CN101495819B - 电子设备热控制装置 - Google Patents
电子设备热控制装置 Download PDFInfo
- Publication number
- CN101495819B CN101495819B CN2007800285150A CN200780028515A CN101495819B CN 101495819 B CN101495819 B CN 101495819B CN 2007800285150 A CN2007800285150 A CN 2007800285150A CN 200780028515 A CN200780028515 A CN 200780028515A CN 101495819 B CN101495819 B CN 101495819B
- Authority
- CN
- China
- Prior art keywords
- fluid
- temperature
- cold
- mixed
- heat sink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/40—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
- H10W40/47—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
- H10W40/475—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling using jet impingement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B49/00—Arrangement or mounting of control or safety devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Control Of Temperature (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2007/074727 WO2009017495A1 (en) | 2007-07-30 | 2007-07-30 | Thermal controller for electronic devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101495819A CN101495819A (zh) | 2009-07-29 |
| CN101495819B true CN101495819B (zh) | 2011-08-17 |
Family
ID=40304591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800285150A Active CN101495819B (zh) | 2007-07-30 | 2007-07-30 | 电子设备热控制装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8896335B2 (https=) |
| JP (1) | JP4790087B2 (https=) |
| KR (1) | KR101047832B1 (https=) |
| CN (1) | CN101495819B (https=) |
| DE (1) | DE112007003606T5 (https=) |
| TW (1) | TWI404178B (https=) |
| WO (1) | WO2009017495A1 (https=) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112007003648T5 (de) * | 2007-09-14 | 2010-08-26 | Advantest Corp. | Verbesserte Grenzfläche zur Temperaturkontrolle |
| DE112008003714T5 (de) | 2008-10-29 | 2010-11-25 | Advantest Corp. | Temperatursteuerung für elektronische Bauelemente |
| DE102010011084A1 (de) * | 2010-03-12 | 2011-09-15 | Converteam Gmbh | Kühlvorrichtung und Verfahren zum Kühlen eines Betriebsmittels |
| US9096784B2 (en) | 2010-07-23 | 2015-08-04 | International Business Machines Corporation | Method and system for allignment of graphite nanofibers for enhanced thermal interface material performance |
| CN103095098B (zh) * | 2011-10-27 | 2015-06-24 | 珠海格力电器股份有限公司 | 变频器散热冷却系统及其控制方法和装置 |
| TWI398654B (zh) * | 2011-11-22 | 2013-06-11 | Chroma Ate Inc | Semiconductor automation testing machine with temperature control system |
| JP2013137285A (ja) | 2011-12-28 | 2013-07-11 | Advantest Corp | ピッチ変更装置、電子部品ハンドリング装置、及び電子部品試験装置 |
| JP2013137284A (ja) | 2011-12-28 | 2013-07-11 | Advantest Corp | 電子部品移載装置、電子部品ハンドリング装置、及び電子部品試験装置 |
| CN103369810B (zh) * | 2012-03-31 | 2016-02-10 | 中微半导体设备(上海)有限公司 | 一种等离子反应器 |
| US9360514B2 (en) * | 2012-04-05 | 2016-06-07 | Board Of Regents, The University Of Texas System | Thermal reliability testing systems with thermal cycling and multidimensional heat transfer |
| US9111899B2 (en) | 2012-09-13 | 2015-08-18 | Lenovo | Horizontally and vertically aligned graphite nanofibers thermal interface material for use in chip stacks |
| US9245813B2 (en) | 2013-01-30 | 2016-01-26 | International Business Machines Corporation | Horizontally aligned graphite nanofibers in etched silicon wafer troughs for enhanced thermal performance |
| US9090004B2 (en) | 2013-02-06 | 2015-07-28 | International Business Machines Corporation | Composites comprised of aligned carbon fibers in chain-aligned polymer binder |
| CN103279149B (zh) * | 2013-05-24 | 2015-03-25 | 深圳英诺激光科技有限公司 | 一种温度补偿式恒温激光器及恒温方法 |
| US9082744B2 (en) | 2013-07-08 | 2015-07-14 | International Business Machines Corporation | Method for aligning carbon nanotubes containing magnetic nanoparticles in a thermosetting polymer using a magnetic field |
| KR20150108578A (ko) * | 2014-03-18 | 2015-09-30 | 가부시키가이샤 어드밴티스트 | 온도 제어 장치 및 시험 시스템 |
| US20160085244A1 (en) * | 2014-09-24 | 2016-03-24 | Fisher Controls International Llc | Vortex tube temperature control for process control devices |
| US10791651B2 (en) | 2016-05-31 | 2020-09-29 | Carbice Corporation | Carbon nanotube-based thermal interface materials and methods of making and using thereof |
| KR101910347B1 (ko) * | 2016-12-05 | 2018-10-23 | 주식회사 글로벌스탠다드테크놀로지 | 반도체 제조설비의 고도화 온도제어장치 |
| US9878565B1 (en) * | 2016-12-20 | 2018-01-30 | Xerox Corporation | Cooling control system |
| TWI755492B (zh) | 2017-03-06 | 2022-02-21 | 美商卡爾拜斯有限公司 | 基於碳納米管的熱界面材料及其製造和使用方法 |
| US10527355B2 (en) | 2017-06-13 | 2020-01-07 | Microsoft Technology Licensing, Llc | Devices, methods, and systems for thermal management |
| JP6948182B2 (ja) * | 2017-08-04 | 2021-10-13 | 株式会社アドバンテスト | 磁気センサ試験装置 |
| CN107543366A (zh) * | 2017-10-11 | 2018-01-05 | 浙江海洋大学 | 一种在低电压下真空容器的温度调控系统 |
| US10753971B2 (en) * | 2018-04-03 | 2020-08-25 | Advantest Corporation | Heat exchanger and electronic device handling apparatus including the same |
| CN110261150A (zh) * | 2019-06-04 | 2019-09-20 | 中国科学院合肥物质科学研究院 | 一种300-4.5k温区多工况低温换热器的测试装置 |
| CN110488796A (zh) * | 2019-08-14 | 2019-11-22 | 武汉克莱美特环境设备有限公司 | 一种液冷散热电路板综合环境模拟箱 |
| CN112239019A (zh) * | 2019-11-15 | 2021-01-19 | 林超文 | 自监测防高温损坏的数码产品收纳盒 |
| US11543327B2 (en) | 2020-01-30 | 2023-01-03 | Gm Cruise Holdings Llc | Method and apparatus for delivering a thermal shock |
| JP7463977B2 (ja) * | 2021-01-26 | 2024-04-09 | 株式会社デンソー | 冷却装置 |
| JP2023149981A (ja) | 2022-03-31 | 2023-10-16 | 株式会社アドバンテスト | 温度調整装置、電子部品ハンドリング装置、電子部品試験装置、及びdutの温度調整方法 |
| JP2023177687A (ja) * | 2022-06-02 | 2023-12-14 | 株式会社アドバンテスト | ヒータ駆動制御装置、電子部品ハンドリング装置、電子部品試験装置、及び、ヒータ駆動制御方法 |
| US11828795B1 (en) | 2022-10-21 | 2023-11-28 | AEM Holdings Ltd. | Test system with a thermal head comprising a plurality of adapters for independent thermal control of zones |
| CN120677396A (zh) | 2022-10-21 | 2025-09-19 | 新加坡商永科股份有限公司 | 用于对多个区域进行独立的控制的热头 |
| US11693051B1 (en) | 2022-10-21 | 2023-07-04 | AEM Holdings Ltd. | Thermal head for independent control of zones |
| US11796589B1 (en) | 2022-10-21 | 2023-10-24 | AEM Holdings Ltd. | Thermal head for independent control of zones |
| US11656272B1 (en) | 2022-10-21 | 2023-05-23 | AEM Holdings Ltd. | Test system with a thermal head comprising a plurality of adapters and one or more cold plates for independent control of zones |
| TWI878761B (zh) | 2022-12-13 | 2025-04-01 | 致茂電子股份有限公司 | 使用多相熱介面構件之電子元件測試方法 |
| US11828796B1 (en) | 2023-05-02 | 2023-11-28 | AEM Holdings Ltd. | Integrated heater and temperature measurement |
| US20250172608A1 (en) * | 2023-11-28 | 2025-05-29 | Smart Modular Technologies, Inc. | Systems and methods for testing thermal conditioning of an integrated circuit (ic) |
| WO2026055252A1 (en) * | 2024-09-03 | 2026-03-12 | Tyco Fire & Security Gmbh | Multi-temperature hydronic system and method with controls and fluid management |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4512161A (en) * | 1983-03-03 | 1985-04-23 | Control Data Corporation | Dew point sensitive computer cooling system |
| US5023695A (en) * | 1988-05-09 | 1991-06-11 | Nec Corporation | Flat cooling structure of integrated circuit |
| CN1409589A (zh) * | 2001-09-26 | 2003-04-09 | 穆丹制造公司 | 用于大功率电子设备机柜的模块化冷却系统和热总线 |
| CN2684380Y (zh) * | 2004-03-13 | 2005-03-09 | 林智忠 | 封闭式整体液冷散热器 |
| CN1591849A (zh) * | 2003-09-03 | 2005-03-09 | 株式会社日立制作所 | 电子仪器装置 |
| CN2864986Y (zh) * | 2005-12-19 | 2007-01-31 | 元山科技工业股份有限公司 | 用于电子元件的散热装置 |
| CN101005745A (zh) * | 2006-01-20 | 2007-07-25 | 刘胜 | 用于电子器件的微喷射流冷却系统 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3241602A (en) * | 1963-06-25 | 1966-03-22 | Andreassen Roar | Heating and cooling system and control therefor |
| US3259175A (en) * | 1964-06-15 | 1966-07-05 | Robert A Kraus | Heating and cooling system for molds |
| US3721386A (en) * | 1970-10-23 | 1973-03-20 | J Brick | Temperature-volume controlled mixing valve |
| CA2053055C (en) * | 1990-10-11 | 1997-02-25 | Tsukasa Mizuno | Liquid cooling system for lsi packages |
| US5918469A (en) * | 1996-01-11 | 1999-07-06 | Silicon Thermal, Inc. | Cooling system and method of cooling electronic devices |
| US5977785A (en) * | 1996-05-28 | 1999-11-02 | Burward-Hoy; Trevor | Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment |
| US5802856A (en) * | 1996-07-31 | 1998-09-08 | Stanford University | Multizone bake/chill thermal cycling module |
| US6593761B1 (en) * | 1997-11-28 | 2003-07-15 | Kabushiki Kaisha Toshiba | Test handler for semiconductor device |
| US6415858B1 (en) * | 1997-12-31 | 2002-07-09 | Temptronic Corporation | Temperature control system for a workpiece chuck |
| US6091062A (en) * | 1998-01-27 | 2000-07-18 | Kinetrix, Inc. | Method and apparatus for temperature control of a semiconductor electrical-test contractor assembly |
| JP5000803B2 (ja) * | 1998-07-14 | 2012-08-15 | デルタ・デザイン・インコーポレイテッド | 電子デバイスの速応温度反復制御を液体を利用して広範囲に行うための装置、方法 |
| US6362944B1 (en) * | 2000-05-19 | 2002-03-26 | Unisys Corporation | System for regulating the temperature of IC-chips with a fluid whose temperature is controlled quickly by a slow response cooler and a fast response heater |
| US6412551B1 (en) * | 2000-05-19 | 2002-07-02 | Unisys Corporation | System for regulating the temperature of IC-chips with a fluid which is heated and cooled as a function of the fluid temperatures to and from heat exchangers for the IC-chips |
| US6668570B2 (en) * | 2001-05-31 | 2003-12-30 | Kryotech, Inc. | Apparatus and method for controlling the temperature of an electronic device under test |
| KR100436657B1 (ko) * | 2001-12-17 | 2004-06-22 | 미래산업 주식회사 | 반도체 소자 테스트 핸들러의 소자 가열 및 냉각장치 |
| US7100389B1 (en) * | 2002-07-16 | 2006-09-05 | Delta Design, Inc. | Apparatus and method having mechanical isolation arrangement for controlling the temperature of an electronic device under test |
| US6861861B2 (en) * | 2002-07-24 | 2005-03-01 | Lg Electronics Inc. | Device for compensating for a test temperature deviation in a semiconductor device handler |
| US7114556B2 (en) * | 2002-12-17 | 2006-10-03 | Micro Control Company | Burn-in oven heat exchanger having improved thermal conduction |
| US7254957B2 (en) * | 2005-02-15 | 2007-08-14 | Raytheon Company | Method and apparatus for cooling with coolant at a subambient pressure |
| US8151872B2 (en) * | 2007-03-16 | 2012-04-10 | Centipede Systems, Inc. | Method and apparatus for controlling temperature |
-
2007
- 2007-07-30 US US12/278,841 patent/US8896335B2/en active Active
- 2007-07-30 DE DE112007003606T patent/DE112007003606T5/de not_active Ceased
- 2007-07-30 JP JP2010519181A patent/JP4790087B2/ja not_active Expired - Fee Related
- 2007-07-30 WO PCT/US2007/074727 patent/WO2009017495A1/en not_active Ceased
- 2007-07-30 CN CN2007800285150A patent/CN101495819B/zh active Active
- 2007-07-30 KR KR1020087020970A patent/KR101047832B1/ko active Active
-
2008
- 2008-07-29 TW TW097128600A patent/TWI404178B/zh active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4512161A (en) * | 1983-03-03 | 1985-04-23 | Control Data Corporation | Dew point sensitive computer cooling system |
| US5023695A (en) * | 1988-05-09 | 1991-06-11 | Nec Corporation | Flat cooling structure of integrated circuit |
| CN1409589A (zh) * | 2001-09-26 | 2003-04-09 | 穆丹制造公司 | 用于大功率电子设备机柜的模块化冷却系统和热总线 |
| CN1591849A (zh) * | 2003-09-03 | 2005-03-09 | 株式会社日立制作所 | 电子仪器装置 |
| CN2684380Y (zh) * | 2004-03-13 | 2005-03-09 | 林智忠 | 封闭式整体液冷散热器 |
| CN2864986Y (zh) * | 2005-12-19 | 2007-01-31 | 元山科技工业股份有限公司 | 用于电子元件的散热装置 |
| CN101005745A (zh) * | 2006-01-20 | 2007-07-25 | 刘胜 | 用于电子器件的微喷射流冷却系统 |
Non-Patent Citations (2)
| Title |
|---|
| 附图1-5. |
| 附图3-10. |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010535417A (ja) | 2010-11-18 |
| JP4790087B2 (ja) | 2011-10-12 |
| TW200921872A (en) | 2009-05-16 |
| TWI404178B (zh) | 2013-08-01 |
| US20100224352A1 (en) | 2010-09-09 |
| US8896335B2 (en) | 2014-11-25 |
| WO2009017495A1 (en) | 2009-02-05 |
| KR101047832B1 (ko) | 2011-07-08 |
| KR20090095456A (ko) | 2009-09-09 |
| DE112007003606T5 (de) | 2010-06-10 |
| CN101495819A (zh) | 2009-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101495819B (zh) | 电子设备热控制装置 | |
| TWI436024B (zh) | 電子裝置之溫度控制器 | |
| JP7649818B2 (ja) | 比例式熱流体送達システムを使用した基板キャリア | |
| US12057370B2 (en) | Vacuum modulated two phase cooling loop efficiency and parallelism enhancement | |
| US7355428B2 (en) | Active thermal control system with miniature liquid-cooled temperature control device for electronic device testing | |
| CN104120409B (zh) | 基板载置台的温度控制系统及其温度控制方法 | |
| CN107045361A (zh) | 双回路温度控制模块及具备该模块的电子元件测试设备 | |
| CN102203905A (zh) | 半导体晶片的温度控制装置及温度控制方法 | |
| US9677822B2 (en) | Efficient temperature forcing of semiconductor devices under test | |
| CN102057476B (zh) | 快速衬底支撑件温度控制 | |
| US20160128225A9 (en) | Efficient temperature forcing of semiconductor devices under test | |
| US11976671B2 (en) | Vacuum modulated two phase cooling loop performance enhancement | |
| CN101424950A (zh) | 被处理基板温度调节装置和调节方法及等离子体处理装置 | |
| Huang et al. | Flow boiling of HFE-7100 for cooling Multi-Chip modules using manifold microchannels | |
| TWI432132B (zh) | Liquid cooling structure | |
| CN114582760A (zh) | 用于集成电路制程的温控设备及集成电路制程系统 | |
| Kwon et al. | Additively manufactured impinging air jet cooler for high-power electronic devices | |
| CN216528815U (zh) | 静电卡盘及半导体处理设备 | |
| Ravi et al. | PDMS Microchannels for Silicon Chip Cooling | |
| Fish et al. | Microgap cooling of via-enhanced glass interposers | |
| CN114582759A (zh) | 用于集成电路制程的温控设备及集成电路制程系统 | |
| Saneie | Single/two-phase flow maldistribution in minichannel heat-sinks under non-uniform heating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |