JP5150155B2 - リニアアクチュエータおよびリニアアクチュエータを利用した装置 - Google Patents

リニアアクチュエータおよびリニアアクチュエータを利用した装置 Download PDF

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Publication number
JP5150155B2
JP5150155B2 JP2007180951A JP2007180951A JP5150155B2 JP 5150155 B2 JP5150155 B2 JP 5150155B2 JP 2007180951 A JP2007180951 A JP 2007180951A JP 2007180951 A JP2007180951 A JP 2007180951A JP 5150155 B2 JP5150155 B2 JP 5150155B2
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JP
Japan
Prior art keywords
permanent magnet
yoke
armature coil
peripheral surface
inner permanent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007180951A
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English (en)
Japanese (ja)
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JP2008237004A (ja
JP2008237004A5 (enExample
Inventor
賢一 伊藤
忠弘 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
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Toshiba Corp
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Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2007180951A priority Critical patent/JP5150155B2/ja
Priority to KR1020070097172A priority patent/KR100899468B1/ko
Priority to TW96136449A priority patent/TW200836456A/zh
Priority to CN2007101531559A priority patent/CN101252304B/zh
Priority to US11/871,434 priority patent/US7517721B2/en
Publication of JP2008237004A publication Critical patent/JP2008237004A/ja
Publication of JP2008237004A5 publication Critical patent/JP2008237004A5/ja
Application granted granted Critical
Publication of JP5150155B2 publication Critical patent/JP5150155B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Electromagnets (AREA)
  • Die Bonding (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)
JP2007180951A 2007-02-23 2007-07-10 リニアアクチュエータおよびリニアアクチュエータを利用した装置 Expired - Fee Related JP5150155B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007180951A JP5150155B2 (ja) 2007-02-23 2007-07-10 リニアアクチュエータおよびリニアアクチュエータを利用した装置
KR1020070097172A KR100899468B1 (ko) 2007-02-23 2007-09-27 리니어 액츄에이터 및 리니어 액츄에이터를 이용한 부품보유 지지 장치, 다이 본더 장치
TW96136449A TW200836456A (en) 2007-02-23 2007-09-28 Linear actuator and parts holding apparatus/die bonder apparatus utilizing same
CN2007101531559A CN101252304B (zh) 2007-02-23 2007-09-28 直线运动执行机构及利用其的部件保持装置、芯片焊接装置
US11/871,434 US7517721B2 (en) 2007-02-23 2007-10-12 Linear actuator and apparatus utilizing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007043795 2007-02-23
JP2007043795 2007-02-23
JP2007180951A JP5150155B2 (ja) 2007-02-23 2007-07-10 リニアアクチュエータおよびリニアアクチュエータを利用した装置

Publications (3)

Publication Number Publication Date
JP2008237004A JP2008237004A (ja) 2008-10-02
JP2008237004A5 JP2008237004A5 (enExample) 2009-11-12
JP5150155B2 true JP5150155B2 (ja) 2013-02-20

Family

ID=39909110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007180951A Expired - Fee Related JP5150155B2 (ja) 2007-02-23 2007-07-10 リニアアクチュエータおよびリニアアクチュエータを利用した装置

Country Status (3)

Country Link
JP (1) JP5150155B2 (enExample)
CN (1) CN101252304B (enExample)
TW (1) TW200836456A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010055698A1 (ja) * 2008-11-17 2010-05-20 国立大学法人福井大学 リニアアクチュエータ
CN101873046A (zh) * 2010-06-11 2010-10-27 蹇兴亮 含稳态的永磁体电磁驱动装置
KR101388085B1 (ko) * 2010-06-10 2014-04-22 엘에스산전 주식회사 바이스테이블 영구자석형 조작기
JP5926017B2 (ja) * 2010-09-29 2016-05-25 日亜化学工業株式会社 円柱状ボンド磁石
US8546964B2 (en) * 2011-03-25 2013-10-01 Tai-Her Yang Reciprocal vibration type power generator equipped with a moving inner columnar magnetic block surrounded by at least one coil set, and a moving outer annular magnetic block that surrounds the at least one coil set
US8736086B2 (en) * 2011-03-25 2014-05-27 Tai-Her Yang Reciprocal vibration type power generator equipped with inner columnar and outer annular magnetic members, a power storage device, a rectifying circuit, and a charging circuit
JP2013229247A (ja) * 2012-04-26 2013-11-07 Toshiba Corp 電力用開閉装置、及びその操作機構
CN102710090B (zh) * 2012-06-06 2014-12-10 西安交通大学 一种可叠加的大位移电磁式加载机及其加载方法
CN102931801B (zh) * 2012-10-31 2014-07-02 西安交通大学 一种利用电磁力进行位置控制的大位移磁作动器
WO2014207996A1 (ja) 2013-06-25 2014-12-31 パナソニックＩｐマネジメント株式会社 アクチュエータ及びアクチュエータを備えるレンズ鏡筒
JP6426931B2 (ja) * 2014-07-24 2018-11-21 学校法人東海大学 発電機
WO2016066129A1 (zh) * 2014-10-30 2016-05-06 陈启星 基于径向磁筒的直线电机
JP6667326B2 (ja) * 2016-03-17 2020-03-18 ファスフォードテクノロジ株式会社 ダイボンダおよびボンディング方法
CN109698598A (zh) * 2017-10-24 2019-04-30 博格华纳公司 用于机电致动器系统的推杆及其制造方法
CN108900064A (zh) * 2018-05-28 2018-11-27 胡明 一种柴油机用音圈电机
CN110824850B (zh) * 2018-08-10 2021-02-02 上海微电子装备（集团）股份有限公司 硅片交接机械手及硅片交接装置
JP2020054122A (ja) * 2018-09-27 2020-04-02 日本電産サンキョー株式会社 アクチュエータ、およびパネルスピーカー
KR102177140B1 (ko) * 2019-01-18 2020-11-10 효성중공업 주식회사 액츄에이터
CN113965040B (zh) * 2020-12-01 2022-12-30 上海隐冠半导体技术有限公司 音圈电机

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115071U (enExample) * 1980-02-04 1981-09-03
JPH0695387B2 (ja) * 1987-07-23 1994-11-24 三菱電機株式会社 ボイスコイル形アクチユエ−タ
US4808955A (en) * 1987-10-05 1989-02-28 Bei Electronics, Inc. Moving coil linear actuator with interleaved magnetic circuits
JPH069373U (ja) * 1992-06-30 1994-02-04 株式会社ユニシアジェックス リニアモータ
JP2606903Y2 (ja) * 1993-12-27 2001-02-19 株式会社安川電機 リニアモータの界磁ヨーク
JP4734766B2 (ja) * 2000-07-18 2011-07-27 Ｓｍｃ株式会社 磁石可動型電磁アクチュエータ
JP4485672B2 (ja) * 2000-10-20 2010-06-23 パナソニック株式会社 リニアモータ及び部品実装装置
JP3927089B2 (ja) * 2002-07-16 2007-06-06 日本電産サンキョー株式会社 リニアアクチュエータ、それを用いたポンプ装置並びにコンプレッサー装置

Also Published As

Publication number Publication date
JP2008237004A (ja) 2008-10-02
CN101252304B (zh) 2012-02-15
CN101252304A (zh) 2008-08-27
TW200836456A (en) 2008-09-01
TWI364902B (enExample) 2012-05-21

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