CN101561401A - Real-time observation method of crystal growing surface microstructure - Google Patents
Real-time observation method of crystal growing surface microstructure Download PDFInfo
- Publication number
- CN101561401A CN101561401A CNA2009100154723A CN200910015472A CN101561401A CN 101561401 A CN101561401 A CN 101561401A CN A2009100154723 A CNA2009100154723 A CN A2009100154723A CN 200910015472 A CN200910015472 A CN 200910015472A CN 101561401 A CN101561401 A CN 101561401A
- Authority
- CN
- China
- Prior art keywords
- crystal
- crystal growing
- interferometer
- real
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention relates to the technical field of real-time quantitative test and analysis of a surface microstructure in the process of crystal growth by a solution method in the 3-D direction and belongs to a method of real-time observation of water-soluble crystal and organic crystal growing surface microstructures by adopting a laser digital phase-shifting interferometer system device. The invention is characterized in that a Fizeau interferometer is introduced into an interference light path; one of two reference plane mirrors in the Fizeau interferometer is replaced by a growing crystal surface so as to ensure laser reflected by the reference plane mirrors and the growing crystal surface to interfere so as to lead interference fringes to contain information of the crystal growing surface; phase shifting interferometry is applied to extract the information of the crystal growing surface structure and then contour maps and three dimensional perspective images of the crystal growing surface are obtained by computation and analysis of computer software to realize real-time observation. The method has simple and reliable working principle, high degree of automation of used equipment, good real-time observation effect and strong image intuition, which particularly can convert the process of crystal growth to display information in omni direction.
Description
Technical field:
The present invention relates to the real-time quantitative test and analysis technology field of crystal growth from solution process surface micro-structure on three-dimensional, belong to a kind of method of utilizing the water-soluble crystal of laser digital movable phase interfere system and device real-time monitored, organic crystal growing surface microstructure, observation is the crystal growing surface characters and appearances under various different growth conditionss, and analyse crystal growth dynamic process and microcosmic crystal defect form mechanism.
Background technology:
Crystal growing surface structures shape growth mechanism, whether stable relation arrives the integrality of growth of single crystal to the crystal growing surface structure, and directly determining final crystal mass, therefore the crystal growing surface structure is carried out the real-time monitored analysis has important theory and realistic meaning.The optical interferometry technology becomes one of effective means of real-time monitored crystal growth with its noncontact, highly sensitive, precision advantages of higher.Technology such as at present existing laser interference, holographic phase contrast interference microscopy are successfully applied to the real-time monitored [Lu Guiwu of crystal growing process, the laser interference experimental study of .KDP crystal step growth kineticses such as Li Chunxi. Chinese Journal of Chemical Physics, 2003,16 (4): 289-292; Zhang Shujun, Yu Xiling etc. the growth of holographic phase contrast interference microscopy research metallic dendrite. journal of Shandong university (natural science edition), 1999,34 (2): 165-169.].Yet all there are some intrinsic restrictions in traditional interference detection method at aspects such as quantity of information, information reliability and information extraction means are provided, at first is its low level phase resolution capabilities and the raising that limited measuring accuracy of low spatial resolution characteristic; Secondly the corrugated phase place is not directly to measure, usually always by the film recording interference fringe picture, carry out the interpretation analysis by the center of seeking every stripe again, in the film recording of interferogram and processing subsequently, will introduce various errors inevitably like this.At present, although people adopt photoelectric scanning device to improve interpretation method to striped, improve the interpretation precision, the atmospheric disturbance in the measuring process, vibration wait influence at random still can't eliminate, thereby have limited the raising of conventional interference method of inspection precision.Position, the real-time digital corrugated phase detection technique that development in recent years is got up, employing is introduced a time modulation to the phasic difference of two coherent lights, receive through modulation and the dynamic interference pattern that intercropping rule at any time changes with the CCD gamma camera, and with computing machine by multi-frame interferometry figure being made data processing such as Fast Fourier Transform (FFT), denoising, the influence at random of extraneous vibration can be reduced to minimum, therefore have satisfied measuring repeatability and reliable high precision, measurement makes whole measuring process only need half a minute rapidly; Tested surface shape can show with corrugated circle of equal altitudes and three-dimensional perspective diagram form, very directly perceived and easy to use [Wang Xiaohui, Cao Genrui etc. laser digital wavefront interferometer Fourier transform movable phase interfere art. photoelectric project, 1997,24 (4): 52-55.].External existing scholar attempts being applied to the movable phase interfere technology in the crystal growth real-time monitored and having obtained some results [Nicholas A.Booth, Boris Stanojev etc. differential movable phase interfere art real-time characterization crystal growth from solution surface. the scientific instrument review, 2002,73 (10): 3540-3545].But existing technology still exists the scope complexity, and observation effect is poor, and real-time monitored is difficult to outstanding shortcomings such as realization.
Summary of the invention:
The objective of the invention is to overcome the shortcoming that prior art exists, deficiency at the conventional laser interference technique, utilize laser phase shift digital wavefront interferometer and corresponding data analysis software, design provides a kind of systems approach that can be used for real-time monitored crystal growth from solution surface micro-structure, and real-time quantitative analysis mechanism of crystal growth and defective form mechanism.
To achieve these goals, technical solution of the present invention is to introduce the Feisuo interferometer in optical interference circuit, one of two reference planes mirrors in the Feisuo interferometer are replaced with the plane of crystal of growing, laser through reference planes mirror and grown crystal surface reflection is interfered, make the information that comprises crystal growing surface in the interference fringe, utilize the movable phase interfere method to extract the crystal growing surface structural information again, obtain the circle of equal altitudes and the three-dimensional perspective of crystal growing surface then by the computer software computational analysis; The system and device of realizing real-time monitored comprises phase shift digital wavefront interferometer and crystal growing apparatus two parts; Wherein the phase shift digital wavefront interferometer is selected the horizontal phase shift digital wavefront interferometer of Feisuo type for use and adopts the He-Ne laser instrument that (λ=632.8nm), its collimated light beam bore is Φ 60mm; Optical quality λ/20 (P-V); It is automatically controlled switching that light path is switched between employing adjustment and the test; Charge-coupled device selects for use high-resolution, high sensitivity, low noise universal; The equal thickness interferometer of piezoelectric ceramic actuator is housed on the reference planes mirror; Movable phase interfere adopts photoelectricity quantitative detection method, to several static interferogram samplings, through image pick-up card the light intensity interferogram is converted into digital interference pattern, restore the corrugated by computing machine according to the mathematics physics model of movable phase interfere, surface form deviation (optical path difference), peak-to-valley value and the standard deviation on output corrugated, and draw face figure such as corrugated two dimension, 3 dimensional drawing and test interference image; Crystal growing apparatus is the small solution crystal growing apparatus, adopts the heating of air bath infrared lamp, and the temperature controller temperature-controlled precision is 0.1 ℃; Grown crystal is placed on the adjusting bracket; The seed crystal frame is made of organic glass, open the light path mouth that system is of a size of Φ 60mm circular window and aims at interferometer in growth cylinder one side, window seals the flatness λ of dull and stereotyped quartz glass/20 with the circular dull and stereotyped quartz glass of Φ 80mm * 14mm, in the depth of parallelism 1 ', smooth finish 40/20.
The employed system and device agent structure of the inventive method comprises laser instrument, beam expanding lens, Amici prism, collimator objective, spectroscope, image-forming objective lens, spatial filter, zooming system, reference planes mirror, cross-graduation plate, imageing sensor (CMOS) and charge-coupled device (CCD) and by seed crystal frame, grown crystal, thermopair, temperature controller, motor, silica glass window, adjusting bracket and heat lamp; The principle of work structure of its phase shift digital wavefront interferometer comprises parts such as imageing sensor, charge-coupled device, interferometer, piezoelectric ceramics (light intensity zoom and focusing), interferometer controller, image capture device, computing machine, display and monitor.
The inventive method at first switches to interferometer the adjustment state when realizing, adjust plane reference mirror and crystal growing apparatus the reflected light spot of plane reference mirror and the reflected light spot of plane of crystal are overlapped at the center of cross-graduation plate; Then interferometer is transferred to test mode, behind beam expanding lens, collimator objective, become parallel beam respectively by the laser that sends in the laser instrument, a parallel beam part reflects through the plane reference mirror, another part sees through the silica glass window on the crystal growing apparatus, fires back through the growing surface of crystal; The light that reflects through the plane reference mirror and interfered by the light that crystal growing surface reflects after image-forming objective lens and spatial filter are handled, removes the influence of parasitic light, and (CCD) becomes interference image on computer screen by charge-coupled device; After obtaining interference pattern, by analyzing the appearance structure that interference pattern obtains crystal growing surface; Phase factor in the light wave is writing down the information of light path, extracts the entrained phase information of light intensity from interference pattern, draws the distance that light wave is propagated; The plane reference mirror is made machinery by piezoelectric ceramics (PZT) control and is moved, and the phase-shift system of interferometer is made up of phase shifting control software, piezoelectric ceramics control card, driving power, piezoelectric ceramics etc.; When utilizing the computer software analysis interference image, interferometer changes the optical path difference of reference light by the plane of motion reference mirror, in real time, collect the multi-frame interferometry pattern automatically, through image pick-up card the light intensity interferogram is converted into the digitizing interferogram, restore the corrugated by computing machine according to movable phase interfere art mathematics physics model, the face shape on output corrugated is poor, and provides face figure such as corrugated two dimension intuitively, thereby obtains the appearance structure figure of crystal growing surface.
The present invention compared with prior art its principle of work is simple and reliable, device therefor automaticity height, and real-time monitored is effective, particularly can be with the comprehensive display message that converts to of crystal growing process, visual in image property is strong.
Description of drawings:
The system and device structural principle synoptic diagram of Fig. 1 during for real-time monitored of the present invention.
Fig. 2 is the structural principle block diagram of phase shift digital wavefront interferometer of the present invention.
Embodiment:
Also be described further in conjunction with the accompanying drawings below by embodiment.
Embodiment:
The basic ideas of present embodiment are to introduce the Feisuo interferometer in optical interference circuit, one of two reference planes mirrors in the Feisuo interferometer are replaced with crystal 14 surfaces of growing, allow the laser through reference planes mirror 9 and grown crystal 14 surface reflections interfere, make the information that comprises grown crystal 14 surfaces in the interference fringe, utilize the movable phase interfere technology to extract the crystal growing surface structural information again, obtain the circle of equal altitudes and the three-dimensional perspective on grown crystal 14 surfaces then by the computer software computational analysis; Present embodiment realizes that the system and device of real-time monitored comprises phase shift digital wavefront interferometer and crystal growing apparatus two parts; Wherein the phase shift digital wavefront interferometer is selected the horizontal phase shift digital wavefront interferometer of Feisuo type for use and adopts He-Ne laser instrument 1 that (λ=632.8nm), the collimated light beam bore is Φ 60mm; Optical quality λ/20 (P-V); It is automatically controlled switching that light path is switched between employing adjustment and the test; The charge-coupled device video camera selects for use high-resolution, high sensitivity, low noise universal; The equal thickness interferometer of piezoelectric ceramic actuator is housed on the reference planes mirror 9; Movable phase interfere adopts photoelectricity quantitative detection method, to several static interferogram samplings, through image pick-up card the light intensity interferogram is converted into digital interference pattern, restore the corrugated by computing machine according to the mathematics physics model of movable phase interfere, surface form deviation (optical path difference), peak-to-valley value and the standard deviation on output corrugated, and draw face figure such as corrugated two dimension, 3 dimensional drawing and test interference image; Crystal growing apparatus is the small solution crystal growing apparatus, adopts the heating of air bath infrared lamp, and the temperature-controlled precision of temperature controller 16 is 0.1 ℃; Grown crystal is placed on the adjusting bracket 19; Seed crystal frame 13 usefulness organic glass are made, open the light path mouth that system is of a size of the silica glass window 18 of Φ 60mm circle and aims at interferometer in growth cylinder one side, the circular dull and stereotyped quartz glass sealing of silica glass window 18 usefulness Φ 80mm * 14mm, flatness λ/20 of dull and stereotyped quartz glass, in the depth of parallelism 1 ', smooth finish 40/20.
The employed system and device agent structure of present embodiment method comprises laser instrument 1, beam expanding lens 2, Amici prism 3, collimator objective 4, spectroscope 5, image-forming objective lens 6, spatial filter 7, zooming system 8, reference planes mirror 9, cross-graduation plate 10, CMOS11 and video camera (CCD) 12 and by seed crystal frame 13, grown crystal 14, thermopair 15, temperature controller 16, motor 17, silica glass window 18, adjusting bracket 19 and heat lamp 20; The principle of work structure of its phase shift digital wavefront interferometer comprises parts such as CMOS11, video camera 12, interferometer 21, piezoelectric ceramics (light intensity zoom and focusing) 22, interferometer controller 23, image capture device 27, computing machine 24, display 25 and monitor 26.
During the invention process, at first dispose certain density saturated growth solution, solution is filtered bakingout process after, seed crystal is fixed on the seed crystal frame 13, according to the step of aqueous solution cooling method crystal growth, with crystal growth to certain size; At first start the phase shift digital wavefront interferometer when carrying out real-time monitored, parallel by the crosshair adjustment reference planes mirror of observing in the interferometer 9 with the silica glass window 18 on the crystal growing apparatus, then crystal is stopped operating, the plane of crystal that selection will be observed, adjustment makes it parallel with observation window, and seed crystal frame 13 and grower be fixed together, regulate the adjusting bracket 19 under the crystal growing apparatus again, make the reflected light of crystal growing surface and the reflected light of reference planes mirror 9 interfere, adjust interferometer and obtain steady and audible interference image, utilize the microstructure and the evolutionary process on the software records analyse crystal growth surface of computing machine.Present embodiment has provided a kind of systems approach and device that can be used for the crystal growth of interferometer observation, in actual applications, the needs that can test according to the observation design the crystal growing apparatus of other type, but the observation window of crystal growing apparatus must adopt high-quality quartz glass.
Claims (2)
1, a kind of real-time observation method of crystal growing surface microstructure, it is characterized in that introducing the Feisuo interferometer in optical interference circuit, one of two reference planes mirrors in the Feisuo interferometer are replaced with the plane of crystal of growing, laser through reference planes mirror and grown crystal surface reflection is interfered, make the information that comprises crystal growing surface in the interference fringe, utilize the movable phase interfere method to extract the crystal growing surface structural information again, obtain the circle of equal altitudes and the three-dimensional perspective of crystal growing surface then by the computer software computational analysis; The system and device of realizing real-time monitored comprises phase shift digital wavefront interferometer and crystal growing apparatus two parts; Wherein the phase shift digital wavefront interferometer is selected the horizontal phase shift digital wavefront interferometer of Feisuo type for use and is adopted the He-Ne laser instrument, and its collimated light beam bore is Ф 60mm; Optical quality λ/20 (P-V); It is automatically controlled switching that light path is switched between employing adjustment and the test; The equal thickness interferometer of piezoelectric ceramic actuator is housed on the reference planes mirror; Movable phase interfere adopts photoelectricity quantitative detection method, to several static interferogram samplings, through image pick-up card the light intensity interferogram is converted into digital interference pattern, restore the corrugated by computing machine according to the mathematics physics model of movable phase interfere, surface form deviation or optical path difference, peak-to-valley value and the standard deviation on output corrugated, and draw face figure such as corrugated two dimension, 3 dimensional drawing and test interference image; Crystal growing apparatus is the small solution crystal growing apparatus, adopts the heating of air bath infrared lamp, and the temperature controller temperature-controlled precision is 0.1 ℃; Grown crystal is placed on the adjusting bracket; The seed crystal frame is made of organic glass, open the light path mouth that system is of a size of Ф 60mm circular window and aims at interferometer in growth cylinder one side, window seals the flatness λ of dull and stereotyped quartz glass/20 with the circular dull and stereotyped quartz glass of Ф 80mm * 14mm, in the depth of parallelism 1 ', smooth finish 40/20.
2, the real-time observation method of crystal growing surface microstructure according to claim 1, at first interferometer is switched to the adjustment state when it is characterized in that realizing, adjust plane reference mirror and crystal growing apparatus the reflected light spot of plane reference mirror and the reflected light spot of plane of crystal are overlapped at the center of cross-graduation plate; Then interferometer is transferred to test mode, behind beam expanding lens, collimator objective, become parallel beam respectively by the laser that sends in the laser instrument, a parallel beam part reflects through the plane reference mirror, another part sees through the silica glass window on the crystal growing apparatus, fires back through the growing surface of crystal; The light that reflects through the plane reference mirror and interfered by the light that crystal growing surface reflects after image-forming objective lens and spatial filter are handled, removes the influence of parasitic light, becomes interference image by charge-coupled device on computer screen; After obtaining interference pattern, by analyzing the appearance structure that interference pattern obtains crystal growing surface; Phase factor in the light wave is writing down the information of light path, extracts the entrained phase information of light intensity from interference pattern, draws the distance that light wave is propagated; The plane reference mirror is made machinery by piezoelectric ceramics control and is moved, and the phase-shift system of interferometer is made up of phase shifting control software, piezoelectric ceramics control card, driving power, piezoelectric ceramics; When utilizing the computer software analysis interference image, interferometer changes the optical path difference of reference light by the plane of motion reference mirror, in real time, collect the multi-frame interferometry pattern automatically, through image pick-up card the light intensity interferogram is converted into the digitizing interferogram, restore the corrugated by computing machine according to movable phase interfere art mathematics physics model, the face shape on output corrugated is poor, and provides face figure such as corrugated two dimension intuitively, thereby obtains the appearance structure figure of crystal growing surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100154723A CN101561401B (en) | 2009-05-23 | 2009-05-23 | Real-time observation method of crystal growing surface microstructure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100154723A CN101561401B (en) | 2009-05-23 | 2009-05-23 | Real-time observation method of crystal growing surface microstructure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101561401A true CN101561401A (en) | 2009-10-21 |
| CN101561401B CN101561401B (en) | 2011-08-17 |
Family
ID=41220295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100154723A Expired - Fee Related CN101561401B (en) | 2009-05-23 | 2009-05-23 | Real-time observation method of crystal growing surface microstructure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101561401B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102425009A (en) * | 2011-11-29 | 2012-04-25 | 青岛大学 | KDP crystal all-dimension growing device |
| CN102634846A (en) * | 2012-04-25 | 2012-08-15 | 青岛大学 | In-situ microscopic observation device for KDP (potassium dihydrogen phosphate) crystal growth process |
| CN103091278A (en) * | 2012-08-28 | 2013-05-08 | 河北工业大学 | Method for detecting organic contamination on surface of large-sized silicon single crystal wafer by infrared mirror reflection |
| CN103575657A (en) * | 2012-07-27 | 2014-02-12 | 明达医学科技股份有限公司 | Optical measuring device |
| CN105177713A (en) * | 2015-08-07 | 2015-12-23 | 青岛大学 | Organic pyridinium salt crystal growth control method |
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN106524955A (en) * | 2016-12-16 | 2017-03-22 | 甘肃省计量研究院 | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness |
| CN106756863A (en) * | 2016-12-10 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | The method that heavy-calibre element film thickness uniformity is detected using fizeau interferometer |
| CN111043973A (en) * | 2019-12-12 | 2020-04-21 | 浙江大学 | Hydrogen isotope crystallization height and surface roughness interference measurement device and method |
| CN114280092A (en) * | 2020-09-28 | 2022-04-05 | 华南师范大学 | In-situ observation crystal growth method and observation device |
| CN117626412A (en) * | 2023-12-14 | 2024-03-01 | 中能兴盛(香河)机电设备有限公司 | Crystal growth control system and method applied to single crystal furnace |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2662803B1 (en) * | 1990-05-31 | 1992-09-04 | Aerospatiale | CRISTALLOGENESIS DEVICE AND INSTALLATION PROVIDED WITH MEANS OF OBSERVATION. |
| CN1049287C (en) * | 1998-01-20 | 2000-02-09 | 山东大学 | Method for real-time measuring crystal growth solid/liquid boundary and boundary layer structure |
| JP4000772B2 (en) * | 2000-12-19 | 2007-10-31 | Ｔｄｋ株式会社 | Seed crystal inspection method and single crystal manufacturing method |
| RU2197569C2 (en) * | 2001-01-25 | 2003-01-27 | Институт прикладной физики РАН | Facility to grow oriented and profiled crystals of kdr family from point seed and seed unit of facility |
| CN1160551C (en) * | 2001-05-27 | 2004-08-04 | 中国科学院安徽光学精密机械研究所 | Real-time measuring method of solid-liquid interface structure in high-temperature melt process of crystal growth and high-temperature heating stage |
| CN100585028C (en) * | 2008-06-13 | 2010-01-27 | 青岛大学 | Inverse-conical dropped bottom type crystal growth apparatus |
-
2009
- 2009-05-23 CN CN2009100154723A patent/CN101561401B/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102425009B (en) * | 2011-11-29 | 2014-03-26 | 青岛大学 | KDP crystal all-dimension growing device |
| CN102425009A (en) * | 2011-11-29 | 2012-04-25 | 青岛大学 | KDP crystal all-dimension growing device |
| CN102634846A (en) * | 2012-04-25 | 2012-08-15 | 青岛大学 | In-situ microscopic observation device for KDP (potassium dihydrogen phosphate) crystal growth process |
| CN103575657A (en) * | 2012-07-27 | 2014-02-12 | 明达医学科技股份有限公司 | Optical measuring device |
| CN103575657B (en) * | 2012-07-27 | 2016-09-07 | 明达医学科技股份有限公司 | Optical measuring device |
| CN103091278A (en) * | 2012-08-28 | 2013-05-08 | 河北工业大学 | Method for detecting organic contamination on surface of large-sized silicon single crystal wafer by infrared mirror reflection |
| CN105177713B (en) * | 2015-08-07 | 2018-05-08 | 青岛大学 | A kind of organic pyridinium salt crystal growth control method |
| CN105177713A (en) * | 2015-08-07 | 2015-12-23 | 青岛大学 | Organic pyridinium salt crystal growth control method |
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN105675262B (en) * | 2016-01-14 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | The high depth of parallelism wavefront of optical components detection device of heavy caliber |
| CN106756863B (en) * | 2016-12-10 | 2019-01-29 | 中国科学院长春光学精密机械与物理研究所 | Utilize the method for fizeau interferometer detection heavy-calibre element film thickness uniformity |
| CN106756863A (en) * | 2016-12-10 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | The method that heavy-calibre element film thickness uniformity is detected using fizeau interferometer |
| CN106524955A (en) * | 2016-12-16 | 2017-03-22 | 甘肃省计量研究院 | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness |
| CN111043973A (en) * | 2019-12-12 | 2020-04-21 | 浙江大学 | Hydrogen isotope crystallization height and surface roughness interference measurement device and method |
| CN114280092A (en) * | 2020-09-28 | 2022-04-05 | 华南师范大学 | In-situ observation crystal growth method and observation device |
| CN114280092B (en) * | 2020-09-28 | 2023-07-28 | 华南师范大学 | In-situ observation crystal growth method and observation device |
| CN117626412A (en) * | 2023-12-14 | 2024-03-01 | 中能兴盛(香河)机电设备有限公司 | Crystal growth control system and method applied to single crystal furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101561401B (en) | 2011-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101561401B (en) | Real-time observation method of crystal growing surface microstructure | |
| US4948253A (en) | Interferometric surface profiler for spherical surfaces | |
| CN108917943B (en) | Flame temperature field measuring device and method based on projection type background schlieren technology | |
| US4869593A (en) | Interferometric surface profiler | |
| Zhang et al. | Phase measuring deflectometry for obtaining 3D shape of specular surface: a review of the state-of-the-art | |
| CN102494623B (en) | Measuring method of non-contact measuring device of center to center distance of lens optical surfaces | |
| US8873068B2 (en) | Low coherence interferometric system for phase stepping shearography combined with 3D profilometry | |
| CN103727891B (en) | Synchronize three-dimensional speckle interferometer measuration system and measuring method | |
| CN201569419U (en) | Rapid surface quality measuring device | |
| US5218424A (en) | Flying height and topography measuring interferometer | |
| JP2011513703A (en) | Apparatus and method for measuring surface topography of an object | |
| CN103162616B (en) | For microsphere surface morphology detect instantaneous phase-shifting interference measuring instrument and adopt this measuring instrument to realize the measuring method of microsphere surface morphology | |
| Tiziani et al. | From speckle pattern photography to digital holographic interferometry | |
| CN103196361A (en) | Short coherence instantaneous phase-shifting interferometer and measuring method for microsphere surface morphology rapid detection | |
| Joenathan et al. | Novel temporal Fourier transform speckle pattern shearing interferometer | |
| KR20210048528A (en) | Surface shape measurement device and surface shape measurement method | |
| Yan et al. | Spatial phase-shift digital shearography for simultaneous measurements in three shearing directions based on adjustable aperture multiplexing | |
| Tereschenko et al. | Vibration compensated high-resolution scanning white-light Linnik-interferometer | |
| US5004345A (en) | Dual-lens shearing interferometer | |
| An | Industrial applications of speckle techniques | |
| CN115541602B (en) | Product defect detection method | |
| US10598604B1 (en) | Normal incidence phase-shifted deflectometry sensor, system, and method for inspecting a surface of a specimen | |
| Zhao et al. | Simultaneous trishearing digital shearography for nondestructive testing | |
| Vishnyakov et al. | Automated Interference Tools of the All-Russian Research Institute for Optical and Physical Measurements | |
| CN112630232B (en) | Method and device for detecting defects of inner surface and outer surface of differential confocal fixed-surface interference target pill |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110817 Termination date: 20120523 |