CN101539697B - 一种薄膜晶体管液晶显示器像素结构及其制造方法 - Google Patents
一种薄膜晶体管液晶显示器像素结构及其制造方法 Download PDFInfo
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- CN101539697B CN101539697B CN2008101024794A CN200810102479A CN101539697B CN 101539697 B CN101539697 B CN 101539697B CN 2008101024794 A CN2008101024794 A CN 2008101024794A CN 200810102479 A CN200810102479 A CN 200810102479A CN 101539697 B CN101539697 B CN 101539697B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000010409 thin film Substances 0.000 title claims abstract description 23
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 58
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000005192 partition Methods 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000002161 passivation Methods 0.000 claims abstract description 13
- 229920002120 photoresistant polymer Polymers 0.000 claims description 93
- 238000005516 engineering process Methods 0.000 claims description 51
- 238000009413 insulation Methods 0.000 claims description 41
- 238000005530 etching Methods 0.000 claims description 32
- 229910052750 molybdenum Inorganic materials 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 229910052804 chromium Inorganic materials 0.000 claims description 12
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 9
- 229910004205 SiNX Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 6
- 229910052779 Neodymium Inorganic materials 0.000 claims description 5
- 229910020286 SiOxNy Inorganic materials 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 230000008569 process Effects 0.000 abstract description 15
- 239000011521 glass Substances 0.000 abstract description 6
- 230000000873 masking effect Effects 0.000 abstract 2
- 230000000717 retained effect Effects 0.000 abstract 1
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 description 13
- 239000011651 chromium Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 229910000583 Nd alloy Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- VVTQWTOTJWCYQT-UHFFFAOYSA-N alumane;neodymium Chemical compound [AlH3].[Nd] VVTQWTOTJWCYQT-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133357—Planarisation layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (11)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008101024794A CN101539697B (zh) | 2008-03-21 | 2008-03-21 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
US12/270,008 US7687330B2 (en) | 2008-03-21 | 2008-11-13 | TFT-LCD pixel structure and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2008101024794A CN101539697B (zh) | 2008-03-21 | 2008-03-21 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN101539697A CN101539697A (zh) | 2009-09-23 |
CN101539697B true CN101539697B (zh) | 2012-04-04 |
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CN2008101024794A Active CN101539697B (zh) | 2008-03-21 | 2008-03-21 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
Country Status (2)
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US (1) | US7687330B2 (zh) |
CN (1) | CN101539697B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105321958A (zh) * | 2014-07-29 | 2016-02-10 | 三星显示有限公司 | 薄膜晶体管阵列面板及其制造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100524781C (zh) * | 2006-12-13 | 2009-08-05 | 北京京东方光电科技有限公司 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
CN101872773A (zh) * | 2010-06-28 | 2010-10-27 | 信利半导体有限公司 | 一种薄膜晶体管阵列基板、显示器及其制造方法 |
CN102157567B (zh) * | 2011-03-18 | 2013-02-06 | 深圳南玻伟光导电膜有限公司 | 半导体薄膜晶体管 |
US20130071962A1 (en) * | 2011-09-20 | 2013-03-21 | Shijian Qin | Method of Manufacturing TFT Array Substrate and TFT Array Substrate |
CN102881657B (zh) * | 2012-09-26 | 2015-01-07 | 京东方科技集团股份有限公司 | 一种cmos晶体管及其制造方法 |
CN103268046B (zh) * | 2012-12-24 | 2016-01-06 | 上海中航光电子有限公司 | 薄膜晶体管液晶显示器、阵列基板及其制作方法 |
CN103091921B (zh) * | 2013-01-28 | 2015-04-15 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示装置 |
CN103456742B (zh) * | 2013-08-27 | 2017-02-15 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示装置 |
CN104730782B (zh) * | 2015-04-01 | 2018-03-27 | 上海天马微电子有限公司 | 一种阵列基板、显示面板和显示装置 |
US10147745B2 (en) | 2015-04-01 | 2018-12-04 | Shanghai Tianma Micro-electronics Co., Ltd. | Array substrate, display panel and display device |
CN109283758B (zh) * | 2017-07-21 | 2021-09-28 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1577418A (zh) * | 2003-07-16 | 2005-02-09 | 三星Sdi株式会社 | 包括多晶硅薄膜晶体管的平板显示装置及其制造方法 |
CN1959509A (zh) * | 2006-11-10 | 2007-05-09 | 京东方科技集团股份有限公司 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
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KR100303446B1 (ko) * | 1998-10-29 | 2002-10-04 | 삼성전자 주식회사 | 액정표시장치용박막트랜지스터기판의제조방법 |
KR100679518B1 (ko) * | 2000-07-13 | 2007-02-07 | 엘지.필립스 엘시디 주식회사 | 액정표장치용 어레이기판과 그 제조방법 |
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2008
- 2008-03-21 CN CN2008101024794A patent/CN101539697B/zh active Active
- 2008-11-13 US US12/270,008 patent/US7687330B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1577418A (zh) * | 2003-07-16 | 2005-02-09 | 三星Sdi株式会社 | 包括多晶硅薄膜晶体管的平板显示装置及其制造方法 |
CN1959509A (zh) * | 2006-11-10 | 2007-05-09 | 京东方科技集团股份有限公司 | 一种薄膜晶体管液晶显示器像素结构及其制造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105321958A (zh) * | 2014-07-29 | 2016-02-10 | 三星显示有限公司 | 薄膜晶体管阵列面板及其制造方法 |
CN105321958B (zh) * | 2014-07-29 | 2020-11-13 | 三星显示有限公司 | 薄膜晶体管阵列面板及其制造方法 |
Also Published As
Publication number | Publication date |
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CN101539697A (zh) | 2009-09-23 |
US20090236605A1 (en) | 2009-09-24 |
US7687330B2 (en) | 2010-03-30 |
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