at middle part connects five by radial splitter box and is the endoporus that petal-shaped distributes, ten endoporus in addition are between the petal-shaped distribution endoporus endoporus at described five two endoporus that are the barbell shape are set respectively, under the shunting action of splitter box, evenly center on described the petal-shaped endoporus that distributes and ten endoporus operations that are the barbell shape when impelling the electric current operation, and the splitter box auxiliary current more is evenly distributed in around 16 endoporus, has realized electric current equally distributed purpose around 16 endoporus.
In order to realize the purpose of foregoing invention, the present invention adopts following technical scheme:
A kind of once radio-frequency coil of drawing 16 silicon core or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil and water coolant carries copper pipe A and electric current to carry and water coolant is carried copper pipe B, be the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil, be provided with below the radio-frequency coil of described radio-frequency coil to the central position cave in trapezoidal, the cooling water channel ring is embedded in the periphery of radio-frequency coil; Described high-frequency coil structure comprises radial splitter box, splitter box and the endoporus that is used for the electric current water conservancy diversion, 16 endoporus wherein six for the middle part endoporus is set, other five endoporus be petal-shaped be evenly distributed on the middle part endoporus around, between five endoporus of described six endoporus peripheries, be respectively equipped with between two endoporus the endoporus that is the barbell shape that connects splitter box.
The described once radio-frequency coil of drawing 16 silicon core or other crystalline material is simultaneously carried and water coolant carries copper pipe A and electric current to carry and water coolant is carried the diagonal cut joint of copper pipe B one side to connect to be used to pass to peripheral five any one that are in the petal-shaped uniform distribution endoporus of six endoporus at electric current.
Because adopt technique scheme, the present invention has following superiority:
The once radio-frequency coil of drawing 16 silicon core or other crystalline material simultaneously of the present invention, 16 endoporus of the present invention are that the middle part is provided with an endoporus, the endoporus at middle part connects five by radial splitter box and is the endoporus that petal-shaped distributes, ten endoporus in addition are between the petal-shaped distribution endoporus endoporus at described five two endoporus that are the barbell shape are set respectively, under the shunting action of splitter box, evenly center on described the petal-shaped endoporus that distributes and ten endoporus operations that are the barbell shape when impelling the electric current operation, and the splitter box auxiliary current more is evenly distributed in around 16 endoporus, has realized electric current equally distributed purpose around 16 endoporus; The Heating temperature of 16 endoporus is basic identical, and the design has broken through the highest existing limitation that can only pull out eight silicon cores, has realized electric current equally distributed purpose around 16 endoporus, improves capacity usage ratio, reduces production costs and reduces fraction defective; The present invention and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce is easy in the promotion and implementation of polysilicon industry.
Description of drawings:
Fig. 1 is a principle of work synoptic diagram of the present invention.
Fig. 2 is a two dimensional structure synoptic diagram of the present invention.
Fig. 3 is the A-A diagrammatic sketch of Fig. 2.
Fig. 4 is an electric current distribution diagram of the present invention.
In the drawings: 1, fuel rod; 2, magnetic line of force; 3, radio-frequency coil; 4, cooling water channel; 5, silicon core; 6, young brilliant; 7, young brilliant chuck; 8, endoporus; 9, above the radio-frequency coil; 10, below the radio-frequency coil; 11, electric current is carried and water coolant conveying copper pipe A; 12, electric current is carried and water coolant conveying copper pipe B; 13, diagonal cut joint; 14, radial splitter box; 15, electric current; 16, splitter box.
Embodiment:
With reference to the following examples, can explain the present invention in more detail; But the present invention is not limited to these embodiment.
In Fig. 1,2,3,4; A kind of once radio-frequency coil of drawing 16 silicon core or other crystalline material simultaneously, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil 3 and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried copper pipe B12,9 are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil 3, below the radio-frequency coil of described radio-frequency coil 3 10 be provided with to the central position cave in trapezoidal, cooling water channel 4 ring is embedded in the periphery of radio-frequency coil 3; Described high-frequency coil structure comprises radial splitter box 14, splitter box 16 and the endoporus 8 that is used for the electric current water conservancy diversion, 16 endoporus 8 wherein six for the middle part endoporus 8 is set, other five endoporus 8 be petal-shaped be evenly distributed on middle part endoporus 8 around, between five endoporus 8 of described six endoporus 8 peripheries, be respectively equipped with between two endoporus 8 endoporus that is the barbell shape 8 that connects splitter box 16.
The described once radio-frequency coil of drawing 16 silicon core or other crystalline material is simultaneously carried and water coolant carries copper pipe A11 and electric current to carry and water coolant is carried the diagonal cut joint 13 of copper pipe B12 one side to connect to be used to pass to six endoporus, 8 peripheral five any one that are in the petal-shaped uniform distribution endoporus 8 at electric current.
Use is as described below: in Fig. 1, earlier fuel rod 1 is delivered to radio-frequency coil 3 bottoms, fuel rod 1 is near more good more apart from radio-frequency coil 3, but must not contact with radio-frequency coil 3, electric current on radio-frequency coil 3 is carried and water coolant carries copper pipe A11 energising to send water and another root electric current to carry and water coolant is carried copper pipe B12 energising draining then, electric current 15 impels radio-frequency coil 3 to produce powerful magnetic line of force 2, make raw material silicon rod 1 upper end utilize magnetic line of force 2 to carry out induction heating near the part of coil, the water coolant that flows through in the cooling water channel 4 gives radio-frequency coil 3 coolings, and diagonal cut joint 13 connects one of them of being used to pass in six endoporus, 8 peripheral five endoporus 8.
At Fig. 2, in 3 or 4, carry the diagonal cut joint 13 of copper pipe A11 and electric current conveying and water coolant conveying copper pipe B12 one side to connect one of them of being used to pass in five endoporus 8 in six endoporus, 8 peripheries in electric current conveying and water coolant, this radial splitter box 14 extends out to other five endoporus 8 by middle part endoporus 8, and between described five endoporus 8, be respectively equipped with between two endoporus 8 endoporus that is the barbell shape 8 that connects splitter box 16 in described six endoporus 8 peripheries, its major function is to make fuel rod 1 thermally equivalent in order to make high-frequency current can form to use or intersect at boundary, and can realize the effect of auxiliaryization material; After melt at 10 position below the close radio-frequency coil in the termination of raw material silicon rod 1, young brilliant chuck 7 is being with young brilliant 6 to descend, make young brilliant 6 melting areas by 16 endoporus, 8 back insertion fuel rods 1, promote young brilliant 6 then, the melt cognition on fuel rod 1 top is followed young brilliant 6 and is risen, also corresponding the following synchronously of the lower shaft of its fuel rod 1 bottom slowly risen, but its fuel rod 1 must not contact with radio-frequency coil 3; Because the end of fuel rod 1 may be not too smooth, so, 10 are designed to the step that caves in below the radio-frequency coil, its role is to make as much as possible the bottom surfaces 10 of raw material silicon rod more than 1 near radio-frequency coil, it is 9 slopes that are designed to from outside to inside above radio-frequency coil, its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 3, with the effect that realizes being heated evenly; The melting area on raw material silicon rod 1 top is in the sticking and drive of young crystalline substance 6 and by behind radio-frequency coil 3 endoporus 8, because weakening and condensation of magnetic line of force 2, just form a new column type crystal, its young brilliant chuck 7 is carried young brilliant 6 secretly and is slowly risen, and just can form the finished silicon core 5 of desired length.
The embodiment that selects for use in this article in order to disclose purpose of the present invention currently thinks to suit, but making of should be appreciated that, and the present invention is intended to comprise that all belong to all changes and the improvement of the interior embodiment of this design and the scope of the invention.
Claims (2)
1. high-frequency coil structure of drawing 16 silicon core or other crystalline material simultaneously once, described high-frequency coil structure is provided with the electric current conveying in the bottom of radio-frequency coil (3) and water coolant carries copper pipe A (11) and electric current to carry and water coolant is carried copper pipe B (12), (9) are the inclined-plane that caves in to the central position above the radio-frequency coil of radio-frequency coil (3), below the radio-frequency coil of described radio-frequency coil (3) (10) be provided with to the central position cave in trapezoidal, cooling water channel (4) ring is embedded in the periphery of radio-frequency coil (3); It is characterized in that: described high-frequency coil structure comprises a middle part endoporus (8) that the middle part is provided with, be petal-shaped be evenly distributed on around the endoporus of middle part and and five peripheral endoporus (8) of connecting by splitter box (16) of middle part endoporus, in the barbell shape structure between the endoporus in twos of described five peripheral endoporus, wherein said barbell shape structure is made of with the splitter box that is connected two endoporus (14) two endoporus.
2. the once high-frequency coil structure of drawing 16 silicon core or other crystalline material simultaneously as claimed in claim 1 is characterized in that: carry and water coolant carries copper pipe A (11) and electric current to carry and water coolant carries the diagonal cut joint (13) of copper pipe B (12) one sides to connect any one of being used to pass in described five peripheral endoporus (8) at electric current.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100640134A CN101570884B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously |
| JP2011529439A JP5313354B2 (en) | 2008-11-25 | 2009-11-06 | Arrangement of high-frequency coil drawing holes for manufacturing multiple silicon cores |
| KR1020107026853A KR101324582B1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| PCT/CN2009/074838 WO2010060349A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| US13/125,973 US20110204044A1 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| RU2010145474/05A RU2459891C2 (en) | 2008-11-25 | 2009-11-06 | High-frequency inductor with draw plates for production of multiple siliceous bars |
| EP09828609.9A EP2366814A4 (en) | 2008-11-25 | 2009-11-06 | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100640134A CN101570884B (en) | 2009-01-06 | 2009-01-06 | High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101570884A CN101570884A (en) | 2009-11-04 |
| CN101570884B true CN101570884B (en) | 2011-06-29 |
Family
ID=41230362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100640134A Expired - Fee Related CN101570884B (en) | 2008-11-25 | 2009-01-06 | High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101570884B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010060349A1 (en) * | 2008-11-25 | 2010-06-03 | Liu Chaoxuan | High-frequency coil pulling holes arrangement for producing multiple silicon cores |
| CN103668429B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 13 or 14 silicon cores |
| CN103668433B (en) * | 2012-09-09 | 2018-02-02 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 12 or 13 silicon cores |
| CN103668434B (en) * | 2012-09-09 | 2018-02-02 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 15 or 16 silicon core |
| CN103668430B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 16 or 17 silicon cores |
| CN103668439B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Produce the high frequency coil of 12 or 13 silicon cores |
-
2009
- 2009-01-06 CN CN2009100640134A patent/CN101570884B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101570884A (en) | 2009-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101570884B (en) | High-frequency coil capable of drawing 16 silicon cores or other crystal materials simultaneously | |
| CN101457388B (en) | High-frequency coil structure capable of simultaneous producing two silicon cores and other crystal material | |
| CN101570886B (en) | High-frequency coil structure capable of drawing 22 silicon cores or other crystal materials | |
| CN101457389B (en) | High-frequency coil structure capable of simultaneous producing seven silicon cores and other crystal material | |
| CN101487136B (en) | High-frequency coil structure capable of producing six silicon cores and other crystal material at the same time | |
| CN101519797B (en) | Method for pulling silicon core by crystal crushed material and device for applying same | |
| CN200996058Y (en) | High-frequency coil for producing five silicon core or other crystal materials | |
| CN202226956U (en) | High-frequency coil for producing eight or nine silicon core drip-shaped and racket-shaped combination drawing holes | |
| CN101570883B (en) | High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials simultaneously | |
| CN101457390B (en) | High-frequency coil structure capable of simultaneous producing eight silicon cores and other crystal material | |
| CN101570887B (en) | High-frequency coil structure capable of drawing 19 silicon cores or other crystal materials | |
| CN101570885B (en) | High-frequency coil capable of drawing 13 silicon cores or other crystal materials simultaneously | |
| CN101457391B (en) | High-frequency coil structure capable of simultaneous producing four silicon cores and other crystal material | |
| CN101498033A (en) | Method for crystal crushed aggregate drawing silicon core and simple apparatus | |
| CN101457393B (en) | High-frequency coil structure capable of simultaneous producing three silicon cores and other crystal material | |
| CN101457395B (en) | High-frequency coil structure capable of simultaneous producing three silicon cores and other crystal material | |
| CN101457392A (en) | High-frequency coil structure capable of simultaneous producing five silicon cores and other crystal material | |
| CN201001209Y (en) | High-frequency coil capable of producing four silicon cores or other crystal materials | |
| CN101457394B (en) | High-frequency coil structure capable of simultaneous producing two silicon cores and other crystal material | |
| CN101487137B (en) | High-frequency coil structure capable of producing four silicon cores and other crystal material at the same time | |
| CN200999269Y (en) | High-frequency coil capable of producing six silicon cores or other crystal material once | |
| CN202226952U (en) | High frequency coil for producing water-drop-shaped or bat-shaped combination drawing hole with eight or nine silicon cores | |
| CN201024229Y (en) | High-frequency coil capable of simultaneously producing five silica cores or other crystal material | |
| CN201024228Y (en) | High-frequency coil capable of simultaneously producing four silica cores or other crystal material | |
| CN202246982U (en) | High-frequency coil provided with racket-shaped drawing hole structure and used for producing seven or eight silicon cores |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111116 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 471000 LUOYANG, HENAN PROVINCE TO: 471009 LUOYANG, HENAN PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20111116 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Patentee after: LUOYANG JINNUO MECHANICAL ENGINEERING Co.,Ltd. Address before: 471000 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Patentee before: Liu Chaoxuan |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110629 Termination date: 20220106 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |