CN109441775A - A kind of vacuum system - Google Patents
A kind of vacuum system Download PDFInfo
- Publication number
- CN109441775A CN109441775A CN201811438170.2A CN201811438170A CN109441775A CN 109441775 A CN109441775 A CN 109441775A CN 201811438170 A CN201811438170 A CN 201811438170A CN 109441775 A CN109441775 A CN 109441775A
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- CN
- China
- Prior art keywords
- vacuum
- vacuum pump
- pump
- chamber
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/02—Pumping installations or systems specially adapted for elastic fluids having reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/123—Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/16—Filtration; Moisture separation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The present invention relates to vacuum pumping technology fields, more particularly to a kind of vacuum system, including the first vacuum chamber and the second vacuum chamber, the first vacuum pump is provided with below first vacuum chamber, the first vacuum tube is provided between first vacuum chamber and the first vacuum pump, first vacuum chamber is connected to the first vacuum pump by the first vacuum tube, the second vacuum pump is provided with below second vacuum chamber, the second vacuum tube is provided between second vacuum chamber and the second vacuum pump, third vacuum tube is provided between first vacuum chamber and second vacuum pump, the first solenoid valve and the first controller for controlling the first electromagnetic valve work are provided in the middle part of third vacuum tube, vacuum detector is provided in first vacuum chamber, vacuum detector is electrically connected with the first controller, vacuum system of the present invention is under the first vacuum pump cancel closedown state, simultaneously using the second vacuum pump Two chambers are vacuumized, continue to produce by the running of the second vacuum pump, to improve the running time of system, promote production capacity.
Description
Technical field
The present invention relates to vacuum pumping technology field more particularly to a kind of vacuum systems.
Background technique
Existing major part electronic component processing needs to carry out under vacuum conditions, the vacuum system that existing enterprise uses
It is most of to generally use independent vacuum pump in the vacuum system of multi-chamber for multi-chamber vacuum system and a certain chamber is taken out
Vacuum pumps the volume of interior air-breathing cavity by constantly changing, makes constantly to be expanded by the volume of gas in pumping chamber, to be needed
The vacuum environment wanted, prolonged operating can make vacuum pump cancel closedown due to temperature anomaly or back pressure height etc., lead to phase
The chamber answered also stops working, and can not be produced, and influences to produce production capacity.
Summary of the invention
The purpose of the present invention is to solve the shortcomings of the prior art providing a kind of vacuum system, vacuum system of the present invention is
Under one vacuum pump cancel closedown state, two chambers are vacuumized simultaneously using the second vacuum pump, so that first chamber will not be because
The cancel closedown of first vacuum pump and shut down, in the first vacuum pump repair process, by the running of the second vacuum pump continue into
Row production promotes production capacity to improve the time that operates of whole system.
The present invention is achieved through the following technical solutions, a kind of vacuum system, including the first vacuum chamber and second is very
Cavity is provided with the first vacuum pump below first vacuum chamber, is arranged between first vacuum chamber and the first vacuum pump
There is the first vacuum tube, first vacuum chamber is connected to the first vacuum pump by the first vacuum tube, under second vacuum chamber
Side is provided with the second vacuum pump, and the second vacuum tube is provided between second vacuum chamber and the second vacuum pump, and described second is true
Cavity is connected to the second vacuum pump by the second vacuum tube, and is provided between first vacuum chamber and second vacuum pump
One end of three vacuum tubes, the third vacuum tube is connected to the second vacuum pump, and the other end of the third vacuum tube and first is very
Blank pipe connection is provided with the first solenoid valve and the first control for controlling the first electromagnetic valve work in the middle part of third vacuum tube
Device processed is provided with vacuum detector in first vacuum chamber, and the vacuum detector is electrically connected with the first controller.
Preferably, the junction of the third vacuum tube and the first vacuum tube is provided with second solenoid valve and for controlling
The second controller of second solenoid valve work, is provided with first passage and second channel in the second solenoid valve, and described first
The top and bottom in channel are connected to the first vacuum tube respectively, and the first passage and the second channel are vertically arranged, described
One end of second channel is connected to first passage, and the other end of the second channel is connected to third vacuum tube, and described second is logical
The connectivity part of road and first passage is provided with blocking valve, and the blocking valve is electrically connected with second controller.
Preferably, being provided with third solenoid valve in the middle part of second vacuum tube and for controlling third electromagnetic valve work
Third controller.
Preferably, the side of first vacuum pump is provided with the first work liquid cooling for cooling down to the first vacuum pump
But system, the side of second vacuum pump are provided with the second work liquid cooling system for cooling down to the second vacuum pump, institute
It is identical as the second working solution cooling system structure to state the first work liquid cooling system.
Preferably, the first work liquid cooling system includes the first chilled water tank, first chilled water tank and the
It is provided with water inlet pipe and outlet pipe between one vacuum pump, the both ends of the both ends of the water inlet pipe and the outlet pipe are respectively with first
Chilled water tank, the connection of the first vacuum pump, first chilled water tank, the first vacuum pump, water inlet pipe, outlet pipe form closed follow
Endless tube road.
Preferably, be provided with temperature sensor in first chilled water tank, the water inlet of first vacuum pump and
Water outlet is respectively arranged with the 4th solenoid valve and the 5th solenoid valve, and the 4th solenoid valve and the 5th solenoid valve are passed with temperature respectively
Sensor electrical connection.
Preferably, the lower end of first vacuum pump and the lower end of second vacuum pump are provided with exhaust-gas treatment dress
It sets.
Beneficial effects of the present invention: a kind of vacuum system, including the first vacuum chamber and the second vacuum chamber, first vacuum
It is provided with the first vacuum pump below chamber, the first vacuum tube is provided between first vacuum chamber and the first vacuum pump, it is described
First vacuum chamber is connected to the first vacuum pump by the first vacuum tube, is provided with the second vacuum below second vacuum chamber
Pump, is provided with the second vacuum tube, second vacuum chamber and the second vacuum pump between second vacuum chamber and the second vacuum pump
It is connected to by the second vacuum tube, is provided with third vacuum tube between first vacuum chamber and second vacuum pump, described the
One end of three vacuum tubes is connected to the second vacuum pump, and the other end of the third vacuum tube is connected to the first vacuum tube, is located at the
The first solenoid valve and the first controller for controlling the first electromagnetic valve work are provided in the middle part of three vacuum tubes, described first is true
Vacuum detector is provided in cavity, the vacuum detector is electrically connected with the first controller, and vacuum system of the present invention is first
Under vacuum pump cancel closedown state, two chambers are vacuumized simultaneously using the second vacuum pump, so that first chamber will not be because of the
The cancel closedown of one vacuum pump and shut down, in the first vacuum pump repair process, continued by the running of the second vacuum pump
Production promotes production capacity to improve the time that operates of whole system.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of vacuum system embodiment one of the present invention.
Fig. 2 is the structural schematic diagram of vacuum system embodiment two of the present invention.
Fig. 3 is the schematic diagram of the section structure of second solenoid valve 11 of the present invention.
Fig. 4 is the structural schematic diagram of the present invention the first work liquid cooling system.
Specific embodiment
1 the present invention is described further to attached drawing 4 and specific embodiment with reference to the accompanying drawing.
As shown in Figure 1, a kind of vacuum system, including the first vacuum chamber 1 and the second vacuum chamber 2, first vacuum chamber 1
Lower section is provided with the first vacuum pump 3, and the first vacuum tube 4 is provided between first vacuum chamber 1 and the first vacuum pump 3, described
First vacuum chamber 1 is connected to the first vacuum pump 3 by the first vacuum tube 4, and it is true that the lower section of second vacuum chamber 2 is provided with second
Sky pump 5, is provided with the second vacuum tube 6, second vacuum chamber 2 and second between second vacuum chamber 2 and the second vacuum pump 5
Vacuum pump 5 is connected to by the second vacuum tube 6, is provided with third vacuum between first vacuum chamber 1 and second vacuum pump 5
Pipe 7, one end of the third vacuum tube 7 are connected to the second vacuum pump 5, the other end and the first vacuum of the third vacuum tube 7
Pipe 4 is connected to, the middle part of third vacuum tube 7 is provided with the first solenoid valve 8 and works for controlling the first solenoid valve 8 first
Controller 9 is provided with vacuum detector 10 in first vacuum chamber 1, and the vacuum detector 10 is electrically connected with the first controller 9
It connects.
In the present embodiment, under normal operating conditions, the first vacuum pump 3 carries out the first vacuum chamber 1 by the first vacuum tube 4
It vacuumizes, the second vacuum pump 5 vacuumizes the second vacuum chamber 2 by the second vacuum tube 6；When event occurs in the first vacuum pump 3
When barrier, vacuum detector 10 detects that vacuum value is different from setting numerical value in the first vacuum chamber 1, concludes that the first vacuum pump 3 goes out
Existing failure, therefore the first controller 9 can be sent a signal to, the first controller 9 opens the first solenoid valve 8 and opens third vacuum tube 7
Channel, the second vacuum pump 5 simultaneously vacuumize the first vacuum chamber 1 and the second vacuum chamber 2, and operator can be by the first vacuum pump
3 stop operating and repair, and vacuum system of the present invention uses the second vacuum pump 5 under 3 cancel closedown state of the first vacuum pump
Two chambers are vacuumized simultaneously, so that first chamber 1 will not be shut down because of the cancel closedown of the first vacuum pump 3, it is true first
In sky 3 repair processes of pump, continue to produce by the running of the second vacuum pump 5, to improve when operating of whole system
Between, promote production capacity.
As shown in Figure 2 to Figure 3, as another embodiment, in the junction of third vacuum tube 7 and the first vacuum tube 4
It is provided with second solenoid valve 11 and the second controller 12 for controlling the work of second solenoid valve 11, in the second solenoid valve 11
It is provided with first passage 111 and second channel 112, the top and bottom of the first passage 111 connect with the first vacuum tube 4 respectively
Logical, the first passage 111 and the second channel 112 are vertically arranged, one end of the second channel 112 and first passage
111 connections, the other end of the second channel 112 are connected to third vacuum tube 7, the second channel 112 and first passage 111
Connectivity part be provided with and stop valve 113, the blocking valve 113 is electrically connected with second controller, and the difference of the present embodiment exists
In the setting for eliminating the first solenoid valve 8 and the first controller 9, it is arranged in the junction of third vacuum tube 7 and the first vacuum tube 4
There are a second solenoid valve 11 and second controller 12, under 3 normal operating conditions of the first vacuum pump, the control of the first controller 9 stops valve
Door 113 closes second channel 112, opens first passage 111；When a vacuum pump 3 breaks down, the control resistance of the first controller 9
It keeps off valve 113 and opens second channel 112, close first passage 111, the second vacuum pump 5 is true to the first vacuum chamber 1 and second simultaneously
Cavity 2 is vacuumized.
In the present embodiment, the middle part of second vacuum tube 6 is provided with third solenoid valve 13 and for controlling third electromagnetism
The third controller 14 that valve 13 works, third controller 14 control third solenoid valve 13 and open the second vacuum tube 6, the second vacuum pump
5 vacuumize the second vacuum chamber 2 by the second vacuum tube 6.
In the present embodiment, the side of first vacuum pump 3 is provided with the first work for cooling down to the first vacuum pump 3
Liquid cooling system 15, it is cooling that the side of second vacuum pump 5 is provided with the second working solution for cooling down to the second vacuum pump 5
System 16, the first work liquid cooling system 15 is identical as second work 16 structure of liquid cooling system, the first vacuum pump 3
Higher temperature can be generated by working long hours, and high temperature is easy to cause 3 failure of the first vacuum pump, it is therefore desirable to pass through the first working solution
The work of cooling system 15, second liquid cooling system 16 respectively cools down the first vacuum pump 3, the second vacuum pump 5.
In the present embodiment, the lower end of the lower end of first vacuum pump 3 and second vacuum pump 5 is provided at exhaust gas
Device 17 is managed, the gas that emission-control equipment 17 extracts the first vacuum chamber 1 and the second vacuum chamber 2 out is handled.
As shown in figure 3, the first work liquid cooling system 15 includes the first chilled water tank 151, first cooling water
Be provided with water inlet pipe 152 and outlet pipe 153 between tank 151 and the first vacuum pump 3, the both ends of the water inlet pipe 152 and it is described go out
The both ends of water pipe 153 are connected to the first chilled water tank 151, the first vacuum pump 3 respectively, and first chilled water tank 151, first is true
Sky pump 3, water inlet pipe 152, outlet pipe 153 form closed circulation line, and the cooling water in the first chilled water tank 151 passes through water inlet
Pipe 152 enters in the first vacuum pump 3 and carries out heat exchange, takes away the heat of the first vacuum pump 3, subsequent cooling water passes through outlet pipe
153 are back in the first chilled water tank 151, are recycled.
In the present embodiment, temperature sensor 154 is provided in first chilled water tank 151, first vacuum pump 3
Inlet and outlet are respectively arranged with the 4th solenoid valve 155 and the 5th solenoid valve 156, the 4th solenoid valve 155 and the 5th
Solenoid valve 156 is electrically connected with temperature sensor 154 respectively, when the cooling water in the first chilled water tank 151 passes through multiple heat exchange
Afterwards, temperature can increase, and cooling effect is undesirable at this time, and temperature sensor 154 detects cold in the first chilled water tank 151
But after water heating, the 4th solenoid valve 155 can be controlled and the 5th solenoid valve 156 closes the inlet and outlet of the first vacuum pump 3；
After cooling water temperature or operator's replacement cooling water in the first chilled water tank 151, then open the water inlet of the first vacuum pump 3
Mouth and water outlet, continue to cool down.
The above is only a preferred embodiment of the present invention, for those of ordinary skill in the art, according to the present invention
Thought, there will be changes in the specific implementation manner and application range, and the content of the present specification should not be construed as to the present invention
Limitation.
Claims (7)
1. a kind of vacuum system, it is characterised in that: including the first vacuum chamber and the second vacuum chamber, the lower section of first vacuum chamber
It is provided with the first vacuum pump, the first vacuum tube, first vacuum are provided between first vacuum chamber and the first vacuum pump
Chamber is connected to the first vacuum pump by the first vacuum tube, is provided with the second vacuum pump below second vacuum chamber, and described
It is true by second that the second vacuum tube, second vacuum chamber and the second vacuum pump are provided between two vacuum chambers and the second vacuum pump
Blank pipe connection, is provided with third vacuum tube between first vacuum chamber and second vacuum pump, the third vacuum tube
One end is connected to the second vacuum pump, and the other end of the third vacuum tube is connected to the first vacuum tube, positioned at third vacuum tube
Middle part is provided with the first solenoid valve and the first controller for controlling the first electromagnetic valve work, setting in first vacuum chamber
There is vacuum detector, the vacuum detector is electrically connected with the first controller.
2. a kind of vacuum system according to claim 1, it is characterised in that: the third vacuum tube and the first vacuum tube
Junction is provided with second solenoid valve and the second controller for controlling second solenoid valve work, sets in the second solenoid valve
It is equipped with first passage and second channel, the top and bottom of the first passage are connected to the first vacuum tube respectively, and described first
Channel and the second channel are vertically arranged, and one end of the second channel is connected to first passage, the second channel it is another
One end is connected to third vacuum tube, and the connectivity part of the second channel and first passage is provided with blocking valve, the blocking valve
Door is electrically connected with second controller.
3. a kind of vacuum system according to claim 1, it is characterised in that: be provided in the middle part of second vacuum tube
Three solenoid valves and third controller for controlling third electromagnetic valve work.
4. a kind of vacuum system according to claim 1, it is characterised in that: the side setting of first vacuum pump is useful
In the first work liquid cooling system to cool down to the first vacuum pump, the side of second vacuum pump is provided with for true to second
Second work liquid cooling system of sky pump cooling, the first work liquid cooling system and the second work liquid cooling system knot
Structure is identical.
5. a kind of vacuum system according to claim 4, it is characterised in that: the first work liquid cooling system includes the
One chilled water tank is provided with water inlet pipe and outlet pipe between first chilled water tank and the first vacuum pump, the water inlet pipe
Both ends and the both ends of the outlet pipe are connected to the first chilled water tank, the first vacuum pump respectively, first chilled water tank, first
Vacuum pump, water inlet pipe, outlet pipe form closed circulation line.
6. a kind of vacuum system according to claim 5, it is characterised in that: be provided with temperature in first chilled water tank
Sensor, the inlet and outlet of first vacuum pump are respectively arranged with the 4th solenoid valve and the 5th solenoid valve, and described
Four solenoid valves and the 5th solenoid valve are electrically connected with temperature sensor respectively.
7. a kind of vacuum system according to claim 1, it is characterised in that: the lower end of first vacuum pump and described
The lower end of two vacuum pumps is provided with emission-control equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811438170.2A CN109441775A (en) | 2018-11-29 | 2018-11-29 | A kind of vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811438170.2A CN109441775A (en) | 2018-11-29 | 2018-11-29 | A kind of vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109441775A true CN109441775A (en) | 2019-03-08 |
Family
ID=65554406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811438170.2A Pending CN109441775A (en) | 2018-11-29 | 2018-11-29 | A kind of vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109441775A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2518317A1 (en) * | 2009-12-24 | 2012-10-31 | Sumitomo Seika Chemicals CO. LTD. | Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus |
| CN203348041U (en) * | 2013-07-17 | 2013-12-18 | 京东方科技集团股份有限公司 | Box cavity vacuumizing device and box aligning device |
| CN204591629U (en) * | 2014-12-23 | 2015-08-26 | 深圳市科罗威材料科技有限公司 | Vacuum pumping device |
| CN105552001A (en) * | 2015-12-10 | 2016-05-04 | 武汉华星光电技术有限公司 | Vacuum system |
| CN205478179U (en) * | 2016-02-26 | 2016-08-17 | 连云港康乐药业有限公司 | Energy -concerving and environment -protective automatic control type vacuum system |
-
2018
- 2018-11-29 CN CN201811438170.2A patent/CN109441775A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2518317A1 (en) * | 2009-12-24 | 2012-10-31 | Sumitomo Seika Chemicals CO. LTD. | Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus |
| CN203348041U (en) * | 2013-07-17 | 2013-12-18 | 京东方科技集团股份有限公司 | Box cavity vacuumizing device and box aligning device |
| CN204591629U (en) * | 2014-12-23 | 2015-08-26 | 深圳市科罗威材料科技有限公司 | Vacuum pumping device |
| CN105552001A (en) * | 2015-12-10 | 2016-05-04 | 武汉华星光电技术有限公司 | Vacuum system |
| CN205478179U (en) * | 2016-02-26 | 2016-08-17 | 连云港康乐药业有限公司 | Energy -concerving and environment -protective automatic control type vacuum system |
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Application publication date: 20190308 |
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| RJ01 | Rejection of invention patent application after publication |