CN202246985U - High-frequency coil for producing racket-shaped drawing hole structure of five or six silicon cores - Google Patents
High-frequency coil for producing racket-shaped drawing hole structure of five or six silicon cores Download PDFInfo
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- CN202246985U CN202246985U CN2011203663569U CN201120366356U CN202246985U CN 202246985 U CN202246985 U CN 202246985U CN 2011203663569 U CN2011203663569 U CN 2011203663569U CN 201120366356 U CN201120366356 U CN 201120366356U CN 202246985 U CN202246985 U CN 202246985U
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Abstract
The utility model provides a high-frequency coil for producing a racket-shaped drawing hole structure of five or six silicon cores, which relates to the high-frequency coil. Drawing holes or material melting holes (11) are arranged in the middle of a round high-frequency coil (2), five flow guide grooves (12) are radially arranged in the drawing holes or material melting holes (11), outer end heads of the five flow guide grooves (12) are arranged among five drawing holes (5), one sides of the five drawing holes (5) facing the drawing holes or material melting holes (11) are respectively provided with a drainage groove (6), gaps are left between the drawing holes or material melting holes (11) and the end parts of the drainage grooves (6), and the outer end of a water inlet pipeline (8) and the outer end of a water outlet pipeline (13) are respectively provided with connecting seats (9). The high-frequency coil has the advantages that the phenomenon that cylindrical crystals are elliptic because of different temperature of the inner side surface and the outer side surface of the peripheral surrounding drawing holes is overcome, the current of the peripheral surrounding drawing holes is uniformly distributed on the periphery of the drawing holes through the drainage groove, and the ovality of the cylindrical crystals is effectively reduced.
Description
[technical field]
The utility model relates to the radio-frequency coil technical field, and the racket shape that especially relates to a kind of production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure.
[background technology]
At present, usage quantity is very huge at home for the silicon core; In the technological process that the molten mode in existing silicon core, silicon single crystal and other material crystals district is produced; What use mostly is a kind of monocular radio-frequency coil, and its principle of work is: through feeding high-frequency current to radio-frequency coil, make radio-frequency coil produce electric current fuel rod is carried out induction heating during work; Fuel rod upper end after the heating forms melt zone; Then that the son is brilliant in the melting area on the insertion fuel rod behind the drawing hole, slowly promote young crystalline substance then, the raw material after the fusing will be followed son's crystalline substance and risen; Form a new pillar-shaped crystal, this new pillar-shaped crystal is the finished product of silicon core or other material crystals.
I find through experiment repeatedly and since existing draw pore structure that layout is set is unreasonable, form the pillar-shaped crystal that draws out for oval, the ovality of pillar-shaped crystal not too meets the requirements; Especially when drawing five above silicon cores, the oval phenomenon of pillar-shaped crystal is more obvious.
[summary of the invention]
In order to overcome the deficiency in the background technology; The racket shape that the utility model discloses a kind of production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure; The utility model produce at the same time five or six roots of sensation silicon core in overcome peripheral around drawing hole outer side and medial surface temperature differ and cause the oval phenomenon of pillar-shaped crystal; Around inboard, drawing hole drainage trough is set, through drainage trough can make peripheral around drawing hole electric current be evenly distributed on and draw around the hole, standard more when silicon core or other crystalline material being heated evenly draw through electric current; The ovality of pillar-shaped crystal effectively reduces, and the pillar-shaped crystal of obtaining more meets the requirements.
In order to realize the purpose of foregoing invention, the utility model adopts following technical scheme:
The racket shape of a kind of production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure; Comprise radio-frequency coil, suction culvert, outlet pipeline, Connection Block and ground wire connection mechanism; The rounded structure of said radio-frequency coil; Be provided with downward concave face at the upper side of circular radio-frequency coil middle part, be provided with ring-shaped step upwards, cooling water channel is set in the outer most surrounding of radio-frequency coil at the bottom surfaces middle part of circular radio-frequency coil; Draw the hole or change the middle part that the material hole is arranged on circular radio-frequency coil; Draw the hole or change evenly be provided with on the outside radio-frequency coil in material hole five around the drawing hole, by drawing the hole or changing the material hole to being radial five diversion trenchs that are provided with, the external end head of said five diversion trenchs is arranged on five and draws between the holes; Said five draw holes be respectively equipped with drainage trough towards drawing the hole or changing material hole one side, the end of said drainage trough with draw the hole or change the material hole and leave spacing; One of them of said five diversion trenchs is through the straight perforation tremendously high frequency of opening coil outer rim; The two ends of cooling water channel form suction culvert and outlet pipeline respectively in the both sides of opening; Suction culvert and outlet pipeline outer end are respectively equipped with Connection Block, are provided with ground wire connection mechanism in the outside of radio-frequency coil.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, is respectively equipped with stomidium at the external end head of said five diversion trenchs.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and the stomidium that is provided with respectively at said five diversion trench external end heads is circle or polygon.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and the end of said drainage trough is set to " V " shape angle or circular arc, and drainage trough is set to arc-shaped transition or angle transition with the end that is connected that draws the hole.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and the through hole of said suction culvert and outlet pipeline passes said Connection Block, is respectively equipped with open hole in both sides up and down at the suction culvert of said Connection Block and the through hole of outlet pipeline.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and said Connection Block is polygon Connection Block or two semicircle Connection Block or oval Connection Block.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure; In the radio-frequency coil outer most surrounding cooling water channel being set does; The outside upper ring surface of radio-frequency coil or outside subordinate's anchor ring or outer edge surface fluting, said cooling water channel ring is embedded in the radio-frequency coil; Or at the outer edge surface of radio-frequency coil through soldering or brazing or silver soldering welding cooling water channel, cooling water channel and radio-frequency coil are integrally formed.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and five upper port places that draw the hole are provided with annular chamfer.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and the upper port place that draws hole or change material hole is provided with annular chamfer.
The racket shape of described production five or six roots of sensation silicon core draws the radio-frequency coil of pore structure; Said ground wire connection mechanism; The outside upper ring surface of radio-frequency coil or down anchor ring or outer edge surface be provided with the ground wire web plate, or at the outside upper ring surface of radio-frequency coil or anchor ring or outer rim punching connect ground wire through screw down.
Owing to adopt technique scheme, the utlity model has following beneficial effect:
The racket shape of described production five of the utility model or six roots of sensation silicon core draws the radio-frequency coil of pore structure; Produce at the same time five or six roots of sensation silicon core in overcome peripheral around drawing hole outer side and medial surface temperature differ and cause the oval phenomenon of pillar-shaped crystal; In the periphery around inboard, drawing hole drainage trough is set; Make that by the drainage trough guide current drawing the inboard electric current in hole reduces; Through drainage trough can make peripheral around drawing hole current temperature more be evenly distributed on and draw around the hole, standard more when silicon core or other crystalline material being heated evenly draw through electric current, the pillar-shaped crystal ovality of obtaining effectively reduces; More meet the requirements of the customers, yield rate increases substantially in production five or six roots of sensation silicon core; The utility model improves capacity usage ratio, reduces production costs and reduces fraction defective and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce, and is easy in the promotion and implementation of polysilicon industry.
[description of drawings]
Fig. 1 is the structural representation of the utility model.
Fig. 2 is the perspective view of Fig. 1.
Fig. 3 is the diagonal cut joint structural representation of Fig. 2.
Fig. 4 is another example structure synoptic diagram of the utility model opening.
Fig. 5 is the perspective view of Fig. 4.
Fig. 6 be Fig. 4 head straight for the mouth structure synoptic diagram.
Fig. 7 is opening " U " the shape example structure synoptic diagram of the utility model.
Fig. 8 is opening " V " the shape example structure synoptic diagram of the utility model.
Fig. 9 is the opening " " of the utility model " shape example structure synoptic diagram.
Figure 10 is the inner structural representation that " V " shape angle is set of the drawing hole drainage trough of the utility model.
Figure 11 is the structural representation that drainage trough the inner, drawing hole of the utility model is provided with circular arc.
Figure 12 is the perspective view that drainage trough the inner, drawing hole of the utility model is provided with the arc-shaped transition in dihedral outer end and drawing hole.
Figure 13 is the perspective view that drainage trough the inner, drawing hole of the utility model is provided with the arc-shaped transition in circular arc outer end and drawing hole.
Figure 14 is the rectangle Connection Block perspective view of the utility model.
Figure 15 is the two semicircle Connection Block perspective view of the utility model.
Figure 16 is another embodiment perspective view of rectangle Connection Block of the utility model.
Figure 17 is that the diversion trench outer end of the utility model is set to square end pore structure synoptic diagram.
Figure 18 is that the diversion trench outer end of the utility model is set to semicircle stomidium structural representation.
Figure 19 is that the diversion trench outer end of the utility model is set to rhombus stomidium structural representation.
Figure 20 is that the diversion trench outer end of the utility model is set to round nose pore structure synoptic diagram.
Figure 21 is that the diversion trench outer end of the utility model is set to oval stomidium structural representation.
Figure 22 is that the diversion trench outer end of the utility model is set to trilateral stomidium structural representation.
In the drawings: 1, ground wire web plate; 2, radio-frequency coil; 3, annular chamfer; 4, stomidium; 5, draw the hole; 6, drainage trough; 7, opening; 8, suction culvert; 9, Connection Block; 10, downward concave face; 11, draw hole or change material hole; 12, diversion trench; 13, outlet pipeline; 14, step; 15, open hole.
[embodiment]
Embodiment with reference to following can explain the utility model in more detail; But the utility model is not limited to these embodiment.
Draw the radio-frequency coil of pore structure in conjunction with the racket shape of production five described in the accompanying drawing 1 to 6 or six roots of sensation silicon core; Comprise radio-frequency coil 2, suction culvert 8, outlet pipeline 13, Connection Block 9 and ground wire connection mechanism; Said radio-frequency coil 2 rounded structures; Be provided with downward concave face 10 at the upper side of circular radio-frequency coil 2 middle part, be provided with ring-shaped step 14 upwards, cooling water channel is set in the outer most surrounding of radio-frequency coil 2 at the bottom surfaces middle part of circular radio-frequency coil 2; Draw the hole or change the middle part that material hole 11 is arranged on circular radio-frequency coil 2; Draw the hole or change evenly be provided with on the outside radio-frequency coil 2 in material hole 11 five around the drawing hole 5 that is provided with annular chamfer 3, by drawing the hole or changing material hole 11 to being radial five diversion trenchs 12 that are provided with, the external end head of said five diversion trenchs 12 is arranged on five and draws between the holes 5; In conjunction with accompanying drawing 17～22, be respectively equipped with circle or polygon stomidium 4 at the external end head of said five diversion trenchs 12; Said five draw holes 5 be respectively equipped with drainage trough 6 towards drawing the hole or changing material hole 11 1 sides; Spacing is left with drawing hole or change material hole 11 in the end of said drainage trough 6; In conjunction with the structure that provides in the accompanying drawing 10～13; The end of said drainage trough 6 is set to " V " shape angle or circular arc, and drainage trough 6 is set to arc-shaped transition or angle transition with the end that is connected that draws hole 5; One of them of said five diversion trenchs 12 is through opening 7 straight perforation tremendously high frequency coil 2 outer rims; The two ends of cooling water channel form suction culvert 8 and outlet pipeline 13 respectively in the both sides of opening 7; In radio-frequency coil 2 outer most surrounding cooling water channel being set does; The outside upper ring surface of radio-frequency coil 2 or outside subordinate's anchor ring or outer edge surface fluting, said cooling water channel ring is embedded in the radio-frequency coil 2; Or at the outer edge surface of radio-frequency coil 2 through soldering or brazing or silver soldering welding cooling water channel; Cooling water channel and radio-frequency coil 2 are integrally formed; Suction culvert 8 is respectively equipped with Connection Block 9 with outlet pipeline 13 outer ends; The through hole of said suction culvert 8 and outlet pipeline 13 passes said Connection Block 9; Being respectively equipped with open hole 15 in both sides up and down at the suction culvert 8 of said Connection Block 9 and the through hole of outlet pipeline 13, is polygon Connection Block 9 or two semicircle Connection Block 9 or oval Connection Block 9 in conjunction with accompanying drawing 14,15,16 said Connection Blocks 9, is provided with ground wire connection mechanism in the outside of radio-frequency coil 2; Said ground wire connection mechanism, the outside upper ring surface of radio-frequency coil 2 or down anchor ring or outer edge surface be provided with ground wire web plate 1, or at the outside upper ring surface of radio-frequency coil 2 or anchor ring or outer rim punching connect ground wire through screw down.
Be set to " U " shape or " V " shape or " " in conjunction with accompanying drawing 6,7,8,9 said openings 7 " diagonal cut joint 7 that provides in shape or the accompanying drawing 3, the preferred diagonal cut joint 7 of the utility model.
The racket shape of implementing described production five of the utility model or six roots of sensation silicon core draws the radio-frequency coil of pore structure; Produce at the same time five or six roots of sensation silicon core in overcome peripheral around drawing hole 5 because the silicon core ellipse phenomenon that outer side and medial surface temperature differ and cause; In the periphery around 5 inboards, drawing hole drainage trough 6 is set; Make that by drainage trough 6 guide current drawing hole 5 inboard electric currents reduces; Through drainage trough 6 can make peripheral around drawing hole 5 current temperatures more be evenly distributed on and draw around the hole 5, standard more when silicon core or other crystalline material being heated evenly draw through electric current, the pillar-shaped crystal of obtaining more meets the requirements of the customers; The utility model combines diversion trench 12 evenly to draw hole 5 operations around five under the shunting action of drainage trough 6 when making the electric current operation through drainage trough 6; Obtain comparatively reasonably electric current; And around electric current under the booster action of drainage trough 6 more is evenly distributed in outside five drawing holes 5; Through experiment and test; Proved that the utility model improves after-current and can be uniformly under the water conservancy diversion of radial diversion trench draws hole 5 operations around each that comprises that the middle part draws the hole or change material hole 11, six draw in the hole around five draw the drawing hole at hole 5 and middle part or change the Heating temperature in material hole 11 basic identical, realized electric current in six drawing holes equally distributed purpose on every side; Drawing hole wherein or change material hole 11 be can be used as material hole also; Effect or only the heating raw clavate become to produce the radio-frequency coil of five silicon cores, or the drawing hole at middle part or change material hole 11 also as drawing the hole forms the radio-frequency coil of producing six silicon cores; The utility model improves capacity usage ratio, reduces production costs and reduces fraction defective and have homogeneous heating, a large amount of save energy, reduce advantages such as facility investment and artificial comprehensive cost can effectively reduce, and is easy in the promotion and implementation of polysilicon industry.
In conjunction with accompanying drawing 1,2,4 and 5, the radio-frequency coil use is described below: at first fuel rod is delivered to radio-frequency coil 2 bottoms, said radio-frequency coil 2 bottoms are step surface; Fuel rod is good more closely more apart from radio-frequency coil 2, but must not contact with radio-frequency coil 2, and water and outlet pipeline 13 energising drainings are sent in 8 energisings of the suction culvert on radio-frequency coil 2 then; Impel radio-frequency coil 2 to produce powerful magneticline of force through the high-frequency current after the conversion; Make the fuel rod upper end utilize magneticline of force to carry out induction heating near the part of radio-frequency coil 2, radio-frequency coil 2 is lowered the temperature through heat-eliminating medium, after melt near the position below the radio-frequency coil termination of treating fuel rod; Young brilliant chuck band young brilliant decline; The melting area of inserting fuel rod after making young crystalline substance through the drawing hole, it is brilliant to promote the son then, and the melt cognition on fuel rod top is followed young brilliant rising; Also corresponding the following synchronously of the lower shaft of its fuel rod bottom slowly risen, but its fuel rod must not contact with radio-frequency coil 2; Because the end of fuel rod maybe be not too smooth; So, be designed to step surface below the radio-frequency coil, its role is to make as much as possible the many bottom surfaces of raw material silicon rod near radio-frequency coil 2; It is designed to downward concave face above radio-frequency coil; Its effect is can reduce high-frequency current too the concentrating of middle part, and makes its uniform distribution on radio-frequency coil 2, to realize being heated effect of uniform; The melting area on fuel rod top is in young brilliant sticking and drive and through behind the radio-frequency coil 2 drawing holes 5; The condensation owing to weakening of magneticline of force; Just form a new column type crystal, its young brilliant chuck is carried young brilliant slowly rising secretly, just can form the finished silicon core of desired length.
Claims (10)
- One kind produce five or the racket shape of six roots of sensation silicon core draw the radio-frequency coil of pore structure; Comprise radio-frequency coil (2), suction culvert (8), outlet pipeline (13), Connection Block (9) and ground wire connection mechanism; The rounded structure of said radio-frequency coil (2); Upper side middle part at circular radio-frequency coil (2) is provided with downward concave face (10); Bottom surfaces middle part at circular radio-frequency coil (2) is provided with ring-shaped step (14) upwards; Outer most surrounding at radio-frequency coil (2) is provided with cooling water channel, it is characterized in that: draw the hole or change the middle part that material hole (11) is arranged on circular radio-frequency coil (2), draw the hole or change evenly be provided with on the outside radio-frequency coil (2) in material hole (11) five around drawing hole (5); By drawing the hole or changing material hole (11) to being radial five diversion trenchs (12) that are provided with; The external end head of said five diversion trenchs (12) is arranged on five and draws between the holes (5), said five draw holes (5) be respectively equipped with drainage trough (6) towards drawing the hole or changing material hole (11) one sides, the end of said drainage trough (6) with draw the hole or change material hole (11) and leave spacing; One of them of said five diversion trenchs (12) is through opening (7) straight perforation tremendously high frequency coil (2) outer rim; The two ends of cooling water channel form suction culvert (8) and outlet pipeline (13) respectively in the both sides of opening (7); Suction culvert (8) and outlet pipeline (13) outer end are respectively equipped with Connection Block (9), are provided with ground wire connection mechanism in the outside of radio-frequency coil (2).
- 2. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure, and it is characterized in that: the external end head at said five diversion trenchs (12) is respectively equipped with stomidium (4).
- 3. the racket shape of production five as claimed in claim 2 or six roots of sensation silicon core draws the radio-frequency coil of pore structure, it is characterized in that: the stomidium (4) that is provided with respectively at said five diversion trenchs (12) external end head is circle or polygon.
- 4. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure; It is characterized in that: the end of said drainage trough (6) is set to " V " shape angle or circular arc, and drainage trough (6) is set to arc-shaped transition or angle transition with the end that is connected that draws hole (5).
- 5. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure; It is characterized in that: the through hole of said suction culvert (8) and outlet pipeline (13) passes said Connection Block (9), is respectively equipped with open hole (15) in both sides up and down at the suction culvert (8) of said Connection Block (9) and the through hole of outlet pipeline (13).
- 6. draw the radio-frequency coil of pore structure like the racket shape of claim 1 or 5 described productions five or six roots of sensation silicon core, it is characterized in that: said Connection Block (9) is polygon Connection Block (9) or two semicircle Connection Block (9) or oval Connection Block (9).
- 7. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure; It is characterized in that: in radio-frequency coil (2) outer most surrounding cooling water channel being set does; The outside upper ring surface of radio-frequency coil (2) or outside subordinate's anchor ring or outer edge surface fluting, said cooling water channel ring is embedded in the radio-frequency coil (2); Or at the outer edge surface of radio-frequency coil (2) through soldering or brazing or silver soldering welding cooling water channel, cooling water channel and radio-frequency coil (2) are integrally formed.
- 8. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure, it is characterized in that: five upper port places that draw hole (5) are provided with annular chamfer (3).
- 9. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure, it is characterized in that: the upper port place that draws hole or change material hole (11) is provided with annular chamfer (3).
- 10. the racket shape of production five as claimed in claim 1 or six roots of sensation silicon core draws the radio-frequency coil of pore structure; It is characterized in that: said ground wire connection mechanism; The outside upper ring surface of radio-frequency coil (2) or down anchor ring or outer edge surface be provided with ground wire web plate (1), or at the outside upper ring surface of radio-frequency coil (2) or anchor ring or outer rim punching connect ground wire through screw down.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203663569U CN202246985U (en) | 2011-09-20 | 2011-09-20 | High-frequency coil for producing racket-shaped drawing hole structure of five or six silicon cores |
| PCT/CN2011/001846 WO2013040735A1 (en) | 2011-09-20 | 2011-11-02 | High frequency coil drawing hole structure capable of producing 5 to 10 silicon cores simultaneously |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203663569U CN202246985U (en) | 2011-09-20 | 2011-09-20 | High-frequency coil for producing racket-shaped drawing hole structure of five or six silicon cores |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202246985U true CN202246985U (en) | 2012-05-30 |
Family
ID=46108255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203663569U Expired - Lifetime CN202246985U (en) | 2011-09-20 | 2011-09-20 | High-frequency coil for producing racket-shaped drawing hole structure of five or six silicon cores |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202246985U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668432A (en) * | 2012-09-09 | 2014-03-26 | 洛阳金诺机械工程有限公司 | High-frequency coil for producing ten or eleven silicon cores |
-
2011
- 2011-09-20 CN CN2011203663569U patent/CN202246985U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668432A (en) * | 2012-09-09 | 2014-03-26 | 洛阳金诺机械工程有限公司 | High-frequency coil for producing ten or eleven silicon cores |
| CN103668432B (en) * | 2012-09-09 | 2017-12-01 | 洛阳金诺机械工程有限公司 | Production ten or the high frequency coil of ten silicon cores |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120530 |