CN101180923B - 气体放电源，特别是euv辐射 - Google Patents

气体放电源，特别是euv辐射 Download PDF

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Publication number
CN101180923B
CN101180923B CN200680017282XA CN200680017282A CN101180923B CN 101180923 B CN101180923 B CN 101180923B CN 200680017282X A CN200680017282X A CN 200680017282XA CN 200680017282 A CN200680017282 A CN 200680017282A CN 101180923 B CN101180923 B CN 101180923B
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CN
China
Prior art keywords
gas discharge
electrode
electrodes
liquid
discharge source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN200680017282XA
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English (en)
Chinese (zh)
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CN101180923A (zh
Inventor
J·W·内夫
R·普鲁默
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Publication of CN101180923A publication Critical patent/CN101180923A/zh
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Luminescent Compositions (AREA)
CN200680017282XA 2005-05-19 2006-05-08 气体放电源，特别是euv辐射 Expired - Fee Related CN101180923B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005023060.1 2005-05-19
DE102005023060A DE102005023060B4 (de) 2005-05-19 2005-05-19 Gasentladungs-Strahlungsquelle, insbesondere für EUV-Strahlung
PCT/IB2006/051428 WO2006123270A2 (en) 2005-05-19 2006-05-08 Gas discharge source, in particular for euv radiation

Publications (2)

Publication Number Publication Date
CN101180923A CN101180923A (zh) 2008-05-14
CN101180923B true CN101180923B (zh) 2011-12-14

Family

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Family Applications (1)

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CN200680017282XA Expired - Fee Related CN101180923B (zh) 2005-05-19 2006-05-08 气体放电源，特别是euv辐射

Country Status (8)

Country Link
US (1) US7630475B2 (https=)
EP (1) EP1886542B1 (https=)
JP (1) JP4879974B2 (https=)
KR (1) KR101214136B1 (https=)
CN (1) CN101180923B (https=)
AT (1) ATE464776T1 (https=)
DE (2) DE102005023060B4 (https=)
WO (1) WO2006123270A2 (https=)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7518134B2 (en) * 2006-12-06 2009-04-14 Asml Netherlands B.V. Plasma radiation source for a lithographic apparatus
US7759663B1 (en) * 2006-12-06 2010-07-20 Asml Netherlands B.V. Self-shading electrodes for debris suppression in an EUV source
US7696493B2 (en) * 2006-12-13 2010-04-13 Asml Netherlands B.V. Radiation system and lithographic apparatus
US7696492B2 (en) * 2006-12-13 2010-04-13 Asml Netherlands B.V. Radiation system and lithographic apparatus
US7838853B2 (en) * 2006-12-14 2010-11-23 Asml Netherlands B.V. Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method
DE102007004440B4 (de) * 2007-01-25 2011-05-12 Xtreme Technologies Gmbh Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter Strahlung mittels einer elektrisch betriebenen Gasentladung
JP5149514B2 (ja) * 2007-02-20 2013-02-20 ギガフォトン株式会社 極端紫外光源装置
US20080239262A1 (en) * 2007-03-29 2008-10-02 Asml Netherlands B.V. Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation
US7629593B2 (en) * 2007-06-28 2009-12-08 Asml Netherlands B.V. Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
ATE551882T1 (de) * 2007-09-07 2012-04-15 Koninkl Philips Electronics Nv Drehradelektrodenvorrichtung für gasentladungsquellen mit radabdeckung für hochleistungsbetrieb
EP2198675B1 (en) 2007-09-07 2013-03-13 Philips Intellectual Property & Standards GmbH Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device
EP2198676A1 (en) * 2007-10-01 2010-06-23 Philips Intellectual Property & Standards GmbH High voltage electrical connection line
JP4952513B2 (ja) * 2007-10-31 2012-06-13 ウシオ電機株式会社 極端紫外光光源装置
WO2009077943A1 (en) * 2007-12-14 2009-06-25 Philips Intellectual Property & Standards Gmbh Method for laser-based plasma production and radiation source, in particular for euv radiation
DE102007060807B4 (de) 2007-12-18 2009-11-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungsquelle, insbesondere für EUV-Strahlung
NL1036595A1 (nl) * 2008-02-28 2009-08-31 Asml Netherlands Bv Device constructed and arranged to generate radiation, lithographic apparatus, and device manufacturing method.
CN102099746B (zh) * 2008-07-18 2013-05-08 皇家飞利浦电子股份有限公司 包含污染捕获器的极端紫外辐射生成设备
EP2170021B1 (en) * 2008-09-25 2015-11-04 ASML Netherlands B.V. Source module, radiation source and lithographic apparatus
JP4623192B2 (ja) * 2008-09-29 2011-02-02 ウシオ電機株式会社 極端紫外光光源装置および極端紫外光発生方法
JP5245857B2 (ja) * 2009-01-21 2013-07-24 ウシオ電機株式会社 極端紫外光光源装置
JP5504673B2 (ja) * 2009-03-30 2014-05-28 ウシオ電機株式会社 極端紫外光光源装置
WO2011051839A1 (en) * 2009-10-29 2011-05-05 Koninklijke Philips Electronics N.V. Electrode system, in particular for gas discharge light sources
EP2555598A1 (en) * 2011-08-05 2013-02-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for generating optical radiation by means of electrically operated pulsed discharges
NL2009683A (en) * 2011-11-15 2013-05-16 Asml Netherlands Bv Radiation source device, lithographic apparatus, and device manufacturing method.
DE102012109809B3 (de) * 2012-10-15 2013-12-12 Xtreme Technologies Gmbh Vorrichtung zur Erzeugung von kurzwelliger elektromagnetischer Strahlung auf Basis eines Gasentladungsplasmas
DE102013103668B4 (de) * 2013-04-11 2016-02-25 Ushio Denki Kabushiki Kaisha Anordnung zum Handhaben eines flüssigen Metalls zur Kühlung von umlaufenden Komponenten einer Strahlungsquelle auf Basis eines strahlungsemittierenden Plasmas
DE102013109048A1 (de) * 2013-08-21 2015-02-26 Ushio Denki Kabushiki Kaisha Verfahren und Vorrichtung zur Kühlung von Strahlungsquellen auf Basis eines Plasmas
DE102013017655B4 (de) 2013-10-18 2017-01-05 Ushio Denki Kabushiki Kaisha Anordnung und Verfahren zum Kühlen einer plasmabasierten Strahlungsquelle
DE102014102720B4 (de) * 2014-02-28 2017-03-23 Ushio Denki Kabushiki Kaisha Anordnung zum Kühlen einer plasmabasierten Strahlungsquelle mit einer metallischen Kühlflüssigkeit und Verfahren zur Inbetriebnahme einer solchen Kühlanordnung
US10021773B2 (en) 2015-11-16 2018-07-10 Kla-Tencor Corporation Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
CN111263577B (zh) * 2018-12-03 2024-10-01 北京梦之墨科技有限公司 一种具有电磁屏蔽性能的旋转结构
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
JP7626009B2 (ja) * 2021-08-30 2025-02-04 ウシオ電機株式会社 放電プラズマ生成ユニット、及びそれを搭載した光源装置
CN113960019A (zh) * 2021-10-26 2022-01-21 天津大学 一种双转盘电极原子发射光谱油液元素装置
KR20250109087A (ko) 2024-01-09 2025-07-16 한국표준과학연구원 레이저 생성 플라즈마를 사용하는 극자외선 발생 장치 및 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1500369A (zh) * 2001-04-06 2004-05-26 ���Ͷ�����ʵ���о��ٽ�Э�� 用于产生远紫外线辐射或软x射线辐射的方法和装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000061839A (ja) * 1998-08-19 2000-02-29 Rikagaku Kenkyusho マイクロ放電ツルーイング装置とこれを用いた微細加工方法
EP1401248B1 (en) * 2002-09-19 2012-07-25 ASML Netherlands B.V. Radiation source, lithographic apparatus, and device manufacturing method
CN101795527B (zh) 2002-09-19 2013-02-20 Asml荷兰有限公司 辐射源、光刻装置和器件制造方法
WO2004062050A2 (en) 2003-01-02 2004-07-22 Jmar Research Inc. Method and apparatus for generating a membrane target for laser produced plasma
DE10342239B4 (de) * 2003-09-11 2018-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung
RU2278483C2 (ru) * 2004-04-14 2006-06-20 Владимир Михайлович Борисов Эуф источник с вращающимися электродами и способ получения эуф излучения из газоразрядной плазмы
US7501642B2 (en) * 2005-12-29 2009-03-10 Asml Netherlands B.V. Radiation source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1500369A (zh) * 2001-04-06 2004-05-26 ���Ͷ�����ʵ���о��ٽ�Э�� 用于产生远紫外线辐射或软x射线辐射的方法和装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Joseph Pankert, Rolf Apetz, Klaus Bergmann, et. al..Integrating Philips’ extreme UV source in the alpha-tools.《Proceedings of SPIE》.2005,第5751卷全文. *
Vladimir M Borisov,Aleksander V Eltsov,Aleksander S Ivanov,et.al.EUV sources using Xe and Sn discharge plasmas.《Journal of Physics D: Applied Physics》.2004,第37卷全文. *

Also Published As

Publication number Publication date
DE102005023060A1 (de) 2006-11-30
EP1886542A2 (en) 2008-02-13
CN101180923A (zh) 2008-05-14
DE602006013621D1 (de) 2010-05-27
WO2006123270A2 (en) 2006-11-23
EP1886542B1 (en) 2010-04-14
JP2008541472A (ja) 2008-11-20
ATE464776T1 (de) 2010-04-15
KR101214136B1 (ko) 2012-12-21
US7630475B2 (en) 2009-12-08
DE102005023060B4 (de) 2011-01-27
WO2006123270A3 (en) 2007-03-08
KR20080043740A (ko) 2008-05-19
US20080187105A1 (en) 2008-08-07
JP4879974B2 (ja) 2012-02-22

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CP01 Change in the name or title of a patent holder

Address after: Holland Ian Deho Finn

Patentee after: KONINKLIJKE PHILIPS N.V.

Address before: Holland Ian Deho Finn

Patentee before: Koninklijke Philips Electronics N.V.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20190805

Address after: Tokyo, Japan

Patentee after: USHIO DENKI Kabushiki Kaisha

Address before: Holland Ian Deho Finn

Patentee before: KONINKLIJKE PHILIPS N.V.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111214