CN101428973B - Magnetic controlled film coating chamber for film coating glass - Google Patents
Magnetic controlled film coating chamber for film coating glass Download PDFInfo
- Publication number
- CN101428973B CN101428973B CN 200810235990 CN200810235990A CN101428973B CN 101428973 B CN101428973 B CN 101428973B CN 200810235990 CN200810235990 CN 200810235990 CN 200810235990 A CN200810235990 A CN 200810235990A CN 101428973 B CN101428973 B CN 101428973B
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- film coating
- chamber
- glass
- cavity
- channel
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Abstract
The invention discloses a vacuum magnetically controlled film coating chamber with even air suction for film coating glass. The vacuum magnetically controlled film coating chamber comprises a cavity, wherein three separating channels are arranged in the cavity, and divide the cavity into four areas; each separating channel is provided with a glass conveying channel; wall plates of two sides forming the separating channels and an upper clapboard and a lower clapboard forming the glass conveying channels are provided with air suction holes; two air suction channels are also arranged in the cavity, are distributed on two ends of the separating channels, and are communicated with a cavity in each separating channel; and two ends of each air suction channel are communicated with air suction holes on the cavity. The vacuum magnetically controlled film coating chamber is applicable in the field of production of vacuum coated glass.
Description
Technical field
The present invention relates to a kind of magnetic controlled film coating chamber for film coating glass.
Background technology
Traditional coated glass vacuum film coating chamber adopts a chamber, because chamber is very large, the bleeding point of several fixed points when being vacuumized, this chamber can only be set, when bleeding, peripheral air is pumped very soon, and middle air around slowly the flow direction, is taken away by aspirating hole more at last, will produce the vacuum suction non-uniform phenomenon like this, very easily cause the ununiformity of plated film rete.
Summary of the invention
Technical problem to be solved by this invention is: a kind of uniform magnetic controlled film coating chamber for film coating glass of bleeding will be provided.
For addressing the above problem, the technical solution used in the present invention is: magnetic controlled film coating chamber for film coating glass, comprise: chamber, in chamber, be provided with three channel isolations, channel isolation is divided into four zones with chamber, be provided with the glass transfer passage at each channel isolation, consisting of on the both sides wallboard of channel isolation and consisting of the upper of glass transfer passage, offer aspirating hole on the lower clapboard, in chamber, also be provided with two bleed-off passages, bleed-off passage is distributed in the channel isolation two ends and communicates with cavity in the channel isolation, and the two ends of bleed-off passage communicate with bleeding point on the chamber.
Advantage of the present invention is: by adopting channel isolation, the innovation of bleeding from common both sides is multi-faceted to chamber evacuation for upper and lower, left and right etc., Effective Raise the homogeneity of vacuum suction, prevent the bleed generation of non-uniform phenomenon of coating chamber part.
Description of drawings
Fig. 1 is the structural principle schematic diagram that magnetic controlled film coating chamber for film coating glass of the present invention is overlooked direction;
Fig. 2 is the A-A sectional structure enlarged view of channel isolation described in Fig. 1.
Among the figure: 1, chamber, 2, channel isolation, 3, bleed-off passage, 4, cavity, 41, wallboard, 42, wallboard, 5, aspirating hole, 6, the glass transfer passage, 61, dividing plate, 62, dividing plate, 7, bleeding point.
Embodiment
Below in conjunction with the drawings and specific embodiments technical solutions according to the invention and principle of work thereof and advantage are further described.
Such as Fig. 1, shown in Figure 2, a kind of magnetic controlled film coating chamber for film coating glass, comprise: chamber 1, in chamber 1, be provided with three channel isolations 2, channel isolation 2 is divided into four zones with chamber 1, be provided with glass transfer passage 6 at each channel isolation 2, at the both sides wallboard 41 that consists of channel isolation 2, on 42 and consist of the upper of glass transfer passage 6, lower clapboard 61, offer aspirating hole 5 on 62, in chamber 1, also be provided with two bleed-off passages 3, bleed-off passage 3 is distributed in channel isolation 2 two ends and communicates with cavity 4 in the channel isolation 2, and the two ends of bleed-off passage 3 communicate with bleeding point 7 on the chamber 1.
Principle of work of the present invention is: when glass be transferred from the left side of chamber 1 enter chamber 1 after, when being arranged on the glass transfer passage 6 on the channel isolation 2, the diffusion pump that is arranged on chamber 1 outside is bled by 7 pairs of chambers 1 of bleeding point, air according to direction shown in the arrow among Fig. 1 from be arranged on wallboard 41,42 and dividing plate 61,62 on aspirating hole 5 enter cavity 4, then the two ends that flow to channel isolation 2 enter pump-line 3, discharge from the aspirating hole 7 at the two ends of pump-line 3 at last.
The present invention is directly bled to coating chamber upper and lower surface and the coating chamber that changes into glass of bleeding simultaneously by diffusion pump, homogenizing the homogeneity of bleeding, fundamentally reduced the inhomogeneous phenomenon of vacuum suction.
Claims (1)
1. magnetic controlled film coating chamber for film coating glass, comprise: chamber, it is characterized in that: in chamber, be provided with three channel isolations, channel isolation is divided into four zones with chamber, be provided with the glass transfer passage at each channel isolation, offer aspirating hole at the upper and lower dividing plate that consists of on the both sides wallboard of channel isolation and consist of the glass transfer passage, in chamber, also be provided with two bleed-off passages, bleed-off passage is distributed in the channel isolation two ends and communicates with cavity in the channel isolation, and the two ends of bleed-off passage communicate with bleeding point on the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810235990 CN101428973B (en) | 2008-11-19 | 2008-11-19 | Magnetic controlled film coating chamber for film coating glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200810235990 CN101428973B (en) | 2008-11-19 | 2008-11-19 | Magnetic controlled film coating chamber for film coating glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101428973A CN101428973A (en) | 2009-05-13 |
| CN101428973B true CN101428973B (en) | 2013-01-30 |
Family
ID=40644650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810235990 Expired - Fee Related CN101428973B (en) | 2008-11-19 | 2008-11-19 | Magnetic controlled film coating chamber for film coating glass |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101428973B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106277816B (en) * | 2016-07-29 | 2019-08-23 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Coating film production line multistage atmosphere isolation device |
| CN106282928B (en) * | 2016-08-10 | 2018-06-08 | 福建新福兴玻璃有限公司 | A kind of coating film on glass production line |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2186249Y (en) * | 1994-04-27 | 1994-12-28 | 长沙国防科技大学八达薄膜电子技术研究所 | Double-end magnetic controlled sputtering ion coating machine |
| CN201056539Y (en) * | 2007-06-22 | 2008-05-07 | 王百新 | Improved plated film producing device for macrotype sheet glass |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE502004008341D1 (en) * | 2004-03-31 | 2008-12-11 | Applied Materials Gmbh & Co Kg | Lock arrangement for a vacuum treatment plant and method for operating this |
-
2008
- 2008-11-19 CN CN 200810235990 patent/CN101428973B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2186249Y (en) * | 1994-04-27 | 1994-12-28 | 长沙国防科技大学八达薄膜电子技术研究所 | Double-end magnetic controlled sputtering ion coating machine |
| CN201056539Y (en) * | 2007-06-22 | 2008-05-07 | 王百新 | Improved plated film producing device for macrotype sheet glass |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101428973A (en) | 2009-05-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20161119 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |