CN203820920U - High frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously - Google Patents
High frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously Download PDFInfo
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- CN203820920U CN203820920U CN201420217341.XU CN201420217341U CN203820920U CN 203820920 U CN203820920 U CN 203820920U CN 201420217341 U CN201420217341 U CN 201420217341U CN 203820920 U CN203820920 U CN 203820920U
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- silicon cores
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 69
- 239000000463 material Substances 0.000 claims abstract description 55
- 230000007246 mechanism Effects 0.000 claims description 24
- 230000007704 transition Effects 0.000 claims description 7
- 238000005476 soldering Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 238000005219 brazing Methods 0.000 claims description 3
- 230000001788 irregular Effects 0.000 claims description 3
- 238000004080 punching Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000002844 melting Methods 0.000 abstract description 4
- 230000008018 melting Effects 0.000 abstract description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 13
- 239000000446 fuel Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000019771 cognition Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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Abstract
The utility model discloses high frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously, relating to a high frequency coil. Seven or eight or nine or ten or eleven or twelve or thirteen rounding drawing holes (3) are arranged outside the drawing hole or a material melting hole (4) of a high frequency coil (2), so that the high frequency coil drawing hole distribution for drawing seven to fourteen silicon cores once simultaneously is formed. The high frequency coil drawing hole distribution has the characteristics of simple structure and convenience in manufacture, and is particularly suitable for popularization in the polycrystalline silicon industry.
Description
[technical field]
The utility model relates to radio-frequency coil technical field, is specifically related to draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously.
[background technology]
Known, because the subsequent product of silicon core is widely used in the fields such as solar electrical energy generation, semi-conductor, military project, so the demand of silicon core is very huge, and original silicon core in process of production, what mostly use is a kind of radio-frequency coil that once draws five or six silicon core, its principle of work is: during work by passing into high-frequency current to radio-frequency coil, make radio-frequency coil carry out induction heating to fuel rod, fuel rod upper end after heating forms melt zone, then utilize seed chuck to drive seed crystal through the melting area of inserting fuel rod upper end after the drawing hole of radio-frequency coil, after the termination of seed crystal and liquation fuse into one, then slowly promote seed crystal, raw material after fusing will be followed seed crystal and risen and then form new pillar-shaped crystal, this pillar-shaped crystal is the finished product of silicon core.
Contriver's Liu Zhaoxuan in first to file multinomially relate to the radio-frequency coil that silicon core draws, but be blank to once draw seven radio-frequency coil drawing hole layouts to 14 silicon cores simultaneously always.
[summary of the invention]
In view of the deficiency existing in background technology, the utility model discloses and draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, the utility model seven of the outer setting in drawing hole or material hole or eight or nine or ten or 11 or 12 or 13 around drawing hole 3, form and once can draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, the utlity model has the features such as simple in structure, easy to process.
In order to realize the object of foregoing invention, the utility model adopts following technical scheme:
Draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, comprise radio-frequency coil, suction culvert, outlet pipeline, Connection Block and ground wire connection mechanism, upper side middle part at radio-frequency coil is provided with downward concave face, bottom surfaces middle part at radio-frequency coil is provided with ring-shaped step upwards, outer most surrounding at radio-frequency coil arranges heat-eliminating medium path, the two ends of described heat-eliminating medium path form respectively suction culvert and outlet pipeline, described suction culvert and outlet pipeline outer end are respectively equipped with Connection Block, on the radio-frequency coil between suction culvert and outlet pipeline, be provided with from radio-frequency coil outer rim and connect to the opening in drawing hole or material hole, described drawing hole or material hole are arranged on the middle part of radio-frequency coil, on the radio-frequency coil of drawing hole or outside, material hole, arrange seven or eight or nine or ten or 11 or 12 or 13 around drawing hole, in the outside of radio-frequency coil, be provided with ground wire connection mechanism.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, described opening is set to straight opening or " U " shape opening or " V " shape opening or " > > " shape opening or diagonal cut joint.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, described drawing hole is set to circular drawing hole; Or be set to square drawing hole; Or be set to square interior rounding of angle drawing hole; Or be set to rectangle drawing hole; Or be set to rounding of angle drawing hole in rectangle; Or be set to trilateral drawing hole; Or be set to rounding of angle drawing hole in trilateral; Or be set to Polygons drawing hole; Or be set to irregular polygon drawing hole; Or be set to rhombus drawing hole; Or be set to rounding of angle drawing hole in rhombus; Or be set to trapezoidal drawing hole; Or be set to trapezoidal interior rounding of angle drawing hole; Or be set to Long Circle drawing hole; Or be set to oval drawing hole.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, described drawing hole towards drawing hole or material hole one side, be provided with rotary-cut mouth; Or towards drawing hole or material hole one side, drainage trough is set; Or towards drawing hole or material hole one side setting " V " shape gap; Or remaining is set to " V " shape gap towards drawing hole or material hole one side, to be partly set to drainage trough; Or remaining is set to rotary-cut mouth towards drawing hole or material hole one side, to be partly set to drainage trough; Or remaining is set to " V " shape gap to be partly set to rotary-cut mouth towards drawing hole or material hole one side, spacing is left in the tip of the end of described drainage trough and " V " shape gap and drawing hole or material hole.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, the external end head of described drainage trough is provided with drainage trough expanding end.
Described drainage trough end is set to " V " shape angle or circular arc to the radio-frequency coil drawing hole layout of 14 silicon cores in the time of described, to draw seven, and drainage trough is set to arc-shaped transition or angle transition with the one end that is connected of drawing hole.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, described Connection Block is polygon Connection Block or two semicircle Connection Block or oval Connection Block.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, heat-eliminating medium access structure in the setting of radio-frequency coil outer most surrounding is: the outside upper ring surface of radio-frequency coil or outside subordinate's anchor ring or outer edge surface fluting, described heat-eliminating medium path ring is embedded in radio-frequency coil; Or at the outer edge surface of radio-frequency coil by soldering or brazing or silver soldering welding heat-eliminating medium path, make heat-eliminating medium path and radio-frequency coil formation one.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, another replacing structure of described heat-eliminating medium path is, at the outer edge surface fluting of radio-frequency coil, then directly utilize groove described in pipe sealing, by described groove, form heat-eliminating medium path.
In the time of described, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, described ground wire connection mechanism is provided with wiring board for the outside upper ring surface at radio-frequency coil or lower anchor ring or outer edge surface, or by screw, connects ground wire formation ground wire connection mechanism at the outside upper ring surface of radio-frequency coil or lower anchor ring or outer rim punching.
Owing to adopting technique scheme, the utlity model has following beneficial effect:
Described in the utility modelly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, the utility model seven of the outer setting in drawing hole or material hole or eight or nine or ten or 11 or 12 or 13 around drawing hole, form and once can draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, the utlity model has simple in structure, the feature such as easily manufactured, is particularly suitable in the promotion and implementation of polysilicon industry.
[accompanying drawing explanation]
Fig. 1 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws seven or eight silicon cores simultaneously;
Fig. 2 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws seven or eight silicon cores simultaneously;
Fig. 3 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws eight or nine silicon cores simultaneously;
Fig. 4 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws eight or nine silicon cores simultaneously;
Fig. 5 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws nine or ten silicon cores simultaneously;
Fig. 6 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws nine or ten silicon cores simultaneously;
Fig. 7 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws ten or 11 silicon cores simultaneously;
Fig. 8 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws ten or 11 silicon cores simultaneously;
Fig. 9 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws 11 or 12 silicon cores simultaneously;
Figure 10 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws 11 or 12 silicon cores simultaneously;
Figure 11 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws 12 or 13 silicon cores simultaneously;
Figure 12 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws 12 or 13 silicon cores simultaneously;
Figure 13 is the radio-frequency coil drawing hole schematic layout pattern that the utility model draws 13 or 14 silicon cores simultaneously;
Figure 14 is another schematic layout pattern of radio-frequency coil drawing hole that the utility model draws 13 or 14 silicon cores simultaneously;
Figure 15 is the structural representation of downward concave face of the present utility model and the recess step that makes progress;
Figure 16 is superstructure schematic diagram of the present utility model;
Figure 17 is the drop-shaped drawing hole structure schematic diagram that drawing hole of the present utility model and " V " shape gap form;
Figure 18 is the bat-shaped drawing hole structure schematic diagram that drawing hole of the present utility model and drainage trough form;
Figure 19 is that drainage trough and the drawing hole connecting portion in racket-shaped drawing of the present utility model hole is set to circular arc transition structure schematic diagram;
Figure 20 is that the drainage trough end in racket-shaped drawing of the present utility model hole is set to horn structure schematic diagram;
Figure 21 is that the drainage trough end in racket-shaped drawing of the present utility model hole is set to drainage trough expanding end structural representation;
Figure 22 is the structural representation that opening of the present utility model is set to diagonal cut joint;
Figure 23 is that opening of the present utility model is set to straight opening structural representation;
Figure 24 is that opening of the present utility model is set to " U " shape hatch frame schematic diagram;
Figure 25 is that opening of the present utility model is set to " V " shape hatch frame schematic diagram;
Figure 26 is that opening of the present utility model is set to " > > " shape hatch frame schematic diagram;
Figure 27 is Connection Block rectangle rising structure schematic diagram of the present utility model;
Figure 28 is the Connection Block rectangle of the present utility model structural representation that lies low;
Figure 29 is the two semicircle perspective view of Connection Block of the present utility model;
Figure 30 is the structural representation that rotary-cut mouth is set on drawing hole of the present utility model;
In the drawings: 1, wiring board; 2, radio-frequency coil; 3, drawing hole; 4, drawing hole or material hole; 5, opening; 6, suction culvert; 7, Connection Block; 8, outlet pipeline; 9, downward concave face; 10, heat-eliminating medium path; 11, ring-shaped step; 12, annular chamfer; 13, " V " shape gap; 14, drainage trough; 15, drainage trough expanding end; 16, open holes; 17, rotary-cut mouth.
[embodiment]
Below in conjunction with embodiment, the utility model is further detailed; The following examples are not for restriction of the present utility model, and only, as supporting to realize mode of the present utility model, any equivalent structure in technological frame disclosed in the utility model is replaced, and is protection domain of the present utility model;
By reference to the accompanying drawings 1, in the time of described in 2 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange seven around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw seven or eight silicon cores,
By reference to the accompanying drawings 3, in the time of described in 4 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange eight around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw eight or nine silicon cores,
By reference to the accompanying drawings 5, in the time of described in 6 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange nine around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw nine or ten silicon cores,
By reference to the accompanying drawings 7, in the time of described in 8 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange ten around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw ten or 11 silicon cores,
By reference to the accompanying drawings 9, in the time of described in 10 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange 11 around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw 11 or 12 silicon cores,
By reference to the accompanying drawings 11, in the time of described in 12 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange 12 around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw 12 or 13 silicon cores,
By reference to the accompanying drawings 13, in the time of described in 14 and 15, draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores, comprise radio-frequency coil 2, suction culvert 6, outlet pipeline 8, Connection Block 7 and ground wire connection mechanism, upper side middle part at radio-frequency coil 2 is provided with downward concave face 9, bottom surfaces middle part at radio-frequency coil 2 is provided with ring-shaped step 11 upwards, outer most surrounding at radio-frequency coil 2 arranges heat-eliminating medium path 10, the two ends of described heat-eliminating medium path 10 form respectively suction culvert 6 and outlet pipeline 8, described suction culvert 6 and outlet pipeline 8 outer ends are respectively equipped with Connection Block 7, on the radio-frequency coil 2 between suction culvert 6 and outlet pipeline 8, be provided with from radio-frequency coil 2 outer rims and connect to the opening 5 in drawing hole or material hole 4, described drawing hole or material hole 4 are arranged on the middle part of radio-frequency coil 2, on the radio-frequency coil 2 of drawing hole or 4 outsides, material hole, arrange 13 around drawing hole 3, in the outside of radio-frequency coil 2, be provided with ground wire connection mechanism and form the radio-frequency coil drawing hole layout that once can simultaneously draw 13 or 14 silicon cores,
By reference to the accompanying drawings 16, drawing hole 3 described in the utility model is provided with the annular chamfer 12 that makes drawing hole 3 cutting edge attenuates;
Drawing hole 3 described in the utility model is set to circular drawing hole 3; Or be set to square drawing hole 3; Or be set to square interior rounding of angle drawing hole 3; Or be set to rectangle drawing hole 3; Or be set to rounding of angle drawing hole 3 in rectangle; Or be set to trilateral drawing hole 3; Or be set to rounding of angle drawing hole 3 in trilateral; Or be set to Polygons drawing hole 3; Or be set to irregular polygon drawing hole 3; Or be set to rhombus drawing hole 3; Or be set to rounding of angle drawing hole 3 in rhombus; Or be set to trapezoidal drawing hole 3; Or be set to trapezoidal interior rounding of angle drawing hole 3; Or be set to Long Circle drawing hole 3; Or be set to oval drawing hole 3; The circular drawing hole 3 of wherein take is example, by reference to the accompanying drawings 17,18,19,20,21 and 30, at drawing hole 3, towards drawing hole or material hole 4 one sides, be provided with rotary-cut mouth 17; Or towards drawing hole or material hole 4 one sides, drainage trough 14 is set; Or towards drawing hole or material hole 4 one side setting " V " shape gap 13; Or remaining is set to " V " shape gap 13 towards drawing hole or material hole 4 one sides, to be partly set to drainage trough 14; Or remaining is set to rotary-cut mouth 17 towards drawing hole or material hole 4 one sides, to be partly set to drainage trough 14; Or remaining is set to " V " shape gap 13 to be partly set to rotary-cut mouth 17 towards drawing hole or material hole 4 one sides, spacing is left in the tip of the end of described drainage trough 14 and " V " shape gap 13 and drawing hole or material hole 4; The external end head of wherein said drainage trough 14 is provided with drainage trough expanding end 15; Described drainage trough 14 ends are set to " V " shape angle or circular arc, and drainage trough 14 is set to arc-shaped transition or angle transition with the one end that is connected of drawing hole 3;
22,23,24,25 and 26 openings 5 described in the utility model are set to straight opening or " U " shape opening 5 or " V " shape opening 5 or " > > " shape opening 5 or diagonal cut joint 5 by reference to the accompanying drawings;
27,28 and 29 Connection Blocks 7 described in the utility model are polygon Connection Block 7 or two semicircle Connection Block 7 or oval Connection Block 7 by reference to the accompanying drawings;
Wherein heat-eliminating medium path 10 structures in radio-frequency coil 2 outer most surrounding settings described in the utility model are: the outside upper ring surface of radio-frequency coil 2 or outside subordinate's anchor ring or outer edge surface fluting, described heat-eliminating medium path 10 rings are embedded in radio-frequency coil 2; Or at the outer edge surface of radio-frequency coil 2 by soldering or brazing or silver soldering welding heat-eliminating medium path 10, make heat-eliminating medium path 10 and radio-frequency coil 2 form one;
In order better to implement the utility model, another replacing structure of heat-eliminating medium path 10 described in the utility model is, at the outer edge surface fluting of radio-frequency coil 2, then directly utilizes groove described in pipe sealing, by described groove, forms heat-eliminating medium path 10;
Wherein ground wire described in the utility model connection mechanism is provided with wiring board 1 for the outside upper ring surface at radio-frequency coil 2 or lower anchor ring or outer edge surface, or by screw, connects ground wire formation ground wire connection mechanism at the outside upper ring surface of radio-frequency coil 2 or lower anchor ring or outer rim punching.
Implement described in the utility modelly to draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, by experiment, proved that wherein drawing hole or the material hole 4 at middle part also can be used as material hole to the utility model, act on the only radio-frequency coil of many silicon of heating raw clavate one-tenth production core, or the drawing hole at middle part or material hole 4 are also as drawing hole, form the radio-frequency coil of producing many silicon core; The utility model improves capacity usage ratio, reduces production costs, a large amount of save energy, reduces the advantages such as facility investment and artificial comprehensive cost can effectively reduce, and is easy in the promotion and implementation of polysilicon industry.
By reference to the accompanying drawings 1～14, radio-frequency coil 2 use procedures are as described below: first fuel rod is delivered to radio-frequency coil 2 bottoms, described radio-frequency coil 2 bottoms are ring-shaped step 11, fuel rod is more closely better apart from radio-frequency coil 2, but must not contact with radio-frequency coil 2 bottom faces, then water and outlet pipeline 8 energising drainings are sent in 6 energisings of the suction culvert on radio-frequency coil 2, on radio-frequency coil 2 after energising draining, high-frequency current impels radio-frequency coil 2 to produce powerful magnetic line of force, make fuel rod upper end utilize magnetic line of force to carry out induction heating near the part of radio-frequency coil 2, radio-frequency coil 2 is lowered the temperature by the heat-eliminating medium in heat-eliminating medium path 10, after melt near the position below radio-frequency coil 2 termination of fuel rod, seed chuck declines with seed crystal, make seed crystal pass through the melting area of the rear insertion fuel rod of drawing hole 3, then promote seed crystal, the melt cognition on fuel rod top is followed seed crystal and is risen, the lower shaft of its fuel rod bottom is also corresponding follows synchronous rising, but its fuel rod must not contact with radio-frequency coil 2, because the end of fuel rod may be not too smooth, so radio-frequency coil 2 is designed to step surface below, its role is to make as much as possible the many bottom surfaces near radio-frequency coil 2 of raw material silicon rod, and the upwards depression of step surface also synchronously has the effect of heating ring, described radio-frequency coil 2 is designed to downward concave face above, and its effect is can reduce high-frequency current too the concentrating of middle part, and it is uniformly distributed on radio-frequency coil 2, to realize the effect being heated evenly and to overcome skin effect, the melting area on fuel rod top is glued and drives and pass through after radio-frequency coil 2 drawing holes 3 seed crystal, the condensation due to weakening of magnetic line of force, just form a new column type crystal, its seed chuck is carried seed crystal rising secretly, just can form the finished silicon core of desired length.
The utility model does not describe part in detail for prior art.
The embodiment selecting in this article for open the purpose of this utility model, currently thinks suitablely, still, will be appreciated that, the utility model is intended to comprise that all belong to all changes and the improvement of the embodiment in this design and invention scope.
Claims (10)
1. draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, comprise radio-frequency coil (2), suction culvert (6), outlet pipeline (8), Connection Block (7) and ground wire connection mechanism, it is characterized in that: the upper side middle part at radio-frequency coil (2) is provided with downward concave face (9), bottom surfaces middle part at radio-frequency coil (2) is provided with ring-shaped step (11) upwards, outer most surrounding at radio-frequency coil (2) arranges heat-eliminating medium path (10), the two ends of described heat-eliminating medium path (10) form respectively suction culvert (6) and outlet pipeline (8), described suction culvert (6) and outlet pipeline (8) outer end are respectively equipped with Connection Block (7), on the radio-frequency coil (2) between suction culvert (6) and outlet pipeline (8), be provided with from radio-frequency coil (2) outer rim and connect to the opening (5) of drawing hole or material hole (4), described drawing hole or material hole (4) are arranged on the middle part of radio-frequency coil (2), on the outside radio-frequency coil (2) in drawing hole or material hole (4), arrange seven or eight or nine or ten or 11 or 12 or 13 around drawing hole (3), outside at radio-frequency coil (2) is provided with ground wire connection mechanism.
2. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described opening (5) is set to straight opening (5) or " U " shape opening (5) or " V " shape opening (5) or " > > " shape opening (5) or diagonal cut joint (5).
3. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described drawing hole (3) is set to circular drawing hole (3); Or be set to square drawing hole (3); Or be set to square interior rounding of angle drawing hole (3); Or be set to rectangle drawing hole (3); Or be set to rounding of angle drawing hole (3) in rectangle; Or be set to trilateral drawing hole (3); Or be set to rounding of angle drawing hole (3) in trilateral; Or be set to Polygons drawing hole (3); Or be set to irregular polygon drawing hole (3); Or be set to rhombus drawing hole (3); Or be set to rounding of angle drawing hole (3) in rhombus; Or be set to trapezoidal drawing hole (3); Or be set to trapezoidal interior rounding of angle drawing hole (3); Or be set to Long Circle drawing hole (3); Or be set to oval drawing hole (3).
4. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described drawing hole (3) towards drawing hole or material hole (4) one sides, be provided with rotary-cut mouth (17); Or towards drawing hole or material hole (4) one sides, drainage trough (14) is set; Or towards drawing hole or material hole (4) one side setting " V " shape gap (13); Or remaining is set to " V " shape gap (13) towards drawing hole or material hole (4) one sides, to be partly set to drainage trough (14); Or remaining is set to rotary-cut mouth (17) towards drawing hole or material hole (4) one sides, to be partly set to drainage trough (14); Or remaining is set to " V " shape gap (13) to be partly set to rotary-cut mouth (17) towards drawing hole or material hole (4) one sides, spacing is left in the tip of the end of described drainage trough (14) and " V " shape gap (13) and drawing hole or material hole (4).
5. as claimed in claim 4ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: the external end head of described drainage trough (14) is provided with drainage trough expanding end (15).
6. as claimed in claim 4ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described drainage trough (14) end is set to " V " shape angle or circular arc, drainage trough (14) is set to arc-shaped transition or angle transition with the one end that is connected of drawing hole (3).
7. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described Connection Block (7) is polygon Connection Block (7) or two semicircle Connection Block (7) or oval Connection Block (7).
8. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: heat-eliminating medium path (10) structure arranging in radio-frequency coil (2) outer most surrounding is: outside upper ring surface or outer subordinate's anchor ring or outer edge surface fluting at radio-frequency coil (2), encircle described heat-eliminating medium path (10) to be embedded in radio-frequency coil (2); Or at the outer edge surface of radio-frequency coil (2) by soldering or brazing or silver soldering welding heat-eliminating medium path (10), make heat-eliminating medium path (10) and radio-frequency coil (2) form one.
9. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: another replacing structure of described heat-eliminating medium path (10) is, outer edge surface fluting at radio-frequency coil (2), then directly utilize groove described in pipe sealing, by described groove, form heat-eliminating medium path (10).
10. as claimed in claim 1ly draw seven to the radio-frequency coil drawing hole layout of 14 silicon cores simultaneously, it is characterized in that: described ground wire connection mechanism is provided with wiring board (1) for the outside upper ring surface at radio-frequency coil (2) or lower anchor ring or outer edge surface, or by screw, connects ground wire formation ground wire connection mechanism at the outside upper ring surface of radio-frequency coil (2) or lower anchor ring or outer rim punching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420217341.XU CN203820920U (en) | 2014-04-25 | 2014-04-25 | High frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420217341.XU CN203820920U (en) | 2014-04-25 | 2014-04-25 | High frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203820920U true CN203820920U (en) | 2014-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420217341.XU Expired - Lifetime CN203820920U (en) | 2014-04-25 | 2014-04-25 | High frequency coil drawing hole distribution for drawing seven to fourteen silicon cores simultaneously |
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| Country | Link |
|---|---|
| CN (1) | CN203820920U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993351A (en) * | 2014-04-25 | 2014-08-20 | 洛阳金诺机械工程有限公司 | High-frequency coil and drawing-hole layout for simultaneously drawing seven-to-fourteen silicon cores |
| CN108179462A (en) * | 2016-12-08 | 2018-06-19 | 有研半导体材料有限公司 | A kind of heating coil for being used to prepare area and melting major diameter single crystal |
-
2014
- 2014-04-25 CN CN201420217341.XU patent/CN203820920U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103993351A (en) * | 2014-04-25 | 2014-08-20 | 洛阳金诺机械工程有限公司 | High-frequency coil and drawing-hole layout for simultaneously drawing seven-to-fourteen silicon cores |
| CN108179462A (en) * | 2016-12-08 | 2018-06-19 | 有研半导体材料有限公司 | A kind of heating coil for being used to prepare area and melting major diameter single crystal |
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| GR01 | Patent grant | ||
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Granted publication date: 20140910 |