CN101171361A - Ceramic evaporator crucibles, method for the production thereof, and use thereof - Google Patents
Ceramic evaporator crucibles, method for the production thereof, and use thereof Download PDFInfo
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- CN101171361A CN101171361A CNA2006800150977A CN200680015097A CN101171361A CN 101171361 A CN101171361 A CN 101171361A CN A2006800150977 A CNA2006800150977 A CN A2006800150977A CN 200680015097 A CN200680015097 A CN 200680015097A CN 101171361 A CN101171361 A CN 101171361A
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5062—Borides, Nitrides or Silicides
- C04B41/507—Borides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
- C04B41/90—Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/90—Electrical properties
- C04B2111/94—Electrically conducting materials
Abstract
The invention relates to an evaporator crucible made of an electrically conductive ceramic support material for vaporizing substrates with metals. Said evaporator crucible is characterized in that one of the following coatings is provided on the surface of the evaporator crucible from which the metals are evaporated: a) a coating made of at least one boride of a transition metal of subgroup 4 to 6 of the periodic system; b) a coating made of a mixture of the metal that is to be evaporated and at least one transition metal of subgroup 4 to 6 of the periodic system and/or the borides thereof; c) a first coating made of at least one transition metal of subgroup 4 to 6 of the periodic system and/or the borides thereof and a coating which is applied thereto and is made of the metal that is to be evaporated. The inventive evaporator crucibles are provided with good initial wetting power for the metals that are to be evaporated such that the evaporation process can be carried out uniformly and with little splashing.
Description
Technical field
The present invention relates to a kind of by ceramic matrix material evaporation boat (Verdampferschiffchen), its manufacture method made of conduction and the application that comes evaporation matrix with metal thereof.
Background technology
Be used for metal, particularly use aluminium, the most frequently used method of coating flexible matrix is so-called high vacuum belt vapour deposition method.Here matrix to be coated is by also being exposed at this moment in the aluminium steam once the guiding of refrigerative roller, and the layer metal deposition that the conduct of aluminium steam approaches is on stromal surface.
In order to produce the constant vapour stream that needs, with ceramic evaporator, promptly so-called evaporation boat, directly energising is heated to about 1450 ℃.Import aluminium wire continuously, it is liquefied on ceramic surface, and about 10
-4Evaporate in the vacuum of mbar.One row evaporations boat is set in metallization/plating equipment like this, makes the uniform aluminium lamination of deposit thickness on the whole width of matrix.
Chemical ingredients by the evaporation boat made of stupalith of conduction generally includes TiB2 (TiB
2), boron nitride (BN) and comprise that selectively aluminium nitride (AlN) forms.TiB wherein
2Be conductive component, it allows as the ohmic resistance heating fumigators.
When the belt evaporated device moved, a subject matter was, uses the metal initial that is evaporated wetting (Erstbenetzung) evaporation boat.For big coat-thickness and matrix circulation, on flexible matrix, can only apply low melting point metal by means of the evaporation boat up to now, as aluminum and zinc with enough vaporator rates and homogeneity.Other metal, for example copper or silver up to now can only be slightly evaporate the board-like or molybdenum plate formula evaporation boat from direct-fired tungsten.Tungsten plate evaporation boat has and the common diverse shape of ceramic evaporation boat used in the belt evaporated device.Consequently, the gripping unit that is used for tungsten plate evaporation boat must design to such an extent that be different from the gripping unit that is used for ceramic evaporator fully, and when the belt evaporated device should be when aluminum evaporation be transformed into the copper evaporation, gripping unit needs complicated repacking.That another shortcoming of tungsten plate evaporation boat is that its run duration occurs is crooked/dangle, because tungsten has different thermal expansivity with copper.Thus, in tungsten plate evaporation boat, cause stress and distortion.This distortion is well-known with the notion of " bimetallic effect ".
DE2535569A1 has illustrated a kind of evaporation boat of being made by the conducting ceramic material with a coating, and this coating comprises one or more carbide or comprises tungsten, tantalum or molybdenum alternatively as main ingredient.Al, Sb, Ni and nichrome wire have only been mentioned as metal to be evaporated.But the described evaporation boat in there is not accepted on market.
DE3114467A1 illustrated a kind of be used for evaporation of metal, by the refractory oxide pottery, as ZrO
2, the evaporation boat of making wherein is provided with tungsten and/or molybdenum coating on evaporation boat inboard.With this evaporation boat should be on the band-like film material metallizing, as the alloy of copper, iron, nickel or these metals.But by ZrO
2The evaporation boat matter that oxide ceramics is made is crisp and to the thermal shocking sensitivity, therefore is not suitable for evaporated metal.Equally, they do not come into the market yet, and are not accepted actually.
DE3935163C1 has illustrated a kind of by boron nitride, optionally the hot pressing conduction mixing material of one or more metals compositions in the group of aluminium nitride and titanium boride and tungsten, molybdenum and chromium composition evaporation boat that make, that be used for evaporating aluminium, copper or silver.But described evaporation boat has such shortcoming, and promptly they are poor for the wetting difference and the startability of copper or silver, therefore need operate frequent re-adjustment at start-up period.
Summary of the invention
Therefore, the objective of the invention is, imagine a kind of ceramic matrix material evaporation boat that make, that be used for metal evaporation matrix by conduction, described evaporation boat particularly has good initial wetting for metal to be evaporated, thus the startability that can realize.In addition, also should imagine a kind of method that is used for making this evaporation boat.
According to the present invention, above-mentioned purpose is by being used for the evaporation boat of metal evaporation matrix and passing through realizing by claim 6 and 7 described methods by claim 1 is described.
Preferred and the suitable especially form of implementation of content of the present invention illustrates in the dependent claims.
Evaporation boat of the present invention has for metal to be evaporated, and for example therefore the outstanding initial wetting of aluminium, copper and silver has good startability.Described evaporation boat does not need further repacking just can use in vacuum belt evaporated device commonly used.Because good is wetting, can realizes the maximum bathing pool size of copper or silver bath, thereby realize high as far as possible evaporation power.The evaporation that realizes by means of evaporation boat of the present invention is a low spatter and uniform, thereby realizes the coating uniformity that metallized matrix is high.
Therefore, content of the present invention is by the ceramic matrix material evaporation boat that make, that be used for metal evaporation matrix of conduction, it is characterized by: carry out being provided with on the surface of evaporated metal one of following coating at described evaporation boat:
A) coating of forming by at least a boride of the transition metal in a kind of periodic table of elements the 4th to 6 subgroup,
B) coating of forming by the mixture of the transition metal in metal to be evaporated and at least a periodic table of elements the 4th to 6 subgroup and/or its boride,
C) first coating of forming by the transition metal at least a periodic table of elements the 4th to 6 subgroup and/or its boride and be applied to the coating of forming by metal to be evaporated on first coating.
In addition, content of the present invention also comprises the manufacture method of this evaporation boat, and wherein the suspension of applying coating material on ceramic matrix material then carries out drying.
According to a kind of method that optionally is used for making this evaporation boat, form coating by known plasma spraying method.
Evaporation boat of the present invention preferably includes such conducting ceramic material, this stupalith comprise TiB2 and boron nitride and also have in case of necessity aluminium nitride as main ingredient as main ingredient, and make by these components are carried out hot pressing.Preferably, the evaporation boat can be the TiB of 45-60% by weight percent
2, weight percent is that the BN of 20-55% and AlN that weight percent is 0-20% form, and wherein can also comprise additive commonly used and subsidiary material.
The coating that boat is evaporated in the present invention preferably has 1-750 μ m, more preferably 15-500 μ m, the still more preferably mean thickness of 50-150 μ m.
Evaporation boat of the present invention has shape known in the prior art, for example has rectangular cross section or semi-ellipsoidal cross section, and is for example known like that by EP0962546B1.
The surface that evaporation boat of the present invention carries out evaporated metal is provided with one of following coating:
A) coating of forming by at least a boride of the transition metal in a kind of periodic table of elements the 4th to 6 subgroup,
B) coating of forming by the mixture of the transition metal in metal to be evaporated and at least a periodic table of elements the 4th to 6 subgroup and/or its boride,
C) first coating of forming by the filtering metal at least a periodic table of elements the 4th to 6 subgroup and/or its boride and be applied to the coating of forming by metal to be evaporated on first coating.
As the transition metal of the periodic table of elements the 4th to 6 subgroup, preferably adopt titanium, zirconium, vanadium, molybdenum and tungsten, particularly tungsten, as boride tungsten boride particularly, as WB and W
2B
5The actual coating of being made up of tungsten boride that shows is particularly suitable for evaporating aluminium, copper or silver because occur from bringing into operation just here good and wetting uniformly, this make described metal on time and space by low splash and constant vaporator rate.Under the situation of the coating that the mixture by copper and tungsten and/or tungsten boride that is used for evaporating copper is formed, the volume content of copper preferably is up to 50% in the coating, and more preferably 20% or still less, to realize preferred initial wetting performance.For the evaporation of silver, according to another kind of form of implementation, coating can be made up of the mixture of silver and tungsten and/or tungsten boride.For the evaporation of aluminium, according to another form of implementation, coating can be made up of the mixture of aluminium and tungsten and/or tungsten boride.In these forms of implementation, in corresponding coating, the volume content of silver or aluminium preferably is up to 50%, and more preferably 20% or still less, to realize preferred initial wetting performance.
Not only be suitable for using metal according to evaporation boat of the present invention, to flexible matrix, carry out high vacuum belt evaporation as paper and plastics film, and be equally applicable to block article, for example the evaporation of TV screen as aluminium, copper or silver.
Similar with the evaporation of aluminium well known in the prior art, carry out evaporation of metal by adopting wire, used wire for example can have the diameter of about 1.0-2.0mm.
The formation of coating that is used for evaporation boat of the present invention is for example by carrying out the surface of evaporation of metal-for example at die cavity-apply the suspension of coated material at the evaporation boat, for example the acetone suspension of tungsten boride carries out, and then carries out drying so that solvent evaporation.But coating also can apply by known fusing spraying method or plasma spraying method.
Under the simplest situation, can realize coating like this, i.e. spreading particle, for example WB particle on evaporation boat surface.But preferably by the plasma spraying method applying coating, because at this moment realize uniform coating, this coating has wetting uniformly equally for metal to be evaporated.
Embodiment
Following example is used to further specify the present invention.
Example 1:(is used for the plasma spraying WB coating of copper evaporation)
After corresponding pre-treatment, on working-surface, give TiB by conduction
2-BN-hybrid ceramic is made and is of a size of 10 * 20 * 120mm
3The evaporation boat apply tungsten boride.Nominally the chemical ingredients of tungsten boride is WB: the roentgen-ray of used tungsten boride (x ray) facies analysis shows, it mainly is 5% W together with volume percent by WB
2B
5Form.By making an abrasive disc that polishes move through the cross section of comparison part, on a comparison part that applies together simultaneously, measure coat-thickness.Coat-thickness average out to 120 μ m.
Pack into the evaporation boat that applied like this in the one belt evaporated device and respectively with about 5 gram copper wire sections (brass wire diameter 2mm) coverings.Sealing equipment and reaching necessary less than 10
-4After the vacuum tightness of mbar, heating power is adjusted to 4.68KW.
At about 60% o'clock that reaches final power, the copper of lay began fusing.When temperature continued to raise, copper began the coating area of wetting vaporizer.
When the power of input reaches about 85% the time, just can begin to supply with copper wire to the belt evaporated device.Adopting diameter for this embodiment is the copper wire of 2.0mm.
The evaporation boat that applies with titanium boride has just demonstrated very good and wetting to the working-surface that applied uniformly at little power when (being equivalent to low temperature).
With this evaporation boat of the present invention, can in the time of 6 little durations, keep the evaporation power of constant, per minute 15 gram copper, and not lower the power of vaporizer.
Example 2:(is used for the W-Cu-coating of the plasma spraying of copper evaporation).
After corresponding surface preparation, give by the TiB that conducts electricity with plasma spraying method
2-BN-AlN hybrid ceramic is made and is of a size of 10 * 20 * 120mm
3The evaporation boat to apply by tungsten and volume percent be the coating that the mixture of 15% copper is formed.Adopt mean particle size is that tungsten metal-powder (manufacturers for example is the H.C.Starck of Goslar) and the mean particle size of 25 μ m is the electrolytic copper powder of 75 μ m for this reason.Before in plasma spraying equipment, handling, on wheel platform that these two kinds of powder compositions are dry and even 12 hours under the situation that adopts the Wimet ball.Powder with even after it should be noted that not make and become inhomogeneous owing to shaking or vibrating because specific gravity difference tends to separate/emanate the powder of (Entmischung) greatly.
By making an abrasive disc that polishes move through the cross section of comparison part, on a comparison part that applies together, determine that coat-thickness is 132 μ m.
The coating of Zhi Zaoing can easily be separated with other coating area that only comprises tungsten or tungsten boride owing to the tangible red color tone of copper in this embodiment.
The vaporizer that applied is like this packed in the belt evaporated device, and cover with the copper wire sections (brass wire diameter 2mm) of about 4 grams respectively.Seal equipment and reaching necessary＜10
-4After the vacuum tightness of mbar, heating power is adjusted to 4.68KW.
At about 60% o'clock that reaches final power, the copper of lay began fusing.When temperature further improved, copper began the coating area of wetting vaporizer very equably, and the copper powder that is embedded in the coating melts than the copper elder generation of lay, because its heat passage only copper wire section by the thermal radiation heating than lay is good.The copper component of fusing is impelled very early in coating, and the copper wire section of lay also melts during power in other words in lower temperature.The copper that is evenly distributed in the coating makes working-surface initial wetting more equably, because needn't pass through the surface tension homogenizing by the local melt that forms of the copper wire section of lay.The effect that is included in the copper in the coating is temporary transient, because from the copper of coating, combine from the copper of the copper wire section of lay and the copper that comes self-sustained copper wire to supply with.
When the power of input reaches about 85% the time, can begin to supply with copper wire to the belt evaporated device.For described embodiment, adopting diameter is the copper wire of 2.0mm.
Evaporation boat of the present invention has the constant evaporation power of per minute 18 gram copper when 91% electric power.The reason that evaporation boat of the present invention has higher evaporation power may be that the coating of being made by powdered mixture has the per surface area bigger than the coating that only is made of tungsten or tungsten boride.
Wetting the playing of all even constant forms the effect of coating very uniformly on film to be deposited.
Example 3:(is used for the tungsten boride coating of the plasma spraying of aluminum evaporation)
After corresponding surface preparation, with the TiB of plasma spraying normal direction by conduction
2-BN hybrid ceramic is made and is of a size of 10 * 20 * 120mm
3The evaporation boat apply that (the WB+ volume percent is about 5% W by tungsten boride
2B
5) coating formed.Adopt for this reason mean particle size be 25 μ m the tungsten boride powder (manufacturers for example is: AEE Atlantic Equipment Engineers, 13 Forster Street, P.O.Box 181,, Bergenfield, N.J.07621, the U.S.).By making an abrasive disc that polishes move through the cross section of comparison part, on a comparison part that applies together, determine that coat-thickness is 125 μ m.
The vaporizer that applied is like this packed in the belt evaporated device, and cover with the aluminium wire sections (aluminium wire diameter 1.8mm) of about 2 grams respectively.Seal equipment and reaching necessary＜10
-4After the vacuum tightness of mbar, heating power is adjusted to 4.68KW.
At about 45% o'clock that reaches final power, the aluminium of lay began fusing.When temperature continued to raise, aluminium began the coating area of wetting vaporizer very equably.
With by BN+TiB
2The uncoated vaporizer of making is compared, and the initial wetting process is carried out more quick and even in evaporation boat of the present invention.This specific character ascribes to, common BN+TiB
2-evaporation boat is at TiB
2Layer of oxide layer is arranged on the particle, and this zone of oxidation can hinder by aluminium wetting well.Aluminum melt with strong reductive action is carrying out the good TiB that must at first reduce before wetting
2Oxide skin.Obviously, evaporation boat of the present invention does not hinder wetting characteristic.This is homogenizing and quickened initial wetting greatly.
When the power of input reaches about 85% the time, can begin to supply with aluminium wire to the belt evaporated device.For this embodiment, adopting diameter is the aluminium wire of 1.8mm.
Evaporation boat of the present invention has the constant vaporization efficiency of per minute 2 to 6 gram aluminium when 85% electric power.All even constant is wetting to be played to make form the effect of coating very uniformly on film to be deposited.
As everyone knows, by making full use of working-surface well, if promptly use the wetting whole working-surface of melt, the work-ing life that can improve vaporizer as far as possible equably.Vaporizer of the present invention has than the uniform wettability of common evaporation boat, has improved work-ing life thus.
Example 4:(is used for the Al coating of the additional plasma spraying of the WB coating of the plasma spraying of aluminum evaporation+on it)
After corresponding pre-treatment, with one group of plasma spraying normal direction by TiB
2-BN-pottery is made and is of a size of 10 * 35 * 140mm
3The evaporation boat apply that (=WB+ volume percent is about 5% W by tungsten boride
2B
5) mean thickness formed is the coating of 136 μ m.Same by thermospray, on this coating, additionally apply the coating of forming by aluminum metal again.Aluminum layer thickness is defined as 200 μ m.
The vaporizer that applied is like this packed in the belt evaporated device, and cover with the aluminium wire sections (aluminium wire diameter 1.8mm) of about 2 grams respectively.Seal equipment and reaching necessary＜10
-4After the vacuum tightness of mbar, heating power is adjusted to 8.20KW.
In the time of in next being used in the belt evaporated device, described vaporizer has the outstanding initial wetting performance to aluminium.
By making full use of the working-surface of vaporizer best, to compare with uncoated evaporation boat with sample ingredient, the evaporation boat has improved 18% work-ing life.
Comparative Examples (4 component vaporizer)
As described in DE3935163C1, will evaporate boat and pack in the belt evaporated device.After the step in being similar to embodiment 1, begin to supply with copper wire.
But the evaporation boat has the wetting of poor, uneven and big ups and downs in time for copper.Consequently, can not form stable vaporator rate, this causes uneven coat-thickness on film to be deposited.
Claims (9)
1. by the evaporation boat that is used for metal evaporation matrix made of ceramic matrix material of conduction, it is characterized by: one of following coating is set on the surface of carrying out evaporation of metal of evaporating boat:
A) coating of at least a boride of a kind of transition metal of the periodic table of elements the 4th to 6 subgroup,
B) coating of forming by the mixture of the transition metal of metal to be evaporated and at least a periodic table of elements the 4th to 6 subgroup and/or its boride,
C) first coating of forming by transition metal and/or its boride of at least a periodic table of elements the 4th to 6 subgroup and be applied to the coating of forming by metal to be evaporated on first coating.
2. by the described evaporation boat of claim 1, it is characterized by: described ceramic matrix material is by hot pressed TiB2 and boron nitride and also have aluminium nitride to form in case of necessity.
3. by claim 1 and/or 2 described evaporation boats, it is characterized by: coating has 1-750 μ m, preferably 15-500 μ m, the more preferably mean thickness of 50-150 μ m.
4. by at least one described evaporation boat of aforesaid right requirement, it is characterized by: the transition metal of the described periodic table of elements the 4th to 6 subgroup is selected from titanium, zirconium, vanadium, molybdenum and tungsten.
5. by at least one described evaporation boat of aforesaid right requirement, it is characterized by: this evaporation boat is provided with the coating of being made up of tungsten boride.
6. be used to make method, it is characterized by: on ceramic matrix material, apply the suspension of coated material, then carry out drying by at least one the described evaporation boat of claim 1-5.
7. be used to make method, it is characterized by: form coating by plasma spraying method by at least one the described evaporation boat of claim 1-5.
8. be used for carrying out the application of evaporation with metal pair matrix by at least one the described evaporation boat of claim 1-5.
9. be used for carrying out the application of vacuum belt evaporation with the metal pair flexible matrix by the described evaporation boat of claim 8.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE200510020945 DE102005020945B4 (en) | 2005-05-04 | 2005-05-04 | Ceramic evaporator boats, process for their preparation and their use |
| DE102005020945.9 | 2005-05-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101171361A true CN101171361A (en) | 2008-04-30 |
Family
ID=36615650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800150977A Pending CN101171361A (en) | 2005-05-04 | 2006-04-26 | Ceramic evaporator crucibles, method for the production thereof, and use thereof |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN101171361A (en) |
| DE (1) | DE102005020945B4 (en) |
| WO (1) | WO2006117119A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107904559A (en) * | 2017-12-21 | 2018-04-13 | 福州大学 | A kind of interior heating evaporation boat with composite ceramic coat and preparation method thereof |
| CN108203314A (en) * | 2017-12-29 | 2018-06-26 | 安徽金美新材料科技有限公司 | The high-temperature nano protective coating and preparation process of evaporation boat and corresponding evaporation boat |
| CN109972096A (en) * | 2017-12-28 | 2019-07-05 | 核工业西南物理研究院 | A method of in material boat surface deposited metal coating |
| CN115287603A (en) * | 2022-08-02 | 2022-11-04 | 广东广纳芯科技有限公司 | Evaporation method |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10184168B2 (en) | 2015-01-20 | 2019-01-22 | Kennametal Inc. | IMC evaporator boat-thermal insulation cartridge assembly |
| US20160208373A1 (en) | 2015-01-20 | 2016-07-21 | Kennametal Inc. | Imc evaporator boat assembly |
| DE102015112135B4 (en) | 2015-07-24 | 2023-04-06 | Kennametal Inc. | Evaporator body with titanium hydride coating, method for its manufacture and use |
| DE102019110950A1 (en) | 2019-04-29 | 2020-10-29 | Kennametal Inc. | Hard metal compositions and their applications |
| CN114394854B (en) * | 2022-01-18 | 2023-03-24 | 辽宁航安型芯科技股份有限公司 | Method for preparing silicon-based ceramic core isolation coating based on waste evaporation boat |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5118941A (en) * | 1974-08-08 | 1976-02-14 | Denki Kagaku Kogyo Kk | KINZOKUJOHATSUYOYOKI |
| DE3114467A1 (en) * | 1981-04-09 | 1982-10-28 | Siemens AG, 1000 Berlin und 8000 München | Evaporator boat, and method for its manufacture |
| US4446357A (en) * | 1981-10-30 | 1984-05-01 | Kennecott Corporation | Resistance-heated boat for metal vaporization |
| US4884788A (en) * | 1988-04-12 | 1989-12-05 | Union Carbide Corporation | Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon |
| DE3935163C1 (en) * | 1989-10-21 | 1990-10-11 | Sintec Keramik Gmbh, 8959 Buching, De | Polycrystalline material for resistance heat evapn. boats - comprises hot pressed electroconductive mixt. based on boron nitride |
| DE4100541C1 (en) * | 1991-01-10 | 1992-01-16 | Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De | |
| DE19714432C2 (en) * | 1997-04-08 | 2000-07-13 | Aventis Res & Tech Gmbh & Co | Carrier body with a protective coating and use of the coated carrier body |
| DE19821772A1 (en) * | 1998-05-14 | 1999-11-18 | Kempten Elektroschmelz Gmbh | Ceramic evaporator boats with improved initial wetting behavior |
-
2005
- 2005-05-04 DE DE200510020945 patent/DE102005020945B4/en not_active Expired - Fee Related
-
2006
- 2006-04-26 WO PCT/EP2006/003886 patent/WO2006117119A1/en active Application Filing
- 2006-04-26 CN CNA2006800150977A patent/CN101171361A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107904559A (en) * | 2017-12-21 | 2018-04-13 | 福州大学 | A kind of interior heating evaporation boat with composite ceramic coat and preparation method thereof |
| CN107904559B (en) * | 2017-12-21 | 2019-11-12 | 福州大学 | A kind of interior heating evaporation boat and preparation method thereof with composite ceramic coat |
| CN109972096A (en) * | 2017-12-28 | 2019-07-05 | 核工业西南物理研究院 | A method of in material boat surface deposited metal coating |
| CN108203314A (en) * | 2017-12-29 | 2018-06-26 | 安徽金美新材料科技有限公司 | The high-temperature nano protective coating and preparation process of evaporation boat and corresponding evaporation boat |
| CN115287603A (en) * | 2022-08-02 | 2022-11-04 | 广东广纳芯科技有限公司 | Evaporation method |
| CN115287603B (en) * | 2022-08-02 | 2023-09-12 | 广东广纳芯科技有限公司 | Vapor deposition method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006117119A1 (en) | 2006-11-09 |
| DE102005020945B4 (en) | 2007-07-12 |
| DE102005020945A1 (en) | 2006-11-09 |
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