CN101252304B - 直线运动执行机构及利用其的部件保持装置、芯片焊接装置 - Google Patents

直线运动执行机构及利用其的部件保持装置、芯片焊接装置 Download PDF

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Publication number
CN101252304B
CN101252304B CN2007101531559A CN200710153155A CN101252304B CN 101252304 B CN101252304 B CN 101252304B CN 2007101531559 A CN2007101531559 A CN 2007101531559A CN 200710153155 A CN200710153155 A CN 200710153155A CN 101252304 B CN101252304 B CN 101252304B
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China
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permanent magnet
yoke
peripheral surface
outer peripheral
inner permanent
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Expired - Fee Related
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CN2007101531559A
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Chinese (zh)
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CN101252304A (zh
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伊藤贤一
中山忠弘
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Toshiba Corp
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Toshiba Corp
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  • Electromagnets (AREA)
  • Die Bonding (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)
CN2007101531559A 2007-02-23 2007-09-28 直线运动执行机构及利用其的部件保持装置、芯片焊接装置 Expired - Fee Related CN101252304B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP043795/2007 2007-02-23
JP2007043795 2007-02-23
JP2007180951A JP5150155B2 (ja) 2007-02-23 2007-07-10 リニアアクチュエータおよびリニアアクチュエータを利用した装置
JP180951/2007 2007-07-10

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CN101252304A CN101252304A (zh) 2008-08-27
CN101252304B true CN101252304B (zh) 2012-02-15

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JP (1) JP5150155B2 (enExample)
CN (1) CN101252304B (enExample)
TW (1) TW200836456A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102710090A (zh) * 2012-06-06 2012-10-03 西安交通大学 一种可叠加的大位移电磁式加载机及其加载方法
CN102931801A (zh) * 2012-10-31 2013-02-13 西安交通大学 一种利用电磁力进行位置控制的大位移磁作动器

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010055698A1 (ja) * 2008-11-17 2010-05-20 国立大学法人福井大学 リニアアクチュエータ
CN101873046A (zh) * 2010-06-11 2010-10-27 蹇兴亮 含稳态的永磁体电磁驱动装置
KR101388085B1 (ko) * 2010-06-10 2014-04-22 엘에스산전 주식회사 바이스테이블 영구자석형 조작기
JP5926017B2 (ja) * 2010-09-29 2016-05-25 日亜化学工業株式会社 円柱状ボンド磁石
US8546964B2 (en) * 2011-03-25 2013-10-01 Tai-Her Yang Reciprocal vibration type power generator equipped with a moving inner columnar magnetic block surrounded by at least one coil set, and a moving outer annular magnetic block that surrounds the at least one coil set
US8736086B2 (en) * 2011-03-25 2014-05-27 Tai-Her Yang Reciprocal vibration type power generator equipped with inner columnar and outer annular magnetic members, a power storage device, a rectifying circuit, and a charging circuit
JP2013229247A (ja) * 2012-04-26 2013-11-07 Toshiba Corp 電力用開閉装置、及びその操作機構
WO2014207996A1 (ja) * 2013-06-25 2014-12-31 パナソニックＩｐマネジメント株式会社 アクチュエータ及びアクチュエータを備えるレンズ鏡筒
JP6426931B2 (ja) * 2014-07-24 2018-11-21 学校法人東海大学 発電機
WO2016066129A1 (zh) * 2014-10-30 2016-05-06 陈启星 基于径向磁筒的直线电机
JP6667326B2 (ja) * 2016-03-17 2020-03-18 ファスフォードテクノロジ株式会社 ダイボンダおよびボンディング方法
CN109698598A (zh) * 2017-10-24 2019-04-30 博格华纳公司 用于机电致动器系统的推杆及其制造方法
CN108900064A (zh) * 2018-05-28 2018-11-27 胡明 一种柴油机用音圈电机
CN110824850B (zh) * 2018-08-10 2021-02-02 上海微电子装备（集团）股份有限公司 硅片交接机械手及硅片交接装置
JP2020054122A (ja) * 2018-09-27 2020-04-02 日本電産サンキョー株式会社 アクチュエータ、およびパネルスピーカー
KR102177140B1 (ko) * 2019-01-18 2020-11-10 효성중공업 주식회사 액츄에이터
CN113965040B (zh) * 2020-12-01 2022-12-30 上海隐冠半导体技术有限公司 音圈电机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808955A (en) * 1987-10-05 1989-02-28 Bei Electronics, Inc. Moving coil linear actuator with interleaved magnetic circuits
CN1334636A (zh) * 2000-07-18 2002-02-06 速睦喜股份有限公司 磁铁可动式电磁促动器
CN1479437A (zh) * 2002-07-16 2004-03-03 ��ʽ������Э���������� 直线运动执行元件及使用该元件的泵装置和空压机装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115071U (enExample) * 1980-02-04 1981-09-03
JPH0695387B2 (ja) * 1987-07-23 1994-11-24 三菱電機株式会社 ボイスコイル形アクチユエ−タ
JPH069373U (ja) * 1992-06-30 1994-02-04 株式会社ユニシアジェックス リニアモータ
JP2606903Y2 (ja) * 1993-12-27 2001-02-19 株式会社安川電機 リニアモータの界磁ヨーク
JP4485672B2 (ja) * 2000-10-20 2010-06-23 パナソニック株式会社 リニアモータ及び部品実装装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4808955A (en) * 1987-10-05 1989-02-28 Bei Electronics, Inc. Moving coil linear actuator with interleaved magnetic circuits
CN1334636A (zh) * 2000-07-18 2002-02-06 速睦喜股份有限公司 磁铁可动式电磁促动器
CN1479437A (zh) * 2002-07-16 2004-03-03 ��ʽ������Э���������� 直线运动执行元件及使用该元件的泵装置和空压机装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特開2005-237065A 2005.09.02

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102710090A (zh) * 2012-06-06 2012-10-03 西安交通大学 一种可叠加的大位移电磁式加载机及其加载方法
CN102710090B (zh) * 2012-06-06 2014-12-10 西安交通大学 一种可叠加的大位移电磁式加载机及其加载方法
CN102931801A (zh) * 2012-10-31 2013-02-13 西安交通大学 一种利用电磁力进行位置控制的大位移磁作动器
CN102931801B (zh) * 2012-10-31 2014-07-02 西安交通大学 一种利用电磁力进行位置控制的大位移磁作动器

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TWI364902B (enExample) 2012-05-21
JP5150155B2 (ja) 2013-02-20
TW200836456A (en) 2008-09-01
JP2008237004A (ja) 2008-10-02
CN101252304A (zh) 2008-08-27

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