KR100960823B1 - 하전입자선 조사장치 - Google Patents
하전입자선 조사장치 Download PDFInfo
- Publication number
- KR100960823B1 KR100960823B1 KR1020080005786A KR20080005786A KR100960823B1 KR 100960823 B1 KR100960823 B1 KR 100960823B1 KR 1020080005786 A KR1020080005786 A KR 1020080005786A KR 20080005786 A KR20080005786 A KR 20080005786A KR 100960823 B1 KR100960823 B1 KR 100960823B1
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- South Korea
- Prior art keywords
- irradiation
- charged particle
- particle beam
- axis direction
- quantum
- Prior art date
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1042—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy with spatial modulation of the radiation beam within the treatment head
- A61N5/1043—Scanning the radiation beam, e.g. spot scanning or raster scanning
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N5/1077—Beam delivery systems
- A61N5/1079—Sharing a beam by multiple treatment stations
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F5/00—Screening processes; Screens therefor
- G03F5/02—Screening processes; Screens therefor by projection methods
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70208—Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Public Health (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Veterinary Medicine (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Radiation-Therapy Devices (AREA)
- Nuclear Medicine (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Abstract
Description
Claims (6)
- 하전입자선이 조사되는 피조사체의 둘레로 회전 가능한 하전입자선 조사부를 가지는 조사실을 구비한 하전입자선 조사장치에 있어서,상기 피조사체를 끼워서 양측에 배치되어, 상기 피조사체에서 생성된 소멸γ선을 검출하는 한 쌍의 검출부를 구비하고,상기 하전입자선 조사부의 회전중심축이 뻗어 있는 방향을 X축 방향으로 하고,상기 검출부는, 상기 X축 방향으로 이동 가능하게 되어 있는 것을 특징으로 하는 하전입자선 조사장치.
- 청구항 1에 있어서,상기 검출부는, 상기 X축 둘레로 회전 가능하게 되어 있는 것을 특징으로 하는 하전입자선 조사장치.
- 청구항 2에 있어서,상기 검출부는, 상기 하전입자선 조사부의 회전에 추종(追從)하여 회전하는 것을 특징으로 하는 하전입자선 조사장치.
- 청구항 3에 있어서,상기 검출부는, 상기 하전입자선 조사부와 일체로서 회전하는 것을 특징으로 하는 하전입자선 조사장치.
- 청구항 1 내지 청구항 4 중 어느 한 항에 있어서,상기 검출부는, 서로 접근하는 방향으로 이동 가능하게 되어 있는 것을 특징으로 하는 하전입자선 조사장치.
- 청구항 1 내지 청구항 4 중 어느 한 항에 있어서,상기 X축 방향과 직교하는 방향을 Y축 방향으로 하고,상기 검출부는, 상기 Y축 둘레로 회전 가능하게 되어 있는 것을 특징으로 하는 하전입자선 조사장치.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2007-00009524 | 2007-01-18 | ||
JP2007009524A JP4797140B2 (ja) | 2007-01-18 | 2007-01-18 | 荷電粒子線照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080068594A KR20080068594A (ko) | 2008-07-23 |
KR100960823B1 true KR100960823B1 (ko) | 2010-06-07 |
Family
ID=39700797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080005786A KR100960823B1 (ko) | 2007-01-18 | 2008-01-18 | 하전입자선 조사장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4797140B2 (ko) |
KR (1) | KR100960823B1 (ko) |
CN (1) | CN101224324B (ko) |
TW (1) | TW200836792A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101242319B1 (ko) * | 2008-09-12 | 2013-03-11 | 가부시키가이샤 히다치 하이테크놀로지즈 | 하전 입자선 장치 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010013346A1 (ja) * | 2008-08-01 | 2010-02-04 | 独立行政法人放射線医学総合研究所 | 放射線治療・pet複合装置 |
US8581196B2 (en) | 2008-08-01 | 2013-11-12 | National Institute Of Radiological Sciences | Detector-shift type combined radiation therapy/PET apparatus |
US8410447B2 (en) * | 2008-10-23 | 2013-04-02 | Shimadzu Corporation | Particle radiotherapy apparatus |
JP5339592B2 (ja) * | 2009-01-28 | 2013-11-13 | 独立行政法人国立がん研究センター | 陽子線治療におけるポジトロン放出核種のアクティビティ分布のシミュレーション方法 |
KR101127680B1 (ko) * | 2009-09-08 | 2012-03-23 | 중앙대학교 산학협력단 | 도넛형 코일을 이용한 하전입자 빔 단층촬영 장치 및 방법 |
WO2011048088A1 (en) | 2009-10-23 | 2011-04-28 | Ion Beam Applications | Gantry comprising beam analyser for use in particle therapy |
EP2660825B1 (en) * | 2010-12-27 | 2015-04-01 | Sumitomo Heavy Industries, Ltd. | Energy degrader and charged-particle irradiation system provided with same |
JP5726541B2 (ja) * | 2011-01-18 | 2015-06-03 | 住友重機械工業株式会社 | エネルギーデグレーダ、及びそれを備えた荷電粒子照射システム |
US8809815B2 (en) * | 2011-04-25 | 2014-08-19 | Mitsubishi Electric Corporation | Particle-beam energy changing apparatus, particle beam therapy system including the same, and method of changing particle beam energy |
JP5701671B2 (ja) * | 2011-04-27 | 2015-04-15 | 住友重機械工業株式会社 | 荷電粒子線照射装置 |
JP5726644B2 (ja) * | 2011-06-06 | 2015-06-03 | 住友重機械工業株式会社 | エネルギーデグレーダ、及びそれを備えた荷電粒子線照射システム |
JP2012254146A (ja) * | 2011-06-08 | 2012-12-27 | Hitachi Ltd | 荷電粒子ビーム照射システム |
JP6587826B2 (ja) * | 2015-05-14 | 2019-10-09 | 株式会社日立製作所 | 粒子線照射システム |
CN105251138B (zh) * | 2015-11-13 | 2018-03-13 | 上海艾普强粒子设备有限公司 | 一种粒子照射装置以及包括该装置的粒子治疗系统 |
CN105797282B (zh) * | 2016-03-07 | 2018-09-04 | 上海艾普强粒子设备有限公司 | 一种粒子照射装置以及包括该装置的粒子治疗系统 |
WO2017214902A1 (zh) * | 2016-06-15 | 2017-12-21 | 深圳市奥沃医学新技术发展有限公司 | 肿瘤位置的追踪方法及放射治疗设备 |
JP6594835B2 (ja) * | 2016-09-02 | 2019-10-23 | 住友重機械工業株式会社 | 荷電粒子線治療装置、及びリッジフィルタ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0510895A (ja) | 1991-07-05 | 1993-01-19 | Hidetsugu Ikegami | 固体の表面物性を探査する方法および走査クラスター顕微鏡 |
JP2005114367A (ja) | 2003-10-02 | 2005-04-28 | Shimadzu Corp | 放射線検出器、および、riイメージング装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8900575A (nl) * | 1989-03-09 | 1990-10-01 | Philips Nv | Roentgenonderzoek apparaat. |
JP2004524527A (ja) * | 2001-02-06 | 2004-08-12 | ジー エス アイ ゲゼルシャフト フュア シュベールイオーネンフォルシュンク エム ベー ハー | 重イオン癌治療施設における高エネルギーイオンビームの輸送および送出のためガントリシステム |
EP1347309A3 (en) * | 2002-03-20 | 2012-04-18 | Hitachi, Ltd. | Radiological imaging apparatus and method |
JP3673791B2 (ja) * | 2002-05-22 | 2005-07-20 | キヤノン株式会社 | 放射線撮影装置及び放射線撮影方法 |
JP4464612B2 (ja) * | 2003-02-12 | 2010-05-19 | 株式会社島津製作所 | 放射線撮像装置 |
JP2005185718A (ja) * | 2003-12-26 | 2005-07-14 | Ge Medical Systems Global Technology Co Llc | 放射線断層撮像装置および撮像方法 |
JP4071765B2 (ja) * | 2004-12-10 | 2008-04-02 | 株式会社東芝 | 核医学診断装置 |
JP2006021046A (ja) * | 2005-07-05 | 2006-01-26 | Mitsubishi Heavy Ind Ltd | 放射線治療装置 |
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2007
- 2007-01-18 JP JP2007009524A patent/JP4797140B2/ja active Active
-
2008
- 2008-01-11 TW TW097101237A patent/TW200836792A/zh not_active IP Right Cessation
- 2008-01-18 KR KR1020080005786A patent/KR100960823B1/ko active IP Right Grant
- 2008-01-18 CN CN2008100035414A patent/CN101224324B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0510895A (ja) | 1991-07-05 | 1993-01-19 | Hidetsugu Ikegami | 固体の表面物性を探査する方法および走査クラスター顕微鏡 |
JP2005114367A (ja) | 2003-10-02 | 2005-04-28 | Shimadzu Corp | 放射線検出器、および、riイメージング装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101242319B1 (ko) * | 2008-09-12 | 2013-03-11 | 가부시키가이샤 히다치 하이테크놀로지즈 | 하전 입자선 장치 |
US8421010B2 (en) | 2008-09-12 | 2013-04-16 | Hitachi High-Technologies Corporation | Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample |
Also Published As
Publication number | Publication date |
---|---|
TWI352605B (ko) | 2011-11-21 |
KR20080068594A (ko) | 2008-07-23 |
JP4797140B2 (ja) | 2011-10-19 |
CN101224324B (zh) | 2012-10-10 |
TW200836792A (en) | 2008-09-16 |
JP2008173297A (ja) | 2008-07-31 |
CN101224324A (zh) | 2008-07-23 |
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