CN101171361A - 陶瓷蒸发舟、其制造方法及其应用 - Google Patents

陶瓷蒸发舟、其制造方法及其应用 Download PDF

Info

Publication number
CN101171361A
CN101171361A CNA2006800150977A CN200680015097A CN101171361A CN 101171361 A CN101171361 A CN 101171361A CN A2006800150977 A CNA2006800150977 A CN A2006800150977A CN 200680015097 A CN200680015097 A CN 200680015097A CN 101171361 A CN101171361 A CN 101171361A
Authority
CN
China
Prior art keywords
coating
metal
evaporation
evaporation boat
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800150977A
Other languages
English (en)
Chinese (zh)
Inventor
C·莱斯尼亚克
D·朗格
M·塞弗特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ESK Ceramics GmbH and Co KG
Original Assignee
ESK Ceramics GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ESK Ceramics GmbH and Co KG filed Critical ESK Ceramics GmbH and Co KG
Publication of CN101171361A publication Critical patent/CN101171361A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C04B41/507—Borides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C04B41/90—Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/90—Electrical properties
    • C04B2111/94—Electrically conducting materials
CNA2006800150977A 2005-05-04 2006-04-26 陶瓷蒸发舟、其制造方法及其应用 Pending CN101171361A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005020945.9 2005-05-04
DE200510020945 DE102005020945B4 (de) 2005-05-04 2005-05-04 Keramische Verdampferschiffchen, Verfahren zu ihrer Herstellung und ihre Verwendung

Publications (1)

Publication Number Publication Date
CN101171361A true CN101171361A (zh) 2008-04-30

Family

ID=36615650

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800150977A Pending CN101171361A (zh) 2005-05-04 2006-04-26 陶瓷蒸发舟、其制造方法及其应用

Country Status (3)

Country Link
CN (1) CN101171361A (de)
DE (1) DE102005020945B4 (de)
WO (1) WO2006117119A1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107904559A (zh) * 2017-12-21 2018-04-13 福州大学 一种具有复合陶瓷涂层的内加热蒸发舟及其制备方法
CN108203314A (zh) * 2017-12-29 2018-06-26 安徽金美新材料科技有限公司 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟
CN109972096A (zh) * 2017-12-28 2019-07-05 核工业西南物理研究院 一种在料舟表面沉积金属涂层的方法
CN115287603A (zh) * 2022-08-02 2022-11-04 广东广纳芯科技有限公司 蒸镀方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
DE102015112135B4 (de) 2015-07-24 2023-04-06 Kennametal Inc. Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen
CN114394854B (zh) * 2022-01-18 2023-03-24 辽宁航安型芯科技股份有限公司 一种基于废旧蒸发舟制备硅基陶瓷型芯隔离涂层的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118941A (ja) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk Kinzokujohatsuyoyoki
DE3114467A1 (de) * 1981-04-09 1982-10-28 Siemens AG, 1000 Berlin und 8000 München Verdampferschiffchen und verfahren zu seiner herstellung
US4446357A (en) * 1981-10-30 1984-05-01 Kennecott Corporation Resistance-heated boat for metal vaporization
US4884788A (en) * 1988-04-12 1989-12-05 Union Carbide Corporation Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon
DE3935163C1 (en) * 1989-10-21 1990-10-11 Sintec Keramik Gmbh, 8959 Buching, De Polycrystalline material for resistance heat evapn. boats - comprises hot pressed electroconductive mixt. based on boron nitride
DE4100541C1 (de) * 1991-01-10 1992-01-16 Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De
DE19714432C2 (de) * 1997-04-08 2000-07-13 Aventis Res & Tech Gmbh & Co Trägerkörper mit einer Schutzbeschichtung und Verwendung des beschichteten Trägerkörpers
DE19821772A1 (de) * 1998-05-14 1999-11-18 Kempten Elektroschmelz Gmbh Keramische Verdampferschiffchen mit verbessertem Erstbenetzungsverhalten

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107904559A (zh) * 2017-12-21 2018-04-13 福州大学 一种具有复合陶瓷涂层的内加热蒸发舟及其制备方法
CN107904559B (zh) * 2017-12-21 2019-11-12 福州大学 一种具有复合陶瓷涂层的内加热蒸发舟及其制备方法
CN109972096A (zh) * 2017-12-28 2019-07-05 核工业西南物理研究院 一种在料舟表面沉积金属涂层的方法
CN108203314A (zh) * 2017-12-29 2018-06-26 安徽金美新材料科技有限公司 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟
CN115287603A (zh) * 2022-08-02 2022-11-04 广东广纳芯科技有限公司 蒸镀方法
CN115287603B (zh) * 2022-08-02 2023-09-12 广东广纳芯科技有限公司 蒸镀方法

Also Published As

Publication number Publication date
DE102005020945A1 (de) 2006-11-09
DE102005020945B4 (de) 2007-07-12
WO2006117119A1 (de) 2006-11-09

Similar Documents

Publication Publication Date Title
CN101171361A (zh) 陶瓷蒸发舟、其制造方法及其应用
CN102933737B (zh) 用于沉积混合晶体层的pvd混合方法
JP2009511742A (ja) スパッタリングによって被膜を堆積する方法
CN100567554C (zh) Pvd敷金属系统的蒸发器体的制备
JPS5877572A (ja) 金属蒸発用抵抗加熱ボ−ト
US2724663A (en) Plural metal vapor coating
TW201406974A (zh) 鍍膜件及其製備方法
EP1497479A1 (de) Verfahren und vorrichtung zur abscheidung von dünnen filmen
CN101171359A (zh) 用铜或银涂覆基质的方法
JPH0234737A (ja) 耐食、耐熱性アルミニウム基合金薄膜とその製造法
US20200240001A1 (en) Evaporator body with titanium hydride coating, method for the production and usage thereof
BR112015000253B1 (pt) processo para revestimento de substratos com superfícies de substrato a serem revestidas por meio de pulverização de material alvo
US4649024A (en) Method for forming evaporated pnictide and alkali metal polypnictide films
CN100494476C (zh) 电阻加热舟皿及其制造方法
CN101238237B (zh) 用于蒸发器体的初始润湿辅助材料
KR0140834B1 (ko) 조성 분포가 균일한 아연-알루미늄 합금 진공증착 강판의 제조방법
CN1236021A (zh) 具有经改进之初始润湿性的陶瓷蒸发皿
JP7434420B2 (ja) 金属セラミック基材を製造するための方法
RU2505621C1 (ru) Способ нанесения медного покрытия
US3647524A (en) Vapor phase metal plating process
EP0548864A1 (de) Methode zur Bildung einer schützenden Aluminiumbeschichtung auf einem Kohlenstoff-Kohlenstoff Verbundwerkstoff
TW201408797A (zh) 合金共蒸發材料及應用該合金共蒸發材料進行蒸發鍍膜的方法
RU1827399C (ru) Способ получени покрытий в вакууме
JPH05330958A (ja) メタライズ下地層形成用ガラス組成物
JPS6326347A (ja) 金属硼化物薄膜の製造法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1117573

Country of ref document: HK

C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication
REG Reference to a national code

Ref country code: HK

Ref legal event code: WD

Ref document number: 1117573

Country of ref document: HK