JP5139444B2 - 液体射出装置および液体射出装置を製造する方法 - Google Patents

液体射出装置および液体射出装置を製造する方法 Download PDF

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Publication number
JP5139444B2
JP5139444B2 JP2009541309A JP2009541309A JP5139444B2 JP 5139444 B2 JP5139444 B2 JP 5139444B2 JP 2009541309 A JP2009541309 A JP 2009541309A JP 2009541309 A JP2009541309 A JP 2009541309A JP 5139444 B2 JP5139444 B2 JP 5139444B2
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Prior art keywords
liquid
chamber
nozzle plate
substrate
organic material
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Expired - Fee Related
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JP2009541309A
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English (en)
Japanese (ja)
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JP2010512262A5 (enExample
JP2010512262A (ja
Inventor
ジョン アンドリュー レベンス
リンガダハリ ゲナシナクニ シャンタラマ
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イーストマン コダック カンパニー
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/1404Geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1606Coating the nozzle area or the ink chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14403Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2009541309A 2006-12-12 2007-12-04 液体射出装置および液体射出装置を製造する方法 Expired - Fee Related JP5139444B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/609,365 2006-12-12
US11/609,365 US7600856B2 (en) 2006-12-12 2006-12-12 Liquid ejector having improved chamber walls
PCT/US2007/024836 WO2008073242A2 (en) 2006-12-12 2007-12-04 Liquid ejector having improved chamber walls

Publications (3)

Publication Number Publication Date
JP2010512262A JP2010512262A (ja) 2010-04-22
JP2010512262A5 JP2010512262A5 (enExample) 2011-01-27
JP5139444B2 true JP5139444B2 (ja) 2013-02-06

Family

ID=39133827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009541309A Expired - Fee Related JP5139444B2 (ja) 2006-12-12 2007-12-04 液体射出装置および液体射出装置を製造する方法

Country Status (5)

Country Link
US (1) US7600856B2 (enExample)
EP (1) EP2089231A2 (enExample)
JP (1) JP5139444B2 (enExample)
CN (1) CN101557938B (enExample)
WO (1) WO2008073242A2 (enExample)

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US7914127B2 (en) * 2005-05-31 2011-03-29 Telecom Italia S.P.A. Nozzle plate for an ink jet print head comprising stress relieving elements
US7938974B2 (en) * 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US7669967B2 (en) 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7605009B2 (en) * 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
US7794613B2 (en) * 2007-03-12 2010-09-14 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US8012363B2 (en) * 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
US20090233386A1 (en) * 2008-03-12 2009-09-17 Yimin Guan Method for forming an ink jetting device
US8173030B2 (en) 2008-09-30 2012-05-08 Eastman Kodak Company Liquid drop ejector having self-aligned hole
US8110117B2 (en) * 2008-12-31 2012-02-07 Stmicroelectronics, Inc. Method to form a recess for a microfluidic device
JP5359642B2 (ja) * 2009-07-22 2013-12-04 東京エレクトロン株式会社 成膜方法
US20110043555A1 (en) * 2009-08-20 2011-02-24 Yonglin Xie Drop ejection method through multi-lobed nozzle
US8267501B2 (en) * 2009-08-20 2012-09-18 Eastman Kodak Company Drop ejector having multi-lobed nozzle
US8205338B2 (en) * 2009-08-20 2012-06-26 Eastman Kodak Company Method of making a multi-lobed nozzle
US8449086B2 (en) 2011-03-30 2013-05-28 Eastman Kodak Company Inkjet chamber and inlets for circulating flow
US9403365B2 (en) * 2011-04-29 2016-08-02 Funai Electric Co., Ltd. Method for fabricating fluid ejection device
US20120274707A1 (en) * 2011-04-29 2012-11-01 Xiaorong Cai Ejection devices for inkjet printers and method for fabricating ejection devices
US20130186301A1 (en) 2012-01-24 2013-07-25 Thomas Nelson Blanton Ink having antibacterial and antifungal protection
US20130189499A1 (en) 2012-01-24 2013-07-25 Thomas Nelson Blanton Antibacterial and antifungal protection for ink jet image
US20130083126A1 (en) * 2011-09-30 2013-04-04 Emmanuel K. Dokyi Liquid ejection device with planarized nozzle plate
US20130082028A1 (en) * 2011-09-30 2013-04-04 Emmanuel K. Dokyi Forming a planar film over microfluidic device openings
US20130237661A1 (en) 2011-12-22 2013-09-12 Thomas B. Brust Inkjet ink composition
JP6041527B2 (ja) 2012-05-16 2016-12-07 キヤノン株式会社 液体吐出ヘッド
JP5740371B2 (ja) * 2012-09-11 2015-06-24 東芝テック株式会社 インクジェットヘッド
JP6095315B2 (ja) 2012-10-02 2017-03-15 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5972139B2 (ja) * 2012-10-10 2016-08-17 キヤノン株式会社 液体吐出ヘッドの製造方法及び液体吐出ヘッド
JP6116198B2 (ja) 2012-11-15 2017-04-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2014188656A (ja) * 2013-03-28 2014-10-06 Tokyo Electron Ltd 中空構造体の製造方法
US9199460B2 (en) * 2013-06-28 2015-12-01 Hewlett-Packard Development Company, L.P. Apparatuses including a plate having a recess and a corresponding protrusion to define a chamber
JP6234095B2 (ja) 2013-07-16 2017-11-22 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP6214284B2 (ja) 2013-09-02 2017-10-18 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP6202987B2 (ja) 2013-10-30 2017-09-27 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
CN105599452A (zh) * 2016-03-03 2016-05-25 中国科学院苏州纳米技术与纳米仿生研究所 多层材料喷孔结构及打印机
CN105667090A (zh) * 2016-03-03 2016-06-15 中国科学院苏州纳米技术与纳米仿生研究所 平整薄膜层喷孔结构及喷墨打印机
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Also Published As

Publication number Publication date
WO2008073242A3 (en) 2008-08-14
CN101557938B (zh) 2011-08-10
EP2089231A2 (en) 2009-08-19
US20080136867A1 (en) 2008-06-12
WO2008073242A2 (en) 2008-06-19
CN101557938A (zh) 2009-10-14
JP2010512262A (ja) 2010-04-22
US7600856B2 (en) 2009-10-13

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