CN101280418B - 具有多层辐射式蒸发源分布结构的多源真空蒸镀装置 - Google Patents
具有多层辐射式蒸发源分布结构的多源真空蒸镀装置 Download PDFInfo
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CN2008100255575A CN101280418B (zh) | 2008-04-29 | 2008-04-29 | 具有多层辐射式蒸发源分布结构的多源真空蒸镀装置 |
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CN101280418B true CN101280418B (zh) | 2010-09-01 |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101845611A (zh) * | 2010-05-07 | 2010-09-29 | 中山大学 | 一种真空蒸镀设备及其蒸镀方法 |
KR20140061808A (ko) * | 2012-11-14 | 2014-05-22 | 삼성디스플레이 주식회사 | 유기물 증착 장치 |
CN103014620B (zh) * | 2013-01-04 | 2015-04-08 | 四川虹视显示技术有限公司 | Oled玻璃基板蒸镀机 |
CN103243302B (zh) * | 2013-05-21 | 2015-07-08 | 上海和辉光电有限公司 | 挡板机构、薄膜沉积装置及薄膜沉积方法 |
CN103540898B (zh) | 2013-10-30 | 2015-07-01 | 京东方科技集团股份有限公司 | 一种真空蒸镀装置 |
JP6388458B2 (ja) | 2014-05-05 | 2018-09-12 | 学校法人沖縄科学技術大学院大学学園 | 太陽電池用途向けペロブスカイト膜の製造システム及び製造方法、並びにペロブスカイト膜 |
CN104195509B (zh) * | 2014-06-10 | 2016-09-28 | 合肥工业大学 | 基于ito加热片的金属膜电极的制作方法 |
JP6698509B2 (ja) * | 2016-12-14 | 2020-05-27 | 株式会社神戸製鋼所 | ターゲット用シャッタ機構およびそれを備えた成膜装置 |
CN109402592B (zh) * | 2017-08-18 | 2020-06-26 | Tcl科技集团股份有限公司 | 器件侧面蒸镀装置及器件侧面蒸镀方法 |
CN109536897B (zh) * | 2019-01-16 | 2023-11-07 | 安徽贝意克设备技术有限公司 | 一种24源连续有机材料蒸镀装备 |
CN114277354B (zh) * | 2021-12-28 | 2023-09-19 | 深圳奥卓真空设备技术有限公司 | 一种af连续真空镀膜设备及其均匀性控制方法 |
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