CN209129832U - Air transporting arrangement - Google Patents

Abstract

This case provides a kind of air transporting arrangement, it is made of an at least flow guiding unit, an at least flow guiding unit includes access panel, substrate, sounding board, actuation membrane, piezoelectric element and exit plate sequentially stack setting, first chamber is defined between sounding board and actuation membrane, second chamber is defined between actuation membrane and exit plate, when piezoelectric element drives actuation membrane, gas is entered the confluence chamber of substrate by the access aperture of access panel, and flow through the hollow bore of sounding board, to enter in first chamber, and it is imported in second chamber by the gap of actuation membrane, finally exported by the outlet opening of exit plate, whereby to control the circulation of gas.

Description

Air transporting arrangement

[technical field]

This case be about a kind of air transporting arrangement, it is espespecially a kind of through miniature, slim and mute air transporting arrangement.

[background technique]

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the gas structure for conveying that micro- side Pu is included is its key technology, therefore how prominent by means of innovation structure Its technical bottleneck is broken, for the important content of development.

With making rapid progress for science and technology, air transporting arrangement using upper also more and more diversification, industrial application, life such as Cure application, health care, electronic radiation etc., or even the recently popular all visible Ta COPA shadow of wearable device, it is seen that tradition Air transporting arrangement had the tendency that gradually towards device microminiaturization, flow maximize.

In in the prior art, air transporting arrangement is mainly constituted with traditional mechanism part stacking, and with each machine Structure component minimization or the mode of thickness thinning, to achieve the purpose that single unit system micromation, slimming.However, traditional mechanism After microminiaturization, dimension control is not easy part, and assembly precision is equally difficult to control, and it is different in turn result in product yield, The problems such as instability of flow for even thering is gas to transmit.

Furthermore, it is known that charge delivery mechanism also there is the problem of feed flow deficiency, through pure gas transmitting device It is difficult to the demand transmitted in response to bulk gas, and known charge delivery mechanism usually has the foot that connects of evagination to connect for being powered Be used, if therefore be intended to multiple known charge delivery mechanisms be arranged side by side to improve transmission quantity, assembly precision is not equally easily-controllable System, connects the obstacle that foot be easy to cause setting, and it is complicated to also result in its external supply lines setting, therefore is still difficult to through this side Formula improves flow, and arrangement mode is also compared with can not flexibly use.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed charge delivery mechanism Device or equipment reach small in size, micromation and mute, and overcome the problems, such as miniature sizes precision be not easy to control, underfed, and The minitype gas transmitting device of various devices can flexibly be applied to, actually problem in the urgent need to address at present.

[utility model content]

The main purpose of this case is to provide a kind of air transporting arrangement, produce by micro electronmechanical processing procedure integrally formed micro- Type air transporting arrangement, with overcome traditional conveying device can not have both simultaneously it is small in size, micromation, dimensional accuracy control and The problem of underfed.

In order to achieve the above object, a broader implementation pattern of this case is to provide a kind of air transporting arrangement, by least one Flow guiding unit is constituted, and at least a flow guiding unit includes for this: an access panel, has an at least ingate；One substrate；One resonance Plate is suspension structure made of face type micro-processing technology, has a hollow bore and multiple movable parts；One actuation membrane is face type Hollow suspension structure made of micro-processing technology has multiple suspension portions, an outer frame and an at least gap；One piezoelectric element, It is attached at a surface in the suspension portion of the actuation membrane；One exit plate has an outlet opening；Wherein, the access panel, the substrate, The sounding board, the actuation membrane and the exit plate are sequentially corresponding stacking setting, the sounding board and the actuation membrane of the flow guiding unit Between have a gap formed a first chamber, a second chamber is formed between the actuation membrane and the exit plate, when the water conservancy diversion list When the piezoelectric element of member drives the actuation membrane, gas enters the confluence chamber by the ingate of the access panel, and flows through this The hollow bore of sounding board, to enter in the first chamber, and at least a gap is imported in the second chamber by this, finally by The outlet opening of the exit plate exports, whereby to control the circulation of gas.

[Detailed description of the invention]

Fig. 1 is the surface structure schematic diagram for the air transporting arrangement that this case is preferred embodiment.

Fig. 2 is flow guiding unit structural schematic diagram shown in FIG. 1.

Fig. 3 A to Fig. 3 C is the single flow guiding unit actuation process partial schematic diagram of air transporting arrangement shown in Fig. 2.

Fig. 4 A and Fig. 4 B are the illustrative view of the first, second and third state sample implementation of the valve of this case.

Fig. 5 A and Fig. 5 B are the illustrative view of the four, the 5th state sample implementations of the valve of this case.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.

The air transporting arrangement of this case is that integrally formed micromation air transporting arrangement is produced by micro electronmechanical processing procedure, to Overcoming traditional gas conveying device not have both simultaneously, small in size, micromation, output flow is insufficient and dimensional accuracy is controlled not The problems such as good.Firstly, please refer to Fig. 1, Fig. 2, in this present embodiment, air transporting arrangement 1 include one first flow guiding unit 10a, An one second flow guiding unit 10b and gas collection chamber 10c, and gas collection chamber 10c is set to the first flow guiding unit 10a and second and leads It flows between unit 10b, and gas collection chamber 10c has an exhaust outlet A；In this present embodiment, the first flow guiding unit 10a and this Two flow guiding unit 10b are identical flow guiding unit structure, and the first flow guiding unit 10a is separately included with second flow guiding unit 10b There are the elements such as access panel 17, substrate 11, sounding board 13, actuation plate 14, piezoelectric element 15 and exit plate 16 sequentially to stack institute's structure At, wherein access panel 17 have ingate 170, sounding board 13 have hollow bore 130 and movable part 131, and sounding board 13 with Confluence chamber 12 is formed between the access panel 17, actuation plate 14 has suspension portion 141, outer frame 142 and multiple gaps 143, out Oralia 16 has outlet opening 160, and structure, feature and set-up mode will be described in further detail in illustrating back segment.

The the first flow guiding unit 10a and one second flow guiding unit 10b of the air transporting arrangement 1 of the present embodiment penetrate entrance The ingate 170 of plate 17, the confluence chamber 12 of substrate 11, sounding board 13 hollow bore 130 and movable part 131, actuation plate 14 Suspension portion 141 and gap 143, piezoelectric element 15 and outlet opening 160 with respectively constitute the first flow guiding unit 10a and this second Flow guiding unit 10b, in other words, the first flow guiding unit 10a, the second flow guiding unit 10b include in a confluence chamber 12, one The movable part 131, one of hollow bore 130, one suspension portion 141,143, one, gap piezoelectric element 15 and one outlet hole 160, the first flow guiding unit 10a, the second flow guiding unit 10b sounding board 13 and actuation plate 14 between there is a gap g0 to form the Second chamber 19 (as shown in Figure 2) is formed between one chamber 18 (as shown in Figure 2) and actuation plate 14 and exit plate 16.First Flow guiding unit 10a and the second flow guiding unit 10b is identical flow guiding unit structure, for convenience of description the knot of air transporting arrangement 1 Structure and gas control mode, following the description will be illustrated with the first flow guiding unit 10a

Referring to Fig. 2, in this present embodiment, it is the hole always to penetrate oralia 17 that access panel 17, which has ingate 170, Hole is circulated with supplied gas, 170 quantity of ingate of the present embodiment be 1.In some embodiments, 170 quantity of ingate Also it can be 1 or more, but be not limited, quantity and set-up mode can appoint Shi Bianhua according to practical situation.In some realities Apply in example, access panel 17 more may include filter device (non-schema), and but not limited to this, the filter device be closing be set into Oral pore 170 filtering the dust in gas, or to filter the impurity in gas, flow to gas to avoid impurity, dust The inside of conveying device 1 makes damaging components.

In the air transporting arrangement 1 of the present embodiment, the substrate 11 of the first flow guiding unit 10a further includes one drive circuit (not shown), to be electrically connected with the anode and cathode of piezoelectric element 15, to provide driving power, but not limited to this. In some embodiments, driving circuit also may be disposed at any position inside air transporting arrangement 1, and but not limited to this, can Appoint Shi Bianhua according to practical situation.

Please continue to refer to Fig. 1 and Fig. 2, in the air transporting arrangement 1 of the present embodiment, the resonance of the first flow guiding unit 10a Plate 13 is for suspension structure, and sounding board 13 has more hollow bore 130 and multiple movable parts 131, and each flow guiding unit 10 is equal With a hollow bore 130 and its corresponding movable part 131.In the flow guiding unit 10 of the present embodiment, hollow bore 130 It is to be set at the center of movable part 131, and hollow bore 130 runs through the hole of sounding board 13 for one, and is connected to confluence chamber Between room 12 and first chamber 18, is circulated and transmitted with supplied gas.The movable part 131 of the present embodiment is for the portion of sounding board 13 Point, be a flexible structure, and can with actuating mould 14 driving and upper and lower bending vibration, whereby to transmit gas, actuation Mode will be described in further detail in specification back segment.

Please continue to refer to Fig. 1 and Fig. 2, in the first flow guiding unit 10a of the present embodiment, actuation plate 14 is for a metal material Material film or polysilicon membrane are constituted, and but not limited to this, which is hollow suspension structure, and actuation plate 14 has more Suspension portion 141 and outer frame 142, and each flow guiding unit 10 all has a suspension portion 141.In the flow guiding unit of the present embodiment In 10, suspension portion 141 is to be connected to outer frame 142 with multiple interconnecting pieces (not shown), so that suspension portion 141 is suspended in outline border In portion 142, and multiple gaps 143 are defined between suspension portion 141 and outer frame 142, circulate to supplied gas, and suspension portion 141 and outer frame 142 and the set-up mode in gap 143, state sample implementation and quantity be not limited, can become according to practical situation Change.In some embodiments, suspension portion 141 is to imply that suspension portion 141 further includes a protrusion and (do not scheme for the structure of a cascaded surface Show), which can be but not be limited to a circular protrusions structure, be set to the lower surface in suspension portion 141, and through the setting of protrusion So that the depth of first chamber 18 is maintained at a specific sections value, can avoid causing because the depth of first chamber 18 is too small altogether whereby The movable part 131 of vibration plate 13 leads to the problem of collision with actuation plate 14 when being resonated, generates noise, also can avoid because of first The depth of chamber 18 excessive the problem of leading to gas transport insufficient pressure, but not limited to this.

Please continue to refer to Fig. 1 and Fig. 2, in the air transporting arrangement 1 of the present embodiment, the first flow guiding unit 10a, second are led Stream unit 10b all has a piezoelectric element 15, and piezoelectric element 15 is the upper surface for being attached at the suspension portion 141 of actuation plate 14, And piezoelectric element 15 is for electrically connecting to more an anode and a cathode (not shown), enables between the voltage source 15 to receive voltage Generation type becomes afterwards, to drive the reciprocating vibration of the reciprocally vertical direction of actuation plate 14, and sounding board 13 is driven to generate altogether Vibration makes the first chamber 18 between sounding board 13 and actuation plate 14 generate pressure change whereby, with the transmission of supplied gas, makees Flowing mode will be described in further detail in specification back segment.

Please continue to refer to Fig. 1 to Fig. 2, in the air transporting arrangement 1 of the present embodiment, the outlet of the first flow guiding unit 10a Plate 16 further includes outlet opening 160, and the first flow guiding unit 10a, the second flow guiding unit 10b all have one outlet hole 160.Yu Ben In the flow guiding unit 10 of embodiment, outlet opening 160 is connected between 16 outside of the second chamber 19 and exit plate, with supplied gas It is flow to outside exit plate 16 by second chamber 19 through outlet opening 160, in order to the transmission for realizing gas.

It is the first flow guiding unit of air transporting arrangement shown in Fig. 3 A please refer to Fig. 2 to Fig. 3 C, Fig. 3 A to Fig. 3 C 10a actuation process partial schematic diagram.Firstly, the first flow guiding unit 10a of air transporting arrangement 1 shown in Fig. 2 is non-enable State (i.e. original state) is wherein with gap g0, so that sounding board 13 and actuation plate between sounding board 13 and actuation plate 14 The depth of gap g0 can be maintained between 14 suspension portion 141, and then can be guided gas and more quickly be flowed, and because of suspension portion 141 keep the suitable distance interference that makes to be in contact with each other to reduce with sounding board 13, promote noise generation that can be lowered, but not as Limit.

As shown in Fig. 2 and Fig. 3 A, in the first flow guiding unit 10a, when piezoelectric element 15 apply voltage, make actuation plate 14 by When the driving actuating of piezoelectric element 15, the suspension portion 141 of actuation plate 14 vibrates upwards, subtracts the increase of 18 volume of first chamber, pressure Small, then gas is complied with external pressure by the ingate 170 on access panel 17 and is entered, and is pooled to the confluence chamber 12 of substrate 11 Place, then flow upwardly into via the central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 into first chamber 18.It connects , as shown in Fig. 2 and Fig. 3 B, and the drive of the vibration of the suspension portion 141 due to being actuated plate 14, make the movable part of sounding board 13 131 also with resonance and vibrate upwards, and the suspension portion 141 of actuation plate 14 also simultaneously downwards vibration, make the movable of sounding board 13 Portion 131 attaches and contacts in the suspension portion 141 of actuation plate 14, simultaneously closes off the space of 18 middle flow of first chamber, makes whereby First chamber 18 is compressed and volume is made to become smaller, pressure increases, and so that the increase of 19 volume of second chamber, pressure is become smaller, and then form pressure Force gradient is pushed the gas inside first chamber 18 and is flowed to two sides, and flows into the via multiple gaps 140 of actuation plate 14 In two chambers 19.

For another example shown in Fig. 2 and Fig. 3 C, the suspension portion 141 of actuation plate 14 continues to vibrate downwards, and drive sounding board 13 can Dynamic portion 131 with downward vibration, compress first chamber 18 further, and flow to most gas in second chamber 19 temporarily It deposits,

Finally, actuation plate 14 suspension portion 141 upwards vibrate, make second chamber 19 compress and volume becomes smaller, pressure becomes larger, And then it is external to exit plate 16 to export the gas in second chamber 19 from the outlet opening 160 of exit plate 16, to complete gas Transmission, so repeat actuation shown in Fig. 3 A, increase the volume of first chamber 18, pressure reduces, and then make gas again External pressure entrance is complied in the secondary ingate 170 by access panel 17, and is pooled at the confluence chamber 12 of substrate 11, then via The central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 is flowed upwardly into first chamber 18.By repetition is above-mentioned The gas transport of the flow guiding unit 10 of Fig. 3 A to Fig. 3 C flows, and makes the suspension portion 141 of actuation plate 14 and the movable part of sounding board 13 131 are persistently reciprocally vibrated up and down, sustainable that gas is continued exit hole 160 by inlet port 170, in order to realization The transmission of gas.

In this way, via the air transporting arrangement 1 of the present embodiment in the first flow guiding unit 10a, the second flow guiding unit 10b Runner design in generate barometric gradient, make gas flow at high rates, and through the resistance difference in runner disengaging direction, by gas by Suction side is transmitted to outlet side, and in the state that outlet side has pressure, still has the ability to continue pushing out gas, and can reach mute Effect.In some embodiments, the vertical reciprocating type vibration frequency of sounding board 13 is can be with the vibration frequency phase of actuation plate 14 Together, i.e., the two can be simultaneously upwards or downward simultaneously, is that can appoint Shi Bianhua according to situation is actually applied, not with the present embodiment Shown in be limited as flowing mode.

Please continue to refer to shown in Fig. 1, in this present embodiment, the first flow guiding unit 10a is stacked into the second water conservancy diversion longitudinally upward Unit 10b, and gas collection chamber 10c is set between the first flow guiding unit 10a and the second flow guiding unit 10b, and gas collection chamber 10c is connected to the outlet opening 160 of first flow guiding unit 10a, the second flow guiding unit 10b.As the first flow guiding unit 10a, second When flow guiding unit 10b is activated, gas can be sucked by its respective ingate 170, then be delivered to by respective outlet opening 160 The gas collection chamber 10c accumulates gas, and gas collection chamber 10c collects the first flow guiding unit 10a and the second flow guiding unit 10b institute is defeated The gas sent is finally discharged by exhaust outlet A, and the air transporting arrangement 1 of such setting is able to utilize the first flow guiding unit 10a and the The actuating of two flow guiding unit 10b adjusts appropriate gas transport amount.

In this present embodiment, the first flow guiding unit 10a and the second flow guiding unit 10b of air transporting arrangement 1 can cooperate drive The connection of dynamic circuit, flexibility ratio is high, is more applied in various electronic component, and can enable simultaneously transmit gas, can be because Answer the gas transport demand of big flow；In addition, the first flow guiding unit 10a, the second flow guiding unit 10b also can be controlled separately actuation or Stop, such as: the first flow guiding unit 10a actuation, the second flow guiding unit 10b stop, and can also be the first flow guiding unit 10a and the Two flow guiding unit 10b are alternately operated, but are not limited, and can be easily achievable the demand of various gas transport flows whereby, and It can reach the effect of power consumption is greatly reduced.

Please continue to refer to Fig. 1, the air transporting arrangement 1 of this case has further included an at least valve 5, and it is defeated that valve 5 may be disposed at gas At least one of the first guiding device 10a of device 1, the ingate 170 of the second guiding device 10b or outlet opening 160 are sent, Or it is set to ingate 170 and outlet opening 160 simultaneously.

Fig. 4 A and Fig. 4 B is please referred to, the first state sample implementation of valve 5 is to include a holder 51, a sealing element 52 and a valve Piece 53.Valve block 53 is set between holder 51 and sealing element 52 and is formed by accommodating space 55, has extremely on holder 51 Few two ventholes 511, and corresponding 51 upper vent hole of holder, 511 position of valve block 53 also sets venthole 531, holder 51 leads to The venthole 531 of stomata 511 and valve block 53, position be substantially be mutually aligned and sealing element 52 be equipped at least one ventilate Hole 521, and the venthole 521 of sealing element 52 forms dislocation with the position of the venthole 511 of holder 51 and is misaligned.

Please continue to refer to Fig. 4 A and Fig. 4 B, in this first embodiment pattern, valve 5 may be disposed at the ingate of access panel 17 170；When 1 enable of air transporting arrangement, gas is imported inside air transporting arrangement 1 by the ingate 170 of access panel 17, this When, form suction inside air transporting arrangement 1, valve block 53 can as shown in Figure 4 B, air-flow in the direction of the arrow and will be on valve block 53 It pushes away, causes 53 contact of valve in holder 51, while opening the venthole 521 of sealing element 52, gas can be by the ventilation of sealing element 102 Hole 102a is imported, since the position of the venthole 531 of valve block 53 is substantially aligned with the venthole 511 of holder 51, therefore venthole 531 can mutually connect with 511, flow up air-flow, into air transporting arrangement 1.And the actuating of air transporting arrangement 1 When plate 14 vibrates downwards, the volume of first chamber 18 is further compressed, gas is made to flow upwardly into second chamber through gap 143 19, while the valve block 53 of valve 5 is pushed by gas, and then restores the work of the venthole 521 of closed Sealing 52 as shown in Figure 4 A It is dynamic, formed gas one it is unidirectional flow into confluence chamber 12, and gas is accumulated in confluence chamber 12, such gas conveying dress Set 1 the first flow guiding unit 10a and the second flow guiding unit 10b actuation plate 14 upwards vibrate when, can be obtained more gas It is discharged by outlet opening 160, with the output of lift gas amount.

Holder 51, sealing element 52 and the valve block 53 of this case valve 5 can be made by grapheme materials, to form micromation Valve member.And in the second embodiment aspect of this case valve 5, it is an electrically charged material in valve block 53, holder 51 is a two poles of the earth The conductive material of property.Holder 51 is electrically connected a control circuit (not shown), and the control circuit is to control holder 51 Polarity (positive electrical polarity or negative electricity polarity).If valve block 53 is a negatively charged material, when the 5 controlled unlatching of palpus of valve, control electricity Road controls holder 51 and forms a positive electrode, and valve block 53 and holder 51 maintain opposed polarity at this time, can so make 53 court of valve block Holder 51 is close, constitutes the unlatching (as shown in Figure 4 B) of valve 5.Conversely, working as valve if valve block 53 is a negatively charged material When the 5 controlled closing of palpus, control circuit controls holder 51 and forms a negative electrode, and valve block 53 remains identical with holder 51 at this time Polarity keeps valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 4 A) of valve 5.

In the 3rd embodiment aspect of this case valve 10, valve block 5 is a magnetic material, and holder 51 be one can be by Control the magnetic material of reverse.Holder 51 is electrically connected a control circuit (not shown), which protects to control The polarity (positive or negative pole) of gripping member 51.If valve block 53 is a magnetic material with cathode, when the 5 controlled unlatching of palpus of valve, keep Part 51 forms the magnetism of an anode, and control circuit control valve block 53 and holder 51 maintain opposed polarity at this time, makes 53 court of valve block Holder 51 is close, constitutes the unlatching (as shown in Figure 4 B) of valve 5.Conversely, working as valve if valve block 53 is a magnetic material with cathode When the 5 controlled closing of palpus, holder 51 forms the magnetism of a cathode, and control circuit control valve block 53 and holder 51 maintain at this time Identical polar keeps valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 4 A) of valve 5.

Fig. 5 A and Fig. 5 B is please referred to, is the illustrative view of the 4th state sample implementation of the valve of this case.As shown in Figure 5A, valve 5 include a holder 51, a sealing element 52 and a flexible membrane 54.There is at least two ventholes 511, holder on holder 51 An accommodating space 55 is kept between 51 and sealing element 52.Flexible membrane 54 is to be attached at holder 51 made by a flexible material One side and be placed in accommodating space 55, and corresponding 51 upper vent hole of holder, 511 position also sets venthole 541, holder 51 venthole 511 and the venthole 541 of flexible membrane 54, position are substantially to be mutually aligned.And sealing element 52 is equipped with extremely The position of a few venthole 521 and the venthole 511 of the venthole 521 and holder 51 of sealing element 52 formed misplace without Alignment.

Please continue to refer to Fig. 5 A and Fig. 5 B.This case valve 5 with the 4th good embodiment implement, holder 51 be one be heated it is swollen Swollen material, and it is electrically connected a control circuit (not shown), the control circuit is heated to control holder 51.When 5 palpus of valve When controlled unlatching, control circuit control holder 51 not expanded by heating and be maintained in accommodating space 55, with sealing element 52 formation One spacing constitutes the unlatching (as shown in Figure 5A) of valve 5.Conversely, when valve 5 must controlled closing, control circuit control holder 51 by Thermal expansion, and holder 51 is driven to contradict towards sealing element 52, flexible membrane 54 can be with the venthole of closely connected closed Sealing 52 at this time 521, constitute the closing (as shown in Figure 5 B) of valve 5.

Please continue to refer to Fig. 5 A and Fig. 5 B, this case valve 5 is with the implementation of the 5th embodiment, and wherein the holder 51 is a piezoresistive material Material, controls its deformation by a control circuit (not shown).When the 5 controlled unlatching of palpus of valve, to enable the holder 51 not by deformation It is maintained in accommodating space 55 and forms spacing with the sealing element 52, constitute the unlatching (as shown in Figure 5A) of the valve.Conversely, working as valve 5 When the controlled closing of palpus, control circuit controls holder 51, to enable the holder 51 be driven holder 51 towards the sealing by deformation Part 52 contradicts, and flexible membrane 54 constitutes closing (such as Fig. 5 B of the valve 5 with the closely connected venthole 521 for closing the sealing element 52 at this time It is shown).Certainly, the holder 51 of each interval block corresponding to multiple ventholes 521 of sealing element 52, can also independently by Control circuit control, formed can modulation valve 5 circulation actuation, reach the adjustment effect of appropriate gas flow.

In conclusion air transporting arrangement provided by this case, carries out through the first flow guiding unit and the second flow guiding unit Actuation, generate barometric gradient, flow gas quickly, and converge via gas collection chamber, be discharged by exhaust outlet, whereby with Adjust the transmission quantity of gas.In addition, through the carry out actuation of piezoelectric element enable actuation plate, make runner of the gas after design and Barometric gradient is generated in pressure chamber, and then makes gas flow at high rates, outlet end is quickly transferred to by upstream end, in order to realization gas Transmission.Furthermore this case also penetrates the flexible variation of the first flow guiding unit and the second flow guiding unit driving method, can be in response to various The demand of different device and gas transport flow can reach high-transmission amount, high-effect, high flexibility and other effects.

This case appointed as person familiar with the technology apply craftsman think and be it is all as modify, it is so neither de- such as attached claim Be intended to Protector.

[symbol description]

1: gas gas conveying device

10a: the first flow guiding unit

10b: the second flow guiding unit

10c: gas collection chamber

A: exhaust outlet

11: substrate

12: confluence chamber

13: sounding board

130: hollow bore

131: movable part

14: actuation plate

141: suspension portion

142: outer frame

143: gap

15: piezoelectric element

16: exit plate

160: outlet opening

17: access panel

170: ingate

18: first chamber

19: second chamber

G0: gap

5: valve

51: holder

52: sealing element

53: valve block

54: flexible membrane

511,521,531,541: venthole

55: accommodating space

Claims (9)

1. a kind of air transporting arrangement, it is characterised in that include:

One first flow guiding unit and one second flow guiding unit, are respectively provided with an ingate and an outlet opening, first flow guiding unit And second flow guiding unit is actuated to import gas by the respective ingate, and is discharged by the outlet opening；And

One gas collection chamber is set between first flow guiding unit and second flow guiding unit, and has an exhaust outlet；

Wherein, first flow guiding unit and second flow guiding unit are respectively sucked gas by the ingate, and by the outlet opening It is delivered to the gas collection chamber, then is discharged by the exhaust outlet of the gas collection chamber, in order to suitably adjusting gas transport amount.

2. air transporting arrangement as described in claim 1, which is characterized in that first flow guiding unit and second flow guiding unit It separately includes:

One access panel has the ingate；

One substrate；

One sounding board has a hollow bore, and has a confluence chamber between the sounding board and the access panel；

One actuation plate has a suspension portion and an outer frame and an at least gap；

One piezoelectric element is attached at a surface in the suspension portion of the actuation plate；

One exit plate has the outlet opening；And

One valve is arranged at least one of the ingate and the outlet opening；

Wherein, the access panel, the substrate, the sounding board, the actuation plate and the exit plate are sequentially corresponding stacks setting, the sounding board And between the actuation plate there is a gap to form a first chamber, a second chamber is formed between the actuation plate and the exit plate, The piezoelectric element drives the actuation plate to generate flexural resonance, so that the first chamber and the second chamber form a pressure difference, and The valve is opened, gas is allowed to enter the confluence chamber by the ingate of the access panel and flow through the hollow hole of the sounding board Hole, to enter in the first chamber, and at least a gap imports in the second chamber by this, finally by the outlet of the exit plate Hole export, whereby to transmit the flowing of gas.

3. air transporting arrangement as claimed in claim 2, which is characterized in that the valve includes a holder, a sealing element and one Valve block wherein keeps an accommodating space between the holder and the sealing element, which is set in the accommodating space, the holding There are at least two ventholes on part, and the ventilation hole site that the valve block corresponds to the holder sets venthole, the holder The ventilation hole site of the venthole and the valve block be substantially be mutually aligned and the sealing element be equipped at least one ventilate Hole, and be to form dislocation to be misaligned with the ventilation hole site of the holder.

4. air transporting arrangement as claimed in claim 2, which is characterized in that the valve includes a holding made of graphene material Part, a sealing element and a valve block, wherein keep an accommodating space between the holder and the sealing element, which is set to the appearance In between emptying, on the holder have at least two ventholes, and the valve block correspond to the holder the ventilation hole site set it is logical The ventilation hole site of stomata, the venthole of the holder and the valve block be substantially be mutually aligned and the sealing element on set There is at least one venthole, and is to form dislocation to be misaligned with the ventilation hole site of the holder.

5. air transporting arrangement as described in claim 3 or 4, which is characterized in that the valve block is an electrically charged material, and is somebody's turn to do Holder is a dipolar conductive material, controls its polarity by a control circuit, to enable the valve block and the holder maintain not Same polarity, and towards the holder close to the unlatching for constituting the valve, to enable the valve block and the holder maintain identical polar, and towards this Sealing element is close to the closing for constituting the valve.

6. air transporting arrangement as described in claim 3 or 4, which is characterized in that the valve block is a magnetic material, and is somebody's turn to do Holder be one can the polar magnetic material of controlled conversion, its polarity is controlled by a control circuit, when the valve block and the holder When maintaining opposed polarity, the valve block is close towards the holder, to constitute the unlatching of the valve；When the valve block and the holder maintain phase When same polarity, the valve block is close towards the sealing element, to constitute the closing of the valve.

7. air transporting arrangement as claimed in claim 2, which is characterized in that the valve includes a holder, a sealing element and one Flexible membrane, wherein maintains an accommodating space between the holder and the sealing element and the flexible membrane is attached at the holder On one surface, and it is arranged and is located in the accommodating space, and there are at least two ventholes on the holder, and the flexible membrane is corresponding The ventilation hole site of the holder sets venthole, and the venthole of the holder and the ventilation hole site of the flexible membrane are big Cause is mutually aligned and the sealing element is equipped at least one venthole, and is to be formed with the ventilation hole site of the holder Dislocation is misaligned.

8. air transporting arrangement as claimed in claim 7, which is characterized in that the holder is the material of a thermal expansion, by one Control circuit controls it and is heated, and when the holder expanded by heating, contradicts the flexible membrane towards the sealing element, to close the sealing A part at least venthole, constitutes the closing of the valve；When the holder not expanded by heating, between the holder and the sealing element The spacing for keeping the accommodating space constitutes the unlatching of the valve.

9. air transporting arrangement as claimed in claim 7, which is characterized in that the holder is a piezoelectric material, by a control Its deformation of circuit control, when the holder deformation, the flexible membrane towards the sealing element contradict, with close the sealing element this at least One venthole constitutes the closing of the valve；When the holder not deformation, keep the accommodating empty between the sealing element and the holder Between spacing, constitute the unlatching of the valve.