CN101512325A - Board appearance inspection method and device - Google Patents

Board appearance inspection method and device Download PDF

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Publication number
CN101512325A
CN101512325A CNA2007800323858A CN200780032385A CN101512325A CN 101512325 A CN101512325 A CN 101512325A CN A2007800323858 A CNA2007800323858 A CN A2007800323858A CN 200780032385 A CN200780032385 A CN 200780032385A CN 101512325 A CN101512325 A CN 101512325A
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China
Prior art keywords
substrate
image
mentioned
unit
base plate
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CNA2007800323858A
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Chinese (zh)
Inventor
角田佳久
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i Pulse Co Ltd
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i Pulse Co Ltd
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Publication of CN101512325A publication Critical patent/CN101512325A/en
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Abstract

Problem to be Solved To efficiently perform a board appearance inspection with a simple structure. Solution A control unit 60 performs processing for comparing a picked-up image of a board P picked up by a camera 52 with standard image data stored in a memory unit 61 and judging whether the board is good or poor. When the board P is judged to be poor, an image of the board P is displayed on a liquid crystal monitor 4 in order to have an operator visually judge the board P. When the board P is judged to be good by the visual judgment, the picked-up image of the board P that is judged to be good is additionally stored in the memory unit 61 as the standard image data.

Description

The appearance inspection method of substrate and device
Technical field
The present invention relates to the installment state that is installed in the element on the substrate, the printed wiring pattern on the substrate, method and the device that the outward appearance of substrates such as printed patterns of pasty state scolder on the substrate is checked.
Background technology
From in the past, a kind of as the appearance inspection method of substrate, it is that benchmark image data (master data) compare that the photographed images of pair substrate and the benchmark of non-defective unit substrate are arranged, and checks its consistent degree methods (so-called pattern matching method (pattern matching method)).In this pattern matching method, if constitute the said reference view data by single sample image, the substrate that is judged as non-defective unit will be few, even the substrate that will should be judged as non-defective unit by operating personnel's visual examination also is used as defective products and processedly falls.Therefore, comparatively it is desirable to, make the said reference view data have to a certain degree scope, still, if enlarge the scope of these benchmark image data meaninglessly, the substrate that then should be judged as defective products also can be judged as non-defective unit.
To this, in the following patent documentation 1, when with one or more sample image serving as basis making benchmark image data, used self organization map (Self Organizing Maps based on one of hierarchy type nerual network technique; SOM) program.Adopt the disclosed gimmick of this patent documentation 1, can obtain benchmark image data corresponding to the appropriate scope of checked property characteristic (representative statistical data).
Patent documentation 1: Jap.P. open communique spy open 2003-044835 number
Yet, the gimmick that above-mentioned patent documentation 1 is disclosed, owing to obtain the benchmark image data by high performance routine processes based on self organization map (SOM), therefore, not only the making of software needs huge cost, and be difficult to avoid increasing capacity for the hardware (storer or CPU) that moves this software, perhaps increase the processing time.
Summary of the invention
The present invention does in view of the above problems, and its purpose is, carries out the visual examination of substrate effectively with more simple formation.
Above-mentioned technical matters, the appearance inspection method of the substrate of the present invention by the following formation of tool is solved.
The appearance inspection method of substrate of the present invention is characterized in that, comprises, the shooting step is taken aforesaid substrate by image unit; Automatically determining step carries out automatic judging unit, thereby the benchmark image data that the photographed images of the substrate that obtained in the above-mentioned shooting step and benchmark as the non-defective unit substrate are stored in storage unit are in advance compared the processing of judging that substrate is whether good; Visual determining step when substrate is judged as defective products in above-mentioned automatic determining step, is shown in display unit with the image of this substrate, makes operating personnel judge according to the image that is shown in above-mentioned display unit is visual whether aforesaid substrate is good; Wherein, when substrate is judged as non-defective unit in above-mentioned visual determining step, this is judged as the photographed images of the substrate of non-defective unit,, appends and be stored in said memory cells as the said reference view data.
Description of drawings
Fig. 1 is the stereographic map of the testing fixture of the related substrate of expression the 1st embodiment of the present invention.
Fig. 2 is the vertical view of the above-mentioned testing fixture of expression.
Fig. 3 is the longitudinal sectional view of the inner structure of the above-mentioned testing fixture of expression.
Fig. 4 is the transverse sectional view of the inner structure of the above-mentioned testing fixture of expression.
Fig. 5 is the figure of liquid crystal panel support section in the presentation graphs 3.
Fig. 6 is the cut-open view of underframe of the mounting structure of expression Control Component.
Fig. 7 is the block scheme of the control system of the above-mentioned testing fixture of expression.
Fig. 8 is the mode chart of the content of the Flame Image Process that is used to illustrate that above-mentioned testing fixture carries out, and wherein, Fig. 8 A represents the photographed images of substrate, and Fig. 8 B represents the benchmark image data, the difference image of Fig. 8 C presentation graphs 8A and Fig. 8 B.
Fig. 9 is that expression is presented at the synoptic diagram of the visual judgement of the operating personnel on the LCD monitor with an example of image.
Figure 10 is the synoptic diagram that the state behind the substrate image is cut apart in expression.
Figure 11 is the leading portion portion of process flow diagram of the content of the performed control action of expression Control Component.
Figure 12 is the center section part of above-mentioned process flow diagram.
Figure 13 is the back segment portion of above-mentioned process flow diagram.
Figure 14 is the synoptic diagram of the schematic configuration of the related base plate inspection system of expression the 2nd embodiment of the present invention.
Figure 15 is the block scheme of the control system of expression aforesaid substrate check system.
Figure 16 is the process flow diagram of the content of the performed control action of expression aforesaid substrate check system.
Figure 17 is the figure that is used to illustrate the variation of base plate inspection system of the present invention.
Figure 18 is the figure that is used to illustrate the 3rd embodiment of the present invention, and expression is shown in the displayed image of the 1st display type on the LCD monitor.
Figure 19 is the figure that expression is shown in the displayed image of the 2nd display type on the above-mentioned LCD monitor.
Figure 20 is the figure that expression is shown in the displayed image of the 3rd display type on the above-mentioned LCD monitor.
Figure 21 is the figure that expression is shown in the displayed image of the 4th display type on the above-mentioned LCD monitor.
Figure 22 is the process flow diagram of the making step of expression limit image.
Figure 23 is a synoptic diagram of extracting the situation in solder printing zone from photographed images out.
Figure 24 is the figure that is used for illustration limit image, and wherein, Figure 24 A represents right side deflection limit image, and Figure 24 B represents left side deflection limit image.
Figure 25 is the figure that is used for illustration limit image, and wherein, Figure 25 A represents upside deflection limit image, and Figure 25 B represents downside deflection limit image.
Figure 26 is the figure that is used for illustration limit image, and wherein, Figure 26 A represents area day of one's doom degree image, and Figure 26 B represents the little limit image of area.
Figure 27 is the process flow diagram of the content of the performed control action of expression Control Component.
Figure 28 is the vertical view of the related pasty state solder printing machine of expression the 4th embodiment of the present invention.
Embodiment
(the 1st embodiment)
Fig. 1 and Fig. 2 roughly represent the testing fixture 1 of the substrate that the 1st embodiment of the present invention is related.As shown in Figure 1 and Figure 2, testing fixture 1, its integral body is box-shaped, comprises rear section 2A that constitutes its rear side and the front part 2B that forwards extends from the front end bottom of this rear section 2A, is the face shaping of A font when having side-looking.The profile of such testing fixture 1 is formed by the shell Ca that covers inspection assembly 50 inner members such as grade described later.
On the above-mentioned front part 2B of this testing fixture 1, be provided with and be used for that printed base plate P put into device or from installing the gateway 6 of taking out printed base plate P.This gateway 6 is made of the peristome that is formed at shell Ca, and is arranged on the central authorities (among Fig. 2, the central authorities on the left and right directions) on the Width of testing fixture 1.
Above above-mentioned gateway 6 and the previous section of rear section 2A, be provided with LCD monitor 4 (being equivalent to display unit involved in the present invention).This LCD monitor 4, constitute by so-called touch type liquid crystal display, various information such as check result are shown on this LCD monitor 4, and show with the picture that finger touches on the monitor by operating personnel (operating personnel), and testing fixture 1 is carried out various inputs.
Among the above-mentioned front part 2B with LCD monitor 4 part side by side on, be provided with safeguard usefulness the door 9.This door 9 opens and closes the local implementation of above-mentioned shell Ca, by opening this door 9, makes the inside of operating personnel's access checking device 1 where necessary, changes marking pen described later etc.In addition, the upper cover Ca1 among the above-mentioned shell Ca can dismantle, and under the state that unloads this upper cover Ca1, can carry out the maintenance of aftermentioned camera assembly 51 etc.
As shown in Figure 1, the left and right sides at the rear section 2A of above-mentioned shell Ca is provided with the handle portion 3 that is made of recess, so that operating personnel's hand puts in handle portion 3 carrying testing fixtures 1.In addition, in Fig. 1 and Fig. 2, symbol 8 expression emergency stop push buttons.
Testing fixture 1, its width attenuates to the front side from the device rear side.Specifically, the side side of the front part 2B in the side of the testing fixture 1 that constitutes by above-mentioned shell Ca (being left lateral sides among Fig. 2), with respect to fore-and-aft direction inclination predetermined angular α, thus, the width of testing fixture 1 attenuates to the front side.This is for the measure that a plurality of testing fixtures 1 are made to improve operability being set compactly, for this point, being illustrated in the 2nd embodiment described later.
Fig. 3 and Fig. 4, the concrete inner structure of expression testing fixture 1.As Fig. 3 and shown in Figure 4, inside at testing fixture 1, be provided with underframe (baseframe) 11, on this underframe 11, be equipped with the substrate holding mechanism that is used to keep printed base plate P and moves it 24 and, be used to take the inspection assembly 50 that remains on the substrate P on this substrate holding mechanism 24 etc.
Above-mentioned underframe 11, possess the base portion 12 of (side of LCD monitor 4 is set) its low highly more dip plane 12a that forwards descends that has forward more side and the side wall portion of holding up respectively from the two ends, the left and right sides of this base portion 12 14 integratedly, and constitute by casting product such as for example aluminium diecastings.
Aforesaid substrate maintaining body 24, be fixed on the dip plane 12a of said base portion 12, it comprises, make slide block 22 along this dip plane 12a in the single shaft robot 20 of the mobile linear motor formula of fore-and-aft direction (below, this direction is called Y direction), be fixed on the worktable 30 of above-mentioned slide block 22.
Above-mentioned worktable 30, be used to keep printed base plate P, by the running of above-mentioned single shaft robot 20, can and the original position (home position) (position shown in the solid line of Fig. 3) faced of above-mentioned gateway 6 and and the inspection position (position shown in two dot-and-dash lines of Fig. 3) faced of camera assembly described later 51 between move along Y direction.And, at above-mentioned original position, carry out the loading and unloading of the printed base plate P on worktable 30, and move to from original position under the state of checking the position at worktable 30, carry out the shooting of being undertaken by camera assembly 51 to printed base plate P.This worktable 30 comprises, is fixed on the facial plate 32 of going up of above-mentioned slide block 22; Be installed on this plate 32 and keep support 36,38 (below, side stand 36, back side stand 38 before being referred to as sometimes) along a pair of substrate in the front and back that left and right directions extends, printed base plate P is clamped between the above-mentioned support 36,38.Particularly, on the back side stand 38 in two supports 36,38, thereby be provided with on Y direction can displacement and the effect by elastomeric elements such as compression helical springs forwards side compose the movable part 39 of gesture, and, be formed with stepped substrate receiving portion respectively in the part that faces one another of this movable part 39 and above-mentioned support 36.So, be placed on the aforesaid substrate receiving portion by edge, front and back with printed base plate P, and with between preceding side stand 36 of this substrate P embedding and the movable part 39 (with reference to Fig. 3), this printed base plate P is being resiliently clamped between two supports 36,38 by compression helical spring etc. just, thus, side stand 36 is located in Y direction as benchmark before the printed base plate P, and remains on worktable 30 with this state.And the side at the left and right directions of preceding side stand 36 is provided with location-plate 36a, the end of printed base plate P (end of left and right directions) and this location-plate 36a butt, and thus, this substrate P is located on left and right directions (below, be called X-direction).
In addition, the interval of above-mentioned front side and back side stand 36,38 can change corresponding to substrate size.Particularly,, be fixed with end plate 34 in the rear end of above-mentioned plate 32, this end plate 34 and above-mentioned before be fixed with pair of right and left guide pole 35 parallel to each other between the side stand 36.And above-mentioned back side stand 38 is installed slidably with respect to above-mentioned guide pole 35, in addition, also is provided with the locking device (not shown) that can pin rear side support 38 on the optional position of above-mentioned guide pole 35.That is, former side stand 36 slides back side stand 38 as benchmark, and pins rear side support 38 by above-mentioned locking device on desirable position, can change the interval between two supports 36,38 thus.
Above-mentioned inspection assembly 50 comprises, makes slide block 42 along single shaft robot 40 that X-direction moves, be assembled in camera assembly 51 in this single shaft robot 40 by slide block 42.
Above-mentioned single shaft robot 40, same with the above-mentioned single shaft robot 20 that is used to drive worktable 30, constitute by the single shaft robot of linear motor formula, and to be fixed on the underframe 11 across the state in above-mentioned two side portion 14.
Above-mentioned camera assembly 51, comprise, the camera 52 (being equivalent to image unit involved in the present invention) that constitutes by area sensors such as CCD or cmos image sensors, to the lighting device 54 of the printed base plate P irradiating illumination light of reference object, and, above-mentioned camera 52 is taken the printed base plate P that remains on above-mentioned worktable 30 from the direction perpendicular to the surface of printed base plate P.Above-mentioned camera assembly 51 is followed the moving of X-direction of above-mentioned slide block 42, can the camera site above the single shaft robot 20 of substrate feeding assembly 24 and, move between the position of in Fig. 4, representing with two dot-and-dash lines and solid line.Camera assembly 51, usually remain on above-mentioned camera site, and when replacing of the such label assembly of aftermentioned (marking unit) 55 etc., move to position shown in two dot-and-dash lines of Fig. 4, when camera assembly 51 being safeguarded, move to position shown in the solid line of Fig. 4 at dismounting upper cover Ca1.
On the above-mentioned inspection assembly 50, the label assembly 55 of writing the regulation mark corresponding to check result etc. at printed base plate P subscript is installed.This label assembly 55 comprises, is used to mark the marking pen 56 of writing mark, the driving mechanism that makes these marking pen 56 advance and retreat.Running by this driving mechanism, above-mentioned marking pen 56, can with the job position (position shown in two dot-and-dash lines among Fig. 3) of the printed base plate P butt that remains on worktable 30 and, it is mobile to advance and retreat between the retreating position (position shown in the solid line Fig. 3) that keep out of the way upward this position.
As Fig. 3 and shown in Figure 4, above-mentioned label assembly 55 is fixed in camera assembly 51 by linking arm 58, can together move along X-direction with this camera assembly 51 thus.In addition, label assembly 55, one in the moving area on its left and right directions distolateral (position shown in two dot-and-dash lines among Fig. 4) is positioned at the dorsal part (rear side) of Fig. 1 and door 9 shown in Figure 2.That is, be positioned at label assembly 55 under the state of this position, by opening door 9, operating personnel can carry out the replacing of marking pen 56 etc. easily.
Above above-mentioned underframe 11, also be provided with the beam 19 that extends along fore-and-aft direction.As shown in Figure 5, this beam 19 is fixed on the front and back one opposite house type assistant support 16,18 that sets up the two side portion 14 of being fixed in underframe 11.And, at the tip of this beam 19, be supported with the above-mentioned liquid crystal panel 4 that can tilt.Particularly, first end at above-mentioned beam 19, the fulcrum 45 that is connected with to extend along X-direction is the shaft coupling 46 that fulcrum can rotate, and above-mentioned LCD monitor 4 is installed on this shaft coupling 46, thus, can change the pitch angle (forwards, backwards direction change posture) of this LCD monitor 4 with respect to pedal line.
And, as shown in Figure 3, above the portion that is provided with of aforesaid substrate maintaining body 24 and the rear space of above-mentioned inspection assembly 50, be provided with and be used for checking that the above-mentioned single shaft robot 40 of assembly 50 carries out the driver 66 of drive controlling.Particularly, on the two side of underframe 11 one 14 and assistant support 18, be fixed with pair of right and left side plate 67, and between this side plate 67, set up back up pad 68, and on this back up pad 68, be fixed with above-mentioned driver 66.
On the other hand, in the inside of the base portion 12 of above-mentioned underframe 11, be provided with the driver 62 etc. of single shaft robot 20 usefulness of Control Component 60, the aforesaid substrate maintaining body 24 of centralized control testing fixture 1.That is, as shown in Figure 6, the inside in said base portion 12 is formed with downwards and the section shape space 15 roughly triangular in shape of opening rearward, in this space 15, is provided with above-mentioned Control Component 60 and driver 62.In addition, in Fig. 3 and Fig. 6, symbol 64 expressions are used to cool off the cooling fan of above-mentioned Control Component 60 grades.
Above-mentioned Control Component 60, driving machine 62 and cooling fan 64, one is fixed on the following cover plate 65 of the lower face of main covering testing fixture 1 and rear face, this time cover plate 65 is installed on the base portion 12 of underframe 11 from downside, under this state, above-mentioned each equipment 60,62,64 is contained in the above-mentioned space 15 of this base portion 12.
Above-mentioned Control Component 60 comprises, carries out the HDD of RAM, store various kinds of data or the software of the CPU of theoretical calculation, the ROM that is used to store the various programs etc. of this CPU of control, device interim store various kinds of data in service.And, shown in the block scheme of Fig. 7, this Control Component 60 is with each single shaft robot 20,40, camera assembly 51 (camera 52 and lighting device 54), label assembly 55 and LCD monitor 4, other not shown electric connection such as various sensor classes of substrate holding mechanism 24 and inspection assembly 50 usefulness. Single shaft robot 20,40 wherein is connected with Control Component 60 respectively by above-mentioned driver 62,66.And, Control Component 60, for the operation program according to storage in advance carries out a series of inspection operation to printed base plate P, the action of the above-mentioned single shaft of centralized control robot 20,40, camera assembly 51 etc., and judge according to above-mentioned camera 52 captured images whether printed base plate P is good, perhaps control the displaying contents of above-mentioned LCD monitor 4 corresponding to its judged result.
The testing fixture 1 of said structure is for example checked printed base plate P in the following order.
After testing fixture 1 started, device 1 remained on holding state, until on-test.Under this holding state, above-mentioned worktable 30 is positioned at original position, shows the menu screen of regulation on the liquid crystal panel 4.
Under this state, operating personnel are installed in printed base plate P on the worktable 30, and " beginning to check " in the above-mentioned menu screen of touch LCD panel 4 selections, thereby begin the inspection of this substrate P.In addition, when being installed in printed base plate P on the above-mentioned worktable 30, printed base plate P being examined face (face of element is installed) state up with it being embedded into substrate and keeping installing between the support 36,38.At this moment, printed base plate P and location-plate 36a butt and located.
Then, check Once you begin, running by single shaft robot 20, worktable 30 moves along Y direction, and the running of the single shaft robot 40 by the opposing party, and camera assembly 51 moves along X-direction, thus, on the position that the camera 52 of camera assembly 51 is positioned to face with printed base plate P, under the irradiation of the illumination light of above-mentioned lighting device 54,52 couples of printed base plate P take by this camera.
So, camera 52 has been taken after the printed base plate P, and whether good above-mentioned Control Component 60 carry out judgement according to the image of being made a video recording to the outward appearance (more specifically, the installment state of the element on the printed base plate P) of printed base plate P.At this, if judged result is a defective products, Control Component 60 is presented on the liquid crystal panel 4 image of this substrate P, makes operating personnel carry out visual judgement according to the image that is presented at the substrate P on this liquid crystal panel 4.And when being judged as defective products once more in this visual judgement, the automatic judgement of promptly above-mentioned Control Component 60 and operating personnel's visual judgement both sides all judge when printed base plate P is defective products, and printed base plate P is just as defective products and processed.In addition, the printed base plate P that above-mentioned Control Component 60 the is carried out particular content whether good judgement is moved is elaborated in the back.
So, whether good after printed base plate P the judgement release, worktable 30 turns back to original position, and operating personnel take out printed base plate P with hand from worktable 30, thereby finish the inspection to this printed base plate P.By repeating above-mentioned checks sequence, a plurality of printed base plate P are carried out visual examination successively.In addition, check after the end, the touch operation that operating personnel stipulate liquid crystal panel 4, the display frame of this liquid crystal panel 4 just turns back to menu screen, and testing fixture 1 turns back to above-mentioned holding state.
Below, whether good the particular content that above-mentioned Control Component 60 is carried out judgement action etc. describe.Above-mentioned camera 52 is taken being examined after the face of printed base plate P, and Control Component 60 at first, carries out the processing that the photographed images of aforesaid substrate P and benchmark image data as the benchmark of non-defective unit substrate are compared.Particularly, Control Component 60, the said reference image data storage (is equivalent to storage unit involved in the present invention in its inner storage part 61, with reference to Fig. 7) in, thereby compare by image and to obtain difference the captured printed base plate P of this reference data image and above-mentioned camera 52, and, judge whether printed base plate P is good according to the image of this difference.That is,, the photographed images of printed base plate P and benchmark image data are compared the automatic judging unit of judging that printed base plate P is whether good thereby constitute by above-mentioned Control Component 60.In addition, the extraction of above-mentioned difference image, for example, the reference mark of using by a plurality of locational position alignment that makes the upper surface (being mounted face) that separately is arranged on printed base plate P, consistent between the photographed images of printed base plate P and benchmark image data, thus carry out under at two images by the state of position alignment.
Be stored in the benchmark image data of above-mentioned storage part 61, the sample image by one or more non-defective unit substrates constitutes at first, and still, as aftermentioned, along with the carrying out of checking, check result is reflected and suitably is added.That is, the benchmark image data under the state that has carried out checking at the printed base plate P of at least one determined number, have a plurality of data.And, so exist under a plurality of benchmark image data conditions, printed base plate P, with the comparison of wherein any one benchmark image data in can be judged as non-defective unit, then regard as non-defective unit.Therefore, the quantity of benchmark image data (scope) is big more, and the scope of printed base plate P that is judged as non-defective unit is wide more.
Fig. 8 is the mode chart that is used to illustrate the content of above-mentioned Flame Image Process, and Fig. 8 A represents the image of the printed base plate P that camera 52 is captured, and Fig. 8 B represents the benchmark image data, and Fig. 8 C represents to carry out the difference image that Flame Image Process obtains by Control Component 60.As shown in Figure 8, various electronic components are installed on the printed base plate P, when the installation site of above-mentioned electronic component or kind etc., between the benchmark image data of the photographed images of Fig. 8 A and Fig. 8 B, occur when different, Dui Ying difference factor is displayed in the difference image of Fig. 8 C therewith.For example, electronic component a among Fig. 8 A and the electronic component a ' among Fig. 8 B, there is skew in their installation site, therefore, shows the difference factor of alpha corresponding to the offset of electronic component a, a ' in the difference image of Fig. 8 C.In addition, electronic component b among Fig. 8 A and the electronic component b ' among Fig. 8 B, therefore their component kind difference, shows the difference factor beta corresponding to the different surfaces color of each electronic component b, b ' in the difference image of Fig. 8 C.In addition, in the difference image of Fig. 8 C, except above-mentioned difference factor of alpha, β, also show the represented small difference factor of symbol ε.
Extract the Control Component 60 of difference image shown in Fig. 8 C out through the Flame Image Process of regulation, then, whether the area of judging above-mentioned each difference factor (α, β etc.) is below the higher limit of predesignating, if below higher limit, judge that then printed base plate P is a non-defective unit, if and, then be judged as defective products greater than higher limit.Below, in the present embodiment, the higher limit of the area of above-mentioned difference factor is called upper limit difference area A.
The result of the visual examination of the resulting printed base plate P of above-mentioned Flame Image Process, if printed base plate P is judged as defective products, then the image of this printed base plate P is presented on the LCD monitor 4, final judgement is just undertaken by operating personnel's visual judgement.
Fig. 9 represents to be presented at image as operating personnel's visual judgement the image of the printed base plate P on the above-mentioned LCD monitor 4.As shown in Figure 9, in LCD monitor 4, show image to the difference image of the photographed images stacking diagram 8C of the printed base plate P shown in Fig. 8 A.At this moment, the difference factor (ε of Fig. 8 C) of area below above-mentioned upper limit difference area A is omitted, and greater than difference factor of alpha, the β of upper limit difference area A, and with corresponding to its difference characteristic, the state that is coloured to different colours is represented.This is the measure of taking for the visual judgement that makes operating personnel carries out more easily, for example, the offset of electronic component and the difference factor of alpha that produces is coloured to blueness, the kind of electronic component is different and difference factor beta that produce is coloured to redness etc.
Then, operating personnel, the visual judgement of printed base plate P is carried out in the display frame of visual such LCD monitor 4, and, by touch LCD monitor 4 its result is imported.That is,, constitute the input block that operating personnel import visual judged result by above-mentioned LCD monitor 4.
The result of above-mentioned visual judgement is printed base plate P when being judged as defective products once more, and above-mentioned label assembly 55 operates, and puts on the NG mark on printed base plate P, and gives the alarm.On the other hand, when printed base plate P was judged as non-defective unit in above-mentioned visual judgement, Control Component 60 with the photographed images of this printed base plate P, appended as the said reference view data and to be stored in storage unit 61.That is,, constitute the control module that the photographed images that is judged as the printed base plate P of non-defective unit in the visual judgement with operating personnel is appended to the said reference image by above-mentioned Control Component 60.Thus, in the inspection afterwards, be in the printed base plate P of components identical installment state, automatic judgement by being carried out according to the benchmark image data of being added by Control Component 60 is judged as non-defective unit, therefore, for same substrate P, operating personnel need not to carry out one by one visual judgement.And the inspection quantity of printed base plate P is many more, and the image of the printed base plate P that is added as benchmark image data as described above also can be many more, and therefore, operating personnel's visual judgement frequency will descend thereupon.
When above-mentioned printed base plate P being carried out whether good judgement, in the example of Fig. 8 and Fig. 9, used the general image of printed base plate P to judge, still, for example as following, also the image segmentation of printed base plate P can be become to carry out whether good judgement after a plurality of zones.After, by such example present embodiment is described.At first, in the automatic judgement of Control Component 60, the photographed images of printed base plate P is divided into a plurality of regional P1, P2 shown in Figure 10 ...On the other hand, corresponding with it, the said reference view data is with as corresponding to each regional P1, P2 ... benchmark image respectively separate, stored in storage part 61.Then, each area image of above-mentioned divided photographed images is compared respectively with the benchmark image data in corresponding zone, thereby extract out corresponding to each regional P1, P2 ... difference image and calculate the area of difference factor, judge that then this area whether below the upper limit difference area A of predesignating, judges thus whether printed base plate P is good.In addition, when cutting apart above-mentioned photographed images, read and separately be arranged on the reference mark that a plurality of locational position alignment on the printed base plate P is used, from above-mentioned photographed images, cut each regional P1, P2 of carrying out set positions with this reference mark as benchmark ... image.Then, under the state that benchmark image data by each regional photographed images that will so obtain and corresponding zone are aimed at mutually in each position (for example, make under each regional diagonal position state consistent with each other) compare, extract out thus corresponding to each regional P1, P2 ... difference image.
Above-mentioned each regional P1, P2 ... quantity (image cut apart number) and size thereof, according to the size of printed base plate P and on element installment state etc., can suitably set.For example, in the example of Figure 10, because the roughly the same element of size is installed, thereby the photographed images of printed base plate P is divided into size zone (P1～Pn) much at one, but, be installed in size of component gap on the printed base plate P when big, the image segmentation that the position of large-size components is installed becomes big zone, and the image that the position of small-sized component is installed then is divided into the zonule.And, corresponding with it, the value of above-mentioned upper limit difference area A, big components set is big, small components is set at little.That is, usually, big element does not require too high installation accuracy, and small components then requires higher relatively installation accuracy, thereby the image segmentation more of small components, thus the strict difference of estimating.
Whether good in carry out judgement by above-mentioned Flame Image Process, Control Component 60 is confirming each regional P1, P2 ... in any one zone in when difference factor greater than above-mentioned upper limit difference area A is arranged, judge that printed base plate P is a defective products.So, in the operating personnel's that then carry out visual judgement, on LCD monitor 4, show the image be identified greater than the zone of the difference factor of upper limit difference area A (to the superpose image of difference image in corresponding zone of area image), visual this image of operating personnel carries out visual judgement.At this moment, on LCD monitor 4, its image of the zone of being segmented is exaggerated demonstration more.Thus, guarantee visual visuognosis degree when judging well.
Below, according to Figure 11～process flow diagram shown in Figure 13, the control action of Control Component 60 of the testing fixture 1 of said structure is described.This control action Once you begin, Control Component 60, the instruction input liquid crystal panel 4 (step S1, S3) that is installed on the worktable 30 of substrate holding mechanism 24 at printed base plate P and checks beginning carries out above-mentioned printed base plate P is moved to check locational control (step S5) afterwards.Particularly, be installed in by gateway 6 on the worktable 30 (with reference to the solid line of Fig. 3) that is positioned at original position confirming printed base plate P, and liquid crystal panel 4 is touched operation and has selected " beginning to check " afterwards from its menu screen, make 20 runnings of single shaft robot, above-mentioned worktable 30 is moved along Y direction, thus printed base plate P is moved on the inspection position shown in two dot-and-dash lines of Fig. 3.
Then, Control Component 60 is carried out the control (step S7) of taking printed base plate P by the camera 62 of camera assembly 51.Particularly, single shaft robot 40 is operated, camera assembly 51 is positioned at the top of the printed base plate P that is positioned at above-mentioned inspection position, and makes lighting device 54 irradiating illumination light, under this state, make it take printed base plate P camera 52 output control signals to illuminate substrate P.
Then, the decision image segmentation is counted n and is cut apart number (step S9) with as the photographed images of cutting apart above-mentioned printed base plate P in the step of back the time, and carries out decision and judge the whether control (step S11) of the benchmark upper limit difference area A well time of printed base plate P according to above-mentioned split image.Storage part 61 is set and be stored in to above-mentioned value according to the kind of the printed base plate P that is classified corresponding to the size of printed base plate P or the installment state of element etc., in advance.In addition, the value of above-mentioned upper limit difference area A perhaps is set at certain value, perhaps according to the installment state of element, increases and decreases setting by element or by the zone.Thereafter, Control Component 60 is counted n according to the image segmentation that determines among the step S9, carries out the control (step S13) of the photographed images cut apart the captured printed base plate P of above-mentioned camera 52.Handle by this, photographed images for example is divided into state shown in Figure 10, forms the 1st～the n zone (P1, P2 ..., image Pn).Then, as first carries out the regional number of the judgment processing of difference area in the step of back, set i=1 (step S15).
Then, Control Component 60, read the benchmark image data (step S17) in i zone from storage part 61, thereby and each regional photographed images of these benchmark image data and the printed base plate P cut apart in above-mentioned steps S13 compared extract difference out, carry out calculating each zone (P1, P2 ...) in the control (step S19) of area s of difference factor.Then, judge below the upper limit difference area A whether this area s obtain in above-mentioned steps S11 (step S21).
In this step S21, be judged as YES, promptly the area s of the difference factor in confirming subject area is when above-mentioned upper limit difference area A is following, in other words, when there are not bigger unfavorable conditions such as offset in the electronic component in confirming this zone, enter next procedure S23, judge the judgment processing of whether all having carried out the difference area of step S21 with regard to All Ranges.Particularly, judge the number of regions of the judgment processing of having carried out the difference area, whether reach the image segmentation that determines among the above-mentioned steps S9 and count n (that is, whether i equals n).In this step S23, be judged as NO, promptly confirming when All Ranges not being carried out the judgment processing of difference area as yet, the object of this judgment processing is moved on to next zone (step S25), repeat above-mentioned processing, until the judgment processing of All Ranges being carried out the difference area.
In above-mentioned steps S21, be judged as NO, when promptly the area s of the difference factor in confirming subject area is greater than above-mentioned upper limit difference area A, in other words, when might there be bigger unfavorable conditions such as offset in the installation site of the electronic component in confirming this zone, enter next procedure S27, judge whether also to exist other benchmark image data in corresponding zone.At this, be judged as YES, promptly when confirming other benchmark image data of existence, turn back to above-mentioned steps S15, repeat the judgment processing of above-mentioned difference area as benchmark with new benchmark image data.On the other hand, in above-mentioned steps S27, be judged as NO, promptly confirming when not having other benchmark image data, carrying out, returning above-mentioned steps S23 then the control (step S29) of sign Fi (its initial value is 0) input " 1 " taking place with the corresponding NG in this zone.Promptly, at this, sign Fi=1 takes place in NG, be illustrated in printed base plate P the i zone photographed images and be stored in the comparison of all data of benchmark image data in the same i zone of conduct in the storage part 61, all have the difference factor greater than above-mentioned upper limit difference area A, expression is a defective products based on the judged result (judged result automatically) of the printed base plate P of the difference image in this i zone.
In addition, in above-mentioned steps S23, be judged as YES, promptly when confirming judgment processing with regard to All Ranges difference area and finished, enter next procedure S31, regional number is reset to i=1, and, judge corresponding to each regional NG and take place whether sign is 1 (step S31) according to order from the 1st zone (P1) to n zone (Pn).When this is judged as NO (Fi=0), enter step S32, confirm i＜n (YES among the step S32), make regional number i increase by 1 (step S33) then, and the processing that above-mentioned steps S31 begins is repeated in new zone.On the other hand, in above-mentioned steps S31, be judged as YES, promptly when confirming Fi=1, in other words, when confirming the zone that has greater than the difference factor of upper limit difference area A and exist, at the zone of Fi=1, execution shows the control (step S34) of visual judgement with image on LCD monitor 4.Particularly, on LCD monitor 4, show, to the photographed images in the i zone of printed base plate P superposeed the i zone of extracting out among the above-mentioned steps S19 difference image and carried out the image of above-mentioned painted processing (the difference factor is coloured to processing corresponding to the color of difference characteristic).Then, judge whether the visual judged result of carrying out according to the image that is presented at the i zone on the LCD monitor 4 is OK (very) (step S35).Particularly, judge whether based on the operation of operating personnel's touch LCD panel 4 and be the operation signal of OK from the expression judged result of liquid crystal panel 4 inputs.
In this step S35, be judged as NO, promptly when confirming visual judged result that operating personnel carry out above-mentioned zone and be NG (bad), give the alarm (step S41), and above-mentioned label assembly 55 is operated, carry out the control (step S42) of on printed base plate P, paying the NG mark.Then, be shown in LCD monitor 4 (step S43) afterwards in the content that with printed base plate P is defective products, carry out make above-mentioned worktable 30 turn back to can the loading and unloading printing substrate P original position (step S44).
On the other hand, in above-mentioned steps S35, be judged as YES, promptly when the visual judged result that confirms operating personnel is OK, execution makes this be judged as the photographed images in the zone of OK, as these regional benchmark image data, append the control (step S37) that is stored in storage part 61 with regional number interrelatedly.Then, enter step S32, judge whether All Ranges has been carried out above-mentioned processing.
(i＜n) promptly confirming when having undressed zone, makes regional number i increase by 1 (step S33), and the later processing of above-mentioned steps S31 is repeated in new zone to be judged as YES in above-mentioned steps S32.
On the other hand, in above-mentioned steps S32, be judged as NO, during i=n, that is, confirming the All Ranges of i=1～n, sign Fi=0 takes place in NG, even perhaps there is the zone (NG zone) of Fi=1, but operating personnel's visual judged result shows that on liquid crystal panel 4 printed base plate P is the content (step S38) of non-defective unit when being OK, enter above-mentioned steps S44 then, make printed base plate P return-to-home position.
In above-mentioned process flow diagram, the image segmentation of printed base plate P is become a plurality of regional P1, P2 ... each carries out the judgement of difference area regionally, but, as mentioned above, thereby also the benchmark image data of the photographed images of printed base plate P integral body and corresponding printed base plate P integral body can be compared and extract difference image out, judge its difference factor area whether below higher limit, thereby judge whether printed base plate P is good.If above-mentioned difference area is more than the higher limit, show on LCD monitor 4 that then the superposeed image of above-mentioned difference image of photographed images to above-mentioned printed base plate P integral body carries out visual judgement for operating personnel, when the result of this visual judgement is that printed base plate P is when being judged as non-defective unit, this is judged as the photographed images of the printed base plate P integral body of non-defective unit, as new benchmark image data, append and be stored in storage part 61.
As mentioned above, adopt above-mentioned the 1st embodiment, Control Component 60, by the photographed images of the captured printed base plate P of camera 52 and the benchmark image data that are stored in storage part 61 are compared, judge whether printed base plate P is good, when printed base plate P is judged as defective products, the image that on LCD monitor 4, shows this substrate P, make operating personnel carry out visual judgement, and when printed base plate P is judged as non-defective unit in this visual judgement, this is judged as the photographed images of the printed base plate P of non-defective unit, as the said reference view data, append and be stored in storage part 61, therefore, the carrying out along with checking can be reflected to operating personnel's visual judged result in the middle of the benchmark image data successively, according to the benchmark image data of the appropriate scope that is obtained thus, can above-mentioned Control Component 60 be judged automatically with appropriate accuracy more.
Promptly, in above-mentioned the 1st embodiment, Control Component 60, initial according to less benchmark image data, judge whether printed base plate P is good, therefore, the scope of printed base plate P that is judged as non-defective unit by this Control Component 60 is narrow, but, after the substrate P of some checked, in operating personnel's visual judgement, be judged as non-defective unit (judged result of Control Component 60 be operated personnel visual judge overthrow and become non-defective unit) the image of printed base plate P, be added as the benchmark image data successively, therefore, afterwards, Control Component 60 is according to the benchmark image data of the appropriate scope that has reflected above-mentioned visual judged result, automatically judge whether substrate P is good, thereby can check printed base plate P effectively with the appropriate precision identical with the actual visual judgement of carrying out of operating personnel.
And, adopt above-mentioned the 1st embodiment, append successively by the image that is judged as the printed base plate P of non-defective unit in the visual judgement only and to be stored in storage part 61 so simple formations operating personnel, just can make the scope of said reference view data reach more suitable, therefore, different with the conventional art that must carry out complicated routine processes, can reduce device 1 manufacturing cost, can shorten the processing time.
In addition, shown in above-mentioned the 1st embodiment, compare the difference image that obtains according to photographed images and benchmark image data to printed base plate P, judge when whether printed base plate P is good, by only obtaining the so simple formation of difference of two kinds image, that is, just can carry out the whether good judgement of printed base plate P effectively.
In addition, shown in above-mentioned the 1st embodiment, be divided into a plurality of zones in photographed images with printed base plate P, and to this each regional photographed images of cutting apart and, the corresponding with it benchmark image data according to each area stores compare, thereby when extracting difference image out and carry out the whether good judgement of printed base plate P by each zone, even it is bigger to be installed in the size disparity of the electronic component on the printed base plate P, also can thereby can irrespectively carry out appropriate visual examination to judge with the corresponding appropriate precision of its size whether the installment state of each element is good with installation elements to printed base plate P.
In addition, shown in above-mentioned the 1st embodiment, when being presented at above-mentioned difference image on the LCD monitor 4 with image as operating personnel's visual judgement, corresponding to the characteristic of difference (for example, be that the difference that produces offset appears and in installation elements on the printed base plate P, still the different and difference that produces etc. of component kind) its difference factor is coloured to different colours, thereby can improves visual visuognosis degree when judging effectively, and can improve the efficient of operating personnel's visual judgement.
In addition, shown in above-mentioned the 1st embodiment, substrate P will be arranged at the substrate holding mechanism 24 that moves between the inspection position that the original position that printed base plate P is loaded and unloaded and 52 couples of printed base plate P of camera take under the situation of inside of testing fixture 1, only need printed base plate P is installed on the original position, a succession of operation afterwards, be that printed base plate P moves to the inspection position or takes actions such as turning back to original position afterwards, can carry out automatically, therefore, can improve the ease of use of testing fixture 1 effectively.And, various apparatuses such as aforesaid substrate maintaining body 24, above-mentioned camera 52, Control Component 60 are installed as one by common underframe 11, can be handled upside down, therefore, can take up space by economy system, especially can not be subjected to the place to be limited in various places and use testing fixture 1.
In addition, in above-mentioned the 1st embodiment, be judged as the photographed images of the printed base plate P of non-defective unit in the visual judgement with operating personnel, as the benchmark image data, append successively and be stored in storage part 61, still, when (for example having appended some, 100 or 200) after the photographed images, data thereafter can no longer be appended.Like this, can prevent the excessive increase of benchmark image data, keep the good inspection of efficient.
In addition, in above-mentioned the 1st embodiment, by the touch operation of operating personnel to LCD monitor 4, decision operation personnel's visual judged result, but, also can when also not having operating personnel's operation, enter next the processing thereby judgement printed base plate P is a defective products through official hour.
In addition, in above-mentioned the 1st embodiment, obtain by camera 52 after the photographed images of printed base plate P integral body, be divided into each regional P1, P2 ... but, can also make camera assembly 51 move successively and worktable 30 is moved along Y direction, camera 52 is positioned at successively in the face of each regional P1, P2 along X-direction ... the position on take, thereby obtain above-mentioned each regional P1, P2 ... photographed images.Like this, exploring degree better pictures can be obtained, therefore,, also visual examination can be carried out accurately for the printed base plate P that minimum element is installed.
In addition, in above-mentioned the 1st embodiment, LCD monitor 4 adopts the LCD of touch panel formula, thereby be configured for the display unit and the input block of accepting operating personnel's operation of display image by same LCD monitor 4, but, as input block, keyboard outside the LCD monitor 4 etc. also can be set separately, thereby constitute input block and display unit respectively.
In addition, in above-mentioned the 1st embodiment, LCD monitor 4 (input block and display unit) is wholely set on testing fixture 1, but, can also be with above-mentioned display unit, input block etc., be arranged on separately outside the above-mentioned testing fixture 1, thereby use the machine that is arranged on separately outside the testing fixture to carry out operating personnel's visual judgement.On the other hand, shown in above-mentioned the 1st embodiment, to be wholely set as the LCD monitor 4 of display unit and input block at testing fixture 1, thereby in same device, carry out under the situation to the automatic judgement of printed base plate P and visual judgement, then can carry out the visual examination of printed base plate P with simple and compact structure.
In addition, in inspection method of the present invention and device, the substrate as checking object is not only limited to printed base plate, and for example, it can also be the substrate etc. that is formed with circuit on the lead frame.
In the 1st embodiment, the example that in a testing fixture 1 printed base plate P is carried out visual examination has been described, still,, comparatively it is desirable in order to improve the checking efficiency of printed base plate P, arrange many testing fixtures 1 and use.In addition, in the case, constitute a check system, can improve the checking efficiency of printed base plate P effectively as long as above-mentioned a plurality of testing fixture 1 is cooperated with each other.Below, just the concrete example that so constitutes describes according to the 2nd embodiment.
(the 2nd embodiment)
Figure 14 roughly represents the related base plate inspection system of the 2nd embodiment of the present invention.In base plate inspection system shown in Figure 14 10, many (among Figure 14 being 5) testing fixture 1a, 1b, 1b being arranged side by side ... connect by hub (hub) 70 networks.Above-mentioned each testing fixture 1a, 1b, 1b ... its basic structure is identical with the testing fixture 1 of above-mentioned the 1st embodiment, have the printed base plate P (with reference to Fig. 1 etc.) that operating personnel are supplied with and take and it is carried out Flame Image Process, thereby judge whether excellent function of printed base plate P.Wherein, be positioned at the testing fixture 1a of central authorities, except having the function of carrying out inspection processing as described above, also have and to be judged as the image of the printed base plate P of defective products in self machine (procuratorial work device 1a) or other machine (procuratorial work device 1b), be presented at the first-class function of LCD monitor 4 of self machine for carry out visual judgement for operating personnel.That is, the testing fixture 1a of central authorities not only has the function to the testing fixture of whether well judging automatically of substrate, also has the function that the visual judgement machine of image is used in the visual judgement that shows printed base plate P.Below, should be called main testing fixture 1a by the testing fixture 1a of central authorities, its outer testing fixture 1b is called secondary testing fixture 1b.
Above-mentioned main testing fixture 1a and secondary testing fixture 1b, 1b ..., the testing fixture 1 of Fig. 1 of its physical construction and above-mentioned the 1st embodiment～shown in Figure 6 is identical.Above-mentioned each testing fixture 1a, 1b, 1b ... in that this point attenuates to front side (LCD monitor 4 sides), also identical (with reference to Fig. 1 and Fig. 2) with above-mentioned the 1st embodiment, therefore, be arranged with 5 above-mentioned testing fixture 1a, 1b, 1b ... the state of Figure 14 in, above-mentioned each testing fixture 1a, 1b, 1b ..., be the center with operating personnel's erect-position, be arranged in roughly fan-shaped.Thus, check system 10 compact conformations, the operability of operating personnel in checking operation also can improve.
Then, with reference to the block scheme of Figure 15, the control system with regard to aforesaid substrate check system 10 describes.Main testing fixture 1a and secondary testing fixture 1b, 1b ... each Control Component 60, with the camera assembly 51 (camera 52 and lighting device 54) in separately the testing fixture; Label assembly 55; LCD monitor 4; Substrate feeding assembly 24 and each the single shaft robot 20,40 that checks assembly 50 usefulness; Other various sensor class electric connections such as (not shown).
The Control Component 60 of above-mentioned main testing fixture 1a, different with the Control Component 60 of secondary testing fixture 1b, it comprises that file (folder) 60b is judged in image storage part 60a (being equivalent to storage unit involved in the present invention), trust.At image storage part 60a, store the benchmark image data of the benchmark when whether good printed base plate P carried out judgement, entrust to judge file 60b, storing being judged as bad printed base plate P employed image when carrying out visual judgement among main testing fixture 1a or the secondary testing fixture 1b.And file 60b is judged in the above-mentioned Control Component 60 of main testing fixture 1a, image storage part 60a, trust, by Control Component 60 electric connections of hub and secondary testing fixture 1b.
Above-mentioned main testing fixture 1a and secondary testing fixture 1b, 1b ... each Control Component 60, for according in advance the storage operation program, come supplying to each testing fixture 1a, 1b, 1b ... printed base plate P carry out a series of inspection action, the action of centralized control aforesaid substrate feeding assembly 24 and inspection assembly 50 grades, and whether good the image captured according to the camera 52 of above-mentioned inspection assembly 50 carry out printed base plate P processing such as judgement.
The base plate inspection system 10 of said structure for example carries out the inspection of printed base plate P as following.
After the system start-up, main testing fixture 1a and secondary testing fixture 1b, 1b ... remain on holding state respectively, until on-test.Under this holding state, each testing fixture 1a, 1b, 1b ... in, the worktable 30 of aforesaid substrate feeding assembly 24 is positioned at original position, and liquid crystal panel 4 shows the menu screen of regulation.
Under this state, operating personnel are installed in main testing fixture 1a and secondary testing fixture 1b, 1b with printed base plate P ... in any one the device in, and touch LCD panel 4 is selected " beginning to check " in the above-mentioned menu screen, thereby the inspection of beginning substrate P in testing fixture 1a or 1b.In addition, printed base plate P is installed in above-mentioned each testing fixture 1a, 1b, 1b ... the time, printed base plate P is installed on the above-mentioned worktable 30 that is positioned at original position.Promptly, printed base plate P is examined the location-plate 36a of face (face of element is installed) the above-mentioned worktable 30 of state butt up with it, and the printed base plate P that will be positioned thus is embedded into substrate and keeps between the support 36,38, thereby substrate P is installed on the worktable 30.
Then, check Once you begin, in testing fixture 1a that above-mentioned printed base plate P is installed or 1b, by the running of single shaft robot 20, worktable 30 moves along Y direction, and the running of the single shaft robot 40 by the opposing party, camera assembly 51 moves along X-direction, and thus, the camera 52 of camera assembly 51 is positioned on the position of facing with printed base plate P, under the irradiation of the illumination light of above-mentioned lighting device 54,52 couples of printed base plate P take by this camera.
Above-mentioned camera 52 has been taken after the printed base plate P, according to its photographed images, whether good the outward appearance (more specifically, the installment state of the element on the printed base plate P) of printed base plate P is carried out judgment processing.The judgment processing whether this is good is carried out in the Control Component 60 of testing fixture 1a that above-mentioned printed base plate P is taken or 1b.At this, if judged result is bad, above-mentioned Control Component 60, image after showing the Flame Image Process that the photographed images of above-mentioned printed base plate P is stipulated on the liquid crystal panel 4 of main testing fixture 1a makes operating personnel carry out visual judgement according to the image that is presented at the substrate P on this liquid crystal panel 4.And, in this visual judgement, being judged as once more when bad, the automatic judgement of promptly above-mentioned Control Component 60 and operating personnel's visual judgement both sides all judge when printed base plate P is defective products, printed base plate P is just as defective products and processed.
So, after the whether good judgement release of printed base plate P, on the liquid crystal panel 4 of testing fixture 1a that this printed base plate P is taken or 1b, show its judged result, and, make printed base plate P turn back to original position along with the moving of worktable 30.Then, operating personnel take out printed base plate P from worktable 30, according to the display message of above-mentioned LCD monitor 4, printed base plate P are put into not shown classification pallet.Thus, end is to the inspection of a substrate.And, by making each testing fixture 1a, 1b, 1b ... carry out above-mentioned checks sequence continuously with the regular hour difference respectively, can carry out visual examination simultaneously a plurality of printed base plate P.
Below, to above-mentioned each testing fixture 1a, 1b, 1b ... in the particular content of the whether good judgement action of the printed base plate P that carries out etc. describe.Each testing fixture 1a, 1b, 1b ... camera 52 take being examined after the face of printed base plate P, the Control Component 60 of this testing fixture 1a or 1b, at first, carry out processing that the photographed images of aforesaid substrate P and benchmark image data as the benchmark of non-defective unit substrate are compared.These benchmark image data, centralized stores image storage part 60a (Figure 15) in the Control Component 60 that is arranged on main testing fixture 1a.Each testing fixture 1a, 1b, 1b ... Control Component 60, from the image storage part 60a of above-mentioned main testing fixture 1a, read this benchmark image data, thereby and the image of the captured printed base plate P of these benchmark image data and above-mentioned camera 52 compared obtain difference, according to the image of this difference, judge whether printed base plate P is good.In addition, the concrete Flame Image Process content of when extracting above-mentioned difference image etc. out, being carried out, identical with above-mentioned the 1st embodiment, thereby omit its detailed description.
Below, according to process flow diagram shown in Figure 16, describe with regard to the control action of the base plate inspection system 10 of said structure.As shown in figure 16, in base plate inspection system 10, carry out two control flow C1, C2 simultaneously.Wherein, control flow C1 is main testing fixture 1a and secondary testing fixture 1b, 1b ... control flow when respectively printed base plate P being judged automatically is at each testing fixture 1a, 1b, 1b ... in the flow process that is performed generally.On the other hand, control flow C2 is to make the control flow of operating personnel to carrying out visual judgement by the substrate that is judged as defective products in the above-mentioned automatic judgement, is the flow process of only carrying out in main testing fixture 1a.
At first, at each testing fixture 1a, 1b, 1b ... in the control flow C1 of the automatic judgement usefulness that is performed generally describe.This control flow C1 Once you begin, each testing fixture 1a, 1b, 1b ... Control Component 60, the instruction input liquid crystal panel 4 (step S101, S102) that is installed on the worktable 30 of substrate feeding assembly 24 at printed base plate P and checks beginning carries out above-mentioned printed base plate P is moved to check locational control (step S103) afterwards.Particularly, be installed in by gateway 6 on the worktable 30 (with reference to the solid line of Fig. 3) that is positioned at original position confirming printed base plate P, and liquid crystal panel 4 is touched operation and has selected " beginning to check " afterwards from its menu screen, make 20 runnings of single shaft robot, above-mentioned worktable 30 is moved along Y direction, thus printed base plate P is moved on the inspection position shown in two dot-and-dash lines of Fig. 4.
Then, above-mentioned Control Component 60 makes to handle to enter step S105, thereby promptly enter printed base plate P is taken the automatic judgement control of judging that it is whether good.In addition, the particular content of automatic judgement control herein is identical with above-mentioned the 1st embodiment.Promptly, take printed base plate P by camera 52, thereby and the image of being made a video recording and the benchmark image data that are stored in the image storage part 50a of above-mentioned main testing fixture 1a are compared take out difference, extract difference image such shown in Fig. 8 C thus out, and whether the area s that judges each difference image in the above-mentioned image below the upper limit difference area A of predesignating, thereby judges whether above-mentioned printed base plate P is good.
The result of above-mentioned automatic judgement control, when printed base plate P is judged as non-defective unit (YES among the step S107), carry out the testing fixture 1a of this judgement or the Control Component 60 of 1b, show that on the liquid crystal panel 4 of above-mentioned testing fixture 1a or 1b printed base plate P is the content (step S109) of non-defective unit, carry out the control (step S111) that makes worktable 30 turn back to original position that can the loading and unloading printing substrate P then.
On the other hand, the result of above-mentioned automatic judgement control, when printed base plate P is judged as defective products (NO among the step S107), execution is judged file 60b to the trust of main testing fixture 1a, sends the control (step S113) that file is judged in the trust that is made of the view data of operating personnel's visual judgement usefulness etc.Particularly, the image of the printed base plate P that takes in the automatic judgement control to above-mentioned steps S105, be superimposed upon the difference image of being extracted out in this control, and to its painted processing of stipulating (the difference factor is coloured to processing corresponding to the color of difference characteristic), thereby make the view data of visual judgement usefulness, to add the information that the inspection machine of defective products substrate or the generation No (serial number) in this inspection machine etc. take place to this view data, judge that as above-mentioned trust file sends to the trust judgement file 60b of main testing fixture 1a.
So, trust judgement file is sent to after the trust judgement file 60b of main testing fixture 1a, in main testing fixture 1a,, carry out the action shown in the control flow C2 in order to carry out operating personnel's visual judgement.Promptly, in this control flow C2, the Control Component 60 of main testing fixture 1a, at first, confirm its trust judges whether store trust judgement file (step S131) among the file 60b, when having above-mentioned file, read the trust of being stored successively and judge file (step S133), and from this document, extract the view data of above-mentioned visual judgement usefulness out and it is presented at (step S135) on the LCD monitor 4.Then, Control Component 60 judges whether according to the visual judged result that image carried out that is presented on this LCD monitor 4 be non-defective unit (step S137).Particularly, judge whether based on the operation of operating personnel's touch LCD panel 4 and be the operation signal of non-defective unit from the expression judged result of liquid crystal panel 4 inputs.
Be judged as YES in above-mentioned steps S137, promptly when the visual judged result that confirms operating personnel is non-defective unit, carries out file is judged in the above-mentioned trust of having handled, writing the visual judged result of expression is the control (step S139) of the OK sign of non-defective unit.On the contrary, be judged as NO in above-mentioned steps S137, promptly when the visual judged result that confirms operating personnel is defective products, carries out file is judged in above-mentioned trust, writing the visual judged result of expression is the control (step S141) of the NG sign of defective products.So, in main testing fixture 1a, to from each testing fixture 1a, 1b, 1b ... trust judge file, each visual whether good sign of its visual judged result of expression that writes successively of operating personnel with judging.
On the other hand, turn back to control flow C1 once more, in having entrusted the testing fixture 1a or 1b that judges, wait is entrusted in the judgement file at it and is write above-mentioned sign (step S115), then, Control Component 60 is by confirming whether exist as the OK sign of above-mentioned sign and any one party of NG sign, the visual judged result of coming the decision operation personnel is that non-defective unit still is defective products (step S117).
In above-mentioned steps S117, be judged as YES, promptly when the visual judged result that confirms operating personnel is non-defective unit, execution is judged as the photographed images of the printed base plate P of non-defective unit with this, as the said reference view data, appends the control (step S119) that is stored in image storage part 60a.Then, enter step S9, display base plate is the content of non-defective unit on liquid crystal panel 4, makes printed base plate P return-to-home position (step S111).
On the other hand, be judged as NO in above-mentioned steps S117, promptly when the visual judged result that confirms operating personnel was defective products, (step S121) gave the alarm, execution makes above-mentioned label assembly 55 runnings, and printed base plate P mark is given the control (step S123) of NG mark.Then, on liquid crystal panel 4, show printed base plate P be defective products content (step S125) afterwards, enter step S111, make printed base plate P turn back to original position.
In addition, in above-mentioned control action, when carrying out the automatic judgement control of step S105 according to divided in advance each shooting area on the printed base plate P, promptly, with process flow diagram (Figure 11 or Figure 12) illustrated in above-mentioned the 1st embodiment similarly, carry out the shooting of the printed base plate P that implements by camera 52 according to divided each shooting area in advance, and this is compared according to difference area s and upper limit difference area A that each shooting area calculates, thereby when carrying out above-mentioned automatic judgement control, in the process of judging automatically successively according to each shooting area, even the automatic judged result to one of them or a plurality of shooting areas is NG, treats also that automatic judgement in all shooting areas sends to entrust after finishing again and judge file.Then, among the process flow diagram C2 that is carried out among the main testing fixture 1a, corresponding to one or more shooting area that is judged as NG in the above-mentioned automatic judgement, successively visual judgement is presented on the LCD monitor 4 with image, operating personnel carry out visual judgement to the view data that this is judged as the shooting area of NG in order.At this moment, when in the visual judgement of operating personnel, NG occurring, judge that to entrusting file writes the NG sign to any one shooting area, opposite, when the visual judged result of all shooting areas (automatically judged result be all shooting areas of NG) is OK, judge that to entrusting file writes the OK sign.
In addition, in main testing fixture 1a, carry out the control action of flow process C1 and C2 simultaneously, still,,, can suitably use LCD monitor 4 flexibly therebetween in order to carry out each flow process C1, C2.Promptly, the view data that from the step S135 of flow process C2, shows visual judgement usefulness begin till operating personnel import visual judged result in the step S137 during, LCD monitor 4 is used for the carrying out of flow process C2, on the contrary, during till the input of operating personnel in the step S102 of flow process C1 begins to check instruction, or in step S109, check result is shown in monitor during, LCD monitor 4 is used for the carrying out of flow process C1.And, for fear of above-mentioned time-interleaving, in main testing fixture 1a, the step S135 of flow process C2, the demonstration of the LCD monitor among the S137 4 control (showing the control of the view data of visual judgement usefulness) have precedence over the step S102 of flow process C1 or the demonstration control of the LCD monitor among the S109 4.
As mentioned above, adopt above-mentioned the 2nd embodiment, be provided with a plurality of testing fixture 1a, 1b, 1b ... (main testing fixture 1a and secondary testing fixture 1b, 1b ...), thereby in the base plate inspection system 10 that can check simultaneously a plurality of printed base plate P, because with above-mentioned testing fixture 1a, 1b, 1b ... in any one device in be judged as the image of the printed base plate P of defective products, centralized displaying is by above-mentioned each testing fixture 1a, 1b, 1b ... in the LCD monitor 4 of the general main testing fixture 1a that constitutes of a table apparatus on, therefore, operating personnel, no matter at which testing fixture 1a, 1b, 1b ... the bad substrate of middle generation, all the time the 4 pairs of substrates of LCD monitor that can both see same main testing fixture 1a carry out visual judgement, and the inspection machine that need not move to one by one corresponding to this printed base plate P when bad substrate takes place carries out visual judgement.Its result can check a plurality of printed base plate P simultaneously, and can realize the more superior base plate inspection system of operability 10.
In addition, shown in above-mentioned the 2nd embodiment, only at a plurality of testing fixture 1a, 1b, 1b ... in main testing fixture 1a be provided with above-mentioned image storage part 60a, and will be common to each testing fixture 1a, 1b, 1b ... the benchmark image data centralization be stored under the situation of this image storage part 60a, can be according to general benchmark image data to each testing fixture 1a, 1b, 1b ... in the printed base plate P that checked carry out whether good judgement, therefore, can avoid each testing fixture 1a, 1b, 1b ... judgment standard deviation appears, and can carry out the inspection of printed base plate P effectively.
In addition, in above-mentioned the 2nd embodiment, each testing fixture 1a, 1b, 1b ... on be provided with Control Component 60 respectively by oneself, still, can also be for example on therein the main testing fixture 1a, centralized control all testing fixture 1a, 1b, 1b are set ... the centralized control assembly of running.
In addition, in above-mentioned the 2nd embodiment, by making a plurality of testing fixture 1a, 1b, 1b ... in a main testing fixture 1a, possess and be used for operating personnel carry out the visual judgement machine of conduct of visual judgement to printed base plate P function, thereby save the space of check system 10, still, unquestionable, can also outside inspection machine, special-purpose above-mentioned visual judgement machine be set separately.Figure 17 represents an example of this mode.In the base plate inspection system 90 in this example shown in Figure 17, be provided with by a plurality of testing fixtures 91 that substrate is checked and arrange a plurality of inspecting substrate U of portion that form, and these a plurality of inspecting substrate U of portion are connected with visual judgement machine 92 respectively by network line.Each U of inspecting substrate portion and visual judgement machine 92 are respectively by a bit manipulation personnel operation.In this structure, as long as with the benchmark of non-defective unit substrate is the benchmark image data, centralized stores is in visual judgement machine 92, and to be stored in benchmark image data in this visual judgement machine 92 as benchmark, make the U of each inspecting substrate portion carry out whether good inspection to printed base plate P, just whether good the judgment standard of judgement among all U of inspecting substrate portion can be remained on certain level, make the more stable quality of printed base plate P.And, because the operating personnel that carry out visual judgement are same operating personnel all the time, thereby can keep the judgment standard of certain visual judgement, bigger fluctuation appears in the benchmark image data of avoiding in the checking process effectively being appended.
In the above-mentioned the 1st and the 2nd embodiment, when being judged as in the automatic judgement of printed base plate P at Control Component 60 when bad, image as operating personnel's visual judgement usefulness, on LCD monitor 4, demonstration is with the photographed images of printed base plate P and the image of the difference image stack of extracting out by the Flame Image Process of regulation, but, as image in addition, can also can be for reference in above-mentioned visual judgement be added in reference to image above-mentioned image near grade shown.Below, according to the 3rd embodiment, the concrete example when adopting such structure describes.
(the 3rd embodiment)
In the 3rd embodiment, use the testing fixture with testing fixture 1 same structure of above-mentioned the 1st embodiment, its concrete structure is as Fig. 1～shown in Figure 7.But, in the related testing fixture of the 3rd embodiment (below, testing fixture 1), be presented at the form on the LCD monitor 4 for the image of operating personnel's visual judgement usefulness, different with above-mentioned the 1st embodiment.Therefore, stress this point below.
In the testing fixture 1 of present embodiment, after Control Component 60 carried out the visual examination of printed base plate P, the photographed images that Be Controlled assembly 60 is judged as bad part is presented on the LCD monitor 4 carried out visual judgement for operating personnel.In the shown bad part, show the image of this bad part and the difference image of benchmark image on the LCD monitor 4.In the present embodiment, the view data of benchmark image is the benchmark image data, comprises 6 kinds of limit view data, by Control Component 60 according to benchmark image data creating benchmark image.Particularly, 6 kinds of limit images based on above-mentioned 6 kinds of limit view data comprise, right side deflection limit image, left side deflection limit image, upside deflection limit image, downside deflection limit image, the big limit image of area, the little limit image of area.
So-called deflection limit image is expression inspected object thing is judged as bad tight preceding non-defective unit state with respect to the skew of the normal position on the printed base plate P a image.For example, right side deflection limit image is meant that the inspected object thing is with respect to the deflection limit image under the offset configuration situation to the right of the normal position on the printed base plate P.In addition, the big limit image of area, the area that is expression inspected object thing is judged as the bad tightly image of preceding non-defective unit state greater than the regulation area on the printed base plate P, the little limit image of area is that the area of expression inspected object thing is judged as the bad tightly image of preceding non-defective unit state less than the regulation area on the printed base plate P.
At this, the method for making of the difference image in the visual judgement is described.Take by camera 52 after the face that is examined of printed base plate P, Control Component 60, at first, to the view data of the photographed images of printed base plate P with judge printed base plate P whether good benchmark is the benchmark image data and compare.Particularly, Control Component 60, the said reference image data storage in its inner storage part 61 (Fig. 7), is obtained difference thereby compare by the view data to the image of the captured printed base plate P of these benchmark image data and camera 52, make difference image based on this difference.In addition, the making of difference image, for example, by making a plurality of locational position alignment reference mark of the face that is mounted that separately is arranged on printed base plate P, consistent between the view data of the photographed images of printed base plate P and benchmark image data, thus carry out under at two images by the state of position alignment.
(show state on the LCD monitor 4)
Below, to the above-mentioned difference image that will be shown in LCD monitor 4 and in visual judgement the concrete display packing that shows simultaneously with reference to image for reference describe.In addition, in the present embodiment, the visual examination object is the printed base plate that is printed with pasty state scolder (below, abbreviate scolder as).Figure 18～Figure 21 represents the figure of the display frame of LCD monitor 4, represents 4 kinds of representative display types respectively.The difference region D 1 of difference image, D2 are coloured to the color different with other zone, thereby can distinguish the zone beyond difference region D 1, D2 and difference region D 1, the D2 clearly.In addition, the display frame of LCD monitor 4 is 2 five equilibriums up and down, thereby is divided into 4 zones.Below, describe as an example with respect to the offset after being printed under the last formed square portion of terminal of printed base plate P (land) the T shift state is bad with pasty state scolder S.
Display type 1 (Figure 18), on upper left zone, show the above-mentioned standard picture (normal condition of printed base plate P with reference to one of image, be the image that scolder S is printed on the state on the desirable printing position on the printed base plate P), on upper right zone, show the overlapped image of photographed images of difference image and printed base plate P.The difference region D 1 of the difference image of making according to the difference of the photographed images of printed base plate P and standard picture is presented at the zone from left lateral to top portion in the viewing area of the scolder S in the photographed images of printed base plate P.
Display type 2 (Figure 19), on upper left zone, show above-mentioned left side deflection limit image (image of the expression non-defective unit limit when scolder S is printed on the position that is offset to the left with respect to the regulation printing position on the printed base plate P) with reference to one of image, on upper right zone, show the overlapped image of photographed images of difference image and printed base plate P.The difference region D 2 of the difference image of making according to the difference of the photographed images of printed base plate P and left side deflection limit image is presented at the zone from left lateral to top portion in the viewing area of the scolder S in the photographed images of printed base plate P.The area of the left lateral of difference region D 2 is less than the area of the left lateral of difference region D 1 shown in Figure 180.
Display type 3 (Figure 20), on upper left zone, show above-mentioned left side deflection limit image with reference to one of image, on upper right zone, the overlapped image of photographed images that shows difference image (difference region D 2) and printed base plate P, display standard image on the zone of lower-left on the zone of bottom right, shows the overlapped image of photographed images of difference image (difference region D 1) and printed base plate P.
Display type 4 (Figure 21), on upper left zone, show above-mentioned left side deflection limit image with reference to one of image, on upper right zone, the overlapped image of photographed images that shows difference image (difference region D 2) and printed base plate P, on the zone of lower-left, show above-mentioned standard picture with reference to one of image.By operating personnel's judgement, can from above-mentioned 4 kinds of display types, suitably select the display type that is suitable for visual judgement in the above-mentioned display type 1～4.In addition, in above-mentioned display type 1～4, difference image (difference region D 2) and the overlapped image of left side deflection limit image perhaps with difference image (difference region D 1) and the overlapped image of standard picture, can also be shown with reference to one of image as above-mentioned.
(production order of limit image)
Below, with reference to Figure 22,, describe with regard to the order of graphics processing unit making corresponding to offset bad (4 kinds up and down) and area 6 kinds of limit images greatly/little bad (2 kinds of sizes).In addition, so-called offset is bad, is meant that the scolder S that is printed on the printed base plate P deviates from printing position bad of regulation.In addition, area is big/little bad be the big bad and little bad abbreviation of area of area, area is bad greatly, the area that is meant the scolder S that is printed on the printed base plate P is bad greater than the regulation area, area is little bad, and the area that is meant the scolder S that is printed on the printed base plate P is bad less than the regulation area.
At first, by image unit (below, be called camera 52) take dispose on the normal position inspected object thing (below, be called scolder S1) substrate (below, be called the solder printing substrate P 2 that finishes), shown in Figure 23 epimere, obtain the finish photographed images (S151) of substrate P 2 of solder printing.Then, from solder printing finished the view data of photographed images of substrate P 2, the view data (S152) of extracting scolder S1 area image out shown in Figure 23 hypomere, was made scolder S1 area image according to the view data of scolder S1 area image.Then, take the substrate that do not have printing solder S1 (below, be called undressed substrate) P1, obtain the photographed images (S153) of undressed substrate P 1 by camera 52.
Then, operating personnel, by input blocks such as ten keys, input with respect to the skew allowance of the regulation in normal printing position (below, be called position limit setting up and down) (S154), and with the position limit of input up and down setting be stored in the storage unit (below, be called storage part 61).Afterwards, according to the position limit setting up and down that is stored in the storage part 61,, make the limit view data (S155) of scolder S1 area image thus to the view data of the mobile scolder S1 area image of prescribed direction (direction up and down).Then, view data to the photographed images of the limit view data of scolder S area image and undressed substrate P 1 is synthesized, thereby making limit view data (below, be called offset limit view data) L1 (S156), and according to this offset limit view data L1, production location deflection limit image.So, right side deflection limit image, left side deflection limit image as Figure 24 B shown in, upside deflection limit image as Figure 25 A shown in and the downside deflection limit image as Figure 25 B shown in of making shown in Figure 24 A.
In addition, operating personnel, by input blocks such as ten keys, input with respect to the rate of change of the regulation of normal printing area (below, be called up and down setting of area limit) (S157), and with the area limit of input up and down setting be stored in the storage part 61.Afterwards, according to setting about the area limit that is stored in the storage part 61, the view data that enlarges or dwindle scolder S1 area image, thereby the limit view data (S158) of making scolder S1 area image.Then, view data to the photographed images of the limit view data of scolder S1 area image and undressed substrate P 1 is synthesized, thereby make area big/little limit view data L2 (S159), and according to this area big/little limit view data L2, make area big/little limit image.So, area big limit image and area as Figure 26 B shown in the little limit image of making shown in Figure 26 A.
As the image making software that is used to make above-mentioned various limit images, can comprise following operation: take the shooting operation that disposes the substrate of inspected object thing and do not dispose the substrate of inspected object thing by image unit; Storage is by the storage operation of the setting of input block input; Thereby the view data of the photographed images of the substrate that does not dispose the inspected object thing that obtained in the view data of the photographed images of the substrate that disposes the inspected object thing that obtained in the above-mentioned shooting operation and the above-mentioned shooting operation compared obtain difference, and extract the extraction operation of the view data of above-mentioned inspected object thing out; Make the view data of the above-mentioned inspected object thing that is obtained in the above-mentioned extraction operation, change, thereby make the change operation of the change view data of above-mentioned inspected object thing according to the setting of being stored in the above-mentioned storage operation; View data to the image of the change view data of the inspected object thing that obtained in this change operation and the above-mentioned substrate that does not dispose the inspected object thing is synthesized, thereby makes the synthesis procedure of limit view data; According to the limit view data that is obtained in this synthesis procedure,, make the image making operation of limit image by graphics processing unit.
(image display operations during inspection)
Below, according to process flow diagram shown in Figure 27, the control action with regard to the Control Component 60 of the testing fixture 1 of said structure describes.Be installed in by gateway 6 on the worktable 30 (with reference to the solid line of Fig. 3) that is positioned at original position at printed base plate P, and LCD monitor 4 is touched operation and has selected " beginning to check " (S201) afterwards from its menu screen, make 20 runnings of single shaft robot, worktable 30 is moved along Y direction, thus printed base plate P is moved on the inspection position shown in two dot-and-dash lines of Fig. 3 (S202).Then, single shaft robot 40 is operated, camera assembly 51 is positioned at the top of the printed base plate P that is positioned at above-mentioned inspection position, and make lighting device 54 irradiating illumination light, to illuminate substrate P, under this state,, make it take printed base plate P, obtain the photographed images (S203) of printed base plate P camera 52 output control signals.
Then, Control Component 60 reads the limit view data from its storage part 61, thereby and the photographed images of these benchmark image data and printed base plate P compared obtain difference, calculate the area s of difference factor thus.Then, judge that this area s is whether below the upper limit difference area A in being stored in storage part 61.When area s when upper limit area A is following, be judged as bad (S204) do not take place, make worktable 30 move to original position from checking the position.Afterwards, on LCD monitor 4, show " check and finish " and " beginning to check ".If selected " check and finish " (S205), then finish to check (S206).If selected " beginning to check " (S205), then to enter S202, carried out next one inspection.
On the other hand,, be judged as bad (S204) taken place as area s during greater than upper limit area A, and judge produced bad whether be area big/little bad.If area greatly/little bad (S207), from storage part 61 read area big/little limit view data (S208), to area big/thereby the view data of the photographed images of little limit view data and printed base plate P compares and obtains difference, and make the difference image (S209) based on this difference.Then, this difference image is presented on the LCD monitor 4, operating personnel carry out visual judgement.Meanwhile, on LCD monitor 4, show " judging NG " and " judging OK ".When visual judged result is that bad selection the " judge NG " is (S210) time, the position data that this bad part takes place is stored in (S211) in the storage part 61, and make worktable 30 from checking that the position moves to original position, then enter S205, judge and check whether finish.
In addition, when operating personnel's visual judged result for not being that bad the selection " judged OK " (S210) time, make worktable 30 from checking that the position moves to original position, then enter S205, judge and check whether finish.
On the other hand, if judge taken place bad be not area big/little bad (S207), then judge whether it is that offset is bad.If be judged as offset bad (S212), then read the bad limit view data of offset (S213) from storage part 61, thereby the view data of the photographed images of bad limit view data of offset and printed base plate P compared obtain difference, and make based on this and produce the difference image (S214) that divides.Then, this difference image is presented on the LCD monitor 4, operating personnel carry out visual judgement.Meanwhile, on LCD monitor 4, show " judging NG " and " judging OK " picture.When visual judged result is that bad selection the " judge NG " is (S215) time, the position data that this bad part takes place is stored in (S216) in the storage part 61, and make worktable 30 from checking that the position moves to original position, then enter S205, judge and check whether finish.
In addition, when operating personnel's visual judged result for not being that bad the selection " judged OK " (S215) time, make worktable 30 from checking that the position moves to original position, then enter S205, judge and check whether finish.
As mentioned above, present embodiment can obtain following effect.
1. the photographed images of the printed base plate P that camera 52 is captured and the difference image of limit image are presented at LCD monitor 4, and, also show simultaneously this moment as limit image with reference to one of image, thus, photographed images that can clear and definite printed base plate P and the difference between the limit image.Therefore, can make the precision of whether good judgement keep stable, and can improve the checking efficiency of operating personnel's visual judgement.
2. the photographed images data of difference image data and printed base plate P are synthesized under the state of position alignment,, can on the basis of the peculiar situation of considering printed base plate P, judge whether good by with both overlapping demonstrations.For example, when a plurality of portion of terminal T that are arranged on the printed base plate P are close to mutually, when in the orientation of portion of terminal T, producing skew, because the distance between the contiguous portion of terminal T weak point is judged as bad sometimes, but when on the direction that the orientation with portion of terminal T intersects skew taking place, even the area of difference image is identical, can not be judged as bad yet.
Can to as with reference to the standard picture of one of image and, will compare (display type 1) based on the image that the photographed images of the difference image of standard picture and printed base plate P is synthesized.
Can to as with reference to the limit image of one of image and, will compare (display type 2) based on the image that the photographed images of the difference image of limit image and printed base plate P is synthesized.
Can to as with reference to the limit image of one of image and, the image that will synthesize based on the photographed images of the difference image of limit image and printed base plate P and, as the standard picture of one of reference image and, will compare (display type 3) based on the image that the photographed images of the difference image of standard picture and printed base plate P is synthesized.
Can to as with reference to the limit image of one of image and, the image that will synthesize based on the photographed images of the difference image of limit image and printed base plate P and, compare (display type 4) as the standard picture of reference image.
7. can be from be suitable for the limit image of the making of difference image corresponding to selection 6 kinds of limit images of harmful content.
8. only carry out visual judgement, thus, compare and all carry out visual judgement and can shorten the inspection required time being judged as bad part in the automatic judgement operation.
9. the viewing area owing to difference image is coloured to the color that is different from difference image viewing area in addition, thereby distinguishes difference image easily.
(the 4th embodiment)
(one-piece construction)
Figure 28 is the vertical view of the related pasty state solder printing machine 100 of the 4th embodiment of the present invention.Figure is shown in 28, pasty state solder printing machine 100, comprise, with printing materials such as pasty state scolder be printed on the printing assembly 130 of the assigned position on the printed base plate P, inspection assembly 120 that the printing state of the printed pasty state scolder of above-mentioned printing assembly 130 is checked, at the printing zone of printing assembly 130 with check between the inspection area of assembly 120, the state of the printed base plate P that is printed with the pasty state scolder with mounting, make substrate printing that this printed base plate P moves back and forth with worktable 110.And, in upstream side and downstream, be provided with printed base plate is moved into above-mentioned printing zone, and take out of a pair of substrate transferring travelling belt 105 of printed base plate P from above-mentioned printing zone adjacent to printing assembly 130.
Printing assembly 130 is arranged on the front face side (being downside among the figure) on the pedestal 101, checks assembly 120, is arranged on the inboard of printing assembly 130.In the front face side of printing assembly 130, operation post 102 is fixed on pedestal 101.On operation post 102, be provided with the keyboard 103 as input block, image display device 104 involved in the present invention.Operating personnel by keyboard 103, can import various settings (for example, corresponding to upper limit area A of the area s of difference factor etc.), and are simultaneously displayed on the difference image on the image display device 104 and carry out visual examination with reference to image by visual.
(structure of printing assembly 130)
Above the substrate that is positioned at above-mentioned printing zone moved with worktable 110 and substrate transferring travelling belt 105, the template 137 of opening that is penetrated with the die plate pattern of tool regulation remained in formwork-support 138.Formwork-support 138 is fixed on the top of the support (not shown) that forms as one with pedestal 101.By illustrated nozzle never the pasty state scolder is supplied on the template 137, and scrape the pasty state scolder of being supplied by scraper plate 136 and make its above-mentioned opening that enters template 137, thus can be on the assigned position on the printed base plate P with the pasty state solder printing.
The scraper plate 136 that makes like this is slidably connected to the structure of the printing assembly 130 that template 137 moves along the Y direction, comprise, keep scraper plate 136 and make the scraper component 135 of its lifting and support this scraper component 135 and the scraper component support component 131 that extends along directions X and support this scraper component support component 131 can move it on the Y direction a pair of Y traversing guide 132.
Two Y traversing guides 132 are fixed on the top of the not shown support that forms as one with pedestal 101.The side of Zuo Ce Y traversing guide 132 in the drawings is fixed with and is fixed on the Y direction ballscrew shaft 133 that the ball nut of scraper component support component 131 screws togather rotationally.In the end of Y direction ballscrew shaft 133, be provided with the servomotor 134 that is used for the above-mentioned Y direction of rotating drive ballscrew shaft 133, and this servomotor 134 is fixed on the top of the support (not shown) that forms as one with pedestal 101.Thus, scraper component support component 131 by the rotating drive of servomotor 134, moves along the Y direction.
(substrate moves the structure with worktable 110)
Substrate moves with worktable 110, comprises upper member and lower member, and upper member can move in the scope of each regulation along X, Y, Z and R direction with respect to lower member.Thus, being positioned in substrate moves with the printed base plate P on the upper member of worktable 110, the driving of the Z direction by upper member, with the butt position of the lower surface butt of template 137 and and the separation point position left mutually of the lower surface of template 137 between, move along the Z direction.
And, move with on the upper member of worktable 110 at substrate, be provided with the substrate transferring travelling belt 110A that can move when moving into and taking out of printed base plate P.This substrate transferring travelling belt 110A, move the upper member of using worktable 110 by substrate, on Y direction and Z direction, align with travelling belt 105 integration with substrate transferring, thereby be in the state of printed base plate P that can join before the printing, to move into substrate then by the above-mentioned printed base plate P that the substrate transferring travelling belt 105 of upstream side is moved into and move, and be kept with on the assigned position on the upper member of worktable 110.And, substrate transferring travelling belt 110A, after printing finishes the back or checks end, and after being in the above-mentioned state that can join printed base plate P, moving printing with the assigned position on the upper member of worktable 110 and finish or check that the printed base plate P that finishes takes out of the substrate transferring travelling belt 105 in downstream remaining on substrate.
On pedestal 101, be provided with supporting substrate and move the lower member with worktable 110 can move it on the Y direction a pair of Y direction track 111.Between two Y direction tracks 111 on the pedestal 101, be fixed with and be fixed on substrate rotationally and move the Y direction ballscrew shaft 112 that screws togather with the ball nut on the lower member of worktable 110 (not shown).In the end of Y direction ballscrew shaft 112, be provided with the servomotor 113 that is used for the above-mentioned Y direction of rotating drive ballscrew shaft 112.Thus, by the rotating drive of servomotor 113, substrate is moved with worktable 110 move on the desirable position on the Y direction.
(checking the structure of assembly 120)
Check to comprise assembly 120, extend and two ends are fixed on the support component 121 of pedestal 101 and at the camera head 122 that is supported on movably on the directions X on the support component 121 along directions X.On support component 121, be fixed with and be fixed on the directions X ballscrew shaft 123 that the ball nut (not shown) on the camera head 122 screws togather rotationally.In the end of directions X ballscrew shaft 123, be provided with the servomotor 124 that is used for the above-mentioned directions X ballscrew shaft 123 of rotating drive, this servomotor 124 is fixed on the support (not shown) that forms as one with pedestal 101.Thus, by the rotating drive of servomotor 124, camera head 122 is moved on the desirable position on the directions X.
(running of pasty state solder printing machine 100)
At first, printed base plate P, by substrate transferring travelling belt 105,110A, from upstream side by the assigned position of conveyance on the upper member of substrate stage 110.After printed base plate P remains on the substrate transferring travelling belt 110A,, and take the position alignment mark of template 137 by the 2nd camera (not shown) by the reference mark on the 1st camera (not shown) the shooting printed base plate P.The upper member of substrate stage 110 moves along directions X, Y direction, R direction with respect to lower member carries out position correction, so that said reference mark and above-mentioned position alignment mark are consistent.And under the state that obtains proofreading and correct in the position, the upper member of substrate stage 110 rises to above-mentioned butt position from above-mentioned separation point position along the Z direction, and printed base plate P is connected to the lower surface of template.Afterwards, running by scraper component 135, scraper plate 136 descends along the Z direction and is connected on the template 137, and rotating drive by servomotor 134, scraper component support component 131 and scraper plate 136 move along the Y direction together, and the pasty state scolder is printed on the printed base plate P by the opening of template 137.After printing finished, scraper plate 137 rose, and the upper member of substrate stage 110 descends to above-mentioned separation point position from above-mentioned butt position, thereby and moved to directions X, Y direction, R direction and to turn back to the position and be corrected state before.
Then, by the rotating drive of servomotor 113, substrate stage 110 moves to above-mentioned inspection area.Camera head 122 is at first taken the reference mark on the printed base plate P, and discerns the coordinate system of printed base plate P by control device.Rotating drive servomotor 113 and servomotor 124 are so that camera head 122 is positioned on the X, Y coordinate of the regulation of printed base plate P.Then, take, and whether the printing state that is printed on the pasty state scolder on the printed base plate P is well judged automatically by camera head 122.Automatically there is not bad judgement in judging and after finishing, rotating drive by servomotor 113, the substrate transferring travelling belt 110A of substrate stage 110 moves to substrate transferring travelling belt 105 positions aligning with above-mentioned printing zone along the Y direction, then printed base plate P is taken out of the downstream.When bad judgement is arranged in automatically judging, after the judgement of all positions finishes, begin to make substrate stage 110 to move, and in order to make operating personnel carry out visual examination, on image display device 104, show difference image simultaneously and with reference to image by visual to the Y direction.In visual examination, still be judged as when bad, can remove printed base plate P from substrate stage 110.
As mentioned above, in the present embodiment, because pasty state solder printing machine 100 comprises image display device 104, therefore after printing assembly 130 prints, can judge automatically its printing state at once, and when in automatically judging, bad judgement being arranged, difference image can be shown simultaneously and on image display device 104 with reference to image.Therefore, operating personnel can be shortened, and then the productive temp time in the pasty state solder printing operation can be shortened by the visual visual examination required time that carries out.
(other embodiment)
The present invention is not only limited to by above-mentioned record and the illustrated embodiment of accompanying drawing, and for example, following embodiment is also within technical scope of the present invention.
(1) in the present embodiment, photographed images and the difference image of overlapping demonstration printed base plate P in the same viewing area of LCD monitor 4, but,, photographed images and the difference image of printed base plate P can also be presented on the mutually different viewing area according to the present invention.
(2) among Figure 19～Figure 21 of present embodiment, on LCD monitor 4, shown left side limit image as benchmark image, but, according to the present invention, the kind that is presented at the limit image on the LCD monitor 4 is not only limited to a kind of, can represent a plurality of limit images on LCD monitor 4 side by side.For example, in the 3rd display type (Figure 20), on the viewing area of lower-left, shown standard picture, on the viewing area of bottom right, shown the overlapped image of photographed images of difference image (difference region D 1) and printed base plate P, still, according to the present invention, can also on the viewing area of lower-left, show upside deflection limit image, on the viewing area of bottom right, show the overlapped image of photographed images based on the difference image printed base plate P of upside deflection limit image.
(3) in the present embodiment, the suitable example when scolder S is printed on portion of terminal T on the printed base plate P has been described, still, the present invention is also applicable to the situation that electronic component is installed on the portion of terminal T that is printed with scolder S.
(4) in the present embodiment, the difference area coloring is become and the difference zone different color of field color in addition, but, the present invention, can also the difference zone not carried out paintedly, for example, can with dashed lines delimit the difference zone, perhaps utilize dip-parallel line etc. that the difference region representation is shade, thereby determine the difference zone.
(5) in the present embodiment, the viewing area of LCD monitor is divided into 4 parts, still, the present invention can also divide according to shown picture number, for example, in the 1st display type (Figure 18), the viewing area of LCD monitor 4 can be divided into 2 parts.
(6) in the present embodiment, as bad form, illustration the offset of direction up and down bad and area big/little bad, but, the present invention, can also be applicable to the bad of other form, for example, scolder mistake bad (having printed the bad of the scolder different) with the scolder of standard kind.This scolder mistake having taken place when bad, can measure the fact of having printed different types of scolder according to the color difference of scolder.
At last, formation of the present invention and effect thereof that will be disclosed according to above-mentioned each embodiment be summarized as follows.
The appearance inspection method of substrate of the present invention is characterized in that, comprises, the shooting step is taken aforesaid substrate by image unit; Automatically determining step carries out automatic judging unit, thereby the benchmark image data that the photographed images of the substrate that obtained in the above-mentioned shooting step and benchmark as the non-defective unit substrate are stored in storage unit are in advance compared the processing of judging that substrate is whether good; Visual determining step when substrate is judged as defective products in above-mentioned automatic determining step, is shown in display unit with the image of this substrate, makes operating personnel judge according to the image that is shown in above-mentioned display unit is visual whether aforesaid substrate is good; Wherein, when substrate is judged as non-defective unit in above-mentioned visual determining step, this is judged as the photographed images of the substrate of non-defective unit,, appends and be stored in said memory cells as the said reference view data.
Adopt the present invention, since make automatic judging unit according to the photographed images of the captured substrate of image unit and be stored in storage unit the benchmark image data judge relatively whether substrate good, when substrate is judged as defective products, also make operating personnel carry out the visual judgement of substrate, and when the result of this visual judgement is judged as non-defective unit for substrate, this photographed images that is judged as the substrate of non-defective unit appended as the said reference view data be stored in storage unit, therefore, along with the carrying out of checking, operating personnel's visual judged result can be reflected to successively in the middle of the benchmark image data, and, can carry out the automatic judgement carried out based on above-mentioned automatic identifying unit effectively with more suitable precision according to the benchmark image data of the appropriate scope that is obtained thus.And, append successively by the image that only will be judged as the substrate of non-defective unit and to be stored in so simple structure in the storage unit by operating personnel's visual judgement, just the scope of said reference view data can be set in suitable scope, therefore, the gimmick disclosed with the above-mentioned Japanese documentation 1 that must carry out complicated routine processes is different, can reduce manufacturing cost, shorten the processing time.
Above-mentioned automatic determining step comparatively it is desirable to, thereby is the photographed images of aforesaid substrate and benchmark image data to be compared obtain difference and judge the step that aforesaid substrate is whether good according to the image of this difference.
Thus, only to obtain the so simple structure of difference of 2 kinds image, just can carry out the whether good judgement of substrate effectively.
In addition, above-mentioned automatic determining step, comparatively it is desirable to, be thereby that the photographed images with aforesaid substrate is divided into a plurality of zones and each regional photographed images of obtaining and compare by the benchmark image data that each same zone is stored and to obtain difference, and judge the step that aforesaid substrate is whether good according to each regional difference image of extracting out thus.
Like this, if the photographed images and the benchmark image data of substrate are divided into a plurality of zones respectively, and, judge whether substrate is good by each zone extraction difference image, just can be to judge with the big or small corresponding appropriate precision of checking object whether substrate is good.
In addition, comparatively it is desirable to, in above-mentioned visual determining step, by the comparison of the photographed images of aforesaid substrate and benchmark image data and the difference image that obtains be shown on the display unit, being shown in the difference image on this display unit, is the difference image that is coloured to different colours corresponding to the characteristic of difference.
Thus, can improve visual visuognosis degree when judging effectively, improve the efficient of operating personnel's visual judgement.
In addition, the testing fixture of substrate of the present invention is the testing fixture that substrate is carried out the substrate of visual examination, it is characterized in that, comprising: image unit, take aforesaid substrate; Storage unit, storage is as the benchmark image data of the benchmark of non-defective unit substrate; Automatic judging unit, the photographed images of the substrate that above-mentioned image unit is captured compares with the benchmark image data that are stored in said memory cells in advance, thereby judges whether aforesaid substrate is good; Control module when the substrate that is defective products by above-mentioned automatic judgment unit judges is judged as non-defective unit by operating personnel's visual judgement, is judged as the photographed images of the substrate of non-defective unit with this, as the said reference view data, appends and is stored in said memory cells.
Adopt base board checking device of the present invention, can carry out visual examination to substrate effectively with simple structure.
In the testing fixture of the present invention, comparatively it is desirable to, also comprise, display unit when above-mentioned automatic judging unit is judged as defective products with substrate, shows the image of this substrate; Input block is used for operating personnel and imports it according to being shown in the visual judged result of judging that aforesaid substrate is whether good of the image of above-mentioned display unit; Wherein, above-mentioned control module when the judged result by above-mentioned input block input is non-defective unit, is judged as the photographed images of the substrate of non-defective unit with this, as the said reference view data, appends and is stored in said memory cells.
Adopt this structure, can in same device, carry out automatic judgement and visual judgement, thereby can carry out the visual examination of printed base plate with simple and compact structure to substrate.
In addition, in the testing fixture of the present invention, comparatively it is desirable to, also comprise, the substrate holding mechanism that substrate is moved between the original position of the loading and unloading of carrying out substrate and the inspection position substrate taken by above-mentioned image unit, this substrate keeps assembly and above-mentioned each unit to be assembled into one, and can be handled upside down.
Like this, make substrate in situ and check under the substrate holding mechanism situation that moves between the position being provided with, only need substrate is arranged on the original position, a series of action afterwards, be that substrate moves to and checks that actions such as turning back to original position after position or the substrate imaging will carry out automatically, therefore, can improve the ease of use of testing fixture effectively.And, thereby being assembled as one, aforesaid substrate maintaining body, above-mentioned various unit etc. can be handled upside down, therefore, can take up space by economy system, can need not especially to consider that ground, place uses testing fixtures in various places.
In addition, base plate inspection system of the present invention, the testing fixture that possesses many above-mentioned substrates, and possesses the visual judgement machine that is common to above-mentioned many testing fixtures, wherein, above-mentioned visual judgement machine, comprise, to be judged as the display unit of image centralized displaying of the substrate of defective products by above-mentioned many testing fixtures respectively, and be used for the input block that operating personnel import the judged result of its visual judgement of carrying out substrate according to the image that is shown in above-mentioned display unit, above-mentioned testing fixture reads the judged result in the above-mentioned visual judgement machine, carries out the running corresponding to this result's regulation.
Adopt the present invention, owing to will in a plurality of testing fixtures, be judged as the image of the substrate of defective products respectively, centralized displaying is on the display unit of general visual judgement machine, therefore, no matter in which testing fixture, produce bad substrate, the display unit of the visual judgement machine that operating personnel are all the time can be visual identical comes visual judgement substrate, need not move to the testing fixture corresponding with this substrate one by one and carry out visual judgement when bad substrate takes place.Its result can check a plurality of substrates simultaneously, and can realize the base plate inspection system that operability is more superior.
Above-mentioned visual judgement machine comparatively it is desirable to, and is arranged at one of them of above-mentioned many testing fixtures.
Thus, the system that can save takes up space, and carries out the inspection of substrate effectively.
In the base plate inspection system of the present invention, comparatively it is desirable to, said memory cells is common to above-mentioned many testing fixtures, and the benchmark image data centralization that is common to each testing fixture is stored in this storage unit.
Thus, can judge whether the substrate of being checked in each testing fixture is good, therefore, can avoid the judgment standard appearance of each testing fixture irregular, and can carry out the inspection of substrate effectively according to general benchmark image data.
In addition, in the testing fixture of substrate of the present invention, comparatively it is desirable to, above-mentioned display unit together shows the image with reference to image and aforesaid substrate for reference in the above-mentioned visual judgement.
Adopt this structure, can make operating personnel's the precision of visual judgement more stable.
In addition, image display device of the present invention comprises: image unit, take substrate; Storage unit, whether good storage as the benchmark image data of the state that is used to judge aforesaid substrate benchmark; Graphics processing unit is obtained difference thereby the view data of the photographed images of the captured substrate of above-mentioned image unit and the said reference view data that is stored in said memory cells compared, and makes the difference image based on this difference; Whether good display unit show above-mentioned difference image and for reference with reference to image in above-mentioned judgement simultaneously.
Adopt this structure, graphics processing unit, the view data of the photographed images of the substrate that is obtained in the step according to shooting and the difference that is stored between the benchmark image data of storage unit are made difference image, display unit, show difference image simultaneously and with reference to image, therefore, the photographed images that can clear and definite substrate and the difference of benchmark image, and can judge with reference to the reference image.Therefore, can make the precision of operating personnel's whether good judgement keep stable, and can improve checking efficiency.
As embodiments of the present invention, comparatively it is desirable to, adopt following structure.
Graphics processing unit can be according to benchmark image data creating benchmark image, and display unit can be shown benchmark image as the reference image.Adopt this structure, can carry out the contrast of difference image and benchmark image, only compare and judge, carry out whether good judgement easilier with difference image.
Display unit can be shown the photographed images of substrate as the reference image.Whether good adopt this structure, except difference image, therefore photographed images that can also reference substrate, is only compared and is judged with difference image, carry out definite judgement easilier.
Storage unit, the standard image data of normal condition that can the storage representation substrate, graphics processing unit can be according to standard image data production standard image, and display unit is shown standard picture as the reference image.Adopt this structure, can carry out the contrast of difference image and standard picture, only compare and judge, carry out whether good judgement easilier with difference image.
Storage unit can be stored multiple benchmark image data, and graphics processing unit can be made above-mentioned difference image according to benchmark image data that are selected from the multiple benchmark image data.Adopt this structure, can select to be suitable for the benchmark image data of whether good judgement.And, can make the difference image of making like this and a plurality of benchmark image be shown in display unit simultaneously.
Storage unit, the standard image data of normal condition that can the storage representation substrate, graphics processing unit can be with standard image data as benchmark image data creating difference image, and display unit can show this difference image.Adopt this structure, photographed images that can clear and definite substrate and the difference between the standard picture.
Base board checking device can also comprise, automatic judging unit compares the view data and the benchmark image data of the photographed images of substrate, and checks its consistent degree, thereby judges whether the state that is arranged on the inspected object thing on the substrate is good; Above-mentioned image display device; Wherein, graphics processing unit, making by automatic judgment unit judges is the difference image of bad inspected object thing.Adopt this testing fixture, need not carry out visual judgement all inspected object things, can be only to being that bad inspected object thing carries out visual judgement by automatic judgment unit judges.Therefore, compare and all carry out visual judgement, can significantly improve procuratorial work efficient.
Pasty state solder printing machine of the present invention can comprise: printing equipment, with the assigned position of pasty state solder printing on substrate; Above-mentioned image display device shows to be used for visual judgement is printed on the printing state of the pasty state scolder on the substrate by printing equipment the auxiliary image of conduct.Perhaps, can comprise: printing equipment, with the assigned position of pasty state solder printing on substrate; Above-mentioned testing fixture is checked the printing state that is printed on the pasty state scolder on the substrate by printing equipment.Adopt this pasty state solder printing machine, can the printing state of pasty state scolder be checked, thereby carry out whether good judgement with after the pasty state solder printing is on substrate.

Claims (21)

1. the appearance inspection method of a substrate is characterized in that, comprise,
The shooting step is taken described substrate by image unit;
Automatically determining step carries out automatic judging unit, thereby the benchmark image data that the photographed images of the substrate that obtained in the described shooting step and benchmark as the non-defective unit substrate are stored in storage unit are in advance compared the processing of judging that substrate is whether good;
Visual determining step when substrate is judged as defective products in described automatic determining step, is shown in display unit with the image of this substrate, makes operating personnel judge according to the image that is shown in described display unit is visual whether described substrate is good; Wherein,
When substrate is judged as non-defective unit in described visual determining step, this is judged as the photographed images of the substrate of non-defective unit,, appends and be stored in described storage unit as described benchmark image data.
2. the appearance inspection method of substrate according to claim 1 is characterized in that:
Described automatic determining step, thus be the photographed images of described substrate and benchmark image data to be compared obtain difference and judge the step that described substrate is whether good according to the image of this difference.
3. the appearance inspection method of substrate according to claim 2 is characterized in that:
Described automatic determining step, be thereby that the photographed images with described substrate is divided into a plurality of zones and each regional photographed images of obtaining and compare by the benchmark image data that each same zone is stored and to obtain difference, and judge the step that described substrate is whether good according to each regional difference image of extracting out thus.
4. according to the appearance inspection method of claim 2 or 3 described substrates, it is characterized in that:
In described visual determining step, by the comparison of the photographed images of described substrate and benchmark image data and the difference image that obtains be shown on the display unit,
Being shown in the difference image of this display unit, is the difference image that is coloured to different colours corresponding to the characteristic of difference.
5. the testing fixture of a substrate carries out the visual examination of substrate, it is characterized in that, comprising:
Image unit is taken described substrate;
Storage unit, storage is as the benchmark image data of the benchmark of non-defective unit substrate;
Automatic judging unit, the photographed images of the substrate that described image unit is captured compares with the benchmark image data that are stored in described storage unit in advance, thereby judges whether described substrate is good;
Control module when the substrate that is defective products by described automatic judgment unit judges is judged as non-defective unit by operating personnel's visual judgement, is judged as the photographed images of the substrate of non-defective unit with this, as described benchmark image data, appends and is stored in described storage unit.
6. the testing fixture of substrate according to claim 5 is characterized in that, also comprise,
Display unit when described automatic judging unit is judged as defective products with substrate, shows the image of this substrate;
Input block is used for operating personnel and imports it according to being shown in the visual judged result of judging that described substrate is whether good of the image of described display unit; Wherein,
Described control module when the judged result by described input block input is non-defective unit, is judged as the photographed images of the substrate of non-defective unit with this, as described benchmark image data, appends and is stored in described storage unit.
7. according to the testing fixture of claim 5 or 6 described substrates, it is characterized in that, also comprise
The substrate holding mechanism that substrate is moved between the original position of the loading and unloading of carrying out substrate and the inspection position substrate taken by described image unit,
This substrate keeps assembly and described each unit to be assembled into one, and can be handled upside down.
8. the check system of a substrate is characterized in that:
Possess the testing fixture of many described substrates of claim 5, and possess the visual judgement machine that is common to described many testing fixtures, wherein,
Described visual judgement machine, comprise, to be judged as the display unit of image centralized displaying of the substrate of defective products by described many testing fixtures respectively, and be used for the input block that operating personnel import the judged result of its visual judgement of carrying out substrate according to the image that is shown in described display unit
Described testing fixture reads the judged result of described visual judgement machine, carries out the running corresponding to this result's regulation.
9. the check system of substrate according to claim 8 is characterized in that:
Described visual judgement machine is arranged at one of them of described many testing fixtures.
10. it is characterized in that according to Claim 8 or the check system of 9 described substrates:
Described storage unit is common to described many testing fixtures, and the benchmark image data centralization that is common to each testing fixture is stored in this storage unit.
11. the testing fixture of substrate according to claim 6 is characterized in that:
Described display unit together shows the image with reference to image and described substrate for reference in the described visual judgement.
12. an image display device is characterized in that, comprising:
Image unit is taken substrate;
Storage unit, whether good storage as the benchmark image data of the state that is used to judge described substrate benchmark;
Graphics processing unit is obtained difference thereby the view data of the photographed images of the captured substrate of described image unit and the described benchmark image data that are stored in described storage unit are compared, and makes the difference image based on this difference;
Whether good display unit show described difference image and for reference with reference to image in described judgement simultaneously.
13. image display device according to claim 12 is characterized in that:
Described graphics processing unit, according to described benchmark image data creating benchmark image, described display unit is shown as described described benchmark image with reference to image.
14., it is characterized in that according to claim 12 or 13 described image display devices:
Described display unit is shown as described the photographed images of described substrate with reference to image.
15., it is characterized in that according to any described image display device in the claim 12 to 14:
Described storage unit, the standard image data of normal condition that can the described substrate of storage representation, described graphics processing unit, according to described standard image data production standard image, described display unit is shown described standard picture as the reference image.
16., it is characterized in that according to any described image display device in the claim 12 to 15:
Described storage unit can be stored multiple described benchmark image data, and described graphics processing unit according to benchmark image data that are selected from the described multiple benchmark image data, is made described difference image.
17., it is characterized in that according to any described image display device in the claim 12 to 16:
Described storage unit, the standard image data of normal condition that can the described substrate of storage representation, described graphics processing unit, with described standard image data as described benchmark image data creating difference image.
18. the testing fixture of a substrate is characterized in that, comprises,
Automatically judging unit compares the view data and the described benchmark image data of the photographed images of described substrate, checks its consistent degree, thereby judges whether the state that is arranged on the inspected object thing on the described substrate is good;
Any described image display device in the claim 12 to 17; Wherein,
Described graphics processing unit, making by described automatic judgment unit judges is the described difference image of bad inspected object thing.
19. a pasty state solder printing machine is characterized in that, comprising:
Printing equipment is with the assigned position of pasty state solder printing on substrate;
Any described image display device in the claim 12 to 17 shows to be used for visual judgement is printed on the printing state of the pasty state scolder on the described substrate by described printing equipment the auxiliary image of conduct.
20. a pasty state solder printing machine is characterized in that, comprising:
Printing equipment is with the assigned position of pasty state solder printing on substrate;
The described testing fixture of claim 18 is checked the printing state that is printed on the pasty state scolder on the described substrate by described printing equipment.
21. a method for displaying image shows to be used for the visual auxiliary image of conduct of judging that the substrate state is whether good of operating personnel, it is characterized in that, comprising:
The shooting step is taken described substrate by image unit;
The difference image making step, thereby to as the state that is used for judging described substrate whether the good benchmark view data that is stored in the photographed images of the benchmark image data of storage unit and the described substrate that described shooting step is obtained in advance compare and obtain difference, and make difference image based on this difference by graphics processing unit;
Whether good image display step make described difference image and for referencely in described judgement be shown in display unit simultaneously with reference to image.
CNA2007800323858A 2006-08-28 2007-08-28 Board appearance inspection method and device Pending CN101512325A (en)

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