CN103575657B - Optical measuring device - Google Patents
Optical measuring device Download PDFInfo
- Publication number
- CN103575657B CN103575657B CN201310237895.6A CN201310237895A CN103575657B CN 103575657 B CN103575657 B CN 103575657B CN 201310237895 A CN201310237895 A CN 201310237895A CN 103575657 B CN103575657 B CN 103575657B
- Authority
- CN
- China
- Prior art keywords
- optical
- module
- measurement
- optics
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 203
- 238000005259 measurement Methods 0.000 claims abstract description 82
- 238000012545 processing Methods 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims description 9
- 239000000084 colloidal system Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000000741 silica gel Substances 0.000 claims description 2
- 229910002027 silica gel Inorganic materials 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 1
- 230000035515 penetration Effects 0.000 abstract 4
- 238000001514 detection method Methods 0.000 description 25
- 238000010586 diagram Methods 0.000 description 14
- 238000002310 reflectometry Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004441 surface measurement Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Abstract
The invention provides an optical measuring device for measuring the surface characteristics of an object, which comprises an optical penetration module, an optical measuring module and a data processing module. The optical penetration module is arranged in front of the object and has at least one optical coefficient. The optical measurement module transmits at least one optical signal to penetrate through the optical penetration module and emit to the surface of the object, the optical signal reflected by the surface penetrates through the optical penetration module to form a feedback signal, and the optical measurement module receives the feedback signal. The data processing module is coupled to the optical measurement module, wherein the data processing module obtains the surface characteristic according to the feedback signal and at least one optical coefficient.
Description
Technical field
The present invention is about a kind of optical measuring device；Specifically, the present invention is can be applied to tool height about one
Reflective objects also reduces the optical measuring device of measure error.
Background technology
Non-damaged data (Nondestructive Testing, NDT) is for the purpose of not destroying determinand, passes through sound
Medium (Medium) the detection objects such as sound, electric wave, magnetic force, light.Additionally, non-damaged data has the most directly touches determinand
Advantage, be not only applicable to building and accurate industry, be more widely used by raw doctor field.It is said that in general, non-damaged data bag
Containing ultrasonic detection, the detection of magnetic grain, infrared detection, detections of radar, optical detection or other detections.It practice, part detection
Mode is the most perfect, seems that vectorial capacity is not enough, the degree of accuracy is the highest, detection range is limited.
In a practical situation, optical detection is great expansionary, it is sufficient to make up disadvantages mentioned above.Additionally, research staff constantly changes
Good optical detection apparatus, it is desirable to promote detection quality, and then expand fields of measurement.In Jin Yibu, optical detection is non-except having
Outside destructive detection and the instant advantage measured, more for pinpoint accuracy.Specifically, optical interference detection be for existing often
By method, by optical path difference characteristic to carry out various accurate measurement.
But, it is originally intended to the optical interference detection device of raw doctor's detection when industrial circle, because determinand has high anti-
Penetrate rate, be difficult to printing opacity or the most light tight, often improve the degree of difficulty of measurement, produce bigger measure error.Summary is all
Multifactor, how to design with pinpoint accuracy the optical detection apparatus that is applicable to various determinand, enable in particular to measure tool
The optical detection apparatus of high reflectance determinand, for the main contributions of the present invention.
Summary of the invention
Because above-mentioned problem of the prior art, the present invention proposes a kind of can be used in metal object and promote detection yield
Optical measuring device.
On the one hand in, the present invention provides a kind of to be had optics and penetrates the optical measuring device of module, it is possible to decrease measure error.
In on the one hand, the present invention provides the optical measuring device of a kind of adjustable measurement pattern, to promote detection yield.
In on the other hand, the present invention provides a kind of optical measuring device reducing light reflectivity, it is possible to measure height reflection
Rate determinand.
It is an aspect of the invention to provide a kind of optical measuring device, for measuring the surface characteristic of object, especially
Comprise the object on highly reflective surface.Optical measuring device comprises optics and penetrates module, optical measurement module and data process mould
Block.
It should be noted that, optics penetrates module and is arranged at the front of object and has at least one optical coefficient.Optical measurement
Module transmits at least one optical signal and penetrates optics and penetrate module and be incident upon the surface of object, and surface-reflected after at least one light
Signal penetrates optics and penetrates module and form feedback signal, and optical measurement module is received back to feedback signal.Data processing module couples
In optical measurement module, wherein data processing module obtains surface characteristic according to feedback signal and at least one optical coefficient.
In actual applications, optical measuring device comprises control module further, and wherein control module is coupled at data
Reason module penetrates module with optics, determines measurement pattern according to surface characteristic.In other words, control module can regard the surface of object
Situation changes the mode measured, to determine optimized measurement pattern.It should be noted that optics penetrates module and has different
Optical coefficient, and control module can export suitable measurement pattern according to known optical coefficient and the feedback signal recorded.
Compared to prior art, it is to utilize optics to penetrate module there is at least one light according to the optical measuring device of the present invention
Learn coefficient, and control module comparison feedback signal and optical coefficient are to obtain surface characteristic.Additionally, optical measuring device passes through light
Penetrate module and control intensity of reflected light, therefore can measure the determinand on tool highly reflective surface.In actual applications, optics is surveyed
Amount device, according to surface characteristic, not only can selectively change measurement pattern, effectively carry out optimized metering system, therefore can
Measure the body surface of various reflectivity.
Can be described in detail by invention below about the advantages and spirit of the present invention and institute's accompanying drawings obtains further
Solve.
Accompanying drawing explanation
Fig. 1 is the embodiment schematic diagram of the optical measuring device of the present invention；
Fig. 2 is the embodiment schematic diagram of the optical measurement module of the present invention；
Fig. 3 is another embodiment schematic diagram of the optical measuring device of the present invention；
Fig. 4 is another embodiment schematic diagram of the optical measuring device of the present invention；
Fig. 5 is another embodiment schematic diagram that the optics of the present invention penetrates module；
Fig. 6 is another embodiment schematic diagram of the optical measuring device of the present invention；
Fig. 7 is another embodiment schematic diagram of the optical measuring device of the present invention.
Main element symbol description:
1,1A～1D: optical measuring device 700: rotary shaft
2: object
10,10A: optics penetrates module
20: optical measurement module
22: surface
30: data processing module
40: control module
50: optical signal
50A: the first optical signal
50B: the second optical signal
51B: the second optical path difference signal
60: mobile module
70: rotating module
110: optical layers
120A: Flow Optical layer
120B: colloid optics layer
120C: thin film optical layer
210: spectrophotometric unit
220: optical path difference unit
Detailed description of the invention
A specific embodiment according to the present invention, it is provided that a kind of optical measuring device, for measuring the surface characteristic of object.
In this embodiment, optical measuring device can be optical surface measurement apparatus, especially optical interdferometer surface sensing device.
Refer to the embodiment schematic diagram of the optical measuring device 1 that Fig. 1, Fig. 1 are the present invention.As it is shown in figure 1, optical measurement
Device 1 comprises optics and penetrates module 10, optical measurement module 20 and data processing module 30.In this embodiment, optics penetrates
Module 10 is arranged at the front of object 2 and has at least one optical coefficient.It should be noted that, object 2 is for measuring object.As for thing
The kind of body 2, can be arbitrary objects, especially comprise the object on highly reflective surface, comprise metal, organism, plant, life
Sundries official, there is no specific restriction.In other words, optics penetrates module 10 can reduce the reflected light signal intensity of object 2, therefore
The surface characteristic on highly reflective surface can be measured.In a practical situation, optics penetrate module 10 to arrange position the most adjacent
Or be in close proximity to the surface 22 of object 2, but it is not limited.It should be noted that, what optics penetrated module 10 is preferably selected from light transmission
Material, including but not limited to any combination of acrylic, plastics, glass, silica gel, photoresist and above-mentioned material.Additionally, at least
One optical coefficient comprises penetrating coefficient, absorption coefficient, reflectance factor or a combination thereof.For example, if penetrating coefficient, its between
Between 0 to 0.99, preferably between 0.1 to 0.75, but it is not limited.
In actual applications, optical measurement module 20 transmits at least one optical signal and penetrates optics and penetrate module 10 and be incident upon thing
The surface 22 of body 2, and at least one optical signal after surface 22 is reflected penetrates optics and penetrates module 10 and form feedback signal, light
Learn measurement module 20 and be received back to feedback signal.As it is shown in figure 1, data processing module 30 is coupled to optical measurement module 20, wherein count
Surface characteristic is obtained according to feedback signal and at least one optical coefficient according to processing module 30.In other words, optical measuring device 1 passes through
Data processing module 30 compares the relation of feedback signal and optical coefficient, and then calculates the surface characteristic result of object 2.It is worth note
Meaning, surface characteristic can be surface profile, roughness, each skin depth or thickness.
It should be noted that optical measurement module 20 can be any form of optical measuring device, comprise optical interference
Instrument, near field optic frequency microscope, optical spectrometers, wherein light source can be LASER Light Source, LED source, infrared ray
Source.In this embodiment, optical measurement module 20 is optical interdferometer measurement apparatus, but is not limited with this example.
Refer to the embodiment schematic diagram of the optical measurement module 20 that Fig. 2, Fig. 2 are the present invention.As in figure 2 it is shown, optics is surveyed
Amount module 20 comprises spectrophotometric unit 210 and optical path difference unit 220.For example, spectrophotometric unit 210 is by least one optical signal 50 points
Being the first optical signal 50A and the second optical signal 50B, wherein the first optical signal 50A penetrates optics and penetrates module 10 and be incident upon surface
22 to produce the first reflected light signal.In a practical situation, spectrophotometric unit 210 can be any form of beam splitter, such as
Spectroscope or prism, there is no specific restriction.Additionally, the second optical signal 50B is incident upon optical path difference unit 220 to produce the second light
Path difference signal 51B, the second optical path difference signal 51B penetrate optics and penetrate module 10 and be incident upon surface 22 to produce the second reflection light letter
Number, and the first reflected light signal and the second reflected light signal penetrate optics and penetrate module 10 to form feedback signal.It should be noted that
It is that optical path difference unit 220 is in order to produce the phase difference of optical signal, by the optical signal of out of phase difference to form interference, and then
Reach to measure the effect on surface.Additionally, optical path difference unit 220 can be liquid crystal cell, electric driven color-changing part, piezoelectric element, partially
Shake any combination of element or above-mentioned material, but be not limited.
In other words, optical measurement module 20 uses spectrophotometric unit 210 carry out light splitting and produced by optical path difference unit 220
Optical path difference, and by the first reflected light signal and the second reflected light signal to form feedback signal, and then obtain the surface of object 2
Characteristic.It should be noted that, in Fig. 2, optical measurement module 20 is to carry out surface measurement based on optical path difference characteristic.But, real at other
Executing in example, optical measurement module 20 can use different optical characteristics to reach to measure the effect on surface, there is no specific restriction.
In other embodiments, optical measurement module 20 can be the optical interference module being originally intended to raw doctor's detection, it is possible to
Measure the determinand comprising high light transmittance surface.For example, above-mentioned determinand can be the to be measured of eyes or other easy printing opacities
Thing.But, if optical measuring device 1 only uses optical measurement module 20, measurement comprises high reflectance surface, is difficult to printing opacity or complete
During complete lighttight determinand, measurement result easily produces error.In Jin Yibu, optical measuring device 1 is to be worn by optics
Module 10 reduces intensity of reflected light, to have the measurement result of high accuracy thoroughly.Additionally, the optics of the present invention penetrates module 10 energy
Enough directly apply to general biomedical detection device or general printing opacity tissue detection device, not only need not significantly revise above-mentioned detection dress
The measurement structure put, has more and reduces cost and improve effect of easy-to-use degree.
Refer to another embodiment schematic diagram of the optical measuring device 1A that Fig. 3, Fig. 3 are the present invention.As it is shown on figure 3, light
Learning measurement apparatus 1A and comprise control module 40 further, wherein control module 40 is coupled to data processing module 30 and penetrates with optics
Module 10, determines measurement pattern according to surface characteristic.In a practical situation, the mode of decision measurement pattern can be manual measurement
Or automatically measure.For example, user can Non-follow control measurement pattern, or according to measure surface characteristic result and hand
Dynamic control measurement pattern.Additionally, optical measuring device 1A can be determined according to the surface characteristic measured automatically by control module 40
Determine measurement pattern.In this embodiment, measurement pattern is including but not limited to plane survey pattern and measurement in space pattern, and above-mentioned
Measurement pattern preferred application is in large-area surface.Additionally, control module 40 can adjust optical property according to surface characteristic.Change
Yan Zhi, optical measuring device 1A can adjust optics by control module penetrate the light of module 10 according to the optical characteristics on surface
Learn structure, to provide more suitably metering system.
Fig. 4 is another embodiment schematic diagram of the optical measuring device of the present invention.As shown in Figure 4, optical measuring device 1B
Optics penetrate module 10A and comprise at least one optical layers 110, each of which optical layers 110 is respectively provided with at least one optical system
Number, and control module 40 is according to surface characteristic control or adjustment at least one optical layers 110.In reality is applied, at least one optics
Layer 110 comprises Flow Optical layer, thin film optical layer, colloid optics layer, Solid-state Optics layer or a combination thereof.In Jin Yibu, optics
Measurement apparatus 1B can select to use suitable optical layers 110 according to the surface characteristic to be measured, each of which optical layers 110
There is different optical characteristics.In citing, additionally, each optical layers 110 can be stratiform housing, and enclosure interior tool
Having accommodation space, wherein accommodation space can house fluid, solid, colloid or a combination thereof, to form optical layers of different nature
110。
For example, as shown in Figure 4, fluid and colloid are respectively contained in different optical layers 110 to form Flow Optical
Layer 120A and colloid optics layer 120B, wherein Flow Optical layer 120A and colloid optics layer 120B has different optical coefficients.
In other words, when optical measuring device 1B measures surface 22, according to feedback signal and optical coefficient found that exceed measurement model
Enclose, seem that reflectivity is too high, absorptivity is too high, then control module 40 manually adjusts according to surface characteristic or automatically adjusts optical layers
110.It should be noted that, the optical coefficient of optical layers 110 comprises penetrating coefficient, absorption coefficient, reflectance factor or a combination thereof.Citing
For, in this embodiment, the scope of penetrating coefficient is between 0.01～0.99；If the reflectivity of object 2 is too high and exceedes
The measurement scope of optical measuring device 1B, then control module 40 adjusts optical layers 110, to provide the relatively low penetrating coefficient of tool (to seem
0.3) optical layers 110, and then obtain measurement result.
In other embodiments, optics penetrates module and conformal in the way of attaching or being coated with can be covered in surface.In other words,
Optics penetrates the geometry exterior contour tool common shape of module and surface.Refer to the optics spigot die that Fig. 5, Fig. 5 are the present invention
Another embodiment schematic diagram of block；As it is shown in figure 5, optics penetrates module comprises thin film optical layer 120C, wherein thin film optical layer
120C is conformal to be covered in surface 22 in the way of attaching.In other words, thin film optical layer 120C is by being attached at surface 22, not only
Optics is greatly decreased and penetrates the gap of module and object 2 to avoid air impact to measure, more can improve the degree of accuracy of measurement.This
Outward, when thin film optical layer 120C or other types optical layers are covered in surface 22, for optical measuring device 1, film
Optical layers 120C and object 2 are simulated in the measurement object having several organized layers.In other words, the optical coefficient of thin film optical layer 120C
For known parameters, optical measuring device 1 can deduct the optical coefficient of thin film optical layer 120 to obtain the surface characteristic of object 2.
Refer to another embodiment schematic diagram of the optical measuring device that Fig. 6, Fig. 6 are the present invention.As shown in Figure 6, optics
Measurement apparatus 1C comprises mobile module 60 further, and wherein mobile module 60 is coupled to optical measurement module 20 and control module
40.In this embodiment, mobile module 60 is further connected to optics and penetrates module 10.In a practical situation, mobile module 60 is permissible
It is electric sliding rail group, electric carrier or other electronic mobile devices, there is no specific restriction.In a practical situation, optical measurement
The module 10 that penetrates module 20 and optics need to move to measure the surface of larger area.In this embodiment, if control module 40 institute
The measurement pattern determined is plane survey pattern, and control module 40 output plane measurement pattern, to mobile module 60, makes optics survey
Amount module 20 and optics penetrate module 10 and move along surface 22 and carry out plane survey for surface 22.For example, mobile
Module 60 can connect and drive optical measurement module 20 and optics to penetrate module 10 to move, and is exported by control module 40 simultaneously
Plane survey pattern, so that optical measurement module 20 is along with the displacement of mobile module 60 is to measure the zones of different on surface.Compare
In other optical measuring devices, optical measuring device 1C can be moved by mobile module 60, can carry out one-dimensional direction
Scan measurement, more can carry out perfect measurement for large-area surface.
Refer to another embodiment schematic diagram of the optical measuring device that Fig. 7, Fig. 7 are the present invention.As it is shown in fig. 7, optics
Measurement apparatus 1D comprises rotating module 70, and wherein rotating module 70 is coupled to control module 40 and has rotary shaft 700.Need explanation
, rotary shaft 700 is connected to object 2.Specifically, rotary shaft can be connected to clamping, snap fit or other snap fit
Object 2, there is no specific restriction.If additionally, the measurement pattern that control module 40 is determined is measurement in space pattern, control module
40 output measurement in space patterns rotarily drive object 2 to rotating module 70, the rotary shaft 700 of rotating module 70 so that optics is surveyed
Amount module 20 carries out measurement in space for surface 22.Relative to optical measuring device 1～1C, optical measuring device 1D can be carried out
Scan measurement, the more surface 22 for object 2 on a large scale and carry out the measurement in multiple region.
Compared to prior art, it is to utilize optics to penetrate module there is at least one light according to the optical measuring device of the present invention
Learn coefficient, and control module comparison feedback signal and optical coefficient are to obtain surface characteristic.In actual applications, optical measurement dress
Put according to surface characteristic, not only can selectively change measurement pattern, effectively carry out optimized metering system, therefore can measure
The body surface of various reflectivity.
By the above detailed description of preferred embodiments, it is intended to more clearly describe inventive feature and spirit,
And not with above-mentioned disclosed preferred embodiment, scope of the invention is any limitation as.On the contrary, its objective is to wish
Prestige can be contained in the category being arranged in the scope of the claims that the present invention to be applied for of various change and tool equality.
Claims (7)
1. an optical measuring device, for measuring a surface characteristic of an object, it is characterised in that this optical measuring device bag
Contain:
One optics penetrates module, and the conformal surface being covered in this object of mode that attaches or be coated with also has at least one optical system
Number；
One optical measurement module, transmission at least one optical signal penetrates this optics and penetrates module and be incident upon a surface of this object, and
This at least one optical signal after this surface is reflected penetrates this optics and penetrates module and form a feedback signal, this optical measurement mould
Block receives this feedback signal, and this optical measurement module comprises:
One spectrophotometric unit, is divided into one first optical signal and one second optical signal, wherein this first light letter by this at least one optical signal
Number penetrating this optics penetrates module and is incident upon this surface to produce one first reflected light signal；And
One optical path difference unit, wherein this second optical signal is incident upon this optical path difference unit to produce one second optical path difference signal, and this is years old
Two optical path difference signals penetrate this optics and penetrate module and be incident upon this surface to produce one second reflected light signal, and this first reflection
Optical signal and this second reflected light signal penetrate this optics and penetrate module to form this feedback signal；
One data processing module, is coupled to this optical measurement module, and wherein this data processing module according to this feedback signal and is somebody's turn to do
At least one optical coefficient obtains this surface characteristic；And
One control module, is coupled to this data processing module and penetrates module with this optics, determine a measurement according to this surface characteristic
Pattern and/or adjust this optical coefficient.
2. optical measuring device as claimed in claim 1, it is characterised in that this optics penetrates module and comprises:
At least one optical layers, this at least one optical layers is respectively provided with this at least one optical coefficient, and this control module is according to this table
Face Characteristics Control or adjust this at least one optical layers.
3. optical measuring device as claimed in claim 2, it is characterised in that this at least one optical layers comprises a Flow Optical
Layer, a thin film optical layer, colloid optical layers, Solid-state Optics layer or an a combination thereof.
4. optical measuring device as claimed in claim 1, it is characterised in that this optics penetrates the material of module selected from sub-gram
Any combination of power, plastics, glass, silica gel, photoresist and above-mentioned material.
5. optical measuring device as claimed in claim 1, it is characterised in that this at least one optical coefficient comprise penetrating coefficient,
Absorption coefficient, reflectance factor or a combination thereof.
6. optical measuring device as claimed in claim 1, it is characterised in that this optical measuring device comprises further:
One mobile module, is coupled to this optical measurement module and this control module, if this measurement mould that this control module is determined
Formula is a plane survey pattern, and this control module exports this plane survey pattern to this mobile module, makes this optical measurement module
Move along this surface and carry out plane survey for this surface.
7. optical measuring device as claimed in claim 1, it is characterised in that this optical measuring device comprises further:
One rotating module, is coupled to this control module and has a rotary shaft, and wherein this rotary shaft is connected to this object, if this control
This measurement pattern that molding block is determined is a measurement in space pattern, and this control module exports this measurement in space pattern to this rotation
Module, this rotary shaft of this rotating module rotarily drives this object so that this optical measurement module carries out one for this surface and stands
Bulk measurement.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101127229A TWI475210B (en) | 2012-07-27 | 2012-07-27 | Optical detection apparatus |
| TW101127229 | 2012-07-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103575657A CN103575657A (en) | 2014-02-12 |
| CN103575657B true CN103575657B (en) | 2016-09-07 |
Family
ID=50047903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310237895.6A Expired - Fee Related CN103575657B (en) | 2012-07-27 | 2013-06-17 | Optical measuring device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103575657B (en) |
| TW (1) | TWI475210B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588492B (en) * | 2015-02-06 | 2017-06-21 | 財團法人國家實驗研究院 | Near-field array detection method for detecting optically high scatter material |
| US9835449B2 (en) | 2015-08-26 | 2017-12-05 | Industrial Technology Research Institute | Surface measuring device and method thereof |
| TWI705243B (en) * | 2019-08-30 | 2020-09-21 | 海華科技股份有限公司 | Detecting method for high transmittance glass and glass detection apparatus by excitation |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998053733A1 (en) * | 1997-05-26 | 1998-12-03 | Hitachi, Ltd. | Inspection apparatus using optical interferometer |
| CN201247199Y (en) * | 2008-06-17 | 2009-05-27 | 苏州大学 | Non-linear 4f phase coherent imaging apparatus for measuring optics |
| CN101561401A (en) * | 2009-05-23 | 2009-10-21 | 青岛大学 | Real-time observation method of crystal growing surface microstructure |
| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
| JP2012002631A (en) * | 2010-06-16 | 2012-01-05 | Mitsutoyo Corp | Optical interference measurement device and shape measurement device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004017232A1 (en) * | 2004-04-05 | 2005-10-20 | Bosch Gmbh Robert | Interferometric measuring device |
| JP2006266687A (en) * | 2005-03-22 | 2006-10-05 | Advanced Mask Inspection Technology Kk | Sample inspection device and sample inspection method |
| US20070291277A1 (en) * | 2006-06-20 | 2007-12-20 | Everett Matthew J | Spectral domain optical coherence tomography system |
-
2012
- 2012-07-27 TW TW101127229A patent/TWI475210B/en active
-
2013
- 2013-06-17 CN CN201310237895.6A patent/CN103575657B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998053733A1 (en) * | 1997-05-26 | 1998-12-03 | Hitachi, Ltd. | Inspection apparatus using optical interferometer |
| CN201247199Y (en) * | 2008-06-17 | 2009-05-27 | 苏州大学 | Non-linear 4f phase coherent imaging apparatus for measuring optics |
| CN101561401A (en) * | 2009-05-23 | 2009-10-21 | 青岛大学 | Real-time observation method of crystal growing surface microstructure |
| JP2012002631A (en) * | 2010-06-16 | 2012-01-05 | Mitsutoyo Corp | Optical interference measurement device and shape measurement device |
| CN102288105A (en) * | 2011-07-22 | 2011-12-21 | 大连民族学院 | Structure and detection method of optical fiber point-diffraction interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103575657A (en) | 2014-02-12 |
| TWI475210B (en) | 2015-03-01 |
| TW201405115A (en) | 2014-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102083359B (en) | Photoacoustic measurement apparatus | |
| CN106735864A (en) | The vibration mirror scanning laser processing and device of coaxial real-time detection | |
| CN103575657B (en) | Optical measuring device | |
| CN104076002A (en) | Information acquiring apparatus and information acquiring method of acquiring information of sample by using terahertz wave | |
| CN107421915A (en) | A kind of living cells based on terahertz time-domain decay total reflection spectrum monitors experimental method in real time | |
| CN105043531B (en) | Sound field measuring device and method | |
| CN103884298B (en) | Metal Surface Roughness based on guided mode measures system and method | |
| CN111288902A (en) | Double-field-of-view optical coherence tomography imaging system and material thickness detection method | |
| CN104422702A (en) | Method for detecting cornea moisture based on terahertz | |
| CN111536885B (en) | Double-incidence-angle type terahertz time-domain spectral coating measuring method | |
| KR20170005963A (en) | performance measuring system for ultrasonic transducers | |
| CN109725302A (en) | For being directed at the method and system of Terahertz sensing system | |
| US9494505B2 (en) | Scanning non-contact surface microrheometer | |
| CN105758297B (en) | Parallel institution formula coordinate measuring set | |
| CN206848170U (en) | Angle scanning type SPR sensor system | |
| CN104634759A (en) | High-frequency terahertz scattering testing device, high-frequency terahertz scattering testing method and high-frequency terahertz scattering analysis method | |
| CN207163909U (en) | A kind of living cells based on terahertz time-domain decay total reflection spectrum monitors experimental provision in real time | |
| CN102809550A (en) | Continuous spectrum two-way transmission distribution function measuring device | |
| Quan et al. | Photoacoustic generation in liquids with low optical absorption | |
| CN103278475B (en) | Measuring device and method of transparent medium refractive index | |
| CN109781241A (en) | A kind of device and method based on optoacoustic effect high-acruracy survey ultrasound field distribution | |
| RU2479833C2 (en) | Localisation method of non-homogeneities of metal surface in infrared radiation | |
| CN203745360U (en) | Micro-cantilever deflection scanning system of micro-cantilever array sensor based on multi-angle planar transmission mirrors | |
| CN107121091A (en) | A kind of profile scan measurement apparatus based on PSD | |
| CN111256604A (en) | Reflection type online coating thickness gauge |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160907 Termination date: 20200617 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |