JP5139444B2 - 液体射出装置および液体射出装置を製造する方法 - Google Patents
液体射出装置および液体射出装置を製造する方法 Download PDFInfo
- Publication number
- JP5139444B2 JP5139444B2 JP2009541309A JP2009541309A JP5139444B2 JP 5139444 B2 JP5139444 B2 JP 5139444B2 JP 2009541309 A JP2009541309 A JP 2009541309A JP 2009541309 A JP2009541309 A JP 2009541309A JP 5139444 B2 JP5139444 B2 JP 5139444B2
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- liquid
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- nozzle plate
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- organic material
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- Expired - Fee Related
Links
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1606—Coating the nozzle area or the ink chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/609,365 | 2006-12-12 | ||
| US11/609,365 US7600856B2 (en) | 2006-12-12 | 2006-12-12 | Liquid ejector having improved chamber walls |
| PCT/US2007/024836 WO2008073242A2 (en) | 2006-12-12 | 2007-12-04 | Liquid ejector having improved chamber walls |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010512262A JP2010512262A (ja) | 2010-04-22 |
| JP2010512262A5 JP2010512262A5 (enExample) | 2011-01-27 |
| JP5139444B2 true JP5139444B2 (ja) | 2013-02-06 |
Family
ID=39133827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009541309A Expired - Fee Related JP5139444B2 (ja) | 2006-12-12 | 2007-12-04 | 液体射出装置および液体射出装置を製造する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7600856B2 (enExample) |
| EP (1) | EP2089231A2 (enExample) |
| JP (1) | JP5139444B2 (enExample) |
| CN (1) | CN101557938B (enExample) |
| WO (1) | WO2008073242A2 (enExample) |
Families Citing this family (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7914127B2 (en) * | 2005-05-31 | 2011-03-29 | Telecom Italia S.P.A. | Nozzle plate for an ink jet print head comprising stress relieving elements |
| US7938974B2 (en) * | 2007-03-12 | 2011-05-10 | Silverbrook Research Pty Ltd | Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face |
| US7669967B2 (en) | 2007-03-12 | 2010-03-02 | Silverbrook Research Pty Ltd | Printhead having hydrophobic polymer coated on ink ejection face |
| US7605009B2 (en) * | 2007-03-12 | 2009-10-20 | Silverbrook Research Pty Ltd | Method of fabrication MEMS integrated circuits |
| US7794613B2 (en) * | 2007-03-12 | 2010-09-14 | Silverbrook Research Pty Ltd | Method of fabricating printhead having hydrophobic ink ejection face |
| US8012363B2 (en) * | 2007-11-29 | 2011-09-06 | Silverbrook Research Pty Ltd | Metal film protection during printhead fabrication with minimum number of MEMS processing steps |
| US20090233386A1 (en) * | 2008-03-12 | 2009-09-17 | Yimin Guan | Method for forming an ink jetting device |
| US8173030B2 (en) | 2008-09-30 | 2012-05-08 | Eastman Kodak Company | Liquid drop ejector having self-aligned hole |
| US8110117B2 (en) * | 2008-12-31 | 2012-02-07 | Stmicroelectronics, Inc. | Method to form a recess for a microfluidic device |
| JP5359642B2 (ja) * | 2009-07-22 | 2013-12-04 | 東京エレクトロン株式会社 | 成膜方法 |
| US20110043555A1 (en) * | 2009-08-20 | 2011-02-24 | Yonglin Xie | Drop ejection method through multi-lobed nozzle |
| US8267501B2 (en) * | 2009-08-20 | 2012-09-18 | Eastman Kodak Company | Drop ejector having multi-lobed nozzle |
| US8205338B2 (en) * | 2009-08-20 | 2012-06-26 | Eastman Kodak Company | Method of making a multi-lobed nozzle |
| US8449086B2 (en) | 2011-03-30 | 2013-05-28 | Eastman Kodak Company | Inkjet chamber and inlets for circulating flow |
| US9403365B2 (en) * | 2011-04-29 | 2016-08-02 | Funai Electric Co., Ltd. | Method for fabricating fluid ejection device |
| US20120274707A1 (en) * | 2011-04-29 | 2012-11-01 | Xiaorong Cai | Ejection devices for inkjet printers and method for fabricating ejection devices |
| US20130186301A1 (en) | 2012-01-24 | 2013-07-25 | Thomas Nelson Blanton | Ink having antibacterial and antifungal protection |
| US20130189499A1 (en) | 2012-01-24 | 2013-07-25 | Thomas Nelson Blanton | Antibacterial and antifungal protection for ink jet image |
| US20130083126A1 (en) * | 2011-09-30 | 2013-04-04 | Emmanuel K. Dokyi | Liquid ejection device with planarized nozzle plate |
| US20130082028A1 (en) * | 2011-09-30 | 2013-04-04 | Emmanuel K. Dokyi | Forming a planar film over microfluidic device openings |
| US20130237661A1 (en) | 2011-12-22 | 2013-09-12 | Thomas B. Brust | Inkjet ink composition |
| JP6041527B2 (ja) | 2012-05-16 | 2016-12-07 | キヤノン株式会社 | 液体吐出ヘッド |
| JP5740371B2 (ja) * | 2012-09-11 | 2015-06-24 | 東芝テック株式会社 | インクジェットヘッド |
| JP6095315B2 (ja) | 2012-10-02 | 2017-03-15 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP5972139B2 (ja) * | 2012-10-10 | 2016-08-17 | キヤノン株式会社 | 液体吐出ヘッドの製造方法及び液体吐出ヘッド |
| JP6116198B2 (ja) | 2012-11-15 | 2017-04-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP2014188656A (ja) * | 2013-03-28 | 2014-10-06 | Tokyo Electron Ltd | 中空構造体の製造方法 |
| US9199460B2 (en) * | 2013-06-28 | 2015-12-01 | Hewlett-Packard Development Company, L.P. | Apparatuses including a plate having a recess and a corresponding protrusion to define a chamber |
| JP6234095B2 (ja) | 2013-07-16 | 2017-11-22 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
| JP6214284B2 (ja) | 2013-09-02 | 2017-10-18 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
| JP6202987B2 (ja) | 2013-10-30 | 2017-09-27 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
| CN105599452A (zh) * | 2016-03-03 | 2016-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | 多层材料喷孔结构及打印机 |
| CN105667090A (zh) * | 2016-03-03 | 2016-06-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | 平整薄膜层喷孔结构及喷墨打印机 |
| EP3694899B1 (en) | 2017-10-11 | 2023-08-23 | Eastman Kodak Company | Compositions d'encres aqueuses pour impressions par jet d'encre et ensembles d'encre |
| CN107757127B (zh) * | 2017-10-30 | 2023-05-26 | 苏州工业园区纳米产业技术研究院有限公司 | 喷头结构、喷头结构的制备方法及微机电喷墨打印头 |
| WO2020159517A1 (en) * | 2019-01-31 | 2020-08-06 | Hewlett-Packard Development Company, L.P. | Fluidic die with surface condition monitoring |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| US6234608B1 (en) * | 1997-06-05 | 2001-05-22 | Xerox Corporation | Magnetically actuated ink jet printing device |
| US6331258B1 (en) * | 1997-07-15 | 2001-12-18 | Silverbrook Research Pty Ltd | Method of manufacture of a buckle plate ink jet printer |
| US7401901B2 (en) * | 1997-07-15 | 2008-07-22 | Silverbrook Research Pty Ltd | Inkjet printhead having nozzle plate supported by encapsulated photoresist |
| US6022482A (en) * | 1997-08-04 | 2000-02-08 | Xerox Corporation | Monolithic ink jet printhead |
| JPH1199649A (ja) | 1997-09-30 | 1999-04-13 | Canon Inc | インクジェットヘッド、その製造方法、及びインクジェット装置 |
| JP3619036B2 (ja) * | 1997-12-05 | 2005-02-09 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| US6382777B1 (en) * | 1998-06-19 | 2002-05-07 | Canon Kabushiki Kaisha | Liquid jet recording head |
| EP1065059B1 (en) * | 1999-07-02 | 2007-01-31 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
| US6474795B1 (en) * | 1999-12-21 | 2002-11-05 | Eastman Kodak Company | Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same |
| US6482574B1 (en) * | 2000-04-20 | 2002-11-19 | Hewlett-Packard Co. | Droplet plate architecture in ink-jet printheads |
| US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
| US6750290B2 (en) * | 2001-04-19 | 2004-06-15 | Canon Kabushiki Kaisha | Epoxy resin composition, method of improving surface of substrate, ink jet recording head and ink jet recording apparatus |
| US6555480B2 (en) * | 2001-07-31 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Substrate with fluidic channel and method of manufacturing |
| US6626523B2 (en) * | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Printhead having a thin film membrane with a floating section |
| US6942318B2 (en) * | 2002-05-31 | 2005-09-13 | Hewlett-Packard Development Company, L.P. | Chamber having a protective layer |
| US6644786B1 (en) * | 2002-07-08 | 2003-11-11 | Eastman Kodak Company | Method of manufacturing a thermally actuated liquid control device |
| ITTO20021099A1 (it) * | 2002-12-19 | 2004-06-20 | Olivetti I Jet Spa | Processo di rivestimento protettivo di microcircuiti idraulici rispetto a liquidi aggressivi. particolarmente per una testina di stampa a getto d'inchiostro. |
| KR100570822B1 (ko) * | 2004-05-11 | 2006-04-12 | 삼성전자주식회사 | 잉크젯 헤드의 제조방법 및 그에 의해 제조된 잉크젯 헤드 |
-
2006
- 2006-12-12 US US11/609,365 patent/US7600856B2/en not_active Expired - Fee Related
-
2007
- 2007-12-04 JP JP2009541309A patent/JP5139444B2/ja not_active Expired - Fee Related
- 2007-12-04 WO PCT/US2007/024836 patent/WO2008073242A2/en not_active Ceased
- 2007-12-04 EP EP07853231A patent/EP2089231A2/en not_active Withdrawn
- 2007-12-04 CN CN2007800460643A patent/CN101557938B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008073242A3 (en) | 2008-08-14 |
| CN101557938B (zh) | 2011-08-10 |
| EP2089231A2 (en) | 2009-08-19 |
| US20080136867A1 (en) | 2008-06-12 |
| WO2008073242A2 (en) | 2008-06-19 |
| CN101557938A (zh) | 2009-10-14 |
| JP2010512262A (ja) | 2010-04-22 |
| US7600856B2 (en) | 2009-10-13 |
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