CN101328576A - Vacuum film coating equipment and atmosphere turntable therefor - Google Patents
Vacuum film coating equipment and atmosphere turntable therefor Download PDFInfo
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- CN101328576A CN101328576A CNA200710075141XA CN200710075141A CN101328576A CN 101328576 A CN101328576 A CN 101328576A CN A200710075141X A CNA200710075141X A CN A200710075141XA CN 200710075141 A CN200710075141 A CN 200710075141A CN 101328576 A CN101328576 A CN 101328576A
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Abstract
The invention discloses vacuum coating equipment, which comprises a vacuum coating chamber used to carry out vacuum coating of a workpiece, an atmosphere return cabin and an atmosphere turntable, wherein an inlet of the atmosphere return cabin is close to an outlet of the vacuum coating chamber, while an outlet of the atmosphere return cabin is close to an inlet of the vacuum coating chamber; the atmosphere turntable is close to the outlet of the vacuum coating chamber and the inlet of the atmosphere return cabin; moreover, the atmosphere turntable comprises a rotary mechanism, a third movable mechanism used to carry a workpiece support from the vacuum coating chamber to the atmosphere turntable and a fourth movable mechanism used to carry the workpiece support from the atmosphere turntable to the inside of the atmosphere return cabin; and the third movable mechanism and the fourth movable mechanism rotates along with the rotary mechanism so as to exchange positions. The vacuum coating equipment adopts the atmosphere turntable to reclaim coated workpiece, and has small land occupation, quick reclaiming tempo and low requirements on transmission accuracy and sealing so as to be beneficial to equipment maintenance.
Description
Technical field
The present invention relates to a kind of vacuum coating film equipment and be used for the atmosphere turn around table of this equipment.
Background technology
Owing to when some products such as glass are carried out plated film, need guarantee the purification of Working environment, therefore, the existing coating film production line for example decoration form of ITO continuous vacuum coating production line normally adopts from load between cleansing operation, finish plated film through vacuum coating film equipment, return unloading piece between cleansing operation again.Expensive because of between cleansing operation all designed load and unloading piece between a cleansing operation usually, and this requires the turn back operation room of load of workpiece behind plated film, the corresponding vacuum coating film equipment formula of also all turning back.The existing formula vacuum coating film equipment that turns back mainly comprises dual mode: (1) vacuum double-sided coating+outlet translation+atmosphere returns frame; (2) vacuum coating single side+vacuum rotates back to frame.
For first kind of mode, its vacuum coating film equipment comprises that platform is reclaimed in vacuum double-sided coating chamber, translation and atmosphere goes back to the storehouse; Workpiece to be plated such as glass substrate are from the vacuum double-sided coating chamber of packing between cleansing operation, work rest loads workpiece to be plated and moves in vacuum film coating chamber, plated film is carried out to workpiece to be plated in vacuum double-sided coating chamber, when plated film finishes, work rest to be plated moves to translation and reclaims platform and join with work rest that translation is reclaimed on the platform, the workpiece of plated film is transferred to translation from vacuum film coating chamber and is reclaimed platform, translation reclaim the work rest that loaded the workpiece of plated film in the platform from the position translation of joining with vacuum film coating chamber to going back to the position that the storehouse joins with atmosphere, atmosphere goes back to the storehouse does not need to be designed to vacuum environment, but need be high environment purification, the workpiece of plated film reclaims platform from translation and transfers to atmosphere and go back to the storehouse and go back to the storehouse from atmosphere and go back to unloading piece between same cleansing operation.
For the second way, its vacuum coating film equipment comprises first vacuum film coating chamber, second vacuum film coating chamber and vacuum turn around table, workpiece to be plated begins plated film and mobile therein from entering first vacuum film coating chamber between cleansing operation, finish the part of filming process, after arriving the vacuum turn around table, the vacuum turn around table is transferred to workpiece with the first vacuum film coating chamber almost parallel but the second opposite vacuum film coating chamber of traffic direction from first vacuum film coating chamber, continue plated film, workpiece turns back between cleansing operation behind the plated film in second vacuum film coating chamber.
Above dual mode respectively has its defective, and first kind of mode is owing to adopt translation to reclaim platform, and not only floor space is big for it, and productive temp is lower, usually all greater than 100s/pitch.The second way adopts the vacuum turn around table, and the vacuum turn around table needs vacuum environment, and all needs vacuum-sealing with first vacuum film coating chamber, second vacuum film coating chamber, so it is very high to transmission accuracy and vacuum-sealing requirement, has increased manufacturing and maintenance difficulties.
Summary of the invention
In order to solve the problems of the technologies described above, the present invention proposes a kind of vacuum coating film equipment and be used for the atmosphere turn around table of this equipment, not only improve productive temp, and reduced transmission accuracy and seal request, be more conducive to safeguard.
To achieve these goals, the present invention has adopted following technical scheme:
A kind of vacuum coating film equipment, comprise the vacuum film coating chamber that is used for workpiece is carried out vacuum plating, being positioned at vacuum plating indoor being used for will be used to carry the work rest transportation of workpiece and pass first travel mechanism of vacuum film coating chamber, atmosphere goes back to the storehouse and is positioned at atmosphere and goes back to the storehouse and be used for and will be used to carry the work rest transportation of workpiece and pass second travel mechanism that atmosphere goes back to the storehouse, the traffic direction of described first travel mechanism and second travel mechanism is opposite, and it is close that atmosphere returns the outlet of the inlet in storehouse and vacuum film coating chamber, it is close that atmosphere returns the inlet of the outlet in storehouse and vacuum film coating chamber, also comprise the atmosphere turn around table, described atmosphere turn around table is near the outlet of vacuum film coating chamber and the inlet that atmosphere goes back to the storehouse, described atmosphere turn around table comprises rotating mechanism, be used for work rest is transported to the 3rd travel mechanism on the atmosphere turn around table and is used for that work rest is transported to atmosphere from the atmosphere turn around table from vacuum film coating chamber going back to the 4th travel mechanism in the storehouse, described the 3rd travel mechanism and the 4th travel mechanism follow the rotating mechanism rotation with switch.
Described the 3rd travel mechanism under static state is positioned on the traffic direction of first travel mechanism, described the 4th travel mechanism under static state is positioned in the operation in the other direction of second travel mechanism, be that described the 3rd travel mechanism under static state is positioned on the track that first travel mechanism is extended along its operation, described the 4th travel mechanism under static state is positioned on the track that second travel mechanism is extended along the opposite direction of its operation.
In the preferred enforcement of the present invention, described rotating mechanism comprises revolving-turret, described the 3rd travel mechanism and the 4th travel mechanism are separately fixed on two opposed side edges of revolving-turret, and described atmosphere turn around table also comprises and is positioned at revolving-turret top or upper limb, distinguishes two corresponding fixed mechanisms with the 3rd travel mechanism and the 4th travel mechanism.
Described rotating mechanism also comprises rotation motor and turntable bearing, the output terminal coupling of described turntable bearing and rotation motor, and described revolving-turret and turntable bearing tighten together.
Described the 3rd travel mechanism and the 4th travel mechanism comprise CD-ROM drive motor respectively, by at least two friction driving rollers of drive motor rotation, described friction driving roller is fixed on the outer side of revolving-turret; Described fixed mechanism is " U " type track that is used to hold the work rest upper limb.
Preferably, described " U " type track is a magnetic orbital, and described work rest upper limb is provided with the magnetic stripe opposite with magnetic orbital magnetic.
The two ends of described magnetic orbital are hydraucone, and described atmosphere turn around table also comprises and is positioned at magnetic orbital support on the revolving-turret, that be used for fixing magnetic orbital.
Further, described atmosphere turn around table also comprises the position transducer that is positioned at identical outer side with friction driving roller, and described each lateral position transducer has two at least.
The shortest distance that the rotation center branch of described rotating mechanism is clipped to the outlet of described vacuum film coating chamber and the inlet that atmosphere goes back to the storehouse is greater than the edge of the rotating mechanism maximum radial distance with respect to rotation center.
Described vacuum coating film equipment comprises also and the identical work-handling platform of described atmosphere turn around table structure that described work-handling platform is near the inlet of vacuum film coating chamber and the outlet that atmosphere goes back to the storehouse.
The invention allows for a kind of atmosphere turn around table that is used for vacuum coating film equipment, comprise rotating mechanism, the 3rd travel mechanism and the 4th travel mechanism, described the 3rd travel mechanism under static state is positioned at first travel mechanism along on the track of its traffic direction extension, be used for work rest is transported to the atmosphere turn around table from vacuum film coating chamber, described the 4th travel mechanism under static state is positioned at second travel mechanism along on the track of the opposite direction extension of its operation, be used for that work rest is transported to atmosphere from the atmosphere turn around table and return in the storehouse, described the 3rd travel mechanism and the 4th travel mechanism follow the rotating mechanism rotation with switch.
Described rotating mechanism comprises rotation motor, turntable bearing and revolving-turret, the output terminal coupling of described turntable bearing and rotation motor, and described revolving-turret and turntable bearing tighten together; Described the 3rd travel mechanism and the 4th travel mechanism are separately fixed on two opposed side edges of revolving-turret, and described atmosphere turn around table also comprises and is positioned at revolving-turret top, distinguishes two corresponding fixed mechanisms with the 3rd travel mechanism and the 4th travel mechanism.
Described the 3rd travel mechanism and the 4th travel mechanism comprise CD-ROM drive motor respectively, by at least two friction driving rollers of drive motor rotation, described friction driving roller is fixed on the outer side of revolving-turret; Described fixed mechanism is " U " type magnetic orbital that is used to hold the work rest upper limb.
Described atmosphere turn around table also comprises the position transducer that is positioned at identical outer side with friction driving roller, and described each lateral position transducer has two at least.
Compared with prior art, the invention has the beneficial effects as follows:
The present invention adopts the atmosphere turn around table to reclaim the workpiece of plated film, uses the recovery platform floor space of revolution mode little, and it is fast to reclaim beat, can be in atmospheric environment work, and need be in vacuum environment, not high to transmission accuracy and seal request, help the maintenance of equipment.
The work-handling platform adopts the structure identical with the atmosphere turn around table, the operator need not be shifted one's position just can finish the loading and unloading of workpiece, has simplified operation, has improved working efficiency.
Description of drawings
Fig. 1 is the structural representation of the vacuum coating film equipment of the specific embodiment of the invention;
Fig. 2 is the three-dimensional structure diagram of the atmosphere turn around table of the specific embodiment of the invention;
Fig. 3 is the decomposition chart of the atmosphere turn around table of the specific embodiment of the invention;
Fig. 4-A is the front view of the atmosphere turn around table of the specific embodiment of the invention;
Fig. 4-B is the side-view of the atmosphere turn around table of the specific embodiment of the invention;
Fig. 4-C is the vertical view of the atmosphere turn around table of the specific embodiment of the invention;
Fig. 5 is the three-dimensional structure diagram of the vacuum coating film equipment of the specific embodiment of the invention.
Embodiment
Below in conjunction with accompanying drawing the solution of the present invention and effect are further described in detail.
Embodiment one:
Please referring to Fig. 1 and Fig. 5, vacuum coating film equipment of the present invention comprises that work-handling platform 1, vacuum film coating chamber 2, atmosphere turn around table 3 and atmosphere go back to storehouse 4, in work-handling platform 1 is placed between cleansing operation, near the inlet of vacuum film coating chamber 2 and the outlet that atmosphere goes back to storehouse 3; Atmosphere returns that the outlet of the inlet in storehouse 4 and vacuum film coating chamber 2 is close, and outlet is close with the inlet of vacuum film coating chamber 2, and atmosphere goes back to storehouse 4 and can parallelly be arranged side by side with vacuum film coating chamber 2, and atmosphere turn around table 3 is near the outlet of vacuum film coating chambers 2 and the inlet that atmosphere goes back to storehouse 4.At work-handling platform 1 place, workpiece to be plated such as glass substrate are installed on the work rest, the work rest band workpiece and is moved into vacuum film coating chamber 2 from work-handling platform 1, work rest loads workpiece to be plated and moves in vacuum film coating chamber 2,2 pairs of workpiece to be plated of vacuum film coating chamber carry out plated film, when plated film finishes, work rest moves to atmosphere turn around table 3, the workpiece of plated film is transferred to atmosphere turn around table 3 from vacuum film coating chamber 2, atmosphere turn around table 3 will load that the work rest of film-coating workpiece goes back to 4 entry positions, storehouse from rotating to atmosphere with vacuum film coating chamber 2 outlet positions, and the work rest that has loaded film-coating workpiece is then transferred to atmosphere and gone back to storehouse 4 and go back to storehouse 4 from atmosphere and get back to work-handling platform 1 unloading piece between cleansing operation from atmosphere turn around table 3.Atmosphere returns and constantly charges into Purge gas in the storehouse 4 to make it be high pressure conditions with respect to external environment, thereby dust can be discharged, and guarantees that atmosphere returns the purification state in the storehouse 4.
To return mobile in the storehouse 4 be by means of first travel mechanism (accompanying drawing is not shown) that is positioned at vacuum film coating chamber 2 to the work rest that loads workpiece and be positioned at second travel mechanism (accompanying drawing is not shown) that atmosphere goes back to storehouse 4 at vacuum film coating chamber 2 and atmosphere, the traffic direction of first travel mechanism and second travel mechanism is opposite, all adopt the travel mechanism of prior art, make work rest along with travelling belt moves thereby for example available motor drives travelling belt.Perhaps drive the rotor wheel that returns the axial distribution in storehouse 4 along vacuum film coating chamber 2 and atmosphere with motor, work rest stands upright on the rotor wheel, and rotor wheel rotates under motor drives, and drives work rest by rotation friction and moves.
Please referring to Fig. 2,3,4-A, 4-B and 4-C, atmosphere turn around table 3 of the present invention comprises turret base 31, fixed mechanism 32, fixed mechanism support 33, position transducer 34, transmitter mount pad 35, rotating mechanism, the 3rd travel mechanism and the 4th travel mechanism.Rotating mechanism comprises revolving-turret 361, turntable bearing 362, bearing (setting) plate 363 and rotation motor 364; Bearing (setting) plate 363 is placed on the turret base 31, turntable bearing 362 be fixedly mounted on the bearing (setting) plate 363 and with the output terminal coupling of rotation motor 364, revolving-turret 361 is placed on the turntable bearing 362 and with turntable bearing 362 and tightens together; By rotation motor 364 output rotary driving forces, turntable bearing 362 rotates and driven rotary turntable 361 is rotated on turret base 31.The 3rd travel mechanism and the 4th travel mechanism lay respectively at the relative both sides of revolving-turret 361, the 3rd travel mechanism under static state is arranged in first travel mechanism of vacuum film coating chamber 2 along on the track of its traffic direction extension, and the 4th travel mechanism under static state is arranged in atmosphere and goes back to second travel mechanism in storehouse 4 along on the track of its operation extension in the other direction.The 3rd travel mechanism is used for receiving work rests and work rest being transported to the 3rd travel mechanism from vacuum film coating chamber 2, the 4th travel mechanism be used for the position thereon the work rest transportation and be sent to atmosphere and go back to storehouse 4.After the 3rd travel mechanism and the 4th travel mechanism are with revolving-turret 361 Rotate 180 degree, the 3rd travel mechanism and the 4th travel mechanism's switch, former the 3rd travel mechanism becomes the 4th new travel mechanism, with the work rest on it transportation and be sent to atmosphere and return in the storehouse 4, former the 4th travel mechanism becomes the 3rd new travel mechanism, receives work rest from vacuum film coating chamber 2.
Because of atmosphere turn around table 3 needs rotation, so atmosphere turn around table 3 can not go back to storehouse 4 near vacuum film coating chamber 2 and/or atmosphere, the rotation center branch of atmosphere turn around table 3 is clipped to the shortest distance of the outlet of vacuum film coating chamber 2 and the inlet that atmosphere goes back to storehouse 4 should be greater than the edge of the rotating mechanism maximum radial distance with respect to rotation center, can not contact or collide vacuum film coating chamber 2 when guaranteeing 3 rotations of atmosphere turn around table and atmosphere goes back to storehouse 4.
The 3rd travel mechanism and the 4th travel mechanism comprise CD-ROM drive motor 371 respectively, drive belt 372 and friction driving roller 373, friction driving roller 373 is fixed on the outer side of revolving-turret 361, be " one " font, the number of friction driving roller 373 is not limit, it can be 2,3,4 or the like, by the driving of CD-ROM drive motor 371, drive belt 372 and can drive friction driving roller 373 rotations.
Fixed mechanism support 33 is installed on the revolving-turret 361, and two fixed mechanisms 32 are installed on it, and is corresponding with the 3rd travel mechanism and the 4th travel mechanism respectively; Fixed mechanism 32 is used to hold the work rest upper limb, can not skew to both sides so that work rest stands upright on the friction driving roller 373.In the present embodiment, fixed mechanism 32 is for falling " U " type magnetic orbital, and opening 321 is a trumpet type, to prevent that work rest from slightly during offset track, also can import work rest in this track, and work rest is corrected back on the track.The following describes principle of work of the present invention.
After workpiece is finished plated film, loading, the work rest of film-coating workpiece is shifted out by first travel mechanism from vacuum film coating chamber 2, transfer to the 3rd travel mechanism of atmosphere turn around table 3 then, at this moment, the work rest lower rim is supported by first friction driving roller 373 in the 3rd travel mechanism, upper limb then enters into the magnetic orbital as fixed mechanism 32, the work rest top is equipped with the magnetic stripe opposite with magnetic orbital magnetic, repel each other by magnetic, one side make work rest can stand upright on the friction driving roller 373 and do not contact with any of magnetic orbital; Can make work rest almost not friction of upper limb when mobile in travel mechanism like this, help moving of work rest.
After work rest enters atmosphere turn around table 3 fully, rotation motor 364 drives revolving-turret 361 rotations, the 3rd travel mechanism and the 4th travel mechanism follow rotating mechanism rotation and make that with switch the workpiece of plated film is transferred to the inlet that atmosphere goes back to storehouse 4 from vacuum film coating chamber 2 outlets, then in kind film-coating workpiece move into atmosphere and carry out unloading piece in going back to storehouse 4 and turning back between cleansing operation; Behind the 3rd travel mechanism and the 4th travel mechanism's switch, the 3rd travel mechanism will be the workpiece of plated film move into atmosphere when going back to storehouse 4, the 4th travel mechanism can continue to receive the workpiece of plated film from vacuum film coating chamber 2.
Certainly, the shape of the fixed mechanism 32 in the present embodiment is not limited to down " U " type, also can be down " V " type or inverted "L" shaped etc., and opening also can be other shapes, does not also limit the employing magnetic orbit, also can adopt general track.
Embodiment two:
On the basis of embodiment one, further increased position transducer 34, position transducer 34 is positioned at identical outer side with friction driving roller 373, is installed on the revolving-turret 361 by transmitter mount pad 35, and its number is not limit, and can be 2,3,4 or the like.Position transducer 34 is used to detect the shift position of work rest, and with detected result send to PLC (programmable logic controller, not shown in the accompanying drawing) by it according to the rotation of detected result control motor with stop.
The friction driving roller of the 3rd travel mechanism and the 4th travel mechanism is advisable with four, and every limit can be provided with two position transducers 34.If four friction driving rollers on every limit are first friction driving roller, second friction driving roller, the 3rd friction driving roller and the 4th friction driving roller according to the direction of its running successively, for the 3rd travel mechanism, then first position transducer is arranged on the right side of first friction driving roller, and second position transducer is arranged on the left side of the 4th friction driving roller, for the 4th travel mechanism, then first position transducer is arranged on the left side of first friction driving roller, and second position transducer is arranged on the right side of the 4th friction driving roller.When first position transducer of the 3rd travel mechanism's side is sensed work rest and is moved, then the position signal with work rest passes to PLC, the corresponding power wheel drive friction driving roller 373 of PLC control CD-ROM drive motor 371 outputs rotates, and work rest relies on the frictional force between itself and the friction driving roller to move forward.When second position transducer sensed the position of work rest, signal is passed to PLC, PLC control CD-ROM drive motor 371 stops, and friction driving roller 373 stops operating, and work rest also stops to move.This moment, PLC judged whether second position transducer of the 4th travel mechanism is sensed work rest and removed simultaneously, promptly judged when last time rotating from vacuum film coating chamber 2 outlets transfer to atmosphere return storehouse 4 inlets loading plate workpiece work rest whether entered into atmosphere and gone back to storehouse 4, rotate if then control rotation motor 364, revolving-turret 361 rotates the 3rd travel mechanism and the 4th travel mechanism's switch.
Embodiment three:
Present embodiment is the further improvement on basic embodiment one or two bases, be that work-handling platform 1 adopts the structure identical with atmosphere turn around table 3, move to atmosphere when returning the outlet in storehouse 4 when being mounted with the work rest of film-coating workpiece, be manoeuvred on the work-handling platform 1, work-handling platform 1 carries out 180 degree rotations, the work rest of film-coating workpiece is transferred to the ingress of vacuum film coating chamber 2, operator's film-coating workpiece unloads, load onto workpiece to be coated then, workpiece to be coated is admitted to vacuum film coating chamber 2.Present embodiment need not be shifted one's position the operator just can finish the loading and unloading of workpiece, has simplified operation, has improved working efficiency.
In sum, the present invention has adopted the atmosphere turn around table in vacuum coating film equipment, and not only floor space is little, and it is fast to reclaim beat, reclaims beat and can reach 60 seconds.The mode of atmosphere revolution does not simultaneously need vacuum-sealing because of atmosphere turn around table and vacuum film coating chamber, atmosphere return between the storehouse, so low to transmission accuracy and the serious backlash commentaries on classics of seal request mode, adopt turntable bearing to finish revolution, equipment is simple, cost is low, helps Operation and Maintenance.And adorn workpiece and unload workpiece and can reduce the cost between cleansing operation between same cleansing operation, workpiece loading and unloading can improve working efficiency at same station simultaneously.
Above content be in conjunction with concrete preferred implementation to further describing that the present invention did, can not assert that concrete enforcement of the present invention is confined to these explanations.For the general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, can also make some simple deduction or replace, all should be considered as belonging to protection scope of the present invention.
Claims (14)
1. vacuum coating film equipment, comprise the vacuum film coating chamber that is used for workpiece is carried out vacuum plating, being positioned at vacuum plating indoor being used for will be used to carry the work rest transportation of workpiece and pass first travel mechanism of vacuum film coating chamber, atmosphere goes back to the storehouse and is positioned at atmosphere and goes back to the storehouse and be used for and will be used to carry the work rest transportation of workpiece and pass second travel mechanism that atmosphere goes back to the storehouse, the traffic direction of described first travel mechanism and second travel mechanism is opposite, and it is close that atmosphere returns the outlet of the inlet in storehouse and vacuum film coating chamber, it is close that atmosphere returns the inlet of the outlet in storehouse and vacuum film coating chamber, it is characterized in that: also comprise the atmosphere turn around table, described atmosphere turn around table is near the outlet of vacuum film coating chamber and the inlet that atmosphere goes back to the storehouse, described atmosphere turn around table comprises rotating mechanism, be used for work rest is transported to the 3rd travel mechanism on the atmosphere turn around table and is used for that work rest is transported to atmosphere from the atmosphere turn around table from vacuum film coating chamber going back to the 4th travel mechanism in the storehouse, described the 3rd travel mechanism and the 4th travel mechanism follow the rotating mechanism rotation with switch.
2. vacuum coating film equipment as claimed in claim 1, it is characterized in that: described the 3rd travel mechanism under static state is positioned at first travel mechanism is moved on the track that extends along it, and described the 4th travel mechanism under static state is positioned at second travel mechanism along on the track of the opposite direction extension of its operation.
3. vacuum coating film equipment as claimed in claim 2, it is characterized in that: described rotating mechanism comprises revolving-turret, described the 3rd travel mechanism and the 4th travel mechanism are separately fixed on two opposed side edges of revolving-turret, described atmosphere turn around table also comprise be positioned at revolving-turret top or upper limb and with two corresponding respectively fixed mechanisms of the 3rd travel mechanism and the 4th travel mechanism.
4. vacuum coating film equipment as claimed in claim 3 is characterized in that: described rotating mechanism also comprises rotation motor and turntable bearing, the output terminal coupling of described turntable bearing and rotation motor, and described revolving-turret and turntable bearing tighten together.
5. vacuum coating film equipment as claimed in claim 4, it is characterized in that: described the 3rd travel mechanism and the 4th travel mechanism comprise CD-ROM drive motor respectively, by at least two friction driving rollers of drive motor rotation, and described friction driving roller is fixed on the outer side of revolving-turret; Described fixed mechanism is " U " type track that is used to hold the work rest upper limb.
6. vacuum coating film equipment as claimed in claim 5 is characterized in that: described " U " type track is a magnetic orbital, and described work rest upper limb is provided with the magnetic stripe opposite with magnetic orbital magnetic.
7. vacuum coating film equipment as claimed in claim 6 is characterized in that: the two ends of described magnetic orbital are hydraucone, and described atmosphere turn around table also comprises and is positioned at magnetic orbital support on the revolving-turret, that be used for fixing magnetic orbital.
8. as each described vacuum coating film equipment in the claim 5 to 7, it is characterized in that: described atmosphere turn around table also comprises the position transducer that is positioned at identical outer side with friction driving roller, and described each lateral position transducer has two at least.
9. as each described vacuum coating film equipment of claim 1 to 7, it is characterized in that: the shortest distance that the rotation center branch of described rotating mechanism is clipped to the outlet of described vacuum film coating chamber and the inlet that atmosphere goes back to the storehouse is greater than the edge of the rotating mechanism maximum radial distance with respect to rotation center.
10. as each described vacuum coating film equipment of claim 1 to 7, it is characterized in that: comprise also and the identical work-handling platform of described atmosphere turn around table structure that described work-handling platform is near the inlet of vacuum film coating chamber and the outlet that atmosphere goes back to the storehouse.
11. atmosphere turn around table that is used for vacuum coating film equipment, it is characterized in that: comprise rotating mechanism, the 3rd travel mechanism and the 4th travel mechanism, described the 3rd travel mechanism under static state is positioned at first travel mechanism along on the track of its traffic direction extension, be used for work rest is transported to the atmosphere turn around table from vacuum film coating chamber, described the 4th travel mechanism under static state is positioned at second travel mechanism along on the track of the opposite direction extension of its operation, be used for that work rest is transported to atmosphere from the atmosphere turn around table and return in the storehouse, described the 3rd travel mechanism and the 4th travel mechanism follow the rotating mechanism rotation with switch.
12. atmosphere turn around table as claimed in claim 11 is characterized in that: described rotating mechanism comprises rotation motor, turntable bearing and revolving-turret, the output terminal coupling of described turntable bearing and rotation motor, and described revolving-turret and turntable bearing tighten together; Described the 3rd travel mechanism and the 4th travel mechanism are separately fixed on two opposed side edges of revolving-turret, and described atmosphere turn around table also comprises and is positioned at revolving-turret top, distinguishes two corresponding fixed mechanisms with the 3rd travel mechanism and the 4th travel mechanism.
13. atmosphere turn around table as claimed in claim 12, it is characterized in that: described the 3rd travel mechanism and the 4th travel mechanism comprise CD-ROM drive motor respectively, by at least two friction driving rollers of drive motor rotation, and described friction driving roller is fixed on the outer side of revolving-turret; Described fixed mechanism is " U " type magnetic orbital that is used to hold the work rest upper limb.
14. atmosphere turn around table as claimed in claim 13 is characterized in that: also comprise the position transducer that is positioned at identical outer side with friction driving roller, described each lateral position transducer has two at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710075141XA CN101328576B (en) | 2007-06-20 | 2007-06-20 | Vacuum film coating equipment and atmosphere turntable therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710075141XA CN101328576B (en) | 2007-06-20 | 2007-06-20 | Vacuum film coating equipment and atmosphere turntable therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101328576A true CN101328576A (en) | 2008-12-24 |
| CN101328576B CN101328576B (en) | 2010-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710075141XA Expired - Fee Related CN101328576B (en) | 2007-06-20 | 2007-06-20 | Vacuum film coating equipment and atmosphere turntable therefor |
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| CN (1) | CN101328576B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252138A (en) * | 2018-11-29 | 2019-01-22 | 东莞市粒米薄膜科技有限公司 | Vacuum coating equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19742923A1 (en) * | 1997-09-29 | 1999-04-01 | Leybold Systems Gmbh | Device for coating a substantially flat, disc-shaped substrate |
| TW200532043A (en) * | 2004-02-10 | 2005-10-01 | Ulvac Inc | Thin film forming apparatus |
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2007
- 2007-06-20 CN CN200710075141XA patent/CN101328576B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109252138A (en) * | 2018-11-29 | 2019-01-22 | 东莞市粒米薄膜科技有限公司 | Vacuum coating equipment |
| CN109252138B (en) * | 2018-11-29 | 2019-08-30 | 东莞市一粒米薄膜科技有限公司 | Vacuum coating equipment |
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| Publication number | Publication date |
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| CN101328576B (en) | 2010-09-01 |
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