CN101224324B - 带电粒子线治疗装置 - Google Patents

带电粒子线治疗装置 Download PDF

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Publication number
CN101224324B
CN101224324B CN2008100035414A CN200810003541A CN101224324B CN 101224324 B CN101224324 B CN 101224324B CN 2008100035414 A CN2008100035414 A CN 2008100035414A CN 200810003541 A CN200810003541 A CN 200810003541A CN 101224324 B CN101224324 B CN 101224324B
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Prior art keywords
charged particle
irradiation
mentioned
proton beam
axis direction
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Chinese (zh)
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CN101224324A (zh
Inventor
西尾祯治
荻野尚
野村和弘
立川敏树
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Sumitomo Heavy Industries Ltd
National Cancer Center Japan
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Sumitomo Heavy Industries Ltd
National Cancer Center Japan
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/10X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1042X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy with spatial modulation of the radiation beam within the treatment head
    • A61N5/1043Scanning the radiation beam, e.g. spot scanning or raster scanning
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/10X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1077Beam delivery systems
    • A61N5/1079Sharing a beam by multiple treatment stations
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F5/00Screening processes; Screens therefor
    • G03F5/02Screening processes; Screens therefor by projection methods
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/70208Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216Mask projection systems
    • G03F7/70275Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

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  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Veterinary Medicine (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Radiation-Therapy Devices (AREA)
  • Nuclear Medicine (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
CN2008100035414A 2007-01-18 2008-01-18 带电粒子线治疗装置 Active CN101224324B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP009524/2007 2007-01-18
JP2007009524A JP4797140B2 (ja) 2007-01-18 2007-01-18 荷電粒子線照射装置

Publications (2)

Publication Number Publication Date
CN101224324A CN101224324A (zh) 2008-07-23
CN101224324B true CN101224324B (zh) 2012-10-10

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Family Applications (1)

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CN2008100035414A Active CN101224324B (zh) 2007-01-18 2008-01-18 带电粒子线治疗装置

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JP (1) JP4797140B2 (enrdf_load_html_response)
KR (1) KR100960823B1 (enrdf_load_html_response)
CN (1) CN101224324B (enrdf_load_html_response)
TW (1) TW200836792A (enrdf_load_html_response)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2010013346A1 (ja) * 2008-08-01 2012-01-05 独立行政法人放射線医学総合研究所 放射線治療・pet複合装置
JP5360914B2 (ja) * 2008-08-01 2013-12-04 独立行政法人放射線医学総合研究所 検出器シフト型放射線治療・pet複合装置
JP5286004B2 (ja) * 2008-09-12 2013-09-11 株式会社日立ハイテクノロジーズ 基板の検査装置、および、基板の検査方法
WO2010046983A1 (ja) * 2008-10-23 2010-04-29 株式会社島津製作所 粒子線治療装置
JP5339592B2 (ja) * 2009-01-28 2013-11-13 独立行政法人国立がん研究センター 陽子線治療におけるポジトロン放出核種のアクティビティ分布のシミュレーション方法
KR101127680B1 (ko) * 2009-09-08 2012-03-23 중앙대학교 산학협력단 도넛형 코일을 이용한 하전입자 빔 단층촬영 장치 및 방법
EP2490765B1 (en) 2009-10-23 2016-09-21 Ion Beam Applications Gantry comprising beam analyser for use in particle therapy
WO2012090614A1 (ja) * 2010-12-27 2012-07-05 住友重機械工業株式会社 エネルギーデグレーダ、及びそれを備えた荷電粒子照射システム
JP5726541B2 (ja) * 2011-01-18 2015-06-03 住友重機械工業株式会社 エネルギーデグレーダ、及びそれを備えた荷電粒子照射システム
US8809815B2 (en) * 2011-04-25 2014-08-19 Mitsubishi Electric Corporation Particle-beam energy changing apparatus, particle beam therapy system including the same, and method of changing particle beam energy
JP5701671B2 (ja) * 2011-04-27 2015-04-15 住友重機械工業株式会社 荷電粒子線照射装置
JP5726644B2 (ja) * 2011-06-06 2015-06-03 住友重機械工業株式会社 エネルギーデグレーダ、及びそれを備えた荷電粒子線照射システム
JP2012254146A (ja) * 2011-06-08 2012-12-27 Hitachi Ltd 荷電粒子ビーム照射システム
JP6587826B2 (ja) * 2015-05-14 2019-10-09 株式会社日立製作所 粒子線照射システム
CN105251138B (zh) * 2015-11-13 2018-03-13 上海艾普强粒子设备有限公司 一种粒子照射装置以及包括该装置的粒子治疗系统
US20190046137A1 (en) * 2016-03-03 2019-02-14 Koninklijke Philips N.V. Hybrid x-ray and gamma imaging system
CN105797282B (zh) * 2016-03-07 2018-09-04 上海艾普强粒子设备有限公司 一种粒子照射装置以及包括该装置的粒子治疗系统
CN109310380B (zh) * 2016-06-15 2023-02-28 深圳市奥沃医学新技术发展有限公司 肿瘤位置的追踪方法及放射治疗设备
JP6594835B2 (ja) * 2016-09-02 2019-10-23 住友重機械工業株式会社 荷電粒子線治療装置、及びリッジフィルタ

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1045344A (zh) * 1989-03-09 1990-09-19 菲利浦光灯制造公司 X射线检查设备
JPH1147287A (ja) 1997-08-08 1999-02-23 Sumitomo Heavy Ind Ltd 放射線治療用回転照射室
CN1445560A (zh) * 2002-03-20 2003-10-01 株式会社日立制作所 放射成象装置、放射成象方法和放射成象支持方法
CN1460451A (zh) * 2002-05-22 2003-12-10 佳能株式会社 放射线摄影装置和放射线摄影方法
CN1520780A (zh) * 2003-02-12 2004-08-18 ��ʽ���絺���������� X射线照相设备
JP2005114739A (ja) * 2004-12-10 2005-04-28 Toshiba Corp 核医学診断装置
CN1636512A (zh) * 2003-12-26 2005-07-13 Ge医疗系统环球技术有限公司 放射断层摄影系统及断层摄影方法

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* Cited by examiner, † Cited by third party
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JP3142612B2 (ja) 1991-07-05 2001-03-07 栄胤 池上 固体の表面物性を探査する方法および走査クラスター顕微鏡
EP1358657A1 (en) * 2001-02-06 2003-11-05 Gesellschaft für Schwerionenforschung mbH Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility
JP4352841B2 (ja) 2003-10-02 2009-10-28 株式会社島津製作所 放射線検出器、および、riイメージング装置
JP2006021046A (ja) * 2005-07-05 2006-01-26 Mitsubishi Heavy Ind Ltd 放射線治療装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1045344A (zh) * 1989-03-09 1990-09-19 菲利浦光灯制造公司 X射线检查设备
JPH1147287A (ja) 1997-08-08 1999-02-23 Sumitomo Heavy Ind Ltd 放射線治療用回転照射室
CN1445560A (zh) * 2002-03-20 2003-10-01 株式会社日立制作所 放射成象装置、放射成象方法和放射成象支持方法
CN1460451A (zh) * 2002-05-22 2003-12-10 佳能株式会社 放射线摄影装置和放射线摄影方法
CN1520780A (zh) * 2003-02-12 2004-08-18 ��ʽ���絺���������� X射线照相设备
CN1636512A (zh) * 2003-12-26 2005-07-13 Ge医疗系统环球技术有限公司 放射断层摄影系统及断层摄影方法
JP2005114739A (ja) * 2004-12-10 2005-04-28 Toshiba Corp 核医学診断装置

Non-Patent Citations (1)

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Title
同上.

Also Published As

Publication number Publication date
KR20080068594A (ko) 2008-07-23
JP2008173297A (ja) 2008-07-31
JP4797140B2 (ja) 2011-10-19
TWI352605B (enrdf_load_html_response) 2011-11-21
CN101224324A (zh) 2008-07-23
KR100960823B1 (ko) 2010-06-07
TW200836792A (en) 2008-09-16

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