TWM553321U - Microelectromechanical fluid control device - Google Patents

Description

Microelectromechanical fluid control device

The present invention relates to a microelectromechanical fluid control device, and more particularly to a micro-electromechanical fluid control device that transmits micro, thin and silent.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

With the rapid development of technology, the application of fluid delivery devices is becoming more and more diversified. For industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., even the most popular wearable devices can be seen in the shadows. Conventional fluid delivery devices have gradually become the trend toward miniaturization of devices and maximization of flow rates.

In the prior art, the fluid transporting device is mainly constructed by stacking conventional mechanical components, and the miniaturization and thinning of the whole device are achieved by minimizing or thinning each mechanical component. However, after the miniaturization of the conventional machine components, the dimensional accuracy control is not easy, and the assembly accuracy is also difficult to control, resulting in different product yields and even unstable flow of the fluid.

Moreover, the conventional fluid transfer device also has a problem of insufficient delivery flow rate, which is difficult to cope with the demand for a large amount of fluid transmission through a single fluid transfer device, and the conventional fluid transfer device usually has a convex lead pin for energization connection. Therefore, if a plurality of conventional fluid transmission devices are to be arranged side by side to increase the transmission amount, the assembly precision is also difficult to control, the guiding pins are liable to cause obstacles in setting, and the external power supply lines are complicated to set up. It is difficult to increase traffic in this way, and the arrangement is less flexible.

Therefore, how to develop a technique that can improve the above-mentioned conventional technology can make the apparatus or equipment using the conventional fluid transmission device small, miniaturized and muted, and overcome the problem that the micro-size precision is difficult to control and the flow rate is insufficient, and can be flexibly utilized. The microfluidic transmission device of various devices is an urgent problem to be solved.

The main purpose of the present invention is to provide a micro-electromechanical fluid control device, which is formed by a micro-electromechanical process to integrally form a miniaturized fluid control device, so as to overcome the inability of the conventional fluid transport device to simultaneously reduce the size, miniaturization, and dimensional accuracy control. Insufficient traffic.

In order to achieve the above object, a generalized implementation of the present invention provides a microelectromechanical fluid control device comprising at least one flow guiding unit, the at least one flow guiding unit comprising: an inlet plate having at least one inlet hole a substrate; a resonant film, a suspension structure made by a surface micromachining technique, having a hollow hole and a plurality of movable portions; a uniform moving film, a hollow suspension structure made by a surface micromachining technique, having a plurality of a floating portion, an outer frame portion and at least one gap; a piezoelectric film attached to a surface of the floating portion of the actuating film; an exit plate having an exit hole; wherein the inlet plate and the base The material, the resonant film, the actuating film and the outlet plate are arranged in a corresponding manner, and a gap is formed between the resonant film and the actuating film of the flow guiding unit to form a first chamber, the actuating film Forming a second chamber between the outlet plate, and when the piezoelectric film of the flow guiding unit drives the actuation film, fluid enters the confluence chamber through the inlet hole of the inlet plate, and flows through the resonance The hollow hole of the membrane to enter the first Chamber, at least one void by the introduction of the second chamber, and finally derived from the outlet orifice of the outlet plate, thereby to control the flow of fluid.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The micro-electromechanical fluid control device of the present invention is an integrated miniaturized fluid control device manufactured by a micro-electromechanical process to overcome the inability of the conventional fluid transport device to simultaneously reduce the size, miniaturization, insufficient output flow, and poor control of dimensional accuracy. And other issues. First, please refer to FIG. 1 and FIG. 2 . FIG. 1 is a schematic diagram showing the appearance of a microelectromechanical fluid control device according to a first preferred embodiment, and FIG. 2 is a microelectromechanical fluid shown in FIG. 1 . Schematic diagram of the sectional structure of the control device. The MEMS fluid control device 1 of the present embodiment is a fluid control device manufactured by a microelectromechanical system (MEMS), which performs micro-machining of the surface of the material through dry and wet etching to form a unit. The molded microfluidic control device, in order to facilitate the description and the features of the protruding structure, decomposes the structure of the microelectromechanical fluid control device 1, which is not intended to illustrate that it is a detachable structure. As shown in the first and second embodiments, in the first embodiment, the MEMS fluid control device 1 is a rectangular flat plate structure, but not limited thereto, mainly by the inlet plate 17, the substrate 11, The resonant film 13, the actuating film 14, the plurality of piezoelectric films 15, and the outlet plate 16 are sequentially stacked, wherein the inlet plate 17 has an inlet hole 170, and the resonant film 13 has a hollow hole 130 and a plurality of movable portions 131. The resonant film 13 and the inlet plate 17 have a confluence chamber 12 (as shown in FIG. 3A). The actuation membrane 14 has a floating portion 141, an outer frame portion 142 and a plurality of gaps 143 (as shown in FIG. 3A). The outlet plate 16 has an outlet hole 160, but is not limited thereto. The structure, features and arrangement of the outlet plate 16 will be further described in the following paragraphs. The MEMS fluid control device 1 of the present embodiment is integrally formed by a micro-electromechanical system process (MEMS) technology, and has a small size and a thin shape, and does not need to be stacked as a conventional fluid control device, thereby avoiding difficulty in controlling the dimensional accuracy. The problem is that the quality of the finished product is stable and the yield is high.

The MEMS fluid control device 1 of the present embodiment passes through a plurality of inlet holes 170 of the inlet plate 17, a plurality of confluence chambers 12 of the substrate 11, a plurality of hollow holes 130 of the resonance film 13, and a plurality of movable portions 131, a plurality of floating portions 141 of the moving film 14 and a plurality of gaps 143, a plurality of piezoelectric films 15 and a plurality of outlet holes 160 to constitute a plurality of flow guiding units 10, in other words, each of the flow guiding units 10 includes a confluent chamber 12. A hollow hole 130, a movable portion 131, a floating portion 141, a gap 143, a piezoelectric film 15 and an exit hole 160, and the plurality of flow guiding units 10 share one inlet hole 170, but not For example, a gap g0 between the resonant film 13 of each flow guiding unit 10 and the actuating film 14 forms a first chamber 18 (as shown in FIG. 3A), and between the actuating film 14 and the outlet plate 16. A second chamber 19 is formed (as shown in Figure 3A). In order to facilitate the description of the structure and fluid control mode of the MEMS fluid control device 1, the following will be described by a single flow guiding unit 10. However, this is not to limit the single flow guiding unit 10, and multiple flow guiding units. 10 may comprise a plurality of micro-electromechanical fluid control devices 1 composed of a single flow guiding unit 10 of the same structure, the number of which may be varied depending on the actual situation. In other embodiments of the present disclosure, each of the flow guiding units 10 may also include an inlet hole 170, but is not limited thereto.

As shown in FIG. 1 , in the first preferred embodiment, the number of the plurality of flow guiding units 10 of the MEMS fluid control device 1 is 40, that is, the MEMS fluid control device 1 has 40 The unit for transporting the fluid separately, that is, as shown in FIG. 1 , each of the outlet holes 160 corresponds to each of the flow guiding units 10, and the 40 flow guiding units 10 are further arranged in a row of 20, and are arranged side by side in pairs. However, they are not limited to this. The quantity and arrangement can be changed according to the actual situation.

Referring to FIG. 2, in the present embodiment, the inlet plate 17 has an inlet hole 170 which is a hole penetrating through the inlet plate 17 for fluid circulation. The number of the inlet holes 170 in this embodiment is one. In some embodiments, the number of the inlet holes 170 may be one or more, but not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. In some embodiments, the inlet plate 17 may further include a filtering device (not shown), but not limited thereto, the filtering device is closed to the inlet hole 170 for filtering dust in the gas, or used for Impurities in the fluid are filtered to prevent impurities and dust from flowing into the interior of the microelectromechanical fluid control device 1 to damage the components.

Please refer to FIG. 2 and FIG. 3A at the same time. FIG. 3A is a partial enlarged structural diagram of a single flow guiding unit of a cross section of the MEMS fluid control device shown in FIG. 2 . As shown in the figure, in the present embodiment, the substrate 11 of the flow guiding unit 10 is made of Bulk Micromachining in a microelectromechanical process, and is a fluid inlet with a high aspect ratio. The structure, and because the mechanical properties of the crucible are similar to the Young's coefficient of steel, twice the height of the drop, and the density is only one-third of the steel, and the mechanical properties of the crucible are extremely stable, suitable for use in this dynamic micro-structure, However, they are not limited to this, and the materials may be changed according to the actual situation. In this embodiment, the substrate 11 further includes a driving circuit (not shown) for electrically connecting to the positive electrode and the negative electrode of the piezoelectric film 15 for providing a driving power source, but not limited thereto. In some embodiments, the driving circuit may be disposed at any position inside the fluid control device 1 of the MEMS, but it is not limited thereto, and may be changed according to actual conditions.

Continuing to refer to FIG. 2 and FIG. 3A, in the MEMS fluid control device 1 of the present embodiment, the resonant film 13 is a suspension structure made by surface micromachining, and the resonant film 13 further has The hollow hole 130 and the plurality of movable portions 131 each have a hollow hole 130 and a corresponding movable portion 131 thereof. In the flow guiding unit 10 of the present embodiment, the hollow hole 130 is disposed at the center of the movable portion 131, and the hollow hole 130 is a hole penetrating the resonant film 13 and communicates with the confluent chamber 12 and the first chamber 18 Between, for fluid circulation and transmission. The movable portion 131 of the present embodiment is a portion of the resonant film 13, which is a flexible structure and can be flexed up and down with the driving of the movable mold 14, thereby transmitting a fluid, and the actuating manner will be in the latter part of the specification. Further details.

Please refer to FIG. 2 and FIG. 3A. In the MEMS fluid control device 1 of the present embodiment, the actuating film 14 is formed by a thin film of a metal material or a polycrystalline silicon film, but not limited thereto. The movable film 14 is a hollow suspension structure made by surface micromachining. The actuating film 14 further has a floating portion 141 and an outer frame portion 142, and each flow guiding unit 10 has a floating portion 141. In the flow guiding unit 10 of the present embodiment, the floating portion 141 is connected to the outer frame portion 142 by a plurality of connecting portions (not shown) to suspend the floating portion 141 in the outer frame portion 142 and in the floating portion 141. A plurality of gaps 143 are defined between the outer frame portion 142 and the outer frame portion 142 for fluid circulation, and the manner, implementation, and quantity of the floating portion 141 and the outer frame portion 142 and the gap 143 are not limited thereto. The actual situation changes. In some embodiments, the floating portion 141 is a stepped surface structure, that is, the floating portion 141 further includes a convex portion (not shown), which may be, but is not limited to, a circular convex structure. The lower surface of the floating portion 141 is disposed through the convex portion to maintain the depth of the first chamber 18 at a specific interval value, thereby avoiding the movable portion of the resonant mold 13 caused by the depth of the first chamber 18 being too small. The problem that the 131 collides with the actuating film 14 during the resonance and generates noise can also avoid the problem that the fluid transmission pressure is insufficient due to the excessive depth of the first chamber 18, but is not limited thereto.

Continuing to refer to FIG. 2 and FIG. 3A, in the MEMS fluid control device 1 of the present embodiment, each of the flow guiding units 10 has a piezoelectric film 15, wherein the piezoelectric film 15 has a positive electrode and a positive electrode. A negative electrode (not shown) is used to drive the piezoelectric film actuation 14. In the flow guiding unit 10 of the present embodiment, the piezoelectric film 15 is a metal oxide film formed by a Sol-gel method, but not limited thereto, the piezoelectric film 15 is Attached to the upper surface of the floating portion 141 of the actuating film 14 for driving the reciprocating vibration of the actuating film 14 in the reciprocating vertical direction, and driving the resonant film 13 to resonate, thereby causing the resonant film 13 and the actuating film The first chamber 18 between 14 produces a pressure change for fluid transfer, the manner of which will be further detailed later in the specification.

Please refer to FIG. 1 to FIG. 3A. In the MEMS fluid control device 1 of the present embodiment, the outlet plate 16 further includes an outlet hole 160, and each of the flow guiding units 10 has an outlet hole 160. In the flow guiding unit 10 of the embodiment, the outlet hole 160 is connected between the second chamber 19 and the outside of the outlet plate 16 for the fluid to flow from the second chamber 19 through the outlet hole 160 to the outside of the outlet plate 16. , 俾 achieve fluid transfer. In some embodiments, the outlet plate 16 of the flow guiding unit 10 further includes a check valve (not shown), and the check valve is closedly disposed in the outlet hole 160 according to the pressure change of the second chamber 19. Turning on or off, thereby preventing fluid from flowing back into the second chamber 19 from the outside, but not limited thereto. In other embodiments, the outlet plate 16 of the flow guiding unit 10 further includes a filtering device (not shown). The filtering device is closed to the outlet hole 160 for filtering dust in the gas or for filtering the fluid. Impurities to prevent impurities and dust from flowing to the internal components of the micro-electromechanical fluid control device 1 to be damaged.

Please refer to FIG. 3A to FIG. 3E at the same time. FIG. 3B to FIG. 3E are partial schematic views showing the operation flow of the single flow guiding unit of the MEMS fluid control device shown in FIG. 3A. First, the flow guiding unit 10 of the microelectromechanical fluid control device 1 shown in Fig. 3A is in an unpowered state (i.e., an initial state), wherein a gap g0 is formed between the resonant film 13 and the actuating film 14 so that The depth of the gap g0 can be maintained between the resonant film 13 and the floating portion 141 of the actuating film 14, and the fluid can be guided to flow more rapidly, and the suspension portion 141 and the resonant film 13 are kept at an appropriate distance to reduce mutual contact interference. The noise generation can be reduced, but not limited to this.

As shown in FIGS. 2 and 3B, in the flow guiding unit 10, when the actuation film 14 is actuated by the voltage of the piezoelectric film 15, the suspension portion 141 of the actuation film 14 vibrates upward, so that the first chamber 18 is caused. When the volume is increased and the pressure is decreased, the fluid enters from the inlet hole 170 on the inlet plate 17 in accordance with the external pressure, and is collected at the confluence chamber 12 of the substrate 11, and is then disposed corresponding to the confluence chamber 12 via the resonance film 13. The central hole 130 flows upward into the first chamber 18.

Next, as shown in FIGS. 2 and 3C, and due to the vibration of the floating portion 141 of the actuating film 14, the movable portion 131 of the resonant film 13 is also resonated to vibrate upward, and the actuating film 14 is The floating portion 141 also vibrates downward at the same time, so that the movable portion 131 of the resonant film 13 is attached against the floating portion 141 of the actuating film 14, while closing the space in the middle of the first chamber 18, thereby making the first chamber 18 is compressed to make the volume smaller and the pressure increase, so that the volume of the second chamber 19 is increased and the pressure is reduced, thereby forming a pressure gradient, so that the fluid inside the first chamber 18 is pushed to flow to both sides, and A plurality of voids 140 of the moving film 14 flow into the second chamber 19.

Further, as shown in FIG. 2 and FIG. 3D, the floating portion 141 of the actuating film 14 continues to vibrate downward, and the movable portion 131 of the resonant film 13 is caused to vibrate downward to further compress the first chamber 18, and Most of the fluid is allowed to flow into the second chamber 19 for temporary storage for the next step to squeeze the fluid in large quantities.

Finally, as shown in FIGS. 2 and 3E, the floating portion 141 of the actuating film 14 vibrates upward, compressing the second chamber 19 to reduce the volume and pressure, and thereby making the fluid in the second chamber 19 The outlet hole 160 of the outlet plate 16 is led out to the outside of the outlet plate 16 to complete the transfer of the fluid, and since the floating portion 141 of the actuating film 14 vibrates upward, while the movable portion 131 of the resonant plate 13 vibrates downward, the first The volume of the chamber 18 is increased and the pressure is reduced, so that the fluid is again introduced by the inlet hole 170 on the inlet plate 17 in accordance with the external pressure, and is collected at the confluence chamber 12 of the substrate 11, and then passed through the resonance film 13 The central hole 130 corresponding to the confluence chamber 12 flows upward into the first chamber 18. The fluid transfer flow of the flow guiding unit 10 of the above-mentioned 3B to 3E is repeated, and the floating portion 141 of the actuating film 14 and the movable portion 131 of the resonant film 13 are continuously reciprocally vibrated up and down, and the fluid can be continuously entered. The port 170 continues to be directed toward the exit aperture 160 to effect fluid transfer.

In this way, the fluid control device 1 of the microelectromechanical device of the present embodiment generates a pressure gradient in the flow channel design of each flow guiding unit 10, so that the fluid flows at a high speed, and the impedance difference between the flow path and the flow direction is The suction end is transmitted to the discharge end, and under the condition that the discharge end is under pressure, the fluid is still capable of continuously pushing out the liquid, and the effect of mute can be achieved. In some embodiments, the vertical reciprocating vibration frequency of the resonant film 13 can be the same as the vibration frequency of the actuating film 14, that is, both can be simultaneously upward or downward, and the system can be changed according to actual application conditions. It is not limited to the mode of operation shown in this embodiment.

In the embodiment, the MEMS fluid control device 1 can cooperate with a plurality of arrangement designs and connection of the driving circuit through the 40 flow guiding units 10, and has high flexibility, and is applied to various electronic components, and Through 40 guiding units 10, fluid can be simultaneously transported, which can respond to large-flow fluid transmission requirements; in addition, each flow guiding unit 10 can also be individually controlled to operate or stop, for example, part of the flow guiding unit 10 is actuated, and A part of the flow guiding unit 10 is stopped, and the partial flow guiding unit 10 and the other part of the flow guiding unit 10 may alternately operate, but not limited thereto, thereby easily achieving various fluid transmission flow demands and achieving a large Reduce the power consumption.

Please refer to FIG. 4, which is a schematic diagram showing the appearance of a microelectromechanical fluid control device according to a second preferred embodiment of the present invention. In the second preferred embodiment of the present invention, the number of the plurality of flow guiding units 20 of the MEMS fluid control device 2 is 80, that is, each of the outlet holes 260 of the outlet plate 26 corresponds to each of the flow guiding units 20, In other words, the MEMS fluid control device 2 has 80 units for separately transporting fluids, and the structure of each of the flow guiding units 20 is similar to that of the first embodiment described above, and the difference lies only in the number and arrangement thereof, so that the structure is This will not be further described. In this embodiment, the 80 flow guiding units 20 are also arranged in a row of 20 rows, and are arranged side by side in four rows, but are not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. By simultaneously enabling the transfer of fluid through the 80 flow guiding units 20, a larger fluid transfer volume can be achieved compared to the previous embodiment, and each flow guiding unit 20 can also individually induce flow, which can control the flow rate of the fluid. The larger range makes it more flexible for use in a variety of devices that require large flow of fluids, but not limited to them.

Please refer to FIG. 5. FIG. 5 is a schematic diagram showing the appearance of a microelectromechanical fluid control device according to a third preferred embodiment of the present invention. In the third preferred embodiment of the present invention, the MEMS fluid control device 3 has a circular structure, and the number of the flow guiding units 30 is 40, that is, each of the outlet holes 360 of the outlet plate 36 corresponds to each A flow guiding unit 30, in other words, the microelectromechanical fluid control device 3 has 40 units for separately transporting fluids, and the structure of each flow guiding unit 30 is similar to that of the first embodiment described above, except for the number and arrangement thereof. The method is therefore not described here. In this embodiment, the 40 flow guiding units 30 are arranged in a ring-shaped arrangement, but the limitation is not limited thereto, and the number and arrangement thereof may be changed according to actual conditions. Through the annular array of 40 flow guiding units 30, it can be applied to various circular or annular fluid transmission channels. Through the change of the array mode of each flow guiding unit 30, it can be more flexibly applied to various fluid transmission devices according to various shapes required in the device. In other embodiments, the plurality of flow guiding units 30 may also be arranged in a honeycomb manner (not shown), but not limited thereto.

In summary, the MEMS fluid control device provided by the present invention is integrally formed by micro-electromechanical system process (MEMS) technology, and can achieve the functions of small size, thinness, and the like, and does not need to be stacked as a conventional fluid control device. It can avoid the problem that the dimensional accuracy is difficult to control, and the quality of the finished product is stable and the yield is high. In addition, actuating the membrane through the piezoelectric membrane enables the fluid to generate a pressure gradient in the designed flow passage and the pressure chamber, thereby allowing the fluid to flow at a high speed, and is quickly transferred from the inlet end to the outlet end to realize the fluid. Transmission. In addition, the volume of the diversion unit, the setting method and the flexible driving method can also achieve high transmission capacity, high efficiency and high flexibility in response to the demand of various devices and fluid transmission flows.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1, 2, 3‧ ‧ MEMS fluid control devices
10, 20, 30‧‧‧ diversion unit
11‧‧‧Substrate
12‧‧‧Confluence chamber
13‧‧‧Resonance film
130‧‧‧ hollow holes
131‧‧‧movable department
14‧‧‧Acoustic film
141‧‧‧Floating Department
142‧‧‧Outer frame
143‧‧‧ gap
15‧‧‧Piezoelectric film
16, 26, 36‧‧‧ export board
160, 260, 360‧‧‧ exit holes
17‧‧‧ entrance board
170‧‧‧ entrance hole
18‧‧‧ first chamber
19‧‧‧Second chamber
G0‧‧‧ gap

FIG. 1 is a schematic view showing the appearance of a microelectromechanical fluid control device according to a first preferred embodiment of the present invention. Fig. 2 is a schematic cross-sectional view showing the MEMS fluid control device shown in Fig. 1. Fig. 3A is a partially enlarged schematic view showing a single flow guiding unit of a cross section of the MEMS fluid control device shown in Fig. 2. 3B to 3E are partial schematic views showing the operation flow of a single flow guiding unit of the MEMS fluid control device shown in FIG. 3A. Fig. 4 is a schematic view showing the appearance of a microelectromechanical fluid control device according to a second preferred embodiment of the present invention. FIG. 5 is a schematic view showing the appearance of a microelectromechanical fluid control device according to a third preferred embodiment of the present invention.

1‧‧‧Micro-electromechanical fluid control device

10‧‧‧Guide unit

11‧‧‧Substrate

12‧‧‧Confluence chamber

13‧‧‧Resonance film

14‧‧‧Acoustic film

15‧‧‧Piezoelectric film

16‧‧‧Export board

160‧‧‧Exit hole

17‧‧‧ entrance board

170‧‧‧ entrance hole

Claims (9)

A microelectromechanical fluid control device comprising at least one flow guiding unit, the at least one flow guiding unit comprising: an inlet plate having at least one inlet hole; a substrate; a resonance film, being surface micromachining The suspension structure of the technology has a hollow hole and a plurality of movable portions, and the resonance film and the inlet plate have a confluence chamber; the uniform moving film is a hollow suspension structure made by the surface micromachining technology, Having a floating portion and an outer frame portion and at least one gap; a piezoelectric film attached to a surface of the floating portion of the actuating film; and an exit plate having an exit hole; wherein the inlet plate, The substrate, the resonant film, the actuating film and the outlet plate are arranged in a corresponding manner, and a gap is formed between the resonant film and the actuating film of the flow guiding unit to form a first chamber. A second chamber is formed between the movable membrane and the outlet plate. When the piezoelectric membrane of the flow guiding unit drives the actuation membrane, fluid enters the confluence chamber through the inlet aperture of the inlet plate and flows through The hollow hole of the resonance film to enter The first chamber is introduced into the second chamber by the at least one gap, and finally is led out of the outlet hole of the outlet plate, thereby controlling the circulation of the fluid. The MEMS fluid control device of claim 1, wherein the actuating film is a metal material film or a polysilicon film. The MEMS fluid control device of claim 1, wherein the piezoelectric film is a metal oxide film formed by a sol-gel method. The MEMS fluid control device of claim 1, wherein the MEMS fluid control device is a one-piece structure formed by a MEMS process. The MEMS fluid control device of claim 1, wherein the piezoelectric film further has a positive electrode and a negative electrode for driving the piezoelectric film to be actuated. The MEMS fluid control device of claim 1, wherein the number of the plurality of flow guiding units is 40, and 20 rows are arranged, and the two rows are arranged side by side. The MEMS fluid control device of claim 1, wherein the number of the plurality of flow guiding units is 80, and 20 rows are arranged, and the four rows are arranged side by side. The MEMS fluid control device of claim 1, wherein the plurality of flow guiding units are arranged in an annular manner. The MEMS fluid control device of claim 1, wherein the plurality of flow guiding units are arranged in a honeycomb manner.