CN109505759A - Air transporting arrangement - Google Patents

Abstract

This case provides a kind of air transporting arrangement, it is made of an at least flow guiding unit, an at least flow guiding unit includes access panel, substrate, sounding board, actuation membrane, piezoelectric element and exit plate sequentially stack setting, first chamber is defined between sounding board and actuation membrane, second chamber is defined between actuation membrane and exit plate, when piezoelectric element drives actuation membrane, gas is entered the confluence chamber of substrate by the access aperture of access panel, and flow through the hollow bore of sounding board, to enter in first chamber, and it is imported in second chamber by the gap of actuation membrane, finally exported by the outlet opening of exit plate, whereby to control the circulation of gas.

Description

Air transporting arrangement

[technical field]

This case be about a kind of air transporting arrangement, it is espespecially a kind of through miniature, slim and mute air transporting arrangement.

[background technique]

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the gas structure for conveying that micro- side Pu is included is its key technology, therefore how prominent by means of innovation structure Its technical bottleneck is broken, for the important content of development.

With making rapid progress for science and technology, air transporting arrangement using upper also more and more diversification, industrial application, life such as Cure application, health care, electronic radiation etc., or even the recently popular all visible Ta COPA shadow of wearable device, it is seen that tradition Air transporting arrangement had the tendency that gradually towards device microminiaturization, flow maximize.

In in the prior art, air transporting arrangement is mainly constituted with traditional mechanism part stacking, and with each machine Structure component minimization or the mode of thickness thinning, to achieve the purpose that single unit system micromation, slimming.However, traditional mechanism After microminiaturization, dimension control is not easy part, and assembly precision is equally difficult to control, and it is different in turn result in product yield, The problems such as instability of flow for even thering is gas to transmit.

Furthermore, it is known that charge delivery mechanism also there is the problem of feed flow deficiency, through pure gas transmitting device It is difficult to the demand transmitted in response to bulk gas, and known charge delivery mechanism usually has the foot that connects of evagination to connect for being powered Be used, if therefore be intended to multiple known charge delivery mechanisms be arranged side by side to improve transmission quantity, assembly precision is not equally easily-controllable System, connects the obstacle that foot be easy to cause setting, and it is complicated to also result in its external supply lines setting, therefore is still difficult to through this side Formula improves flow, and arrangement mode is also compared with can not flexibly use.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed charge delivery mechanism Device or equipment reach small in size, micromation and mute, and overcome the problems, such as miniature sizes precision be not easy to control, underfed, and The minitype gas transmitting device of various devices can flexibly be applied to, actually problem in the urgent need to address at present.

[summary of the invention]

The main purpose of this case is to provide a kind of air transporting arrangement, produce by micro electronmechanical processing procedure integrally formed micro- Type air transporting arrangement, with overcome traditional conveying device can not have both simultaneously it is small in size, micromation, dimensional accuracy control and The problem of underfed.

In order to achieve the above object, a broader implementation pattern of this case is to provide a kind of air transporting arrangement, by least one Flow guiding unit is constituted, and at least a flow guiding unit includes for this: an access panel, has an at least ingate；One substrate；One resonance Plate is suspension structure made of face type micro-processing technology, has a hollow bore and multiple movable parts；One actuation membrane is face type Hollow suspension structure made of micro-processing technology has multiple suspension portions, an outer frame and an at least gap；One piezoelectric element, It is attached at a surface in the suspension portion of the actuation membrane；One exit plate has an outlet opening；Wherein, the access panel, the substrate, The sounding board, the actuation membrane and the exit plate are sequentially corresponding stacking setting, the sounding board and the actuation membrane of the flow guiding unit Between have a gap formed a first chamber, a second chamber is formed between the actuation membrane and the exit plate, when the water conservancy diversion list When the piezoelectric element of member drives the actuation membrane, gas enters the confluence chamber by the ingate of the access panel, and flows through this The hollow bore of sounding board, to enter in the first chamber, and at least a gap is imported in the second chamber by this, finally by The outlet opening of the exit plate exports, whereby to control the circulation of gas.

[Detailed description of the invention]

Fig. 1 is the surface structure schematic diagram for the air transporting arrangement that this case is the first preferred embodiment.

Fig. 2 is the schematic diagram of the section structure of air transporting arrangement shown in FIG. 1.

Fig. 3 A is the single flow guiding unit partial enlargement structural representation of the section of air transporting arrangement shown in Fig. 2.

Fig. 3 B to Fig. 3 D is the single flow guiding unit actuation process partial schematic diagram of air transporting arrangement shown in Fig. 3 A.

Fig. 4 is the surface structure schematic diagram for the air transporting arrangement that this case is the second preferred embodiment.

Fig. 5 is the surface structure schematic diagram for the air transporting arrangement that this case is third preferred embodiment.

Fig. 6 is the surface structure schematic diagram for the air transporting arrangement that this case is the 4th preferred embodiment.

Fig. 7 A and Fig. 7 B are the illustrative view of the first, second and third state sample implementation of the valve of this case.

Fig. 8 A and Fig. 8 B are the illustrative view of the four, the 5th state sample implementations of the valve of this case.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.

The air transporting arrangement of this case is that integrally formed micromation air transporting arrangement is produced by micro electronmechanical processing procedure, to Overcoming traditional gas conveying device not have both simultaneously, small in size, micromation, output flow is insufficient and dimensional accuracy is controlled not The problems such as good.Firstly, please referring to Fig. 1, Fig. 2 and Fig. 3 A, in first embodiment, air transporting arrangement 1 includes by a spy The multiple flow guiding units 10 for determining arrangement mode setting form, and in this present embodiment, multiple flow guiding units 10 are the arrangement of 2 column, 10 row Mode forms the structure of a rectangular flat plate, these flow guiding units 10 separately included access panel 17, substrate 11, sounding board 13, The elements such as actuation plate 14, piezoelectric element 15 and exit plate 16, which sequentially stack, to be constituted, and wherein access panel 17 has ingate 170, sounding board 13 has hollow bore 130 and movable part 131, and confluence chamber is formed between sounding board 13 and the access panel 17 Room 12, actuation plate 14 have suspension portion 141, outer frame 142 and multiple gaps 143, and exit plate 16 has outlet opening 160, knot Structure, feature and set-up mode will be described in further detail in illustrating back segment.The present embodiment air transporting arrangement 1 can be MEMS The integrated molding of processing procedure (MEMS) technology is made, and dimension volume is small, is thinned, and is superimposed without such as traditional gas conveying device heap Work, avoidable dimensional accuracy are difficult to the problem of controlling, and institute's output quality of finished is stable and yield is higher.

The air transporting arrangement 1 of the present embodiment is through multiple ingates 170 of access panel 17, multiple confluences of substrate 11 Chamber 12, multiple hollow bores 130 of sounding board 13 and multiple movable parts 131, multiple suspension portions 141 of actuation plate 14 and multiple Gap 143, multiple piezoelectric elements 15 and multiple outlet openings 160 are to constitute multiple flow guiding units 10, in other words, each water conservancy diversion list Member 10 includes a movable part of hollow bore 130, one of confluence chamber 12, one 131, suspension portions 141, a gaps 143, a piezoelectric element 15 and one outlet hole 160, and multiple flow guiding units 10 be share an ingate 170, but not with This is limited, and between the sounding board 13 and actuation plate 14 of each flow guiding unit 10 there is a gap g0 to form first chamber 18 (such as Shown in Fig. 3 A) and actuation plate 14 and exit plate 16 between formed second chamber 19 (as shown in Figure 3A).Gas for convenience of description The structure and gas control mode of body conveying device 1, following the description will be illustrated with single flow guiding unit 10, so this it is non-to Limitation this case only has single flow guiding unit 10, and multiple flow guiding units 10 may include multiple mutually isostructural single flow guiding units 10 Formed air transporting arrangement 1, quantity can appoint Shi Bianhua according to practical situation.It is each in other embodiments of this case A flow guiding unit 10 also may include an ingate 170, and but not limited to this.

As shown in Figure 1, in the first preferred embodiment, the quantity of multiple flow guiding units 10 of air transporting arrangement 1 be for 40, imply that air transporting arrangement 1 has 40 units that can individually transmit gas, i.e., as shown in Figure 1, each outlet opening 160 Each flow guiding unit 10 is corresponded to, and 40 flow guiding units 10 are arranged side by side more with 20 for a line with corresponding two-by-two, but It is not limited, quantity, arrangement mode all can appoint Shi Bianhua according to practical situation.

Referring to Fig. 2, in this present embodiment, it is the hole always to penetrate oralia 17 that access panel 17, which has ingate 170, Hole is circulated with supplied gas, 170 quantity of ingate of the present embodiment be 1.In some embodiments, 170 quantity of ingate Also it can be 1 or more, but be not limited, quantity and set-up mode can appoint Shi Bianhua according to practical situation.In some realities Apply in example, access panel 17 more may include filter device (non-schema), and but not limited to this, the filter device be closing be set into Oral pore 170 filtering the dust in gas, or to filter the impurity in gas, flow to gas to avoid impurity, dust The inside of conveying device 1 makes damaging components.

In this present embodiment, substrate 11 further includes one drive circuit (not shown), to piezoelectric element 15 anode and Cathode is electrically connected, and to provide driving power, but not limited to this.In some embodiments, driving circuit also be may be disposed at Any position inside air transporting arrangement 1, but not limited to this, can appoint Shi Bianhua according to practical situation.

Please continue to refer to Fig. 2 and Fig. 3 A, in the gas gas conveying device 1 of the present embodiment, sounding board 13 is to suspend Structure, sounding board 13 have more hollow bore 130 and multiple movable parts 131, and each flow guiding unit 10 all have one it is hollow Hole 130 and its corresponding movable part 131.In the flow guiding unit 10 of the present embodiment, hollow bore 130 is that be set to can At the center in dynamic portion 131, and hollow bore 130 runs through the hole of sounding board 13 for one, and is connected to confluence chamber 12 and first Between chamber 18, is circulated and transmitted with supplied gas.The movable part 131 of the present embodiment is for the part of sounding board 13, and being one can The structure scratched, and can the upper and lower bending vibration with the driving of actuating mould 14, whereby to transmit gas, making flowing mode will be in saying Bright book back segment is described in further detail.

Please continue to refer to Fig. 2 and Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, actuation plate 14 is for a metal material Material film or polysilicon membrane are constituted, and but not limited to this, which is hollow suspension structure, and actuation plate 14 has more Suspension portion 141 and outer frame 142, and each flow guiding unit 10 all has a suspension portion 141.In the flow guiding unit of the present embodiment In 10, suspension portion 141 is to be connected to outer frame 142 with multiple interconnecting pieces (not shown), so that suspension portion 141 is suspended in outline border In portion 142, and multiple gaps 143 are defined between suspension portion 141 and outer frame 142, circulate to supplied gas, and suspension portion 141 and outer frame 142 and the set-up mode in gap 143, state sample implementation and quantity be not limited, can become according to practical situation Change.In some embodiments, suspension portion 141 is to imply that suspension portion 141 further includes a protrusion and (do not scheme for the structure of a cascaded surface Show), which can be but not be limited to a circular protrusions structure, be set to the lower surface in suspension portion 141, and through the setting of protrusion So that the depth of first chamber 18 is maintained at a specific sections value, can avoid causing because the depth of first chamber 18 is too small altogether whereby The movable part 131 of vibration plate 13 leads to the problem of collision with actuation plate 14 when being resonated, generates noise, also can avoid because of first The depth of chamber 18 excessive the problem of leading to gas transport insufficient pressure, but not limited to this.

Please continue to refer to Fig. 2 and Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, each flow guiding unit 10 is all had One piezoelectric element 15, piezoelectric element 15 is the upper surface for being attached at the suspension portion 141 of actuation plate 14, and piezoelectric element 15 has more Have an anode and a cathode (not shown), be for electrically connecting to, enable between the voltage source 15 receive voltage after generation type become, to drive The reciprocating vibration of dynamic actuation plate 14 reciprocally vertical direction, and sounding board 13 is driven to generate resonance, make sounding board 13 whereby First chamber 18 between actuation plate 14 generates pressure change, and with the transmission of supplied gas, making flowing mode will be after specification Section is described in further detail.

Please continue to refer to Fig. 1 to Fig. 3 A, in the air transporting arrangement 1 of the present embodiment, exit plate 16 further includes outlet opening 160, and each flow guiding unit 10 all has one outlet hole 160.In the flow guiding unit 10 of the present embodiment, outlet opening 160 is It is connected between 16 outside of the second chamber 19 and exit plate, outlet is flow to through outlet opening 160 by second chamber 19 with supplied gas Outside plate 16, in order to the transmission for realizing gas.

Please refer to Fig. 3 A to Fig. 3 D, Fig. 3 B to Fig. 3 D is the single flow guiding unit of air transporting arrangement shown in Fig. 3 A 10 actuation process partial schematic diagrams.Firstly, the flow guiding unit 10 of air transporting arrangement 1 shown in Fig. 3 A is the state of non-enable (i.e. original state) is wherein with gap g0, so that sounding board 13 and actuation plate 14 between sounding board 13 and actuation plate 14 Can maintain the depth of gap g0 between suspension portion 141, and then gas can be guided and more quickly flowed, and because suspension portion 141 with Sounding board 13 keeps suitable distance to make the interference reduction that is in contact with each other, and promotes noise generation that can be lowered, but not limited to this.

As shown in Fig. 2 and Fig. 3 B, in flow guiding unit 10, when the application voltage of piezoelectric element 15, make actuation plate 14 by piezoelectricity When the driving actuating of element 15, the suspension portion 141 of actuation plate 14 vibrates upwards, reduces the increase of 18 volume of first chamber, pressure, then Gas is complied with external pressure by the ingate 170 on access panel 17 and is entered, and is pooled at the confluence chamber 12 of substrate 11, then pass through It is flowed upwardly by the central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 into first chamber 18.Then, as schemed Shown in 2 and Fig. 3 C, and the drive of the vibration of the suspension portion 141 due to being actuated plate 14, make the movable part 131 of sounding board 13 also with Resonance and vibrate upwards, and the suspension portion 141 of actuation plate 14 also simultaneously downwards vibration, paste the movable part 131 of sounding board 13 In the attached suspension portion 141 for contacting at actuation plate 14, the space of 18 middle flow of first chamber is simultaneously closed off, makes the first chamber whereby Room 18 is compressed and volume is made to become smaller, pressure increases, and so that the increase of 19 volume of second chamber, pressure is become smaller, and then form barometric gradient, It pushes the gas inside first chamber 18 to flow to two sides, and flows into second chamber via multiple gaps 140 of actuation plate 14 In 19.

For another example shown in Fig. 2 and Fig. 3 D, the suspension portion 141 of actuation plate 14 continues to vibrate downwards, and drive sounding board 13 can Dynamic portion 131 with downward vibration, compress first chamber 18 further, and flow to most gas in second chamber 19 temporarily It deposits,

Finally, actuation plate 14 suspension portion 141 upwards vibrate, make second chamber 19 compress and volume becomes smaller, pressure becomes larger, And then it is external to exit plate 16 to export the gas in second chamber 19 from the outlet opening 160 of exit plate 16, to complete gas Transmission, so repeat actuation shown in Fig. 3 B, increase the volume of first chamber 18, pressure reduces, and then make gas again External pressure entrance is complied in the secondary ingate 170 by access panel 17, and is pooled at the confluence chamber 12 of substrate 11, then via The central hole 130 being correspondingly arranged on sounding board 13 with confluence chamber 12 is flowed upwardly into first chamber 18.By repetition is above-mentioned The gas transport of the flow guiding unit 10 of Fig. 3 B to Fig. 3 D flows, and makes the suspension portion 141 of actuation plate 14 and the movable part of sounding board 13 131 are persistently reciprocally vibrated up and down, sustainable that gas is continued exit hole 160 by inlet port 170, in order to realization The transmission of gas.

In this way, which the air transporting arrangement 1 via the present embodiment generates in the runner design of each flow guiding unit 10 Barometric gradient makes gas flow at high rates, and through the resistance difference in runner disengaging direction, gas is transmitted to discharge by suction side End, and in the state that outlet side has pressure, it still has the ability to continue pushing out gas, and can reach mute effect.In some realities It applies in example, the vertical reciprocating type vibration frequency of sounding board 13 is can be identical as the vibration frequency of actuation plate 14, i.e., the two can be simultaneously It is upwards or downward simultaneously, it is that can appoint Shi Bianhua according to situation is actually applied, not to make flowing mode shown in the present embodiment It is limited.

In this present embodiment, air transporting arrangement 1 can cooperate the design of various arrangement mode through 40 flow guiding units 10 And the connection of driving circuit, flexibility ratio is high, is more applied in various electronic component, and penetrate 40 flow guiding units 10 Can simultaneously enable transmit gas, can be in response to the gas transport demand of big flow；In addition, each flow guiding unit 10 also can be controlled separately Actuation or stopping, such as: 10 actuation of part flow guiding unit, another part flow guiding unit 10 stop, and can also be part water conservancy diversion lists Member 10 replaces running with the flow guiding unit 10 of another part, but is not limited, and can be easily achievable various gas transports whereby The demand of flow, and can reach the effect of power consumption is greatly reduced.

Referring to Fig. 4, Fig. 4 is the surface structure schematic diagram for the air transporting arrangement that this case is the second preferred embodiment.In In the second preferred embodiment of this case, the quantity of multiple flow guiding units 20 of air transporting arrangement 2 be 80, arrangement mode is I.e. each outlet opening 260 of exit plate 26 corresponds to each flow guiding unit 20, and in other words, air transporting arrangement 2 has 80 Can individually transmit the unit of gas, the structure of each flow guiding unit 20 be it is similar in aforementioned first embodiment, difference is only that it Mode is arranged in quantity, therefore its structure does not repeat further in this.80 flow guiding units 20 of the present embodiment are also with 20 A line is arranged side by side so that four rows are corresponding, but is not limited, and quantity, arrangement mode can all appoint according to practical situation applies change Change.Gas is transmitted through the enable simultaneously of 80 flow guiding units 20, can reach the gas transport amount bigger compared to previous embodiment, And each flow guiding unit 20 also can independent enable water conservancy diversion, can control the range of gas transport flow bigger, answer its more flexible For in the various device for needing big flow gas transport, but it is not limited.Multiple flow guiding units 20 of air transporting arrangement 2 Quantity be 20, arrangement mode may respectively be a line concatenation be arranged or one column concatenation be arranged.

Referring to Fig. 5, Fig. 5 is the surface structure schematic diagram for the air transporting arrangement that this case is third preferred embodiment.In In this case third preferred embodiment, air transporting arrangement 3 is for a circular configuration, and it is 40 that the quantity of its flow guiding unit 30, which is, A, i.e., each outlet opening 360 of exit plate 36 corresponds to each flow guiding unit 30, and in other words, air transporting arrangement 3 has 40 can individually transmit the unit of gas, the structure of each flow guiding unit 30 be it is similar in aforementioned first embodiment, difference only exists In its quantity, mode is arranged, therefore its structure does not repeat further in this.40 flow guiding units 30 of the present embodiment are with ring The mode of type arrangement is arranged, and but not limited to this, and quantity, arrangement mode all can appoint Shi Bianhua according to practical situation.Through 40 A 30 annular array of flow guiding unit makes it can be applied to various round or annular gas transmission channel.Through each flow guiding unit 30 array manner variation can keep its more flexible and pass applied to various gas in response to required various shape in demand device In defeated device.

Referring to Fig. 6, Fig. 6 is the surface structure schematic diagram for the air transporting arrangement that this case is the 4th preferred embodiment.In In the 4th preferred embodiment of this case, the flow guiding unit 40 of air transporting arrangement 4 is that honeycomb mode arranges.

Please continue to refer to Fig. 2 and Fig. 3 A, the air transporting arrangement 1 of this case has further included at least a valve 5, valve 5 and may be disposed at The ingate 170 of air transporting arrangement 1 or outlet opening 160, or it is set to ingate 170 and outlet opening 160 simultaneously.

Fig. 7 A and Fig. 7 B is please referred to, the first state sample implementation of valve 5 is to include a holder 51, a sealing element 52 and a valve Piece 53.Valve block 53 is set between holder 51 and sealing element 52 and is formed by accommodating space 55, has extremely on holder 51 Few two ventholes 511, and corresponding 51 upper vent hole of holder, 511 position of valve block 53 is also provided at least two ventholes 531, protects The venthole 511 of gripping member 51 and the venthole 531 of valve block 53, position be substantially be mutually aligned and sealing element 52 be equipped with extremely A few venthole 521, and the position of the venthole 511 of the venthole 521 of sealing element 52 and holder 51 formed dislocation without Alignment.

Please continue to refer to Fig. 7 A and Fig. 7 B, in this first embodiment pattern, valve 5 may be disposed at the ingate of access panel 17 170；When 1 enable of air transporting arrangement, gas is imported inside air transporting arrangement 1 by the ingate 170 of access panel 17, this When, form suction inside air transporting arrangement 1, valve block 53 can as shown in Figure 7 B, air-flow in the direction of the arrow and will be on valve block 53 It pushes away, causes 53 contact of valve in holder 51, while opening the venthole 521 of sealing element 52, gas can be by the ventilation of sealing element 102 Hole 102a is imported, since the position of the venthole 531 of valve block 53 is substantially aligned with the venthole 511 of holder 51, therefore venthole 531 can mutually connect with 511, flow up air-flow, into air transporting arrangement 1.When the actuating of air transporting arrangement 1 When plate 14 vibrates downwards, the volume of first chamber 18 is further compressed, gas is made to flow upwardly into second chamber through gap 143 19, while the valve block 53 of valve 5 is pushed by gas, and then restores the work of the venthole 521 of closed Sealing 52 as shown in Figure 7 A It is dynamic, formed gas one it is unidirectional flow into confluence chamber 12, and gas is accumulated in confluence chamber 12, such gas conveying dress Set 1 actuation plate 14 upwards vibrate when, can be obtained more gas and be discharged by outlet opening 160, with the output of lift gas amount.

Holder 51, sealing element 52 and the valve block 53 of this case valve 5 can be made by grapheme materials, to form micromation Valve member.And in the second embodiment aspect of this case valve 5, valve block 53 is an electrically charged material, and holder 51 is a bipolarity Conductive material.Holder 51 is electrically connected a control circuit (not shown), pole of the control circuit to control holder 51 Property (positive electrical polarity or negative electricity polarity).If valve block 53 is a negatively charged material, when the 5 controlled unlatching of palpus of valve, control circuit It controls holder 51 and forms a positive electrode, valve block 53 and holder 51 maintain opposed polarity at this time, so valve block 53 can be made towards guarantor Gripping member 51 is close, constitutes the unlatching (as shown in Figure 7 B) of valve 5.Conversely, if valve block 53 is a negatively charged material, when 5 palpus of valve When controlled closing, control circuit controls holder 51 and forms a negative electrode, and valve block 53 and holder 51 maintain identical polar at this time, Keep valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 7 A) of valve 5.

In the 3rd embodiment aspect of this case valve 10, valve block 5 is a magnetic material, and holder 51 be one can be by Control the magnetic material of reverse.Holder 51 is electrically connected a control circuit (not shown), which protects to control The polarity (positive or negative pole) of gripping member 51.If valve block 53 is a magnetic material with cathode, when the 5 controlled unlatching of palpus of valve, keep Part 51 forms the magnetism of an anode, and control circuit control valve block 53 and holder 51 maintain opposed polarity at this time, makes 53 court of valve block Holder 51 is close, constitutes the unlatching (as shown in Figure 7 B) of valve 5.Conversely, working as valve if valve block 53 is a magnetic material with cathode When the 5 controlled closing of palpus, holder 51 forms the magnetism of a cathode, and control circuit control valve block 53 and holder 51 maintain at this time Identical polar keeps valve block 53 close towards sealing element 52, constitutes the closing (as shown in Figure 7 A) of valve 5.

Fig. 8 A and Fig. 8 B is please referred to, is the illustrative view of the 4th state sample implementation of the valve of this case.As shown in figure Fig. 8 A, Valve 5 includes a holder 51, a sealing element 52 and a flexible membrane 54.There are at least two ventholes 511 on holder 51, keep An accommodating space 55 is kept between part 51 and sealing element 52.Flexible membrane 54 is to be attached at holder made by a flexible material 51 one side and be placed in accommodating space 55, and corresponding 51 upper vent hole of holder, 511 position is also provided at least two ventilations Hole 541, the venthole 511 of holder 51 and the venthole 541 of flexible membrane 54, position are substantially to be mutually aligned.And sealing Part 52 is equipped with the position shape of at least one venthole 521 and the venthole 511 of the venthole 521 and holder 51 of sealing element 52 It is misaligned at dislocation.

Please continue to refer to Fig. 8 A and Fig. 8 B.This case valve 5 with the 4th good embodiment implement, holder 51 be one be heated it is swollen Swollen material, and it is electrically connected a control circuit (not shown), the control circuit is heated to control holder 51.When 5 palpus of valve When controlled unlatching, control circuit controls the not expanded by heating of holder 51, and holder 101 and sealing element 102 is made to keep accommodating space 55 spacing constitutes the unlatching (as shown in Figure 8 A) of valve 5.Conversely, when the 5 controlled closing of palpus of valve, control circuit controls holder 51 Expanded by heating, and holder 51 is driven to contradict towards sealing element 52, flexible membrane 54 can be with the ventilation of closely connected closed Sealing 52 at this time Hole 521 constitutes the closing (as shown in Figure 8 B) of valve 5.

Please continue to refer to Fig. 8 A and Fig. 8 B, this case valve 5 is with the implementation of the 5th embodiment, and wherein the holder 51 is a piezoresistive material Material, controls its deformation by a control circuit (not shown).When the 5 controlled unlatching of palpus of valve, to enable the holder 51 not by deformation, make Holder 101 and sealing element 102 keep the spacing of accommodating space 55, constitute the unlatching (as shown in Figure 8 A) of the valve 5.Conversely, working as When the 5 controlled closing of palpus of valve, control circuit controls holder 51, to enable the holder 51 be driven holder 51 close towards this by deformation Sealing 52 contradicts, and flexible membrane 54 constitutes closing (such as Fig. 8 B of the valve 5 with the closely connected venthole 521 for closing the sealing element 52 at this time It is shown).Certainly, the holder 51 of each interval block corresponding to multiple ventholes 521 of sealing element 52, can also be the independently-controlled Circuit control processed, formed can modulation valve 5 circulation actuation, reach the adjustment effect of appropriate gas flow.

In conclusion air transporting arrangement provided by this case includes multiple flow guiding units, carried out through flow guiding unit Actuation is generated barometric gradient, flows gas quickly, and these flow guiding units are arranged using specific arrangement mode, is used To control and adjust the conveying of gas transport amount gas.In addition, through the carry out actuation of piezoelectric element enable actuation plate, make gas in Barometric gradient is generated in runner and pressure chamber after design, and then makes gas flow at high rates, is quickly transferred to out by upstream end Mouth end, in order to the transmission for realizing gas.Furthermore this case also penetrates the flexible of the quantity of flow guiding unit, set-up mode and driving method Variation, can reach high-transmission amount, high-effect, high flexibility etc. in response to the demand of various different devices and gas transport flow Effect.What is more, this case penetrates the setting of valve, so that gas is demonstrate,proved efficient concentration, and accumulate gas in the chamber of finite volume, The effect of reaching lift gas output quantity.

This case appointed as person familiar with the technology apply craftsman think and be it is all as modify, it is so neither de- such as attached claim Be intended to Protector.

[symbol description]

1,2,3,4: gas gas conveying device

5: valve

10,20,30: flow guiding unit

11: substrate

12: confluence chamber

13: sounding board

130: hollow bore

131: movable part

14: actuation plate

141: suspension portion

142: outer frame

143: gap

15: piezoelectric element

16,26,36: exit plate

160,260,360: outlet opening

17: access panel

170: ingate

18: first chamber

19: second chamber

G0: gap

5: valve

51: holder

52: sealing element

53: valve block

54: flexible membrane

511,521,531,541: venthole

55: accommodating space

Claims (12)

1. a kind of air transporting arrangement, characterized by comprising:

Multiple flow guiding units, the flow guiding unit, separately include:

One access panel has an at least ingate；

One substrate；

One sounding board has a hollow bore, and has a confluence chamber between the sounding board and the access panel；

One actuation plate has a suspension portion and an outer frame and an at least gap；

One piezoelectric element is attached at a surface in the suspension portion of the actuation plate；And

One exit plate has an outlet opening；And

The ingate and the outlet opening at least one is arranged in an at least valve；

Wherein, the access panel, the substrate, the piezoelectric board, the actuation plate and the exit plate are sequentially corresponding stacks setting, the sounding board And between the actuation plate there is a gap to form a first chamber, a second chamber is formed between the actuation plate and the exit plate, The piezoelectric element drives the actuation plate to generate flexural resonance, so that the first chamber and the second chamber form a pressure difference, and An at least valve is opened, gas is allowed to enter the confluence chamber by the ingate of the access panel and is flowed through in this of the piezoelectric board Hollow bore, to enter in the first chamber, and at least a gap imports in the second chamber by this, finally being somebody's turn to do by the exit plate Outlet opening export, is arranged multiple flow guiding unit by a particular arrangement mode to transmit gas.

2. air transporting arrangement as described in claim 1, which is characterized in that the particular arrangement mode is a line concatenation arrangement.

3. air transporting arrangement as described in claim 1, which is characterized in that the particular arrangement mode is a column concatenation arrangement.

4. air transporting arrangement as described in claim 1, which is characterized in that the particular arrangement mode is ring style arrangement.

5. air transporting arrangement as described in claim 1, which is characterized in that particular arrangement mode is that honeycomb mode arranges.

6. air transporting arrangement as described in claim 1, which is characterized in that the valve includes a holder, a sealing element and one Valve block wherein keeps an accommodating space between the holder and the sealing element, which is set in the accommodating space, the holding There are at least two ventholes on part, and the ventilation hole site that the valve block corresponds to the holder sets venthole, the holder The ventilation hole site of the venthole and the valve block be substantially be mutually aligned and the sealing element be equipped at least one ventilate Hole, and be to form dislocation to be misaligned with the ventilation hole site of the holder.

7. air transporting arrangement as described in claim 1, which is characterized in that the valve includes a holding made of graphene material Part, a sealing element and a valve block, wherein keep an accommodating space between the holder and the sealing element, which is set to the appearance In between emptying, on the holder have at least two ventholes, and the valve block correspond to the holder the ventilation hole site set it is logical The ventilation hole site of stomata, the venthole of the holder and the valve block be substantially be mutually aligned and the sealing element on set There is at least one venthole, and is to form dislocation to be misaligned with the ventilation hole site of the holder.

8. air transporting arrangement as claimed in claims 6 or 7, which is characterized in that the valve block is an electrically charged material, and is somebody's turn to do Holder is a dipolar conductive material, its polarity is controlled by a control circuit, when the valve block is different from holder maintenance Polarity chron, the valve block is close towards the holder, constitutes the unlatching of the valve；When the valve block and the holder maintain identical polar, The valve block is close towards the sealing element, constitutes the closing of the valve.

9. air transporting arrangement as claimed in claims 6 or 7, which is characterized in that the valve block is a magnetic material, and is somebody's turn to do Holder be one can the polar magnetic material of controlled conversion, its polarity is controlled by a control circuit, when the valve block and the holder When maintaining opposed polarity, the valve block is close towards the holder, constitutes the unlatching of the valve；When the valve block is identical as the holder maintenance Polarity chron, the valve block is towards the sealing element, close to the closing for constituting the valve.

10. air transporting arrangement as described in claim 1, which is characterized in that the valve includes a holder, a sealing element and one Flexible membrane, wherein maintains an accommodating space between the holder and the sealing element and the flexible membrane is attached at the holder On one surface, and it is arranged and is located in the accommodating space, and there are at least two ventholes on the holder, and the flexible membrane is corresponding The ventilation hole site of the holder sets venthole, and the venthole of the holder and the ventilation hole site of the flexible membrane are big Cause is mutually aligned and the sealing element is equipped at least one venthole, and is to be formed with the ventilation hole site of the holder Dislocation is misaligned.

11. air transporting arrangement as claimed in claim 10, which is characterized in that the holder is the material of a thermal expansion, by One control circuit controls it and is heated, and when the holder expanded by heating, which contradicts towards the sealing element, to close the sealing An at least venthole for part, constitutes the closing of the valve；When the holder not expanded by heating, the sealing element and the holder it Between keep the spacing of the accommodating space, constitute the unlatching of the valve.

12. air transporting arrangement as claimed in claim 11, which is characterized in that the holder is a piezoelectric material, by a control Its deformation of circuit control processed, when the holder is by deformation, which contradicts towards the sealing element, to close being somebody's turn to do for the sealing element An at least venthole constitutes the closing of the valve；When the holder is not by deformation, keeping between the sealing element and the holder should The spacing of accommodating space constitutes the unlatching of the valve.