CN203348041U - Box cavity vacuumizing device and box aligning device - Google Patents
Box cavity vacuumizing device and box aligning device Download PDFInfo
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- CN203348041U CN203348041U CN 201320426581 CN201320426581U CN203348041U CN 203348041 U CN203348041 U CN 203348041U CN 201320426581 CN201320426581 CN 201320426581 CN 201320426581 U CN201320426581 U CN 201320426581U CN 203348041 U CN203348041 U CN 203348041U
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Abstract
The utility model discloses a box cavity vacuumizing device and a box aligning device which are designed to solve the problems of large energy consumption and low working efficiency of the existing structure. The box cavity vacuumizing device comprises a vacuumizing unit connected with a box cavity through a first pipeline and at least one vacuum cavity connected between the box cavity and the vacuumizing unit through a second pipeline. A valve is arranged between the box cavity and the vacuumizing unit, between the box cavity and the vacuum cavity and between the vacuum cavity and the vacuumizing unit respectively. By means of the vacuum cavity, the vacuumizing unit working continuously is utilized to vaccumize the vacuum cavity during inflation of the box cavity, the pressure of the box cavity is reduced through the vacuum cavity after the inflation of the box cavity is finished, and the vacuumizing unit is further utilized to vacuumize the box cavity. The vacuumizing unit working continuously is completely utilized, vacuumizing of the box cavity is quickened, energy is saved, and the box cavity vacuumizing device saves time and is convenient.
Description
Technical field
The utility model relates to vacuum pumping technology, particularly relates to a kind of one-tenth box cavity vacuum pumping device and to box device.
Background technique
In the Display Technique field, when the two substrates up and down of display floater carries out box, need under vacuum state to the box machine in carry out, to being provided with into the box cavity in the box machine, by becoming box cavity vacuum pumping cavity, be embodied as the vacuum state of box cavity, the vacuum state that becomes the box cavity is that the vacuum unit by being comprised of vacuum pump realizes.The vacuum pump of general one-tenth box cavity vacuum pumping device is always in operating condition, as the box cavity, need to inflate in order to open, while taking out the panel after box, connect into the valve meeting temporary close of box cavity and vacuum pump, the now running of vacuum pump is not to becoming vacuum up in the box cavity to do any contribution, the continuous firing of vacuum pump also can cause the waste of resource, thereby causes the inefficiency of vacuum pump.
The model utility content
(1) technical problem that will solve
The technical problems to be solved in the utility model is when becoming box cavity inflatable open, how to take full advantage of the work of the vacuum unit of continuous running, vacuumizes the next time that is into the box cavity and makes effective contribution.
(2) technological scheme
In order to solve the problems of the technologies described above, the utility model becomes box cavity vacuum pumping device, comprise by the first pipeline and the vacuum unit that becomes the box cavity to be connected, also comprise by the second pipeline and be connected at least one vacuum chamber between described one-tenth box cavity and vacuum unit;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve.
Preferably, described vacuum unit comprises several vacuum pumps;
Several described vacuum pumps are connected with described one-tenth box cavity by the first pipeline, by the second pipeline, with described vacuum chamber, are connected.
Preferably, described vacuum pump comprises dry pump and molecular pump.
Preferably, described the first pipeline all is provided with N the tie point be connected with described one-tenth box cavity at the end for being connected described one-tenth box cavity with described the second pipeline;
Described N is not less than 2.
Preferably,
Described vacuum unit is divided into N and vacuumizes subelement;
Described the first pipeline is divided into N bar branch road;
Article one, described branch road is provided with a described tie point, and connects a described subelement that vacuumizes;
Described vacuumizing between subelement is connected by establishing valvular pipeline.
Preferably, also comprise on-off controller;
Described valve is solenoid valve;
Described on-off controller, receive extraneous instruction or according to built-in instruction, to the instruction of described solenoid valve transmit button;
Described solenoid valve receives and opens or cut out according to described switch order.
Preferably, be provided with the filter that flows to described vacuum unit gas for filtration in described vacuum chamber.
Preferably, described vacuum chamber and described the second pipeline removably connect.
For addressing the above problem, the utility model, to box device, comprises that at least one becomes box cavity and one-tenth box cavity vacuum pumping device as above,
Wherein said one-tenth box cavity is connected by pipeline with described one-tenth box cavity vacuum pumping device.
(3) beneficial effect
The one-tenth box cavity vacuum pumping device that technique scheme provides and to box device, by setting up vacuum chamber, when becoming box cavity inflatable open, by the vacuum unit that includes vacuum pump, vacuum chamber is vacuumized, when described one-tenth box cavity needs exhaust to form vacuum, first by being communicated with into box cavity and vacuum chamber, thereby the step-down for the first time that is embodied as the box cavity has reduced the gas in one-tenth box cavity, cut into again being connected and being communicated with vacuum unit and becoming the box cavity between box cavity and vacuum chamber, make vacuum unit to becoming the box cavity to be vacuumized, now become the interior air pressure of box cavity lower than barometric pressure, thereby accelerated the speed that becomes the box cavity to vacuumize, and realized the storage of the efficiency of vacuum unit when becoming the box cavity to open by arranging of vacuum chamber, thereby improved the working efficiency of vacuum unit, reduce the waste of the energy.
The accompanying drawing explanation
Fig. 1 is the one-tenth box cavity vacuum pumping device described in the utility model embodiment two and becomes one of linkage structure schematic diagram of box cavity;
Fig. 2 is the linkage structure schematic diagram of the described one-tenth box of the utility model embodiment three cavity vacuum pumping device and one-tenth box cavity;
Fig. 3 is the linkage structure schematic diagram of the described one-tenth box of the utility model embodiment four cavity vacuum pumping device and one-tenth box cavity.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for the utility model is described, but are not used for limiting scope of the present utility model.
In description of the present utility model, it should be noted that, orientation or the position relationship of the indications such as term " " center ", " on ", D score, " interior ", " left side ", " right side " be based on orientation shown in the drawings or position relationship; be only the utility model and simplified characterization for convenience of description; rather than the device of indication or hint indication or element must have specific orientation, with specific orientation structure and operation, so can not be interpreted as restriction of the present utility model.Unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also to be electrically connected to; Can be directly to be connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand the concrete meaning of above-mentioned term in the utility model.In addition, in description of the present utility model, except as otherwise noted, the implication of " a plurality of " is two or more, and " more than two " comprise two.
Embodiment one:
Based on becoming the defect of box cavity vacuum pumping device in prior art, the present embodiment provides a kind of improved novel one-tenth box cavity vacuum pumping device, for the one-tenth box cavity to the box machine is vacuumized, the basic structure that described pumped vacuum systems comprises is: comprise by the first pipeline and the vacuum unit that becomes the box cavity to be connected, also comprise by the second pipeline and be connected at least one vacuum chamber between described one-tenth box cavity and vacuum unit;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve.
Wherein,
Described the first pipeline refers to direct connection vacuum unit and the pipeline that becomes the box cavity;
Described the second pipeline refers to the pipeline that connects vacuum unit, becomes box cavity and vacuum chamber;
And can common conduit at the first pipeline described in concrete implementation process and described the second pipeline, only need to meet the first pipeline and can form independently air-flow path with second pipe under valve control and can.
The one-tenth box cavity vacuum pumping device of said structure, during becoming the inflation of box cavity and/or opening, can be closed between box cavity and vacuum unit and become the valve between box cavity and vacuum chamber, open the valve between vacuum chamber and vacuum unit, utilize the vacuum unit of continuous running, vacuum chamber is vacuumized; When needs are vacuumized one-tenth box cavity again, can close the valve between vacuum chamber and vacuum unit, at first open between box cavity and vacuum unit by vacuum chamber, one-tenth box cavity is bled for the first time, be broken into again being connected between box cavity and vacuum chamber, and be opened into the valve between box cavity and vacuum chamber, further by vacuum unit, complete into the needed degree of vacuum of box cavity.During becoming the box cavity to exit, the power of vacuum unit continuous running further acts on into the realization of box chamber vacuum degree by means of vacuum chamber, does not cause any waste, and has accelerated to become the vacuum pumping rate again of box cavity.
As further improvement of this embodiment, in order to accelerate the working efficiency of vacuum unit, described vacuum unit can be provided with several vacuum pumps;
Several described vacuum pumps are connected with described one-tenth box cavity by the first pipeline, by the second pipeline, with described vacuum chamber, are connected, and realize that each vacuum pump all can be connected with described one-tenth box cavity and vacuum chamber respectively by the pipeline of independently controlling.
Embodiment two:
As shown in Figure 1, the present embodiment becomes box cavity vacuum pumping device, comprise by the first pipeline and the vacuum unit that becomes the box cavity to be connected, also comprise by the second pipeline and be connected to a vacuum chamber between described one-tenth box cavity and vacuum unit and be designated as the first vacuum chamber;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve.
Described vacuum unit is selected the first dry pump, the first dry pump is designated as the 3rd valve 3 with the valve arranged on the connecting pipeline become between the box cavity, the valve arranged on connecting pipeline between the first vacuum chamber and the first dry pump is designated as the second valve 2, the first vacuum chamber is designated as the 6th valve 6 with becoming the valve arranged on connecting pipeline between the box cavity, become on the box cavity and also be provided with compression drying gas inflated unit CDA, become between box cavity and CDA and be provided with bleed valve 7.CAD, in order to becoming the box cavity when needs are opened, provides gas to make in cavity to break away from vacuum to one-tenth box cavity.
While becoming the inflation of box cavity, close the 3rd valve 3 and the 6th valve 6, open bleed valve 7, open the second valve 2 simultaneously, utilize the first dry pump to vacuumize the first vacuum chamber.While becoming the box cavity again to vacuumize, close bleed valve 7 and the second valve 2, open the 6th valve 6 and the 3rd valve 3, by means of the vacuum in the first vacuum chamber, be lowered into the pressure in the box cavity, continue as into the box cavity by the first dry pump and vacuumize, to save the pumpdown time simultaneously.
Vacuum pump in vacuum unit described in concrete implementation process can add or reduce vacuum pump as required, to realize the allocation optimum of equipment cost, operational efficiency.Particularly as described in vacuum unit comprise several vacuum pumps, described vacuum pump all is connected with becoming box cavity or vacuum chamber by pipeline; Several described vacuum pumps are divided into the vacuum pump that at least can realize two kinds of different degree of vacuum, to realize the balance between equipment cost and high vacuum effect.
According to foregoing description, can find out, setting by the first vacuum chamber, the usefulness that becomes the box cavity to open the first dry pump of inflating that time can be recycled, shortened vacuum and the box machine has been reached to the time of required degree of vacuum, be equivalent to reduce the process time of equipment, improved production capacity and efficiency; In equipment normal operation process, the first dry pump does not need directly from barometric pressure, to start to be vacuumized, but start to vacuumize from being starkly lower than atmospheric condition, be equivalent to the degree of vacuum excursion dwindles simultaneously to some extent, so just make the required maximum load of the first dry pump reduce, and guaranteed to a certain extent the first dry pump run stability; The first vacuum chamber of newly establishing is connected in between box cavity and vacuum unit, played the effect of certain buffering transition, reduced direct impact between the two, while as treated as in the box cavity, having steam or greasy dirt, in vacuum, its molecular density can diminish in adapter cavity, thereby reduces the impact on vacuum unit.
Embodiment three:
In order further to accelerate into box cavity vacuum pumping rate, can be suitable set up vacuum chamber and vacuum pump, specific as follows:
As shown in Figure 2, the present embodiment becomes box cavity vacuum pumping device, comprise by the first pipeline and the vacuum unit that becomes the box cavity to be connected, also comprise by the second pipeline and be connected to two vacuum chambers between described one-tenth box cavity and vacuum unit, and be designated as respectively the first vacuum chamber and the second vacuum chamber;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve.Described vacuum chamber is arranged to the described vacuum pump in vacuumizing of a plurality of and suitable increase, and described vacuum chamber comprises that two are designated as respectively the first vacuum chamber and the second vacuum chamber;
Bag the first dry pump, the second dry pump, the 3rd dry pump and molecular pump 8 in described vacuum unit,
Vacuum chamber is divided into two, and the second pipeline that connects into box cavity, vacuum chamber and vacuum unit just is divided into two, and one for being connected to form into the current path of box cavity through the first vacuum cavity and vacuum unit three; Article one, for being connected to form into the current path of box cavity through the second vacuum cavity and vacuum unit three.
Wherein, molecular pump is need to be at the certain vacuum degree, and the vaccum-pumping equipment of the provided high vacuum that could move, in the described structure of the present embodiment, has designed the first dry pump, the second dry pump, the 3rd dry pump and molecular pump 8; Thereby formed two-stage and vacuumized subelement, when dry pump is extracted into certain vacuum, be difficult to gas clean-up again, the operation of molecular pump 8 is conducive to again reduce air pressure, forms high vacuum.
In the present embodiment, in described vacuum unit, be provided with the first dry pump, the second dry pump, the 3rd dry pump and with the molecular pump 8 of the second dry series connection of pumps, become between box cavity and vacuum unit to form three the first direct-connected pipelines.
The pipeline that becomes the box cavity to be connected with the first vacuum chamber is provided with between valve 6, the first vacuum cavity and molecular pump 8 and is provided with valve 1;
Become between box cavity and the first dry pump and the 3rd dry pump and all by valve 3, carry out the control of pipeline, and carry out the control of pipeline by valve 2 between the second dry pump and molecular pump 8;
The pipeline that becomes the box cavity to be connected with the second vacuum is provided with between valve 5, the second cavitys and the 3rd dry pump and is provided with valve 4;
Become the box cavity to be connected with inflation unit CDA by pipeline, and corresponding pipeline is provided with charging valve 7.Described CDA is in order to provide clean pathogenic dryness body to one-tenth and cavity.
The present embodiment is compared enforcement two and has been set up a vacuum chamber---the second vacuum chamber, set up the second dry pump in further described vacuum unit, the 3rd dry pump, the 3rd dry pump can arrange separately, also can be set to the vacuum pumping pump structure combined with molecular pump, the 3rd dry pump is connected with the connecting pipeline of the first dry pump with the second vacuum chamber, on connecting pipeline between the first dry pump and the 3rd dry pump, with on connecting pipeline between the first dry pump and the second dry pump, compare, lacked a valve, reason is that this valve is not essential, this valve is not set, can be when becoming the venting of box cavity, close the 3rd valve 3 and the 5th valve 5, open the 4th valve 4, act on the second vacuum chamber by the first dry pump and the 3rd dry pump vacuumizes simultaneously.Working principle and the process of the one-tenth box cavity vacuum pumping device shown in Fig. 2 in structure are similar to the corresponding introduction in Fig. 1.
Below in conjunction with the structure that becomes box cavity vacuum pumping device in Fig. 2, to upper and lower two substrates in the demonstration field the box working procedure is described, concrete steps are as follows:
Step 1: after opening of device, bleed valve 7 cuts out, and other valve is opening state, and three dry pumps are started working, three cavitys are vacuumized, after arriving molecular pump 8 breakout pressures, the second valve 2, the 6th valve 6 are closed, and molecular pump 8 startups vacuumize and maintain the first vacuum chamber, the 3rd valve 3, the 5th valve 5 are closed simultaneously, allow the first dry pump and the 3rd dry pump continue to vacuumize to the second vacuum chamber, henceforth, each pump is always in continuous duty.Now be the initial idle state of equipment.
Step 2: when being produced, now bleed valve 7 is opened, while as the box cavity, arriving barometric pressure, become the box cavity to open receiving array substrate and color membrane substrates, become afterwards the box cavity to close, now the 5th valve 5 is opened, due to the second vacuum chamber always in vacuum state, now become gas in the box cavity to flow to the second vacuum chamber rapidly, its internal pressure descends rapidly, now opens the 3rd valve 3, and closes the 4th valve 4 and the 5th valve 5, allow the 3rd dry pump with the first dry pump simultaneously to becoming the box cavity to vacuumize, make it reach rapidly the molecular pump breakout pressure.
Step 3: open equally afterwards the 6th valve 6, allowing into the box cavity is communicated with the first vacuum chamber, because the first vacuum chamber is the high vacuum chamber, after two cavitys are communicated with, become the box chamber pressure also can descend rapidly, equally now open the second valve 2, close the first valve 1 and the 6th valve 6, make molecular pump to becoming the box cavity to vacuumize, make it reach into rapidly the required degree of vacuum of box.According to two newly-increased cavity volumes and each pump pumping speed size, according to timesaving principle, also can select to vacuumize with the first vacuum chamber that becomes the box cavity to be connected or the second vacuum chamber simultaneously, when the vacuum chamber volume of setting up larger, when vacuum pumping speed is larger, become box cavity internal air pressure to descend more obvious.
Step 4: two substrates completes after box, by becoming the 3rd valve 3 and the second valve 2 between box cavity and the first dry pump and the second dry pump, close, opening the first valve 1,4 pairs of the first vacuum chambers of the 4th valve and the second vacuum chamber continues respectively to vacuumize, become the bleed valve 7 on the box cavity to open, after in becoming the box cavity, reaching barometric pressure, cavity is opened simultaneously, take the glass that becomes box away, and accept new substrate, and continue step 2, so loop.
As can be seen from the above embodiments, on the basis of the utility model embodiment by the first vacuum pumping pump with becoming the box cavity to be connected, be provided with additional vacuum chamber, during becoming the venting of box cavity, utilize the vacuum unit of non-stop run to be vacuumized vacuum chamber, after becoming the venting of box cavity to finish, be lowered into the pressure of box cavity by vacuum chamber, further by vacuum unit, one-tenth box cavity is vacuumized again, both taken full advantage of the vacuum unit of continuous running, can accelerate into again again vacuumizing of box cavity, energy efficient, save time convenient.
Embodiment four:
The one-tenth box cavity vacuum pumping device of the present embodiment, comprise by the first pipeline and the vacuum unit that becomes the box cavity to be connected, and also comprises by the second pipeline and be connected at least one vacuum chamber between described one-tenth box cavity and vacuum unit;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve;
Described the first pipeline all for being connected an end of described one-tenth box cavity, is provided with the tie point that several are connected with described one-tenth box cavity with described the second pipeline side by side.
In the present embodiment, described one-tenth box cavity vacuum pumping device, all be provided with a plurality of tie points at the end for connecting into the box cavity of the first pipeline and the second pipeline, realized that one becomes box cavity vacuum pumping device for vacuumizing a plurality of one-tenth box cavitys.
The sequential of inflating between a plurality of one-tenth box cavitys and vacuumizing is different, vacuum unit adopts the method for time-division respectively to becoming the box cavity to be vacuumized with vacuum chamber, thereby, when having improved equipment operating efficiency, saved at least a set of one-tenth box cavity vacuum pumping device.
When the described one-tenth box of the present embodiment cavity vacuum pumping device becomes the work of box cavity with two, one at inflatable open, another need to vacuumize, and by valve, blocks the connection at the one-tenth box cavity of inflatable open, keeps being connected of the one-tenth box cavity need to vacuumize with another; At two, become the box cavitys all when vacuumizing, vacuum unit vacuumizes vacuum chamber, thereby raising again become the operational efficiency of box cavity vacuum pumping device, with respect to one, become the box cavity to connect a set of one-tenth box cavity vacuum pumping device simultaneously, saved the cost of a set of one-tenth box cavity vacuum pumping device.Simultaneously in order to improve the speed vacuumized, the number of increase vacuum pumping pump that can be suitable.
As further improvement of this embodiment, described vacuum unit is divided into the subelement that vacuumizes that the described tie point number N that is provided with the first pipeline equates;
Described the first pipeline is divided into N bar branch road;
Article one, described branch road is provided with a described tie point, and connects a described subelement that vacuumizes;
Described vacuumizing between subelement is connected by establishing valvular pipeline.
Vacuum unit is divided into to N and vacuumizes subelement, each vacuumizes in subelement and at least is provided with a vacuum pump, in concrete implementation procedure, each number that vacuumizes the vacuum pump that subelement comprises can require be arranged according to efficiency and the evacuation rate of the size that becomes the box cavity, vacuum pump.
Described the first pipeline is divided into N bar branch road, in concrete implementation process, can common conduit between branch road, only need to control by valve the independent control be embodied as between box cavity and vacuum unit and get final product, during common conduit, can reduce input the simplified structure of pipeline.
Vacuumize between subelement by establishing valvular pipeline to connection, when vacuumizing the corresponding one-tenth box of subelement cavity, one of them now inflates, another needs to vacuumize, can open corresponding two valves that vacuumize on the subelement connecting pipeline, make two to vacuumize subelement and be one and become the box cavity to vacuumize, thereby accelerate to vacuumize efficiency.
When two one-tenth box cavitys are all vacuumizing, and both air pressure is unequal, in order to guarantee not influence each other between two one-tenth box cavitys, can closes connection and vacuumize the valve on subelement, realize two partitions that vacuumize between subelement, guarantee the stable work of each vacuum unit.
In concrete implementation procedure, connect any two and vacuumize pipeline between subelement and the pipeline of equal reusable the first pipeline of valve or the second pipeline, to reduce the use of pipeline.
As shown in Figure 3, be below a specific embodiment: the described one-tenth box of the present embodiment cavity vacuum pumping device comprises vacuum unit, vacuum chamber 1, vacuum chamber 2; The first pipeline be equipped with two tie points that become the box cavity on the second pipeline, connected two and become the box cavitys in diagram, be into respectively box cavity 1 and become box cavity 2; Described vacuum unit is divided and each and every one is vacuumized subelement for two; First described subelement that vacuumizes, directly be connected with becoming box cavity 1 by the first pipeline, comprises dry pump 1-1, dry pump 1-2, dry pump 1-3 and molecular pump 41; Second described subelement that vacuumizes, directly be connected with becoming box cavity 2 by the first pipeline, comprises dry pump 2-1, dry pump 2-2, dry pump 2-3 and molecular pump 42.Be provided with valve 11, valve 12, valve 13, valve 14, valve 15, valve 16, valve 17, valve 18, valve 19, valve 20, valve 21 and valve 22 simultaneously in the described one-tenth box of the present embodiment cavity.Valve 31 is the break-make with the pipeline that becomes box cavity 1 for control connection CDA; And valve 32 for control connection CDA the break-make with the pipeline that becomes box cavity 2.
Wherein, valve 11 and valve 21 can forever be communicated with or block first and vacuumize subelement and second and vacuumize subelement.
In concrete implementation process, two vacuumize subelement and can respectively or combine becoming box cavity 1, becoming box cavity 2 to vacuumize, as box cavity 1 with to become box cavity 2 work schedules inconsistent, and when first vacuumizes number that subelement and second vacuumizes the vacuum pump in subelement and equates with the number that vacuumizes the vacuum pump in subelement in traditional equipment, two vacuumize subelement to one of them one-tenth box cavity, thereby the speed vacuumized has improved.
Embodiment five:
The described one-tenth box of the present embodiment cavity vacuum pumping device, improve to embodiment four arbitrary embodiments' basis at above-described embodiment one, is specially:
Described one-tenth box cavity vacuum pumping device also comprises on-off controller;
Described valve is solenoid valve;
Described on-off controller, receive extraneous instruction or according to built-in instruction, to the instruction of described solenoid valve transmit button;
Described solenoid valve receives and opens or cut out according to described switch order.
When implementing, the opening and closing of valve have been related to, in the present embodiment by the introducing of on-off controller, and described valve is set to solenoid valve, realize the automatic control to valve switch by on-off controller, thereby improved the automation of equipment, thereby strengthened again intellectuality and the practicability of equipment.
Embodiment six:
The described one-tenth box of the present embodiment cavity vacuum pumping device has been made further improvement in embodiment one to arbitrary one of embodiment's five embodiment's basis, is specially:
Be provided with the filter that flows to described vacuum unit gas for filtration in described vacuum chamber.
In traditional equipment, treat as in the box cavity while having steam and greasy dirt, can directly enter in the vacuum pump of vacuum unit, cause shorten the working life of vacuum pump; And in this has been implemented by the introducing of vacuum chamber, owing to becoming the box cavity when being vacuumized, at first form a connected component with vacuum chamber, can take away a part of steam and greasy dirt, and under part steam and greasy dirt finally can stop in vacuum chamber, thereby reduced steam and the greasy dirt of directly going to vacuum pump; Passing through again arranges filter in described vacuum chamber, minimizing again the pollution to vacuum pump of steam in the air-flow and greasy dirt, thereby can extend working life of vacuum pump.
As further improvement of this embodiment, described vacuum chamber and described the second pipeline removably connect.Be arranged to described the second pipeline by vacuum chamber and be to removably connect, facilitate maintenance and the cleaning of vacuum chamber, filter, use convenient.
Embodiment seven:
It is a kind of to box device that the present embodiment provides, comprise at least one become box cavity and as embodiment one to one-tenth box cavity vacuum pumping device as described in any structure in embodiment six, described one-tenth box cavity is connected by pipeline with described one-tenth box cavity vacuum pumping device.Thereby have advantages of that evacuation rate is fast, energy efficiency is high.
The above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection domain of the present utility model.
Claims (9)
1. one kind becomes box cavity vacuum pumping device, comprises by the first pipeline and the vacuum unit that becomes the box cavity to be connected, and it is characterized in that, also comprises by the second pipeline and is connected at least one vacuum chamber between described one-tenth box cavity and vacuum unit;
Between described one-tenth box cavity and described vacuum unit, between described one-tenth box cavity and described vacuum chamber, between described vacuum chamber and described vacuum unit, be provided with valve.
2. one-tenth box cavity vacuum pumping device as claimed in claim 1, is characterized in that, described vacuum unit comprises several vacuum pumps;
Several described vacuum pumps are connected with described one-tenth box cavity by the first pipeline, by the second pipeline, with described vacuum chamber, are connected.
3. one-tenth box cavity vacuum pumping device as claimed in claim 2, is characterized in that, described vacuum pump comprises dry pump and molecular pump.
4. become as claimed in claim 2 or claim 3 box cavity vacuum pumping device, it is characterized in that, described the first pipeline all is provided with N the tie point be connected with described one-tenth box cavity at the end for being connected described one-tenth box cavity with described the second pipeline;
Described N is not less than 2.
5. one-tenth box cavity vacuum pumping device as claimed in claim 4, is characterized in that,
Described vacuum unit is divided into N and vacuumizes subelement;
Described the first pipeline is divided into N bar branch road;
Article one, described branch road is provided with a described tie point, and connects a described subelement that vacuumizes;
Described vacuumizing between subelement is connected by establishing valvular pipeline.
6. one-tenth box cavity vacuum pumping device as claimed in claim 5, is characterized in that, also comprises on-off controller;
Described valve is solenoid valve;
Described on-off controller, receive extraneous instruction or according to built-in instruction, to the instruction of described solenoid valve transmit button;
Described solenoid valve receives and opens or cut out according to described switch order.
7. one-tenth box cavity vacuum pumping device as claimed in claim 6, is characterized in that, is provided with the filter that flows to described vacuum unit gas for filtration in described vacuum chamber.
8. one-tenth box cavity vacuum pumping device as claimed in claim 7, is characterized in that, described vacuum chamber and described the second pipeline removably connect.
9. one kind to box device, it is characterized in that, comprises that at least one becomes box cavity and as the described one-tenth box of claim 1-8 any one cavity vacuum pumping device,
Wherein said one-tenth box cavity is connected by pipeline with described one-tenth box cavity vacuum pumping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320426581 CN203348041U (en) | 2013-07-17 | 2013-07-17 | Box cavity vacuumizing device and box aligning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320426581 CN203348041U (en) | 2013-07-17 | 2013-07-17 | Box cavity vacuumizing device and box aligning device |
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| CN203348041U true CN203348041U (en) | 2013-12-18 |
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| CN 201320426581 Expired - Fee Related CN203348041U (en) | 2013-07-17 | 2013-07-17 | Box cavity vacuumizing device and box aligning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107235197A (en) * | 2017-04-26 | 2017-10-10 | 张家港市铭斯特光电科技有限公司 | One kind vacuumizes vacuum breaker method |
| CN107369600A (en) * | 2017-07-31 | 2017-11-21 | 武汉华星光电技术有限公司 | A kind of vacuum board |
| CN109441775A (en) * | 2018-11-29 | 2019-03-08 | 东莞市维健维康科技有限公司 | A kind of vacuum system |
| CN112368033A (en) * | 2018-07-04 | 2021-02-12 | 皇家飞利浦有限公司 | Pump device configured for use with a breast pump device |
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2013
- 2013-07-17 CN CN 201320426581 patent/CN203348041U/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107235197A (en) * | 2017-04-26 | 2017-10-10 | 张家港市铭斯特光电科技有限公司 | One kind vacuumizes vacuum breaker method |
| CN107235197B (en) * | 2017-04-26 | 2019-05-10 | 张家港市铭斯特光电科技有限公司 | One kind vacuumizing vacuum breaker method |
| CN107369600A (en) * | 2017-07-31 | 2017-11-21 | 武汉华星光电技术有限公司 | A kind of vacuum board |
| CN107369600B (en) * | 2017-07-31 | 2019-09-27 | 武汉华星光电技术有限公司 | A kind of vacuum board |
| CN112368033A (en) * | 2018-07-04 | 2021-02-12 | 皇家飞利浦有限公司 | Pump device configured for use with a breast pump device |
| CN109441775A (en) * | 2018-11-29 | 2019-03-08 | 东莞市维健维康科技有限公司 | A kind of vacuum system |
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