TWM554513U - Gas delivery device - Google Patents
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- TWM554513U TWM554513U TW106213773U TW106213773U TWM554513U TW M554513 U TWM554513 U TW M554513U TW 106213773 U TW106213773 U TW 106213773U TW 106213773 U TW106213773 U TW 106213773U TW M554513 U TWM554513 U TW M554513U
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Abstract
一種氣體輸送裝置，包含入口板、基材、共振板、致動板、壓電元件以及出口板依序堆疊，其更包含至少一閥，該閥設置於入口板之入口孔及出口板之出口孔中至少一者。其中，共振板與入口板之間具有一匯流腔室，共振板與致動板間具有一第一腔室，且致動板與出口板間具有一第二腔室；當壓電元件驅動致動板時，第一腔室及第二腔室形成一壓力差，此時使閥開啟，以導引氣體由入口板之入口孔進入匯流腔室，流經共振板之中空孔洞進入第一腔室內，並由致動板之空隙導入第二腔室內，最後由出口板之出口孔導出，藉此控制氣體之輸送。A gas delivery device comprising an inlet plate, a substrate, a resonance plate, an actuation plate, a piezoelectric element and an outlet plate, which are sequentially stacked, further comprising at least one valve disposed at an inlet opening of the inlet plate and an outlet of the outlet plate At least one of the holes. Wherein, there is a confluence chamber between the resonance plate and the inlet plate, a first chamber is provided between the resonance plate and the actuation plate, and a second chamber is provided between the actuation plate and the outlet plate; When the plate is moved, the first chamber and the second chamber form a pressure difference, and the valve is opened to guide the gas from the inlet hole of the inlet plate into the confluence chamber, and flows through the hollow hole of the resonance plate into the first cavity. The chamber is introduced into the second chamber by the gap of the actuating plate and finally led out from the outlet hole of the outlet plate, thereby controlling the gas delivery.
Description
本案係關於一種氣體輸送裝置，尤指一種具有閥以控制氣體流動的氣體輸送裝置。The present invention relates to a gas delivery device, and more particularly to a gas delivery device having a valve to control the flow of a gas.
目前於各領域中無論是醫藥、電腦科技、列印、能源等工業，產品均朝精緻化及微小化方向發展，其中微幫浦、噴霧器、噴墨頭、工業列印裝置等產品所包含之流體輸送結構為其關鍵技術，是以，如何藉創新結構突破其技術瓶頸，為發展之重要內容。At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.
隨著科技的日新月異，流體輸送裝置的應用上亦愈來愈多元化，舉凡工業應用、生醫應用、醫療保健、電子散熱等等，甚至近來熱門的穿戴式裝置皆可見它的踨影，可見傳統的流體輸送裝置已漸漸有朝向裝置微小化、流量極大化的趨勢。With the rapid development of technology, the application of fluid delivery devices is becoming more and more diversified. For industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., even the most popular wearable devices can be seen in the shadows. Conventional fluid delivery devices have gradually become the trend toward miniaturization of devices and maximization of flow rates.
然而，目前微型化之流體輸送裝置雖能持續傳輸氣體，但在微型化之有限容積的腔室或流道上設計要求較多的氣體傳輸，顯然要提升是有一定困難度，因此結合閥門之設計，不儘可控制氣流傳輸之持續或中斷，也可控制氣體單向之流動，而且讓有限容積的腔室或流道去累積氣體，以提升氣體量的輸出，這是本案所欲新型的主要課題。However, although the miniaturized fluid delivery device can continuously transport gas, it requires more gas transmission in the miniaturized finite volume chamber or flow channel. Obviously, it is difficult to upgrade, so the design of the valve is combined. It can control the continuous or interruption of airflow transmission, control the flow of gas in one direction, and let the chamber or flow channel of limited volume accumulate gas to increase the output of gas. This is the main type of new gas in this case. Question.
本案之主要目的在於提供一種氣體輸送裝置，其入口孔與出口孔中至少一者設置一閥，讓有限容積的腔室去累積氣體，以提升氣體量的輸出。The main object of the present invention is to provide a gas delivery device in which at least one of an inlet port and an outlet port is provided with a valve for allowing a chamber of a limited volume to accumulate gas to increase the output of the gas amount.
為達上述目的，本案之一較廣義實施態樣為提供一種氣體輸送裝置，包含：一入口板，具有至少一入口孔；一基材；一共振板，具有一中空孔洞，且該共振板與該入口板之間具有一匯流腔室；一致動板，具有一懸浮部、一外框部及至少一空隙；一壓電元件，貼附於該致動板之該懸浮部之一表面；一出口板，具有一出口孔；以及至少一閥，設置在該入口孔和該出口孔中之至少一者；其中，該入口板、該基材、該共振板、該致動板及該出口板係依序對應堆疊設置，該共振板及該致動板之間具有一間隙形成一第一腔室，該致動板及該出口板之間形成一第二腔室，該壓電元件驅動該致動板產生彎曲共振，以使該第一腔室及該第二腔室形成一壓力差，並使該閥開啟，讓氣體由該入口孔進入該匯流腔室而流經該共振板之該中空孔洞，以進入該第一腔室內，並由該至少一空隙導入該第二腔室內，最後由該出口板之該出口孔導出，藉此以傳輸氣體之流動。In order to achieve the above object, a generalized embodiment of the present invention provides a gas delivery device comprising: an inlet plate having at least one inlet hole; a substrate; a resonance plate having a hollow hole, and the resonance plate and Between the inlet plates, there is a confluence chamber; the movable plate has a floating portion, an outer frame portion and at least one gap; a piezoelectric element is attached to a surface of the floating portion of the actuating plate; An outlet plate having an outlet opening; and at least one valve disposed in at least one of the inlet aperture and the outlet aperture; wherein the inlet panel, the substrate, the resonance plate, the actuation plate, and the outlet plate Corresponding to the stacking arrangement, a gap is formed between the resonant plate and the actuating plate to form a first chamber, and a second chamber is formed between the actuating plate and the outlet plate, and the piezoelectric element drives the Actuating the plate to generate a bending resonance, so that the first chamber and the second chamber form a pressure difference, and the valve is opened, allowing gas to enter the confluence chamber through the inlet hole and flow through the resonance plate a hollow hole to enter the first chamber and At least one void is introduced into the second chamber, and finally derived from the outlet orifice of the outlet plate, whereby at a flow of transport gas.
體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在本質上係當作說明之用，而非架構於限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.
請參閱第1 圖，其為本案之一較佳實施例之氣體輸送裝置之結構示意圖。在本案之一較佳實施例中，氣體輸送裝置1由基材11、共振板13、致動板14、壓電元件15及出口板16依序對應堆疊所構成一主體，再以入口板17用以封蓋基材11底部所組成。其中，基材11由一矽材或由石墨烯材製成的板材，並以半導體製程製出一貫穿之匯流腔室12，入口板17用以封蓋基材11底部，並具有至少一入口孔170對應連通匯流腔室12。共振板13為一撓性板，貼合堆疊固設於基材11上方，並於對應到匯流腔室12位置設有一中空孔洞130，而共振板13在貼合基材11以外之懸空部分形成一可動部131，可受一共振頻率而彎曲形變。致動板14為具有一懸浮部141、一外框部142及至少一空隙143的板結構，懸浮部141設置於中間受外框部142連接支撐，且懸浮部141與外框部142未連接部分而保持多個空隙143，致動板14的外框部142為貼合堆疊固設於共振板13上，而使懸浮部141與共振板13之間具有一間隙g0以形成一第一腔室18，懸浮部141可為任意幾何形狀，較佳者為正方形。壓電元件15為壓電材料製成之一板狀結構，貼附於致動板14之懸浮部141之一表面上，其尺寸則略小於懸浮部141。出口板16為利用一隔離件(例如，導電膠)貼合堆疊於致動板14的外框部142上，以使出口板16與致動板14之間隔出一第二腔室19，出口板16具有一出口孔160，連通第二腔室19。Please refer to FIG. 1 , which is a schematic structural view of a gas delivery device according to a preferred embodiment of the present invention. In a preferred embodiment of the present invention, the gas delivery device 1 is composed of a substrate 11, a resonance plate 13, an actuation plate 14, a piezoelectric element 15, and an outlet plate 16 in a correspondingly stacked manner to form a main body, and then an inlet plate 17 It is used to cover the bottom of the substrate 11. Wherein, the substrate 11 is made of a coffin or a plate made of graphene, and a through-flow chamber 12 is formed by a semiconductor process, and the inlet plate 17 is used to cover the bottom of the substrate 11 and has at least one inlet. The hole 170 corresponds to the communication manifold 12 . The resonance plate 13 is a flexible plate, and the bonding stack is fixed on the substrate 11 and is provided with a hollow hole 130 at a position corresponding to the confluence chamber 12, and the resonance plate 13 is formed in a suspended portion other than the bonding substrate 11. A movable portion 131 can be bent and deformed by a resonance frequency. The actuating plate 14 is a plate structure having a floating portion 141, an outer frame portion 142 and at least one gap 143. The floating portion 141 is disposed in the middle and supported by the outer frame portion 142, and the floating portion 141 is not connected to the outer frame portion 142. The outer frame portion 142 of the actuation plate 14 is partially fixed to the resonance plate 13 for a portion of the cover plate 142, and a gap g0 is formed between the suspension portion 141 and the resonance plate 13 to form a first cavity. The chamber 18, the suspension portion 141 can be of any geometric shape, preferably square. The piezoelectric element 15 is a plate-like structure made of a piezoelectric material, and is attached to the surface of one of the floating portions 141 of the actuating plate 14, and has a size slightly smaller than that of the floating portion 141. The outlet plate 16 is attached to the outer frame portion 142 of the actuating plate 14 by a spacer (for example, a conductive adhesive), so that the outlet plate 16 and the actuating plate 14 are spaced apart from each other by a second chamber 19, and the outlet The plate 16 has an outlet opening 160 that communicates with the second chamber 19.
本案之氣體輸送裝置1為了微型化之設計，在有限容積的腔室去累積氣體，以提升氣體量的輸出，更具有至少一閥10，閥10可設置在入口孔170或出口孔160任一個之中，或者同時設置於兩者，以累積氣體而提升氣體量的輸出。閥10之結構與作動方式將於後段詳述。The gas delivery device 1 of the present invention, in order to miniaturize the design, accumulates gas in a chamber of a limited volume to increase the output of the gas amount, and further has at least one valve 10, and the valve 10 can be disposed at either the inlet hole 170 or the outlet port 160. Among them, or both, to accumulate gas to increase the output of the gas amount. The structure and actuation of the valve 10 will be detailed later.
請參閱第2A圖至第2C圖，其為本案之一較佳實施例之氣體輸送裝置之作動示意圖。氣體輸送裝置1之壓電元件15施加電壓驅動致動板14產生彎曲共振，致動板14進行沿垂直方向之往復式運動。如第2A圖所示，當致動板14向上振動時，第一腔室18體積增加，進而產生一吸力，驅使外界之一氣體經由入口孔170被導入匯流腔室12內，且第二腔室19內氣體受壓縮，而由出口孔160排出，同時如第2B圖所示，當致動板14之振動引發共振板13產生共振，因而導致共振板13之可動部131向上形變，氣體經過共振板13之中空孔洞130進入第一腔室18，並將第一腔室18中的氣體向周邊擠壓。再如第2C圖所示，當致動板14向下振動時，進一步壓縮第一腔室18之體積，使其中的氣體透過空隙143向上流入第二腔室19，再重複第2A圖所示之作動，第二腔室19內氣體受壓縮，而由出口孔160排出，再次將外界之氣體導入匯流腔室12。氣體輸送裝置1藉由重複循環上述第2A圖至第2C圖所示之作動，即可持續進行氣體之傳輸。Please refer to FIG. 2A to FIG. 2C , which are schematic diagrams showing the operation of the gas delivery device according to a preferred embodiment of the present invention. The piezoelectric element 15 of the gas delivery device 1 applies a voltage to drive the actuation plate 14 to generate a bending resonance, and the actuation plate 14 performs a reciprocating motion in the vertical direction. As shown in FIG. 2A, when the actuation plate 14 vibrates upward, the volume of the first chamber 18 increases, thereby generating a suction force that drives one of the outside gases into the confluence chamber 12 via the inlet aperture 170, and the second chamber The gas in the chamber 19 is compressed and discharged from the outlet port 160, and as shown in Fig. 2B, when the vibration of the actuating plate 14 causes the resonance plate 13 to resonate, the movable portion 131 of the resonance plate 13 is deformed upward, and the gas passes. The hollow hole 130 of the resonance plate 13 enters the first chamber 18 and presses the gas in the first chamber 18 to the periphery. Further, as shown in FIG. 2C, when the actuation plate 14 vibrates downward, the volume of the first chamber 18 is further compressed, and the gas therein flows upward through the gap 143 into the second chamber 19, and repeats FIG. 2A. As a result, the gas in the second chamber 19 is compressed and discharged from the outlet port 160, and the outside air is again introduced into the confluence chamber 12. The gas delivery device 1 can continuously perform the gas transfer by repeating the operations shown in the above FIGS. 2A to 2C.
請參閱第3A圖及第3B圖，其為本案之閥10之第一實施態樣之作動示意圖。如第3A圖所示，閥10之第一實施態樣為包含一保持件101、一密封件102以及一閥片103。在本案之一較佳實施例中，保持件101、密封件102以及閥片103皆以石墨烯材所製成，但不以此為限。保持件101上具有至少兩個通氣孔101a，而閥片103設置於保持件101及密封件102之間所形成的容置空間105中，且對應保持件101之通氣孔101a位置設置通氣孔103a，保持件101的通氣孔101a及閥片103的通氣孔103a，其位置為大致相互對準。以及密封件102上設有至少一個通氣孔102a，且密封件102之通氣孔102a與保持件101之通氣孔101a之位置形成錯位而不對準。Please refer to FIG. 3A and FIG. 3B , which are schematic diagrams of the operation of the first embodiment of the valve 10 of the present invention. As shown in FIG. 3A, the first embodiment of the valve 10 includes a retaining member 101, a seal member 102, and a valve disc 103. In a preferred embodiment of the present invention, the holding member 101, the sealing member 102 and the valve plate 103 are all made of graphene material, but not limited thereto. The holder 101 has at least two vent holes 101a, and the valve piece 103 is disposed in the accommodating space 105 formed between the holder 101 and the sealing member 102, and the vent hole 103a is disposed corresponding to the vent hole 101a of the holder 101. The vent hole 101a of the holder 101 and the vent hole 103a of the valve piece 103 are positioned substantially in alignment with each other. And the sealing member 102 is provided with at least one vent hole 102a, and the position of the vent hole 102a of the sealing member 102 and the vent hole 101a of the holder member 101 are misaligned and not aligned.
請同時參閱第1圖至第3B圖。在本案之一較佳實施例中，閥10如第3A圖所示之第一實施例樣態，設置於入口板17之入口孔170之中。當氣體輸送裝置1致能，開始前述如第2A圖至第2C圖所示之作動，持續將氣體由入口板17之入口孔170導入氣體輸送裝置1內部，此時如第3B圖所示，氣體輸送裝置1內部形成吸力，閥片103會如圖示中沿箭頭方向之氣流而將閥片103上推，致使閥103頂觸於保持件101，同時開啟密封件102之通氣孔102a之作動，由於閥片103的通氣孔103a之位置大致對準保持件101的通氣孔101a，因此氣體可由密封件102之通氣孔102a導入，再由閥片103之通氣孔103a與保持件101之通氣孔101a接通，使氣流向上流動；當氣體輸送裝置1之致動板14向下振動時，進一步壓縮第一腔室18之體積，使氣體透過空隙143向上流入第二腔室19，同時閥10之閥片103受到氣體推壓，進而恢復如第3A圖所示封閉密封件102之通氣孔102a之作動，形成氣體一單向之流動進入匯流腔室12，並在匯流腔室12內累積氣體，如此氣體輸送裝置1之致動板14向上振動時，即可獲得較多的氣體由出口孔160排出，以提升氣體量的輸出。Please also refer to Figures 1 to 3B. In a preferred embodiment of the present invention, the valve 10 is disposed in the inlet opening 170 of the inlet plate 17 as in the first embodiment shown in FIG. 3A. When the gas delivery device 1 is enabled, the operation as shown in Figs. 2A to 2C is started, and the gas is continuously introduced into the gas delivery device 1 from the inlet hole 170 of the inlet plate 17, as shown in Fig. 3B. The inside of the gas delivery device 1 forms a suction force, and the valve piece 103 pushes up the valve piece 103 as shown in the figure in the direction of the arrow, so that the valve 103 is in contact with the holder 101 while opening the vent hole 102a of the sealing member 102. Since the position of the vent hole 103a of the valve piece 103 is substantially aligned with the vent hole 101a of the holder 101, the gas can be introduced from the vent hole 102a of the sealing member 102, and the vent hole 103a of the valve piece 103 and the vent hole of the holder 101. 101a is turned on to cause the airflow to flow upward; when the actuator plate 14 of the gas delivery device 1 vibrates downward, the volume of the first chamber 18 is further compressed, so that the gas flows upward through the gap 143 into the second chamber 19, while the valve 10 The valve piece 103 is pressed by the gas to restore the operation of the vent hole 102a of the sealing member 102 as shown in Fig. 3A, forming a one-way flow of gas into the confluence chamber 12, and accumulating gas in the confluence chamber 12. , such a gas delivery device 1 when the actuator plate 14 upwardly vibration, can be obtained more gas discharged from the outlet hole 160, the amount of gas to enhance the output.
在本案閥10之閥片103、密封件102以及保持件101可用石墨烯材料所製成，以形成微型化之閥件。而在本案閥10之第二實施例態樣中，閥片103為一帶電荷之材料，保持件101為一兩極性之導電材料。保持件101電性連接一控制電路(未圖示)，該控制電路用以控制保持件101之極性(正電極性或負電極性)，若閥片103為一帶負電荷之材料，當閥10須受控開啟時，控制電路控制保持件101形成一正電極，此時閥片103與保持件101維持不同極性，如此會使閥片103朝保持件101靠近，構成閥10之開啟(如第3B圖所示)。反之，若閥片103為一帶負電荷之材料，當閥10須受控關閉時，控制電路控制保持件101形成一負電極，此時閥片103與保持件101維持相同極性，如此會使閥片103朝密封件102靠近，構成閥10之關閉(如第3A圖所示)。The valve plate 103, the seal member 102, and the holder 101 of the valve 10 of the present invention may be made of a graphene material to form a miniaturized valve member. In the second embodiment of the valve 10 of the present invention, the valve piece 103 is a charged material, and the holding member 101 is a two-polar conductive material. The holding member 101 is electrically connected to a control circuit (not shown) for controlling the polarity (positive polarity or negative polarity) of the holding member 101. If the valve piece 103 is a negatively charged material, when the valve 10 is When the controlled opening is required, the control circuit controls the holding member 101 to form a positive electrode. At this time, the valve piece 103 and the holding member 101 maintain different polarities, so that the valve piece 103 approaches the holding member 101, thereby forming the opening of the valve 10. Figure 3B shows). On the other hand, if the valve piece 103 is a negatively charged material, when the valve 10 is to be controlled to be closed, the control circuit controls the holding member 101 to form a negative electrode, at which time the valve piece 103 and the holder 101 maintain the same polarity, thus causing the valve The sheet 103 is brought toward the seal 102 to form a closure of the valve 10 (as shown in Figure 3A).
在本案閥10之第三實施例態樣中，閥10為一帶磁性之材料，而保持件101為一可受控變換極性之磁性材料。保持件101電性連接一控制電路(未圖示)，該控制電路用以控制保持件101之極性(正極或負極)。若閥片103為一帶負極之磁性材料，當閥10須受控開啟時，控制電路控制保持件101形成一正極之磁性，此時閥片103與保持件101維持不同極性，使閥片103朝保持件101靠近，構成閥10之開啟(如第3B圖所示)。反之，若閥片103為一帶負極之磁性材料，當閥10須受控關閉時，控制電路控制保持件101形成一負極之磁性，此時閥片103與保持件101維持相同極性，使閥片103朝密封件102靠近，構成閥10之關閉(如第3A圖所示)。In the third embodiment of the valve 10 of the present invention, the valve 10 is a magnetic material, and the holder 101 is a magnetic material of controlled polarity. The holder 101 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the holder 101. If the valve piece 103 is a magnetic material with a negative electrode, when the valve 10 is to be controlled to open, the control circuit controls the holding member 101 to form a magnetic pole of the positive electrode. At this time, the valve piece 103 and the holding member 101 maintain different polarities, so that the valve piece 103 faces The holder 101 is brought close to form the opening of the valve 10 (as shown in Fig. 3B). On the other hand, if the valve piece 103 is a magnetic material with a negative electrode, when the valve 10 is to be controlled to be closed, the control circuit controls the holding member 101 to form a magnetic pole of the negative electrode, and at this time, the valve piece 103 and the holding member 101 maintain the same polarity, so that the valve piece 103 approaches the seal 102, constituting the closure of the valve 10 (as shown in Figure 3A).
請參閱第4A圖及第4B圖，其為本案之閥之第四實施態樣之作動示意圖。如第4A圖所示，閥10包含一保持件101、一密封件102及一柔性膜104。保持件101上具有至少兩個通氣孔101a，保持件101與密封件102之間保持一容置空間105。柔性膜104以一可撓性材料所製成，貼附於保持件101之一表面上，並設置於容置空間105內，且對應保持件101之通氣孔101a位置設置通氣孔104a，保持件101的通氣孔101a及閥片103的通氣孔104a，其位置為大致相互對準。以及密封件102上設有至少一個通氣孔102a，且密封件102之通氣孔102a與保持件101之通氣孔101a之位置形成錯位而不對準。Please refer to FIG. 4A and FIG. 4B , which are schematic diagrams showing the operation of the fourth embodiment of the valve of the present invention. As shown in FIG. 4A, the valve 10 includes a retaining member 101, a seal member 102, and a flexible membrane 104. The holder 101 has at least two vent holes 101a, and an accommodating space 105 is held between the holder 101 and the sealing member 102. The flexible film 104 is made of a flexible material, is attached to one surface of the holder 101, and is disposed in the accommodating space 105. The vent hole 104a is disposed corresponding to the vent hole 101a of the holder 101. The vent hole 101a of 101 and the vent hole 104a of the valve piece 103 are positioned substantially in alignment with each other. And the sealing member 102 is provided with at least one vent hole 102a, and the position of the vent hole 102a of the sealing member 102 and the vent hole 101a of the holder member 101 are misaligned and not aligned.
請繼續參閱第4A圖及第4B圖。在本案閥10之第四實施態樣中，保持件101為一受熱膨脹之材料，且電性連接一控制電路(未圖示)，該控制電路用以控制保持件101受熱。當閥10須受控開啟時，控制電路控制保持件101不受熱膨脹，保持件101與密封件102保持容置空間105之間距，構成閥10之開啟(如第4A圖所示)。反之，當閥10須受控關閉時，控制電路控制保持件101受熱膨脹，而驅使保持件101朝密封件102抵觸，此時柔性膜104可以密貼封閉密封件102之至少一個通氣孔102a，構成閥10之關閉(如第4B圖所示)。Please continue to refer to Figures 4A and 4B. In the fourth embodiment of the valve 10 of the present invention, the holding member 101 is a material that is thermally expanded, and is electrically connected to a control circuit (not shown) for controlling the holding member 101 to be heated. When the valve 10 is to be controlled to open, the control circuit controls the holder 101 to be unheated, and the holder 101 and the seal 102 maintain the distance between the accommodating spaces 105, constituting the opening of the valve 10 (as shown in Fig. 4A). On the contrary, when the valve 10 is to be controlled to be closed, the control circuit controls the holding member 101 to be thermally expanded to drive the holder 101 against the sealing member 102, and the flexible film 104 can be closely attached to the at least one vent hole 102a of the sealing member 102, The closing of the valve 10 is formed (as shown in Fig. 4B).
在本案閥10之第五實施態樣中，保持件101為一壓電材料，且電性連接一控制電路(未圖示)，該控制電路用以控制保持件101之形變。當閥10須受控開啟時，控制電路控制保持件101不產生形變，保持件101與密封件102保持容置空間105形成間距，構成閥10之開啟(如第4A圖所示)。反之，當閥10須受控關閉時，控制電路控制保持件101產生形變，驅使保持件101朝密封件102抵觸，此時柔性膜104以密貼封閉密封件102之至少一個通氣孔102a，構成閥10之關閉(如第4B圖所示)。當然，密封件102之複數個通氣孔102a所對應之每個間隔區塊之保持件101，也可獨立受控制電路控制，形成可調變閥10之流通作動，達成適當氣體流量之調節作用。In the fifth embodiment of the valve 10 of the present invention, the holder 101 is a piezoelectric material and is electrically connected to a control circuit (not shown) for controlling the deformation of the holder 101. When the valve 10 is to be controlled to open, the control circuit controls the retaining member 101 to be deformed, and the retaining member 101 and the seal member 102 maintain a space between the accommodating spaces 105, constituting the opening of the valve 10 (as shown in FIG. 4A). On the contrary, when the valve 10 is to be controlled to be closed, the control circuit controls the deformation of the holder 101 to drive the holder 101 against the sealing member 102. At this time, the flexible film 104 closes the at least one vent hole 102a of the sealing member 102. The valve 10 is closed (as shown in Figure 4B). Of course, the holding member 101 of each of the spacer blocks corresponding to the plurality of vent holes 102a of the sealing member 102 can also be independently controlled by the control circuit to form a flow operation of the adjustable variable valve 10 to achieve an appropriate gas flow regulating effect.
綜上所述，本案之氣體輸送裝置在入口孔與出口孔中之至少一者設置一閥，讓有限容積的腔室去累積氣體，以提升氣體量的輸出極具產業利用性。In summary, the gas delivery device of the present invention is provided with a valve in at least one of the inlet hole and the outlet hole, so that the limited volume chamber accumulates gas, so that the output of the gas volume is highly industrially usable.
本案得由熟知此技術之人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.
1‧‧‧氣體輸送裝置
10‧‧‧閥
101‧‧‧保持件
102‧‧‧密封件
103‧‧‧閥片
104‧‧‧柔性膜
101a、102a、103a、104a‧‧‧通氣孔
105‧‧‧容置空間
11‧‧‧基材
12‧‧‧匯流腔室
13‧‧‧共振板
130‧‧‧中空孔洞
131‧‧‧可動部
14‧‧‧致動板
141‧‧‧懸浮部
142‧‧‧外框部
143‧‧‧空隙
15‧‧‧壓電元件
16‧‧‧出口板
160‧‧‧出口孔
17‧‧‧入口板
170‧‧‧入口孔
18‧‧‧第一腔室
19‧‧‧第二腔室
g0‧‧‧間隙1‧‧‧ gas delivery device
10‧‧‧ valve
101‧‧‧ Holder
102‧‧‧Seal
103‧‧‧ Valves
104‧‧‧Flexible film
101a, 102a, 103a, 104a‧‧‧ vents
105‧‧‧ accommodating space
11‧‧‧Substrate
12‧‧‧Confluence chamber
13‧‧‧Resonance board
130‧‧‧ hollow holes
131‧‧‧movable department
14‧‧‧Acoustic board
141‧‧‧Floating Department
142‧‧‧Outer frame
143‧‧‧ gap
15‧‧‧Piezoelectric components
16‧‧‧Export board
160‧‧‧Exit hole
17‧‧‧ entrance board
170‧‧‧ entrance hole
18‧‧‧ first chamber
19‧‧‧Second chamber
G0‧‧‧ gap
第1圖為本案之一較佳實施例之氣體輸送裝置之結構示意圖。 第2A圖至第2C圖為本案之一較佳實施例之氣體輸送裝置之作動示意圖。 第3A圖及第3B圖為本案之閥之第一、第二及第三實施態樣之作動示意圖。 第4A圖及第4B圖為本案之閥之第四、第五實施態樣之作動示意圖。1 is a schematic structural view of a gas delivery device according to a preferred embodiment of the present invention. 2A to 2C are schematic views showing the operation of the gas delivery device of a preferred embodiment of the present invention. 3A and 3B are schematic views showing the operation of the first, second and third embodiments of the valve of the present invention. 4A and 4B are schematic views showing the operation of the fourth and fifth embodiments of the valve of the present invention.
1‧‧‧氣體輸送裝置 1‧‧‧ gas delivery device
10‧‧‧閥 10‧‧‧ valve
11‧‧‧基材 11‧‧‧Substrate
12‧‧‧匯流腔室 12‧‧‧Confluence chamber
13‧‧‧共振板 13‧‧‧Resonance board
130‧‧‧中空孔洞 130‧‧‧ hollow holes
131‧‧‧可動部 131‧‧‧movable department
14‧‧‧致動板 14‧‧‧Acoustic board
141‧‧‧懸浮部 141‧‧‧Floating Department
142‧‧‧外框部 142‧‧‧Outer frame
143‧‧‧空隙 143‧‧‧ gap
15‧‧‧壓電元件 15‧‧‧Piezoelectric components
16‧‧‧出口板 16‧‧‧Export board
160‧‧‧出口孔 160‧‧‧Exit hole
17‧‧‧入口板 17‧‧‧ entrance board
170‧‧‧入口孔 170‧‧‧ entrance hole
18‧‧‧第一腔室 18‧‧‧ first chamber
19‧‧‧第二腔室 19‧‧‧Second chamber
g0‧‧‧間隙 G0‧‧‧ gap
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106213773U TWM554513U (en) | 2017-09-15 | 2017-09-15 | Gas delivery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106213773U TWM554513U (en) | 2017-09-15 | 2017-09-15 | Gas delivery device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWM554513U true TWM554513U (en) | 2018-01-21 |
Family
ID=61729934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106213773U TWM554513U (en) | 2017-09-15 | 2017-09-15 | Gas delivery device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWM554513U (en) |
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