CN209083522U - Air transporting arrangement - Google Patents

Abstract

This case provides a kind of air transporting arrangement, include: the first flow guiding unit group and the second flow guiding unit group, it is made of respectively multiple flow guiding units, multiple flow guiding unit respectively has ingate and outlet opening, actuated gas can be imported by the respective ingate of multiple flow guiding unit and be discharged by the outlet opening；And gas collection chamber, it is set between the first flow guiding unit group and the second flow guiding unit group, and there is exhaust outlet；Wherein, the first flow guiding unit group and second unit group are respectively sucked gas by multiple ingates, and are delivered to the gas collection chamber by multiple outlet opening, then be discharged by the exhaust outlet of gas collection chamber, in order to the adjustment for realizing appropriate gas transport amount.

Description

Air transporting arrangement

[technical field]

This case be about a kind of air transporting arrangement, it is espespecially a kind of through miniature, slim and mute air transporting arrangement.

[background technique]

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the gas structure for conveying that micro- side Pu is included is its key technology, therefore how prominent by means of innovation structure Its technical bottleneck is broken, for the important content of development.

With making rapid progress for science and technology, air transporting arrangement using upper also more and more diversification, industrial application, life such as Cure application, health care, electronic radiation etc., or even the recently popular all visible Ta COPA shadow of wearable device, it is seen that tradition Air transporting arrangement had the tendency that gradually towards device microminiaturization, flow maximize.

In in the prior art, air transporting arrangement is mainly constituted with traditional mechanism part stacking, and with each machine Structure component minimization or the mode of thickness thinning, to achieve the purpose that single unit system micromation, slimming.However, traditional mechanism After microminiaturization, dimension control is not easy part, and assembly precision is equally difficult to control, and it is different in turn result in product yield, The problems such as instability of flow for even thering is gas to transmit.

Furthermore, it is known that charge delivery mechanism also there is the problem of feed flow deficiency, through pure gas transmitting device It is difficult to the demand transmitted in response to bulk gas, and known charge delivery mechanism usually has the foot that connects of evagination to connect for being powered Be used, if therefore be intended to multiple known charge delivery mechanisms be arranged side by side to improve transmission quantity, assembly precision is not equally easily-controllable System, connects the obstacle that foot be easy to cause setting, and it is complicated to also result in its external supply lines setting, therefore is still difficult to through this side Formula improves flow, and arrangement mode is also compared with can not flexibly use.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed charge delivery mechanism Device or equipment reach small in size, micromation and mute, and overcome the problems, such as miniature sizes precision be not easy to control, underfed, and The minitype gas transmitting device of various devices can flexibly be applied to, actually problem in the urgent need to address at present.

[utility model content]

The main purpose of this case is to provide a kind of air transporting arrangement, produce by micro electronmechanical processing procedure integrally formed micro- Type air transporting arrangement, with overcome traditional conveying device can not have both simultaneously it is small in size, micromation, dimensional accuracy control and The problem of underfed.

In order to achieve the above object, a broader implementation pattern of this case is to provide a kind of air transporting arrangement, include: one first Flow guiding unit group and one second flow guiding unit group, are made of multiple flow guiding units, these flow guiding units respectively have one respectively Ingate and an outlet opening, actuated gas can be imported by the respective ingate of these flow guiding units and arranged by the outlet opening Out；And a gas collection chamber, it is set between the first flow guiding unit group and the second flow guiding unit group, and there is an exhaust Mouthful；Wherein, the first flow guiding unit group and the second unit group are respectively sucked gas by multiple ingate, and by multiple Outlet opening is delivered to the gas collection chamber, then is discharged by the exhaust outlet of the gas collection chamber, in order to the tune for realizing appropriate gas transport amount It is whole.

[Detailed description of the invention]

Fig. 1 is the surface structure schematic diagram for the air transporting arrangement that this case is the first preferred embodiment.

Fig. 2 is the schematic diagram of the section structure of air transporting arrangement shown in FIG. 1.

Fig. 3 A is the single flow guiding unit partial enlargement structural representation of the section of air transporting arrangement shown in Fig. 2.

Fig. 3 B to Fig. 3 D is the single flow guiding unit actuation process partial schematic diagram of air transporting arrangement shown in Fig. 3 A.

Fig. 4 is the surface structure schematic diagram for the air transporting arrangement that this case is the second preferred embodiment.

Fig. 5 is the surface structure schematic diagram for the air transporting arrangement that this case is third preferred embodiment.

Fig. 6 is the surface structure schematic diagram for the air transporting arrangement that this case is the 4th preferred embodiment.

Fig. 7 A and Fig. 7 B are the illustrative view of the first, second and third state sample implementation of the valve of this case.

Fig. 8 A and Fig. 8 B are the illustrative view of the four, the 5th state sample implementations of the valve of this case.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.

The air transporting arrangement of this case is air transporting arrangement, please refers to Fig. 1, Fig. 2 and Fig. 3 A, in first embodiment, Air transporting arrangement 1 includes one first flow guiding unit group 10a, one second flow guiding unit group 10b and a gas collection chamber 10c, and first Flow guiding unit group 10a and the second flow guiding unit group 10b are made of multiple flow guiding units 10 respectively, and gas collection chamber 10c is arranged Between the first flow guiding unit group 10a and the second flow guiding unit group 10b, and gas collection chamber 1c has an exhaust outlet A；Each is led Flowing unit 10 includes the elements such as access panel 17, substrate 11, sounding board 13, actuation plate 14, piezoelectric element 15 and exit plate 16 It sequentially stacks and is constituted, wherein access panel 17 has ingate 170, and sounding board 13 has hollow bore 130 and movable part 131, And confluence chamber 12 is formed between sounding board 13 and the access panel 17, actuation plate 14 has suspension portion 141, outer frame 142 and more A gap 143, exit plate 16 have outlet opening 160, and structure, feature and set-up mode will be described in further detail in illustrating back segment.

First flow guiding unit group 10a of the air transporting arrangement 1 of the present embodiment and the second flow guiding unit group 10b are penetrated Multiple ingates 170 of access panel 17, multiple confluence chambers 12 of substrate 11, multiple hollow bores 130 of sounding board 13 and more The multiple suspension portions 141 and multiple gaps 143, multiple piezoelectric elements 15 and multiple outlet openings of a movable part 131, actuation plate 14 160 to constitute multiple flow guiding units 10, and in other words, each flow guiding unit 10 is hollow comprising a confluence chamber 12, one The movable part 131, one of hole 130, one suspension portion 141,143, one, gap piezoelectric element 15, one outlet hole 160 and One ingate 170, but not limited to this, has a gap between the sounding board 13 and actuation plate 14 of each flow guiding unit 10 G0, which is formed, forms (such as Fig. 3 A of second chamber 19 between first chamber 18 (as shown in Figure 3A) and actuation plate 14 and exit plate 16 It is shown).The structure of air transporting arrangement 1 and gas control mode for convenience of description, following the description will be with single flow guiding units 10 Be illustrated, so this it is non-only have single flow guiding unit 10 to limit this case, multiple flow guiding units 10 may include multiple identical knots The formed air transporting arrangement 1 of single flow guiding unit 10 of structure, quantity can appoint Shi Bianhua according to practical situation.

As shown in Figure 1, in the first preferred embodiment, the first flow guiding unit group 10a and the second flow guiding unit group 10b's is more The quantity of a flow guiding unit 10 be 40, imply that air transporting arrangement 1 has 80 units that can individually transmit gas, i.e., As shown in Figure 1, each ingate 170 corresponds to each flow guiding unit 10, and the first flow guiding unit group 10a and second is led Flow 40 flow guiding units 10 of unit group 10b more respectively with 20 for a line, be arranged side by side with corresponding two-by-two, but not as Limit, quantity, arrangement mode all can appoint Shi Bianhua according to practical situation.

Referring to Fig. 2, in this present embodiment, it is the hole always to penetrate oralia 17 that access panel 17, which has ingate 170, Hole, each flow guiding unit 10 are all had an ingate 170, are circulated with supplied gas.In some embodiments, access panel 17 more may be used Comprising filter device (non-schema), but not limited to this, which is that closing is set to ingate 170, to cross air filtration Dust in body, or to filter the impurity in gas, flowing to the inside of air transporting arrangement 1 to avoid impurity, dust makes Damaging components.

The substrate 11 of air transporting arrangement 1 further includes one drive circuit (not shown), to the anode with piezoelectric element 15 And cathode is electrically connected, to provide driving power, but not limited to this.In some embodiments, driving circuit is also settable Any position inside air transporting arrangement 1, but not limited to this, can appoint Shi Bianhua according to practical situation.

Please continue to refer to Fig. 2 and Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, sounding board 13 is for the knot that suspends Structure, sounding board 13 has more hollow bore 130 and multiple movable parts 131, and each flow guiding unit 10 all has a hollow hole Hole 130 and its corresponding movable part 131.In the flow guiding unit 10 of the present embodiment, hollow bore 130 is to be set to movably At the center in portion 131, and hollow bore 130 runs through the hole of sounding board 13 for one, and is connected to confluence chamber 12 and the first chamber Between room 18, is circulated and transmitted with supplied gas.The movable part 131 of the present embodiment is for the part of sounding board 13, is one flexible Structure, and can with actuating mould 14 driving and upper and lower bending vibration, whereby to transmit gas, making flowing mode will be in explanation Book back segment is described in further detail.

Please continue to refer to Fig. 2 and Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, actuation plate 14 is for a metal material Material film or polysilicon membrane are constituted, and but not limited to this, which is hollow suspension structure, and actuation plate 14 has more Suspension portion 141 and outer frame 142, and each flow guiding unit 10 all has a suspension portion 141.In the flow guiding unit of the present embodiment In 10, suspension portion 141 is to be connected to outer frame 142 with multiple interconnecting pieces (not shown), so that suspension portion 141 is suspended in outline border In portion 142, and multiple gaps 143 are defined between suspension portion 141 and outer frame 142, circulate to supplied gas, and suspension portion 141 and outer frame 142 and the set-up mode in gap 143, state sample implementation and quantity be not limited, can become according to practical situation Change.In some embodiments, suspension portion 141 is to imply that suspension portion 141 further includes a protrusion and (do not scheme for the structure of a cascaded surface Show), which can be but not be limited to a circular protrusions structure, be set to the lower surface in suspension portion 141, and through the setting of protrusion So that the depth of first chamber 18 is maintained at a specific sections value, can avoid causing because the depth of first chamber 18 is too small altogether whereby The movable part 131 of vibration plate 13 leads to the problem of collision with actuation plate 14 when being resonated, generates noise, also can avoid because of first The depth of chamber 18 excessive the problem of leading to gas transport insufficient pressure, but not limited to this.

Please continue to refer to Fig. 2 and Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, each flow guiding unit 10 is all had One piezoelectric element 15, piezoelectric element 15 is the upper surface for being attached at the suspension portion 141 of actuation plate 14, and piezoelectric element 15 has more Have an anode and a cathode (not shown), be for electrically connecting to, enable between the voltage source 15 receive voltage after generation type become, to drive The reciprocating vibration of dynamic actuation plate 14 reciprocally vertical direction, and sounding board 13 is driven to generate resonance, make sounding board 13 whereby First chamber 18 between actuation plate 14 generates pressure change, and with the transmission of supplied gas, making flowing mode will be after specification Section is described in further detail.

Please continue to refer to Fig. 1 to Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, exit plate 16 further includes outlet opening 160, and each flow guiding unit 10 all has one outlet hole 160.In the flow guiding unit 10 of the present embodiment, outlet opening 160 is It is connected between 16 outside of the second chamber 19 and exit plate, outlet is flow to through outlet opening 160 by second chamber 19 with supplied gas Outside plate 16, in order to the transmission for realizing gas.

Please refer to Fig. 3 A to Fig. 3 D, Fig. 3 B to Fig. 3 D is the single flow guiding unit of air transporting arrangement shown in Fig. 3 A 10 actuation process partial schematic diagrams.Firstly, the flow guiding unit 10 of air transporting arrangement 1 shown in Fig. 3 A is the state of non-enable (i.e. original state) is wherein with gap g0, so that sounding board 13 and actuation plate 14 between sounding board 13 and actuation plate 14 Can maintain the depth of gap g0 between suspension portion 141, and then gas can be guided and more quickly flowed, and because suspension portion 141 with Sounding board 13 keeps suitable distance to make the interference reduction that is in contact with each other, and promotes noise generation that can be lowered, but not limited to this.

As shown in Fig. 2 and Fig. 3 B, in flow guiding unit 10, when the application voltage of piezoelectric element 15, make actuation plate 14 by piezoelectricity When the driving actuating of element 15, the suspension portion 141 of actuation plate 14 vibrates upwards, reduces the increase of 18 volume of first chamber, pressure, then Gas is complied with external pressure by the ingate 170 on access panel 17 and is entered, and is pooled at the confluence chamber 12 of substrate 11, then pass through It is flowed upwardly by the central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 into first chamber 18.Then, as schemed Shown in 2 and Fig. 3 C, and the drive of the vibration of the suspension portion 141 due to being actuated plate 14, make the movable part 131 of sounding board 13 also with Resonance and vibrate upwards, and the suspension portion 141 of actuation plate 14 also simultaneously downwards vibration, paste the movable part 131 of sounding board 13 In the attached suspension portion 141 for contacting at actuation plate 14, the space of 18 middle flow of first chamber is simultaneously closed off, makes the first chamber whereby Room 18 is compressed and volume is made to become smaller, pressure increases, and so that the increase of 19 volume of second chamber, pressure is become smaller, and then form barometric gradient, It pushes the gas inside first chamber 18 to flow to two sides, and flows into second chamber via multiple gaps 140 of actuation plate 14 In 19.

For another example shown in Fig. 2 and Fig. 3 D, the suspension portion 141 of actuation plate 14 continues to vibrate downwards, and drive sounding board 13 can Dynamic portion 131 with downward vibration, compress first chamber 18 further, and flow to most gas in second chamber 19 temporarily It deposits.

Finally, actuation plate 14 suspension portion 141 upwards vibrate, make second chamber 19 compress and volume becomes smaller, pressure becomes larger, And then it is external to exit plate 16 to export the gas in second chamber 19 from the outlet opening 160 of exit plate 16, to complete gas Transmission, so repeat actuation shown in Fig. 3 B, increase the volume of first chamber 18, pressure reduces, and then make gas again External pressure entrance is complied in the secondary ingate 170 by access panel 17, and is pooled at the confluence chamber 12 of substrate 11, then via The central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 is flowed upwardly into first chamber 18.By repetition is above-mentioned The gas transport of the flow guiding unit 10 of Fig. 3 B to Fig. 3 D flows, and makes the suspension portion 141 of actuation plate 14 and the movable part of sounding board 13 131 are persistently reciprocally vibrated up and down, sustainable that gas is continued exit hole 160 by inlet port 170, in order to realization The transmission of gas.

In this way, which the air transporting arrangement 1 via the present embodiment generates in the runner design of each flow guiding unit 10 Barometric gradient makes gas flow at high rates, and through the resistance difference in runner disengaging direction, gas is transmitted to discharge by suction side End, and in the state that outlet side has pressure, it still has the ability to continue pushing out gas, and can reach mute effect.In some realities It applies in example, the vertical reciprocating type vibration frequency of sounding board 13 is can be identical as the vibration frequency of actuation plate 14, i.e., the two can be simultaneously It is upwards or downward simultaneously, it is that can appoint Shi Bianhua according to situation is actually applied, not to make flowing mode shown in the present embodiment It is limited.

Please continue to refer to shown in Fig. 2, in this present embodiment, the concatenation setting of multiple flow guiding units 10 is respectively formed first and is led Unit group 10a and the second flow guiding unit group 10b is flowed, and the first flow guiding unit group 10a is stacked into the second flow guiding unit longitudinally upward Group 10b, and gas collection chamber 10c is set between the first flow guiding unit group 10a and the second flow guiding unit group 10b, and air collecting chamber Room 10c is connected to the outlet opening 160 of these flow guiding units 10 of the first flow guiding unit group 10a, the second flow guiding unit group 10b. It, can be by gas by it when these flow guiding units 10 actuating in the first flow guiding unit group 10a, the second flow guiding unit group 10b Multiple ingates 170 suck, then are delivered to gas collection chamber 10c accumulation gas, gas collection chamber 10c by multiple outlet openings 160 The gas that the first flow guiding unit group 10a and flow guiding unit group 10b are conveyed is collected, is finally discharged by exhaust outlet A, is so set The air transporting arrangement 1 set is able to suitable to adjust using the actuating of the first flow guiding unit group 10a and the second flow guiding unit group 10b When gas transport amount.In addition, the quantity, arrangement mode between the first flow guiding unit group 10a and the second flow guiding unit group 10b are phase Together, but not this is to be limited, in another embodiment, the quantity of the first flow guiding unit group 10a and the second flow guiding unit group 10b with Arrangement mode also can be difference.

In this present embodiment, the first flow guiding unit group 10a of air transporting arrangement 1 and the second flow guiding unit group 10b can match The design of various arrangement mode and the connection of driving circuit are closed, flexibility ratio is high, more it is applied in various electronic component, And can simultaneously enable transmit gas, can be in response to the gas transport demand of big flow；In addition, each flow guiding unit 10 also can be controlled individually Production is dynamic or stops, such as: 10 actuation of part flow guiding unit, another part flow guiding unit 10 stop, and can also be part water conservancy diversion Unit 10 replaces running with the flow guiding unit 10 of another part, but is not limited, and can be easily achievable various gases whereby and pass The demand of defeated flow, and can reach the effect of power consumption is greatly reduced.

Referring to Fig. 4, Fig. 4 is the surface structure schematic diagram for the air transporting arrangement that this case is the second preferred embodiment.In In the second preferred embodiment of this case, the first flow guiding unit group 20a (non-schema) of air transporting arrangement 2 and the second flow guiding unit group The mutual vertical stack setting of 20b, and multiple flow guiding units 20 of the first flow guiding unit group 20a and the second flow guiding unit group 20b Quantity be 80, arrangement mode be i.e. access panel 27 each ingate 270 correspond to each flow guiding unit 20, In other words, air transporting arrangement 2 has 160 units that can individually transmit gas, the first flow guiding unit group 20a (non-schema) and The structure of second flow guiding unit group 20b be it is similar in aforementioned first embodiment, difference is only that its quantity, mode is arranged, Therefore its structure does not repeat further in this.The first flow guiding unit group 20a (non-schema) of the present embodiment and the second flow guiding unit 80 flow guiding units 20 of group 20b are arranged side by side also with 20 for a line with four rows are corresponding, but are not limited, quantity, Arrangement mode all can appoint Shi Bianhua according to practical situation.Through the first flow guiding unit group 20a (non-schema) and the second flow guiding unit Group 20b is respectively provided with 80 flow guiding units 20, and gas is transmitted in enable simultaneously, can reach bigger compared to previous embodiment Gas transport amount, and each flow guiding unit 20 also can independent enable water conservancy diversion, can control the range of gas transport flow bigger, make Its is more flexible to be applied in the various device for needing big flow gas transport, but is not limited.In other implementations of this case Example in, the quantity of multiple flow guiding units of the first flow guiding unit group and the second flow guiding unit group of air transporting arrangement 2 be 20 It is a, arrangement mode may respectively be a line concatenation be arranged or one column concatenation be arranged, but not limited to this.

Referring to Fig. 5, Fig. 5 is the surface structure schematic diagram for the air transporting arrangement that this case is third preferred embodiment.In In this case third preferred embodiment, air transporting arrangement 3 is for a circular configuration, and its first flow guiding unit group 30a (does not scheme Formula) and the quantity of flow guiding unit 30 of the second flow guiding unit group 30b be respectively 40, i.e. each ingate of access panel 37 370 correspond to each flow guiding unit 30, in other words, the first flow guiding unit group 30a of air transporting arrangement 3 and the second flow guiding unit Group 30b is respectively provided with 40 units that can individually transmit gas, and the structure of each flow guiding unit 30 is in aforementioned first embodiment Similar, difference is only that its quantity, mode is arranged, therefore its structure does not repeat further in this.The first of the present embodiment It is with ring-like arrangement that flow guiding unit group 30a (non-schema) and the second flow guiding unit group 30b penetrates 40 flow guiding units 30 respectively Mode is arranged, and but not limited to this, and quantity, arrangement mode all can appoint Shi Bianhua according to practical situation, through 40 water conservancy diversion 30 annular array of unit makes it can be applied to various round or annular gas transmission channel.Through the battle array of each flow guiding unit 30 Column mode changes, and can make its more flexible dress applied to various gas transport in response to required various shape in demand device In setting.

Referring to Fig. 6, Fig. 6 is the surface structure schematic diagram for the air transporting arrangement that this case is the 4th preferred embodiment.In In the 4th preferred embodiment of this case, the first flow guiding unit group 40a (non-schema) of air transporting arrangement 4 and the second flow guiding unit group The flow guiding unit 40 of 40b is that honeycomb mode arranges.

Please continue to refer to Fig. 1, the air transporting arrangement 1 of this case has further included an at least valve 5, and it is defeated that valve 5 may be disposed at gas Ingate 170 or the outlet opening 160 of device 1 are sent, or is set to ingate 170 and outlet opening 160 simultaneously.

Fig. 7 A and Fig. 7 B is please referred to, the first state sample implementation of valve 5 is to include a holder 51, a sealing element 52 and a valve Piece 53.Valve block 53 is set between holder 51 and sealing element 52 and is formed by accommodating space 55, has extremely on holder 51 Few two ventholes 511, and corresponding 51 upper vent hole of holder, 511 position of valve block 53 also sets venthole 531, holder 51 leads to The venthole 531 of stomata 511 and valve block 53, position be substantially be mutually aligned and sealing element 52 be equipped at least one ventilate Hole 521, and the venthole 521 of sealing element 52 forms dislocation with the position of the venthole 511 of holder 51 and is misaligned.

Please continue to refer to Fig. 7 A and Fig. 7 B, in this first embodiment pattern, valve 5 may be disposed at the ingate of access panel 17 170；When 1 enable of air transporting arrangement, gas is imported inside air transporting arrangement 1 by the ingate 170 of access panel 17, this When, form suction inside air transporting arrangement 1, valve block 53 can as shown in Figure 7 B, air-flow in the direction of the arrow and will be on valve block 53 It pushes away, causes 53 contact of valve in holder 51, while opening the venthole 521 of sealing element 52, gas can be by the ventilation of sealing element 102 Hole 102a is imported, since the position of the venthole 531 of valve block 53 is substantially aligned with the venthole 511 of holder 51, therefore venthole 531 can mutually connect with 511, flow up air-flow, into air transporting arrangement 1.And the actuating of air transporting arrangement 1 When plate 14 vibrates downwards, the volume of first chamber 18 is further compressed, gas is made to flow upwardly into second chamber through gap 143 19, while the valve block 53 of valve 5 is pushed by gas, and then restores the work of the venthole 521 of closed Sealing 52 as shown in Figure 7 A It is dynamic, formed gas one it is unidirectional flow into confluence chamber 12, and gas is accumulated in confluence chamber 12, such gas conveying dress Set 1 actuation plate 14 upwards vibrate when, can be obtained more gas by being discharged by outlet opening 160, with the defeated of lift gas amount Out.

Holder 51, sealing element 52 and the valve block 53 of this case valve 5 can be made by grapheme materials, to form micromation Valve member.And in the second embodiment aspect of this case valve 5, it is an electrically charged material in valve block 53, holder 51 is a two poles of the earth The conductive material of property.Holder 51 is electrically connected a control circuit (not shown), and the control circuit is to control holder 51 Polarity (positive electrical polarity or negative electricity polarity).If valve block 53 is a negatively charged material, when the 5 controlled unlatching of palpus of valve, control electricity Road controls holder 51 and forms a positive electrode, and valve block 53 and holder 51 maintain opposed polarity at this time, can so make 53 court of valve block Holder 51 is close, constitutes the unlatching (as shown in Figure 7 B) of valve 5.Conversely, working as valve if valve block 53 is a negatively charged material When the 5 controlled closing of palpus, control circuit controls holder 51 and forms a negative electrode, and valve block 53 remains identical with holder 51 at this time Polarity keeps valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 7 A) of valve 5.

In the 3rd embodiment aspect of this case valve 10, valve block 5 is a magnetic material, and holder 51 be one can be by Control the magnetic material of reverse.Holder 51 is electrically connected a control circuit (not shown), which protects to control The polarity (positive or negative pole) of gripping member 51.If valve block 53 is a magnetic material with cathode, when the 5 controlled unlatching of palpus of valve, keep Part 51 forms the magnetism of an anode, and control circuit control valve block 53 and holder 51 maintain opposed polarity at this time, makes 53 court of valve block Holder 51 is close, constitutes the unlatching (as shown in Figure 7 B) of valve 5.Conversely, working as valve if valve block 53 is a magnetic material with cathode When the 5 controlled closing of palpus, holder 51 forms the magnetism of a cathode, and control circuit control valve block 53 and holder 51 maintain at this time Identical polar keeps valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 7 A) of valve 5.

Fig. 8 A and Fig. 8 B is please referred to, is the illustrative view of the 4th state sample implementation of the valve of this case.As shown in Figure 8 A, valve 5 include a holder 51, a sealing element 52 and a flexible membrane 54.There is at least two ventholes 511, holder on holder 51 An accommodating space 55 is kept between 51 and sealing element 52.Flexible membrane 54 is to be attached at holder 51 made by a flexible material One side and be placed in accommodating space 55, and corresponding 51 upper vent hole of holder, 511 position also sets venthole 541, holder 51 venthole 511 and the venthole 541 of flexible membrane 54, position are substantially to be mutually aligned.And sealing element 52 is equipped with extremely The position of a few venthole 521 and the venthole 511 of the venthole 521 and holder 51 of sealing element 52 formed misplace without Alignment.

Please continue to refer to Fig. 8 A and Fig. 8 B.This case valve 5 with the 4th good embodiment implement, holder 51 be one be heated it is swollen Swollen material, and it is electrically connected a control circuit (not shown), the control circuit is heated to control holder 51.When 5 palpus of valve When controlled unlatching, control circuit control holder 51 not expanded by heating and be maintained in accommodating space 55, with sealing element 52 formation Spacing constitutes the unlatching (as shown in Figure 7 A) of valve 5.Conversely, it is heated that control circuit controls holder 51 when 5 palpus controlled closing of valve Expansion, and holder 51 is driven to contradict towards sealing element 52, flexible membrane 54 can be with the venthole of closely connected closed Sealing 52 at this time 521, constitute the closing (as shown in Figure 8 B) of valve 5.

Please continue to refer to Fig. 8 A and Fig. 8 B, this case valve 5 is with the implementation of the 5th embodiment, and wherein the holder 51 is a piezoresistive material Material, controls its deformation by a control circuit (not shown).When the 5 controlled unlatching of palpus of valve, to enable the holder 51 not by deformation It is maintained in accommodating space 55 and forms a spacing with the sealing element 52, constitute the unlatching (as shown in Figure 7 A) of the valve.Conversely, working as valve When the 5 controlled closing of palpus, control circuit controls holder 51, to enable the holder 51 be driven holder 51 close towards this by deformation Sealing 52 contradicts, and flexible membrane 54 constitutes closing (such as Fig. 8 B of the valve 5 with the closely connected venthole 521 for closing the sealing element 52 at this time It is shown).Certainly, the holder 51 of each interval block corresponding to multiple ventholes 521 of sealing element 52, can also be the independently-controlled Circuit control processed, formed can modulation valve 5 circulation actuation, reach the adjustment effect of appropriate gas flow.

In conclusion air transporting arrangement provided by this case includes multiple flow guiding units, carried out through flow guiding unit Actuation generates barometric gradient, flows gas quickly, and these flow guiding units the first flow guiding unit group of composition and second are led Unit group is flowed, these water conservancy diversion lists in the first flow guiding unit group and the second flow guiding unit group are set using specific arrangement mode Member, to control and adjust the conveying of gas transport amount gas.In addition, making through the carry out actuation of piezoelectric element enable actuation plate Gas generates barometric gradient in the runner and pressure chamber after design, and then makes gas flow at high rates, is quickly passed by upstream end It is handed to outlet end, in order to the transmission for realizing gas.Furthermore this case also penetrates quantity, set-up mode and the driving method of flow guiding unit Flexible variation, high-transmission amount, high-effect, Gao Ling can be can reach in response to the demand of various different devices and gas transport flow Activity and other effects.

This case appointed as person familiar with the technology apply craftsman think and be it is all as modify, it is so neither de- such as attached claim Be intended to Protector.

[symbol description]

1,2,3,4: gas gas conveying device

10a, 20a, 30a, 40a: the first flow guiding unit group

10b, 20b, 30b, 40b: the second flow guiding unit group

1c: gas collection chamber

A: exhaust outlet

10,20,30,40: flow guiding unit

11: substrate

12: confluence chamber

13: sounding board

130: hollow bore

131: movable part

14: actuation plate

141: suspension portion

142: outer frame

143: gap

15: piezoelectric element

16,26,36: exit plate

160,260,360: outlet opening

17: access panel

170: ingate

18: first chamber

19: second chamber

G0: gap

5: valve

51: holder

52: sealing element

53: valve block

54: flexible membrane

511,521,531,541: venthole

55: accommodating space

Claims (13)

1. a kind of air transporting arrangement, characterized by comprising:

One first flow guiding unit group and one second flow guiding unit group, are made of multiple flow guiding units respectively, multiple water conservancy diversion list First respectively to have an ingate and an outlet opening, multiple flow guiding unit is actuated to be imported gas by the respective ingate And it is discharged by the outlet opening；And

One gas collection chamber is set between the first flow guiding unit group and the second flow guiding unit group, and has an exhaust outlet；

Wherein, the first flow guiding unit group and the second flow guiding unit group are respectively sucked gas by multiple ingate, and by Multiple outlet opening is delivered to the gas collection chamber, then is discharged by the exhaust outlet of the gas collection chamber, to realize appropriate gas transport The adjustment of amount.

2. air transporting arrangement as described in claim 1, which is characterized in that the first flow guiding unit group and the second water conservancy diversion list Tuple is arranged respectively by multiple flow guiding unit with a line concatenation.

3. air transporting arrangement as described in claim 1, which is characterized in that the first flow guiding unit group and the second water conservancy diversion list Tuple is arranged respectively by multiple flow guiding unit with a column concatenation.

4. air transporting arrangement as described in claim 1, which is characterized in that the first flow guiding unit group and the second water conservancy diversion list Tuple is arranged respectively by multiple flow guiding unit with ring style.

5. air transporting arrangement as described in claim 1, which is characterized in that the first flow guiding unit group and the second water conservancy diversion list Tuple is arranged in a manner of honeycomb by multiple flow guiding unit respectively.

6. air transporting arrangement as described in claim 1, which is characterized in that each flow guiding unit separately includes:

One access panel has the ingate；

One substrate；

One sounding board has a hollow bore, and has a confluence chamber between the sounding board and the access panel；

One actuation plate has a suspension portion and an outer frame and an at least gap；

One piezoelectric element is attached at a surface in the suspension portion of the actuation plate；And

One exit plate has the outlet opening；And

An at least valve is arranged at least one of the ingate and the outlet opening；

Wherein, the access panel, the substrate, the sounding board, the actuation plate and the exit plate are sequentially corresponding stacks setting, the sounding board And between the actuation plate there is a gap to form a first chamber, a second chamber is formed between the actuation plate and the exit plate, The piezoelectric element drives the actuation plate to generate flexural resonance, so that the first chamber and the second chamber form a pressure difference, and The valve is opened, gas is allowed to enter the confluence chamber by the ingate of the access panel and flow through the hollow hole of the sounding board Hole, to enter in the first chamber, and at least a gap imports in the second chamber by this, finally by the outlet of the exit plate Hole export, whereby to transmit the flowing of gas.

7. air transporting arrangement as claimed in claim 6, which is characterized in that the valve includes a holder, a sealing element and one Valve block wherein keeps an accommodating space between the holder and the sealing element, which is set in the accommodating space, the holding There are at least two ventholes on part, and the ventilation hole site that the valve block corresponds to the holder sets venthole, the holder The ventilation hole site of the venthole and the valve block be substantially be mutually aligned and the sealing element be equipped at least one ventilate Hole, and be to form dislocation to be misaligned with the ventilation hole site of the holder.

8. air transporting arrangement as claimed in claim 6, which is characterized in that the valve includes a holding made of graphene material Part, a sealing element and a valve block, wherein keep an accommodating space between the holder and the sealing element, which is set to the appearance In between emptying, on the holder have at least two ventholes, and the valve block correspond to the holder the ventilation hole site set it is logical The ventilation hole site of stomata, the venthole of the holder and the valve block be substantially be mutually aligned and the sealing element on set There is at least one venthole, and is to form dislocation to be misaligned with the ventilation hole site of the holder.

9. air transporting arrangement as claimed in claim 7 or 8, which is characterized in that the valve block is an electrically charged material, and is somebody's turn to do Holder is a dipolar conductive material, its polarity is controlled by a control circuit, when the valve block is different from holder maintenance Polarity chron, the valve block is close towards the holder, to constitute the unlatching of the valve；When the valve block and the holder maintain identical polar When, the valve block is close towards the sealing element, to constitute the closing of the valve.

10. air transporting arrangement as claimed in claim 7 or 8, which is characterized in that the valve block is a magnetic material, and The holder be one can the polar magnetic material of controlled conversion, its polarity is controlled by a control circuit, when the valve block and the holding When part maintains opposed polarity, the valve block is close towards the holder, to constitute the unlatching of the valve；When the valve block and the holder maintain When identical polar, the valve block is close towards the sealing element, to constitute the closing of the valve.

11. air transporting arrangement as claimed in claim 6, which is characterized in that the valve includes a holder, a sealing element and one Flexible membrane, wherein maintains an accommodating space between the holder and the sealing element and the flexible membrane is attached at the holder On one surface, and it is arranged and is located in the accommodating space, and there are at least two ventholes on the holder, and the flexible membrane is corresponding The ventilation hole site of the holder sets venthole, and the venthole of the holder and the ventilation hole site of the flexible membrane are big Cause is mutually aligned and the sealing element is equipped at least one venthole, and is to be formed with the ventilation hole site of the holder Dislocation is misaligned.

12. air transporting arrangement as claimed in claim 11, which is characterized in that the holder is the material of a thermal expansion, by One control circuit controls it and is heated, and when the holder expanded by heating, contradicts the flexible membrane towards the sealing element, to close the sealing An at least venthole for part, constitutes the closing of the valve；When the holder not expanded by heating, the sealing element and the holder are protected The spacing for holding the accommodating space constitutes the unlatching of the valve.

13. air transporting arrangement as claimed in claim 11, which is characterized in that the holder is a piezoelectric material, by a control Its deformation of circuit control processed contradicts the flexible membrane towards the sealing element, to close the sealing element when the holder is by deformation An at least venthole, constitutes the closing of the valve；When the holder is not by deformation, the sealing element and the holder keep the appearance Spacing between emptying constitutes the unlatching of the valve.