TWM559312U - Gas delivery device - Google Patents

Abstract

The present invention provides a gas delivery device comprising: a plurality of flow guiding units, a flow guiding unit, respectively comprising: an inlet plate having an inlet hole; a substrate; a resonance plate having a hollow hole, and a confluence chamber between the resonance plate and the inlet plate a firing plate having a suspension portion and an outer frame portion and a gap; a piezoelectric element attached to a surface of the suspension portion of the actuation plate; and an outlet plate having an outlet hole; and a valve disposed at the inlet hole and the outlet At least one of the holes; letting gas enter the confluence chamber through the inlet hole of the inlet plate and flow through the hollow hole of the resonance plate to enter the first chamber, and introduce the gap into the second chamber, and finally the outlet plate The outlet holes are led out, and the flow guiding units are arranged in a specific arrangement to transport the gas.

Description

Gas delivery device

The present invention relates to a gas delivery device, and more particularly to a gas delivery device that is micro, thin and silent.

At present, in all fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. The gas transmission structure included in the micro-pull is its key technology. The innovation structure breaks through its technical bottleneck and is an important part of development.

With the rapid development of technology, the application of gas delivery devices is becoming more and more diversified. For industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., even the most popular wearable devices can be seen in the shadows. Conventional gas delivery devices have gradually become the trend toward miniaturization of devices and maximization of flow rates.

In the prior art, the gas delivery device is mainly constructed by stacking conventional mechanical components, and the miniaturization and thinning of the whole device are achieved by minimizing or thinning each mechanical component. However, after the miniaturization of the conventional machine components, the dimensional accuracy control is not easy, and the assembly precision is also difficult to control, resulting in different product yields and even unstable gas flow.

Moreover, the conventional gas transmission device also has a problem of insufficient delivery flow rate, which is difficult to cope with the demand for a large amount of gas transmission through a single gas transmission device, and the conventional gas transmission device usually has a convex guiding pin for energizing connection. Use, so if you want to set a number of conventional gas transmission devices side by side to increase the amount of transmission, the assembly accuracy is also difficult to control, the guide pin is easy This creates obstacles to the installation and also complicates the setting of the external power supply line. Therefore, it is still difficult to increase the flow rate in this way, and the arrangement is less flexible.

Therefore, how to develop a technique that can improve the above-mentioned conventional techniques can make the apparatus or equipment using the conventional gas transmission device small, miniaturized and muted, and overcome the problem that the micro-size precision is difficult to control and the flow rate is insufficient, and can be flexibly utilized. The micro gas transmission device of various devices is an urgent problem to be solved at present.

The main purpose of the present invention is to provide a gas delivery device, which is manufactured by a micro-electromechanical process to integrally form a miniaturized gas delivery device, so as to overcome the problem that the conventional delivery device cannot simultaneously reduce the size, miniaturization, dimensional accuracy control and insufficient flow rate. .

In order to achieve the above object, a generalized embodiment of the present invention provides a gas delivery device comprising: a plurality of flow guiding units, each of the flow guiding units comprising: an inlet plate having at least one inlet hole; a substrate; a resonance plate having a hollow hole, and a resonance chamber between the resonance plate and the inlet plate; the movable plate having a floating portion and an outer frame portion and at least one gap; a piezoelectric element attached a surface of the suspension portion of the actuation plate; an outlet plate having an outlet opening; and at least one valve disposed at least one of the inlet aperture and the outlet aperture; wherein the inlet panel, the base The material, the resonant plate, the actuating plate, the piezoelectric element and the outlet plate are arranged in a corresponding manner, and a gap is formed between the resonant plate and the actuating plate to form a first chamber, the actuating plate And forming a second chamber between the outlet plate, the piezoelectric element driving the actuation plate to generate a bending resonance, so that the first chamber and the second chamber form a pressure difference, and the at least one valve is Open, let the gas enter the inlet plate The hole enters the confluence chamber and flows through the hollow hole of the resonance plate to enter the first chamber, and is introduced into the second chamber from the at least one gap, and finally is led out from the outlet hole of the outlet plate, The flow guiding units are arranged in a specific arrangement to transport gas.

1, 2, 3, 4‧‧‧ gas gas delivery devices

5‧‧‧ valve

10, 20, 30‧‧‧ diversion unit

11‧‧‧Substrate

12‧‧‧Confluence chamber

13‧‧‧Resonance board

130‧‧‧ hollow holes

131‧‧‧movable department

14‧‧‧Acoustic board

141‧‧‧Floating Department

142‧‧‧Outer frame

143‧‧‧ gap

15‧‧‧Piezoelectric components

16, 26, 36‧‧‧ export board

160, 260, 360‧‧‧ exit holes

17‧‧‧ entrance board

170‧‧‧ entrance hole

18‧‧‧ first chamber

19‧‧‧Second chamber

G0‧‧‧ gap

5‧‧‧ valve

51‧‧‧ Holder

52‧‧‧Seal

53‧‧‧ valve

54‧‧‧Flexible film

511, 521, 531, 541‧‧ vents

55‧‧‧ accommodating space

1 is a schematic view showing the appearance of a gas delivery device according to a first preferred embodiment of the present invention.

Fig. 2 is a schematic cross-sectional view showing the gas delivery device shown in Fig. 1.

Fig. 3A is a partially enlarged schematic view showing a single flow guiding unit of a cross section of the gas delivery device shown in Fig. 2.

3B to 3D are partial schematic views showing the operation flow of a single flow guiding unit of the gas delivery device shown in Fig. 3A.

Fig. 4 is a schematic view showing the appearance of a gas delivery device according to a second preferred embodiment of the present invention.

Fig. 5 is a schematic view showing the appearance of a gas delivery device according to a third preferred embodiment of the present invention.

Figure 6 is a schematic view showing the appearance of the gas delivery device of the fourth preferred embodiment.

7A and 7B are schematic views showing the operation of the first, second and third embodiments of the valve of the present invention.

8A and 8B are schematic views showing the operation of the fourth and fifth embodiments of the valve of the present invention.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The gas conveying device of the present invention is a miniaturized gas conveying device integrally formed by a micro-electromechanical process, which overcomes the problems that the conventional gas conveying device cannot simultaneously have a specific small size, miniaturization, insufficient output flow rate, and poor control of dimensional precision. First, please refer to FIG. 1 , FIG. 2 and FIG. 3A . In the first embodiment, the gas delivery device 1 includes a specific row The plurality of flow guiding units 10 are arranged in a column mode. In the embodiment, the plurality of flow guiding units 10 are arranged in a row of 2 rows and 10 rows to form a rectangular flat plate structure, and the flow guiding units 10 respectively include an inlet plate. 17. The substrate 11, the resonance plate 13, the actuation plate 14, the piezoelectric element 15, and the outlet plate 16 are sequentially stacked, wherein the inlet plate 17 has an inlet hole 170, and the resonance plate 13 has a hollow hole 130 and a movable portion. 131, and a confluence chamber 12 is formed between the resonance plate 13 and the inlet plate 17. The actuation plate 14 has a floating portion 141, an outer frame portion 142 and a plurality of gaps 143. The outlet plate 16 has an outlet hole 160, and its structure and characteristics And the setting method will be further detailed in the later part of the description. The gas delivery device 1 of the present embodiment can be integrally formed by a micro-electromechanical system process (MEMS) technology, and has a small size and a thin shape, and does not need to be stacked as a conventional gas delivery device, thereby avoiding the problem that the dimensional accuracy is difficult to control. The finished product quality is stable and the yield is high.

The gas delivery device 1 of the present embodiment passes through a plurality of inlet holes 170 of the inlet plate 17, a plurality of confluence chambers 12 of the substrate 11, a plurality of hollow holes 130 of the resonance plate 13, a plurality of movable portions 131, and an actuation plate 14 a plurality of floating portions 141 and a plurality of gaps 143, a plurality of piezoelectric elements 15 and a plurality of outlet holes 160 to form a plurality of flow guiding units 10, in other words, each of the flow guiding units 10 includes a confluent chamber 12 and a a hollow hole 130, a movable portion 131, a floating portion 141, a gap 143, a piezoelectric element 15 and an outlet hole 160, and the plurality of flow guiding units 10 share an inlet hole 170, but not limited thereto. A gap g0 between the resonance plate 13 of each flow guiding unit 10 and the actuation plate 14 forms a first chamber 18 (as shown in FIG. 3A), and a second between the actuation plate 14 and the outlet plate 16 is formed. Chamber 19 (as shown in Figure 3A). In order to facilitate the description of the structure of the gas delivery device 1 and the gas control mode, the following description will be made with a single flow guiding unit 10. However, this is not to limit the single flow guiding unit 10 in the present case, and the plurality of guiding units 10 may include The gas conveying device 1 composed of a plurality of single flow guiding units 10 of the same structure may be varied according to actual conditions. In other embodiments of the present disclosure, each of the flow guiding units 10 may also include An inlet hole 170, but not limited thereto.

As shown in FIG. 1 , in the first preferred embodiment, the number of the plurality of flow guiding units 10 of the gas delivery device 1 is 40, that is, the gas delivery device 1 has 40 units capable of separately transmitting gas. That is, as shown in FIG. 1 , each of the outlet holes 160 corresponds to each of the flow guiding units 10, and the 40 flow guiding units 10 are further arranged in 20 rows, and are arranged side by side in two or two, but none of them are The number and arrangement of the restrictions can be changed according to the actual situation.

Referring to FIG. 2, in the present embodiment, the inlet plate 17 has an inlet hole 170 which is a hole penetrating through the inlet plate 17 for gas circulation. The number of the inlet holes 170 in this embodiment is one. In some embodiments, the number of the inlet holes 170 may be one or more, but not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. In some embodiments, the inlet plate 17 may further include a filtering device (not shown), but not limited thereto, the filtering device is closed to the inlet hole 170 for filtering dust in the gas, or used for The impurities in the gas are filtered to prevent impurities and dust from flowing into the interior of the gas delivery device 1 to damage the components.

In the present embodiment, the substrate 11 further includes a driving circuit (not shown) for electrically connecting the positive and negative electrodes of the piezoelectric element 15 to provide a driving power source, but is not limited thereto. In some embodiments, the driving circuit may be disposed at any position inside the gas delivery device 1, but is not limited thereto, and may be changed according to actual conditions.

Please refer to FIG. 2 and FIG. 3A. In the gas gas delivery device 1 of the present embodiment, the resonance plate 13 is a suspension structure, and the resonance plate 13 further has a hollow hole 130 and a plurality of movable portions 131, and each guide The flow units 10 each have a hollow bore 130 and its corresponding movable portion 131. In the flow guiding unit 10 of the present embodiment, the hollow hole 130 is disposed at the center of the movable portion 131, and the hollow hole 130 is a hole penetrating the resonance plate 13 and communicates with the confluence chamber 12 and the first chamber 18 Between the gas for circulation and transmission. The movable portion 131 of the embodiment is a portion of the resonance plate 13, which is a flexible structure, and can be bent and vibrated up and down with the driving of the movable mold 14, thereby transmitting gas, and the operation mode thereof will be explained. The latter part of the book is further detailed.

Continuing to refer to FIG. 2 and FIG. 3A , in the gas delivery device 1 of the present embodiment, the actuation plate 14 is formed by a thin film of a metal material or a polycrystalline silicon film, but not limited thereto, the actuation plate 14 is not limited thereto. For the hollow suspension structure, the actuation plate 14 further has a suspension portion 141 and an outer frame portion 142, and each flow guiding unit 10 has a floating portion 141. In the flow guiding unit 10 of the present embodiment, the floating portion 141 is connected to the outer frame portion 142 by a plurality of connecting portions (not shown) to suspend the floating portion 141 in the outer frame portion 142 and in the floating portion 141. A plurality of gaps 143 are defined between the outer frame portion 142 and the outer frame portion 142 for the gas to circulate, and the manner, implementation, and quantity of the floating portion 141 and the outer frame portion 142 and the gap 143 are not limited thereto. The actual situation changes. In some embodiments, the floating portion 141 is a stepped surface structure, that is, the floating portion 141 further includes a convex portion (not shown), which may be, but is not limited to, a circular convex structure. The lower surface of the floating portion 141 is disposed through the convex portion to maintain the depth of the first chamber 18 at a specific interval value, thereby preventing the movable portion of the resonant plate 13 from being too small due to the depth of the first chamber 18. The problem that the 131 collides with the actuating plate 14 during the resonance and generates noise can also avoid the problem that the gas transmission pressure is insufficient due to the excessive depth of the first chamber 18, but is not limited thereto.

Continuing to refer to FIG. 2 and FIG. 3A, in the gas delivery device 1 of the present embodiment, each of the flow guiding units 10 has a piezoelectric element 15 attached to the suspension of the actuation plate 14. The upper surface of the portion 141, and the piezoelectric element 15 further has a positive electrode and a negative electrode (not shown) for electrically connecting, so that the voltage source 15 receives a voltage and is deformed to drive the actuation plate. 14 reciprocatingly reciprocating vibration in the vertical direction, and driving the resonance plate 13 to resonate, thereby causing a pressure change in the first chamber 18 between the resonance plate 13 and the actuation plate 14 for gas transmission, and actuating The method will be further detailed in the later part of the manual.

Referring to FIGS. 1 to 3A , in the gas delivery device 1 of the present embodiment, the outlet plate 16 further includes an outlet hole 160 , and each of the flow guiding units 10 has an outlet hole 160 . In the flow guiding unit 10 of the embodiment, the outlet hole 160 is connected between the second chamber 19 and the outside of the outlet plate 16 for the gas to flow from the second chamber 19 through the outlet hole 160 to the outside of the outlet plate 16. , 俾 achieve gas transmission.

Please refer to FIG. 3A to FIG. 3D at the same time. FIGS. 3B to 3E are partial schematic views showing the operation flow of the single flow guiding unit 10 of the gas delivery device shown in FIG. 3A. First, the flow guiding unit 10 of the gas delivery device 1 shown in Fig. 3A is in an unpowered state (i.e., an initial state), wherein a gap g0 is formed between the resonance plate 13 and the actuation plate 14 to cause the resonance plate 13 The depth of the gap g0 can be maintained between the floating portion 141 of the actuating plate 14, and the gas can be guided to flow more rapidly, and the floating portion 141 and the resonant plate 13 are kept at an appropriate distance to reduce mutual contact interference, thereby promoting noise generation. Can be reduced, but not limited to this.

As shown in FIGS. 2 and 3B, in the flow guiding unit 10, when the piezoelectric element 15 applies a voltage to cause the actuation plate 14 to be driven by the piezoelectric element 15, the suspension portion 141 of the actuation plate 14 is upward. The vibration causes the first chamber 18 to increase in volume and the pressure to decrease, and the gas enters from the inlet hole 170 on the inlet plate 17 in accordance with external pressure, and collects at the confluence chamber 12 of the substrate 11, and then passes through the resonance plate 13 The central hole 130 provided corresponding to the confluence chamber 12 flows upward into the first chamber 18. Next, as shown in FIGS. 2 and 3C, and due to the vibration of the suspension portion 141 of the actuator plate 14, the movable portion 131 of the resonance plate 13 is also resonated to vibrate upward, and the actuation plate 14 is The suspension portion 141 also vibrates downward at the same time, so that the movable portion 131 of the resonance plate 13 is attached against the floating portion 141 of the actuation plate 14 while closing the space circulating in the middle of the first chamber 18, thereby making the first chamber 18 compresses to make the volume smaller and the pressure increase, so that the volume of the second chamber 19 is increased and the pressure is reduced, thereby forming a pressure gradient, so that the gas inside the first chamber 18 is pushed to flow to both sides, and A plurality of voids 140 of the moving plate 14 flow into the second chamber 19.

As shown in FIG. 2 and FIG. 3D, the floating portion 141 of the actuating plate 14 continues to vibrate downward, and the movable portion 131 of the resonant plate 13 is caused to vibrate downwardly to further press the first chamber 18. Shrinking, and causing most of the gas to flow into the second chamber 19 for temporary storage. Finally, the floating portion 141 of the actuating plate 14 vibrates upward, compressing the second chamber 19 to reduce the volume and pressure, thereby making The gas in the second chamber 19 is led out from the outlet hole 160 of the outlet plate 16 to the outside of the outlet plate 16 to complete the gas transfer, so that the operation shown in FIG. 3B is repeated to increase the volume of the first chamber 18. The pressure is reduced, and the gas is again introduced by the inlet hole 170 on the inlet plate 17 in accordance with the external pressure, and is collected at the confluence chamber 12 of the substrate 11, and then corresponding to the confluence chamber 12 via the resonance plate 13 The central hole 130 flows upward into the first chamber 18. By repeating the gas transmission flow of the flow guiding unit 10 of the third to third embodiments, the floating portion 141 of the actuating plate 14 and the movable portion 131 of the resonant plate 13 are continuously reciprocally vibrated up and down, which is sustainable. Gas is continuously directed from the inlet port 170 to the outlet port 160 for gas transport.

In this way, the gas delivery device 1 of the present embodiment generates a pressure gradient in the flow channel design of each flow guiding unit 10, so that the gas flows at a high speed, and the gas is transmitted from the suction end through the difference in impedance between the flow path and the flow direction. To the discharge end, and under the pressure of the discharge end, there is still the ability to continuously push out the gas, and the effect of mute can be achieved. In some embodiments, the vertical reciprocating vibration frequency of the resonant plate 13 can be the same as the vibration frequency of the actuating plate 14, that is, the two can be simultaneously upward or downward, which can be changed according to the actual application situation. It is not limited to the mode of operation shown in this embodiment.

In the present embodiment, the gas delivery device 1 can be configured with a plurality of arrangement modes and a connection of the driving circuit through the 40 flow guiding units 10. The flexibility is extremely high, and is applied to various electronic components and transmits through 40 electronic components. The flow guiding unit 10 can simultaneously transmit gas, which can meet the gas transmission demand of a large flow rate; in addition, each flow guiding unit 10 can also be individually controlled to operate or stop, for example, part of the flow guiding unit 10 is actuated, and another part of the flow guiding The unit 10 stops, and the partial flow guiding unit 10 and the other part of the flow guiding unit 10 alternately operate, but are not limited thereto, thereby easily achieving various gas transmission flow demands and achieving a large drop. Low power consumption.

Please refer to FIG. 4, which is a schematic view showing the appearance of the gas delivery device of the second preferred embodiment. In the second preferred embodiment of the present invention, the number of the plurality of flow guiding units 20 of the gas delivery device 2 is 80, and the arrangement is such that each of the outlet holes 260 of the outlet plate 26 corresponds to each of the flow guiding units 20. In other words, the gas delivery device 2 has 80 units for separately transporting gas, and the structure of each flow guiding unit 20 is similar to that of the first embodiment described above, and the difference lies only in the number and arrangement thereof, so the structure thereof is not I will go into further details. In this embodiment, the 80 flow guiding units 20 are also arranged in a row of 20 rows, and are arranged side by side in four rows, but are not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. By simultaneously enabling the transmission of gas through the 80 flow guiding units 20, a larger gas transmission amount than that of the foregoing embodiment can be achieved, and each of the flow guiding units 20 can also individually induce the flow, which can control the gas transmission flow rate. The larger range makes it more flexible for use in a variety of devices requiring large flow of gas, but not limited to this. Referring to FIGS. 4B and 4C, the number of the plurality of flow guiding units 20 of the gas delivery device 2 is 20, and the arrangement thereof may be one row serial arrangement or one column serial arrangement.

Please refer to FIG. 5, which is a schematic view showing the appearance of a gas delivery device according to a third preferred embodiment of the present invention. In the third preferred embodiment of the present invention, the gas delivery device 3 has a circular structure, and the number of the flow guiding units 30 is 40, that is, each of the outlet holes 360 of the outlet plate 36 corresponds to each diversion. The unit 30, in other words, the gas delivery device 3 has 40 units for separately transporting gas, and the structure of each of the flow guiding units 30 is similar to that of the first embodiment described above, the difference is only in the number and arrangement manner, so the structure is This will not be further described. In this embodiment, the 40 flow guiding units 30 are arranged in a ring-shaped arrangement, but the limitation is not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. Through the annular array of 40 flow guiding units 30, it can be applied to various circular or annular gas transmission channels. Through the change of the array of each flow guiding unit 30, it can respond to various requirements in the demanding device. The shape makes it more flexible for use in a variety of gas transmission devices.

Please refer to FIG. 6. FIG. 6 is a schematic view showing the appearance of a gas delivery device according to a fourth preferred embodiment of the present invention. In the fourth preferred embodiment of the present invention, the flow guiding units 40 of the gas delivery device 4 are arranged in a honeycomb manner.

Continuing to refer to FIG. 2 and FIG. 3A , the gas delivery device 1 of the present invention further includes at least one valve 5 , and the valve 5 can be disposed at the inlet hole 170 or the outlet hole 160 of the gas delivery device 1 or at the same time at the inlet hole 170 . And an exit hole 160.

Referring to FIGS. 7A and 7B, the first embodiment of the valve 5 includes a retaining member 51, a seal member 52, and a valve plate 53. The valve piece 53 is disposed in the accommodating space 55 formed between the holding member 51 and the sealing member 52. The holding member 51 has at least two vent holes 511, and the valve piece 53 is also disposed corresponding to the vent hole 511 of the holding member 51. At least two vent holes 531, a vent hole 511 of the holder 51 and a vent hole 531 of the valve piece 53 are disposed substantially in alignment with each other, and at least one vent hole 521 is provided in the sealing member 52, and the vent hole of the sealing member 52 The position of the 521 and the vent 511 of the holder 51 is misaligned and not aligned.

Continuing to refer to FIGS. 7A and 7B, in the first embodiment, the valve 5 can be disposed at the inlet opening 170 of the inlet plate 17; when the gas delivery device 1 is enabled, the gas is introduced from the inlet plate 17 The hole 170 is introduced into the interior of the gas delivery device 1. At this time, the inside of the gas delivery device 1 forms a suction force, and the valve piece 53 pushes up the valve piece 53 in the direction of the arrow as shown in Fig. 7B, so that the valve 53 abuts against the valve 53 The holding member 51 simultaneously opens the vent hole 521 of the sealing member 52, and the gas can be introduced from the vent hole 102a of the sealing member 102. Since the position of the vent hole 531 of the valve piece 53 is substantially aligned with the vent hole 511 of the holding member 51, the vent hole 531 is provided. The 511 can be connected to each other to flow the airflow upward into the gas delivery device 1. When the actuation plate 14 of the gas delivery device 1 vibrates downward, the volume of the first chamber 18 is further compressed, so that the gas flows upward through the gap 143 into the second chamber 19, while the valve piece 53 of the valve 5 is pressed by the gas. Further, the operation of the vent hole 521 of the sealing member 52 as shown in FIG. 7A is resumed to form a gas. The one-way flow enters the confluence chamber 12, and accumulates gas in the confluence chamber 12, so that when the actuation plate 14 of the gas delivery device 1 vibrates upward, more gas is obtained to be discharged from the outlet hole 160, Increase the output of the gas volume.

The holder 51 of the valve 5 of the present invention, the sealing member 52 and the valve piece 53 may be made of a graphene material to form a miniaturized valve member. In the second embodiment of the valve 5 of the present invention, the valve piece 53 is a charged material, and the holding member 51 is a two-polar conductive material. The holder 51 is electrically connected to a control circuit (not shown) for controlling the polarity (positive polarity or negative polarity) of the holder 51. If the valve piece 53 is a negatively charged material, when the valve 5 is to be controlled to open, the control circuit controls the holding member 51 to form a positive electrode. At this time, the valve piece 53 and the holding member 51 maintain different polarities, so that the valve piece 53 is caused. Adjacent to the holder 51, the opening of the valve 5 is formed (as shown in Fig. 7B). On the other hand, if the valve piece 53 is a negatively charged material, when the valve 5 is to be controlled to be closed, the control circuit controls the holding member 51 to form a negative electrode, at which time the valve piece 53 and the holding member 51 maintain the same polarity, so that the valve piece 53 Approaching the seal 52 constitutes the closing of the valve 5 (as shown in Figure 7A).

In the third embodiment of the valve 10 of the present invention, the valve piece 5 is a magnetic material, and the holding member 51 is a magnetic material of controlled polarity. The holder 51 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the holder 51. If the valve piece 53 is a magnetic material with a negative electrode, when the valve 5 is to be controlled to open, the holding member 51 forms a positive magnetic state, and at this time, the control circuit controls the valve piece 53 and the holding member 51 to maintain different polarities, so that the valve piece 53 faces The retaining member 51 is brought close to form the opening of the valve 5 (as shown in Fig. 7B). On the other hand, if the valve piece 53 is a magnetic material with a negative electrode, when the valve 5 is controlled to be closed, the holding member 51 forms a magnetic pole of the negative electrode, and at this time, the control circuit controls the valve piece 53 and the holding member 51 to maintain the same polarity, so that the valve piece 53 approaches the seal 52, constituting the closing of the valve 5 (as shown in Figure 7A).

Please refer to FIG. 8A and FIG. 8B , which are schematic diagrams showing the operation of the fourth embodiment of the valve of the present invention. As shown in FIG. 8A, the valve 5 includes a retaining member 51, a sealing member 52 and a flexible membrane. 54. The holder 51 has at least two vent holes 511 therein, and an accommodating space 55 is held between the holder 51 and the sealing member 52. The flexible film 54 is made of a flexible material, and is attached to one side of the holding member 51 to be placed in the accommodating space 55. At least two vent holes 541 are also disposed at positions corresponding to the vent holes 511 of the holding member 51. The vent hole 511 of the holder 51 and the vent hole 541 of the flexible film 54 are positioned substantially in alignment with each other. And the sealing member 52 is provided with at least one venting hole 521 and the position of the venting hole 521 of the sealing member 52 and the venting hole 511 of the holding member 51 is misaligned and not aligned.

Please continue to refer to Figures 8A and 8B. In the fourth preferred embodiment of the present invention, the retaining member 51 is a thermally expanded material and is electrically connected to a control circuit (not shown) for controlling the holding member 51 to be heated. When the valve 5 is to be controlled to open, the control circuit controls the holding member 51 to be free from thermal expansion, so that the holder 101 and the seal member 102 are maintained at a distance between the accommodating spaces 55, constituting the opening of the valve 5 (as shown in Fig. 8A). On the contrary, when the valve 5 is controlled to be closed, the control circuit controls the holding member 51 to be thermally expanded to drive the holding member 51 against the sealing member 52. At this time, the flexible film 54 can be closely attached to the vent hole 521 of the sealing member 52 to constitute the valve 5. Closed (as shown in Figure 8B).

Continuing to refer to FIGS. 8A and 8B, the valve 5 of the present invention is implemented in the fifth embodiment, wherein the holder 51 is a piezoelectric material controlled by a control circuit (not shown). When the valve 5 is to be controlled to open, so that the retaining member 51 is not deformed, the distance between the retaining member 101 and the sealing member 102 in the accommodating space 55 constitutes the opening of the valve 5 (as shown in Fig. 8A). On the contrary, when the valve 5 is to be controlled to be closed, the control circuit controls the holding member 51 to deform the holding member 51 to urge the holding member 51 against the sealing member 52, at which time the flexible film 54 closes the sealing member with a close seal. The vent 521 of 52 constitutes the closing of the valve 5 (as shown in Fig. 8B). Of course, the holding member 51 of each of the spacer blocks corresponding to the plurality of vent holes 521 of the sealing member 52 can also be independently controlled by the control circuit to form a flow operation of the adjustable variable valve 5 to achieve an appropriate gas flow regulating effect.

In summary, the gas delivery device provided in the present invention comprises a plurality of flow guiding units, which are actuated by the flow guiding unit to generate a pressure gradient, so that the gas flows rapidly, and the flow guiding units are arranged by using a specific arrangement. To control and adjust the gas delivery volume gas delivery. In addition, the actuating plate is actuated by the piezoelectric element, so that the gas generates a pressure gradient in the designed flow channel and the pressure chamber, so that the gas flows at a high speed, and is quickly transmitted from the inlet end to the outlet end, and the gas is realized. Transmission. In addition, this case also allows for high transmission capacity, high efficiency, and high flexibility through the flexible changes in the number, setting, and driving methods of the diversion unit. What's more, in this case, through the setting of the valve, the gas certificate is efficiently concentrated, and the gas is accumulated in the chamber of a limited volume to achieve the effect of increasing the gas output.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

Claims (12)

A gas delivery device comprising: a plurality of flow guiding units, each of the flow guiding units comprising: an inlet plate having at least one inlet hole; a substrate; a resonance plate having a hollow hole, and the resonance plate and the Between the inlet plates, there is a confluence chamber; the movable plate has a floating portion and an outer frame portion and at least one gap; a piezoelectric element attached to one surface of the floating portion of the actuating plate; an outlet a plate having an outlet hole; and at least one valve disposed at least one of the inlet hole and the outlet hole; wherein the inlet plate, the substrate, the resonance plate, the actuation plate, and the piezoelectric element And the outlet plate is sequentially arranged correspondingly, the gap between the resonant plate and the actuating plate forms a first chamber, and a second chamber is formed between the actuating plate and the outlet plate, the pressure The electric component drives the actuation plate to generate a bending resonance to cause a pressure difference between the first chamber and the second chamber, and the at least one valve is opened to allow gas to enter the confluence from the inlet aperture of the inlet plate a chamber and flowing through the hollow hole of the resonance plate , To enter the first chamber, the at least one gap by introducing the second chamber, and finally derived from the outlet orifice of the outlet plate, with a particular arrangement of the plurality of guide means arranged to transport gas. The gas delivery device of claim 1, wherein the specific arrangement is one row in series. The gas delivery device of claim 1, wherein the specific arrangement is a series of tandem arrangements. The gas delivery device of claim 1, wherein the specific arrangement is arranged in an annular manner. The gas delivery device of claim 1, wherein the specific arrangement is arranged in a honeycomb manner. The gas delivery device of claim 1, wherein the valve comprises a holding member, a sealing member and a valve piece, wherein an accommodating space is maintained between the holding member and the sealing member, the valve plate is arranged In the accommodating space, the holder has at least two vent holes, and the valve plate is provided with a vent hole corresponding to the vent hole of the holding member, the vent hole of the holding member and the vent hole of the valve piece The positions are substantially aligned with each other, and the seal is provided with at least one venting opening, and the venting opening position of the retaining member is misaligned to form a misalignment. The gas delivery device of claim 1, wherein the valve comprises a holder made of graphene material, a sealing member and a valve piece, wherein the holding member and the sealing member maintain a volume The valve plate is disposed in the accommodating space, the holder has at least two vent holes, and the valve plate is provided with a vent hole corresponding to the vent hole of the retaining member, the vent hole of the retaining member and The vent holes of the valve plate are substantially aligned with each other, and the sealing member is provided with at least one vent hole, and the vent hole position of the retaining member is misaligned to form a misalignment. The gas delivery device of claim 6 or 7, wherein the valve piece is a charged material, and the holding member is a two-polar conductive material controlled by a control circuit. When the valve piece and the holder maintain different polarities, the valve piece approaches the holder to constitute opening of the valve; when the valve piece maintains the same polarity as the holder, the valve piece approaches the sealing member, thereby constituting the valve piece The valve is closed. The gas delivery device of claim 6 or 7, wherein the valve piece is a magnetic material, and the holding member is a magnetic material of controlled polarity, controlled by a control circuit. When the valve plate maintains a different polarity from the retaining member, the valve plate approaches the retaining member to form an opening of the valve; when the valve plate maintains the same polarity as the retaining member, the valve plate faces the sealing member. Close to the closing of the valve. The gas delivery device of claim 1, wherein the valve comprises a retaining member, a sealing member and a flexible film, wherein an accommodating space is maintained between the holding member and the sealing member, and the flexible film is attached to a surface of the holding member and disposed in the accommodating space, and the holding The device has at least two vent holes, and the flexible film is provided with a vent hole corresponding to the vent hole of the retaining member, and the vent hole of the retaining member and the vent hole of the flexible film are substantially aligned with each other, and At least one venting hole is provided in the sealing member, and the venting hole position of the holding member is misaligned to form a misalignment. The gas delivery device of claim 10, wherein the retaining member is a thermally expandable material, which is controlled by a control circuit to be heated, and when the retaining member is thermally expanded, the flexible membrane is in contact with the sealing member to The at least one venting opening of the sealing member constitutes closing of the valve; when the retaining member is not thermally expanded, the distance between the sealing member and the retaining member is maintained to form an opening of the valve. The gas delivery device of claim 11, wherein the holding member is a piezoelectric material, and the deformation is controlled by a control circuit, and when the holder is deformed, the flexible film is in contact with the sealing member to The at least one venting opening of the sealing member constitutes closing of the valve; when the retaining member is not deformed, the distance between the accommodating space and the retaining member is maintained to form an opening of the valve.