CN101557938B - 具有改进的腔室壁的液体喷射器及其制作方法 - Google Patents

具有改进的腔室壁的液体喷射器及其制作方法 Download PDF

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Publication number
CN101557938B
CN101557938B CN2007800460643A CN200780046064A CN101557938B CN 101557938 B CN101557938 B CN 101557938B CN 2007800460643 A CN2007800460643 A CN 2007800460643A CN 200780046064 A CN200780046064 A CN 200780046064A CN 101557938 B CN101557938 B CN 101557938B
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CN
China
Prior art keywords
liquid
chamber
nozzle plate
organic material
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007800460643A
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English (en)
Chinese (zh)
Other versions
CN101557938A (zh
Inventor
J·A·勒本斯
L·G·香塔拉马
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
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Publication date
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Publication of CN101557938A publication Critical patent/CN101557938A/zh
Application granted granted Critical
Publication of CN101557938B publication Critical patent/CN101557938B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CN2007800460643A 2006-12-12 2007-12-04 具有改进的腔室壁的液体喷射器及其制作方法 Expired - Fee Related CN101557938B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/609,365 US7600856B2 (en) 2006-12-12 2006-12-12 Liquid ejector having improved chamber walls
US11/609,365 2006-12-12
PCT/US2007/024836 WO2008073242A2 (en) 2006-12-12 2007-12-04 Liquid ejector having improved chamber walls

Publications (2)

Publication Number Publication Date
CN101557938A CN101557938A (zh) 2009-10-14
CN101557938B true CN101557938B (zh) 2011-08-10

Family

ID=39133827

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800460643A Expired - Fee Related CN101557938B (zh) 2006-12-12 2007-12-04 具有改进的腔室壁的液体喷射器及其制作方法

Country Status (5)

Country Link
US (1) US7600856B2 (enExample)
EP (1) EP2089231A2 (enExample)
JP (1) JP5139444B2 (enExample)
CN (1) CN101557938B (enExample)
WO (1) WO2008073242A2 (enExample)

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EP1893410B1 (en) * 2005-05-31 2016-11-30 Sicpa Holding Sa Nozzle plate for an ink jet print head comprising stress relieving elements
US7669967B2 (en) 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7605009B2 (en) * 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
US7938974B2 (en) * 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US7794613B2 (en) * 2007-03-12 2010-09-14 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US8012363B2 (en) 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
US20090233386A1 (en) * 2008-03-12 2009-09-17 Yimin Guan Method for forming an ink jetting device
US8173030B2 (en) 2008-09-30 2012-05-08 Eastman Kodak Company Liquid drop ejector having self-aligned hole
US8110117B2 (en) * 2008-12-31 2012-02-07 Stmicroelectronics, Inc. Method to form a recess for a microfluidic device
JP5359642B2 (ja) * 2009-07-22 2013-12-04 東京エレクトロン株式会社 成膜方法
US20110043555A1 (en) * 2009-08-20 2011-02-24 Yonglin Xie Drop ejection method through multi-lobed nozzle
US8205338B2 (en) * 2009-08-20 2012-06-26 Eastman Kodak Company Method of making a multi-lobed nozzle
US8267501B2 (en) * 2009-08-20 2012-09-18 Eastman Kodak Company Drop ejector having multi-lobed nozzle
US8449086B2 (en) 2011-03-30 2013-05-28 Eastman Kodak Company Inkjet chamber and inlets for circulating flow
US9403365B2 (en) * 2011-04-29 2016-08-02 Funai Electric Co., Ltd. Method for fabricating fluid ejection device
US20120274707A1 (en) * 2011-04-29 2012-11-01 Xiaorong Cai Ejection devices for inkjet printers and method for fabricating ejection devices
US20130186301A1 (en) 2012-01-24 2013-07-25 Thomas Nelson Blanton Ink having antibacterial and antifungal protection
US20130189499A1 (en) 2012-01-24 2013-07-25 Thomas Nelson Blanton Antibacterial and antifungal protection for ink jet image
US20130082028A1 (en) * 2011-09-30 2013-04-04 Emmanuel K. Dokyi Forming a planar film over microfluidic device openings
US20130083126A1 (en) * 2011-09-30 2013-04-04 Emmanuel K. Dokyi Liquid ejection device with planarized nozzle plate
US20130237661A1 (en) 2011-12-22 2013-09-12 Thomas B. Brust Inkjet ink composition
JP6041527B2 (ja) * 2012-05-16 2016-12-07 キヤノン株式会社 液体吐出ヘッド
JP5740371B2 (ja) * 2012-09-11 2015-06-24 東芝テック株式会社 インクジェットヘッド
JP6095315B2 (ja) 2012-10-02 2017-03-15 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5972139B2 (ja) * 2012-10-10 2016-08-17 キヤノン株式会社 液体吐出ヘッドの製造方法及び液体吐出ヘッド
JP6116198B2 (ja) 2012-11-15 2017-04-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2014188656A (ja) * 2013-03-28 2014-10-06 Tokyo Electron Ltd 中空構造体の製造方法
US9199460B2 (en) * 2013-06-28 2015-12-01 Hewlett-Packard Development Company, L.P. Apparatuses including a plate having a recess and a corresponding protrusion to define a chamber
JP6234095B2 (ja) 2013-07-16 2017-11-22 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP6214284B2 (ja) 2013-09-02 2017-10-18 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP6202987B2 (ja) * 2013-10-30 2017-09-27 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
CN105667090A (zh) * 2016-03-03 2016-06-15 中国科学院苏州纳米技术与纳米仿生研究所 平整薄膜层喷孔结构及喷墨打印机
CN105599452A (zh) * 2016-03-03 2016-05-25 中国科学院苏州纳米技术与纳米仿生研究所 多层材料喷孔结构及打印机
CN111201261A (zh) 2017-10-11 2020-05-26 伊斯曼柯达公司 水性喷墨油墨组合物和油墨组
CN107757127B (zh) * 2017-10-30 2023-05-26 苏州工业园区纳米产业技术研究院有限公司 喷头结构、喷头结构的制备方法及微机电喷墨打印头
WO2020159517A1 (en) * 2019-01-31 2020-08-06 Hewlett-Packard Development Company, L.P. Fluidic die with surface condition monitoring

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US6382777B1 (en) * 1998-06-19 2002-05-07 Canon Kabushiki Kaisha Liquid jet recording head
US6644786B1 (en) * 2002-07-08 2003-11-11 Eastman Kodak Company Method of manufacturing a thermally actuated liquid control device
EP1366906A1 (en) * 2002-05-31 2003-12-03 Hewlett-Packard Company Chamber having a protective layer

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EP0904939A2 (en) * 1997-09-30 1999-03-31 Canon Kabushiki Kaisha Ink jet head, method of manufacturing such ink jet head, and ink jet apparatus provided with such ink jet head
US6382777B1 (en) * 1998-06-19 2002-05-07 Canon Kabushiki Kaisha Liquid jet recording head
EP1366906A1 (en) * 2002-05-31 2003-12-03 Hewlett-Packard Company Chamber having a protective layer
US6644786B1 (en) * 2002-07-08 2003-11-11 Eastman Kodak Company Method of manufacturing a thermally actuated liquid control device

Also Published As

Publication number Publication date
CN101557938A (zh) 2009-10-14
WO2008073242A3 (en) 2008-08-14
WO2008073242A2 (en) 2008-06-19
EP2089231A2 (en) 2009-08-19
JP5139444B2 (ja) 2013-02-06
US7600856B2 (en) 2009-10-13
US20080136867A1 (en) 2008-06-12
JP2010512262A (ja) 2010-04-22

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Granted publication date: 20110810

Termination date: 20131204