CN108203314A - 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟 - Google Patents
蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟 Download PDFInfo
- Publication number
- CN108203314A CN108203314A CN201711476402.9A CN201711476402A CN108203314A CN 108203314 A CN108203314 A CN 108203314A CN 201711476402 A CN201711476402 A CN 201711476402A CN 108203314 A CN108203314 A CN 108203314A
- Authority
- CN
- China
- Prior art keywords
- evaporation boat
- protective coating
- nano
- boat
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 47
- 230000008020 evaporation Effects 0.000 title claims abstract description 47
- 239000011253 protective coating Substances 0.000 title claims abstract description 28
- 238000002360 preparation method Methods 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims abstract description 95
- 239000002086 nanomaterial Substances 0.000 claims abstract description 36
- 239000002904 solvent Substances 0.000 claims abstract description 27
- 229920005989 resin Polymers 0.000 claims abstract description 16
- 239000011347 resin Substances 0.000 claims abstract description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 15
- 238000000498 ball milling Methods 0.000 claims description 13
- 239000002002 slurry Substances 0.000 claims description 13
- 238000005516 engineering process Methods 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 5
- 229910039444 MoC Inorganic materials 0.000 claims description 5
- 150000002576 ketones Chemical class 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims 1
- LCDFWRDNEPDQBV-UHFFFAOYSA-N formaldehyde;phenol;urea Chemical compound O=C.NC(N)=O.OC1=CC=CC=C1 LCDFWRDNEPDQBV-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract description 5
- 239000011733 molybdenum Substances 0.000 abstract description 5
- 229910052721 tungsten Inorganic materials 0.000 abstract description 4
- 239000010937 tungsten Substances 0.000 abstract description 4
- 239000002131 composite material Substances 0.000 abstract description 2
- 239000011247 coating layer Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- -1 phenolic aldehyde Chemical class 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 235000019795 sodium metasilicate Nutrition 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5006—Boron compounds
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Paints Or Removers (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711476402.9A CN108203314A (zh) | 2017-12-29 | 2017-12-29 | 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711476402.9A CN108203314A (zh) | 2017-12-29 | 2017-12-29 | 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN108203314A true CN108203314A (zh) | 2018-06-26 |
Family
ID=62606078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711476402.9A Pending CN108203314A (zh) | 2017-12-29 | 2017-12-29 | 蒸发舟的高温纳米保护涂层及制备工艺及对应蒸发舟 |
Country Status (1)
Country | Link |
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CN (1) | CN108203314A (zh) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62294165A (ja) * | 1986-06-14 | 1987-12-21 | Tokyo Tungsten Co Ltd | 蒸着用タングステンヒ−タボ−ト |
DE4238514A1 (de) * | 1992-11-14 | 1994-05-19 | Leybold Ag | Verfahren zum Beschicken eines Verdampferschiffchens für eine Vorrichtung zur Beschichtung von Substraten |
JP2003096558A (ja) * | 2001-09-21 | 2003-04-03 | Hitachi Chem Co Ltd | 蒸着ボート |
CN1958836A (zh) * | 2005-11-04 | 2007-05-09 | 通用电气公司 | 用于蒸发金属的容器以及制造该容器的方法 |
WO2008025447A1 (de) * | 2006-09-01 | 2008-03-06 | Esk Ceramics Gmbh & Co. Kg | Keramische verdampferschiffchen, verfahren zu ihrer herstellung und ihre verwendung |
CN101171361A (zh) * | 2005-05-04 | 2008-04-30 | Esk陶瓷有限及两合公司 | 陶瓷蒸发舟、其制造方法及其应用 |
CN101171359A (zh) * | 2005-05-04 | 2008-04-30 | Esk陶瓷有限及两合公司 | 用铜或银涂覆基质的方法 |
US20090217876A1 (en) * | 2008-02-28 | 2009-09-03 | Ceramic Technologies, Inc. | Coating System For A Ceramic Evaporator Boat |
CN107326330A (zh) * | 2017-06-30 | 2017-11-07 | 福州大学 | 一种具有氧化铝多孔结构缓冲层的内热式一体化蒸发舟 |
-
2017
- 2017-12-29 CN CN201711476402.9A patent/CN108203314A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62294165A (ja) * | 1986-06-14 | 1987-12-21 | Tokyo Tungsten Co Ltd | 蒸着用タングステンヒ−タボ−ト |
DE4238514A1 (de) * | 1992-11-14 | 1994-05-19 | Leybold Ag | Verfahren zum Beschicken eines Verdampferschiffchens für eine Vorrichtung zur Beschichtung von Substraten |
JP2003096558A (ja) * | 2001-09-21 | 2003-04-03 | Hitachi Chem Co Ltd | 蒸着ボート |
CN101171361A (zh) * | 2005-05-04 | 2008-04-30 | Esk陶瓷有限及两合公司 | 陶瓷蒸发舟、其制造方法及其应用 |
CN101171359A (zh) * | 2005-05-04 | 2008-04-30 | Esk陶瓷有限及两合公司 | 用铜或银涂覆基质的方法 |
CN1958836A (zh) * | 2005-11-04 | 2007-05-09 | 通用电气公司 | 用于蒸发金属的容器以及制造该容器的方法 |
WO2008025447A1 (de) * | 2006-09-01 | 2008-03-06 | Esk Ceramics Gmbh & Co. Kg | Keramische verdampferschiffchen, verfahren zu ihrer herstellung und ihre verwendung |
US20090217876A1 (en) * | 2008-02-28 | 2009-09-03 | Ceramic Technologies, Inc. | Coating System For A Ceramic Evaporator Boat |
CN107326330A (zh) * | 2017-06-30 | 2017-11-07 | 福州大学 | 一种具有氧化铝多孔结构缓冲层的内热式一体化蒸发舟 |
Non-Patent Citations (1)
Title |
---|
温秉权: "《机械制造基础》", 31 January 2007, 北京理工大学出版社 * |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: Building 1, Building A, Building 603, Huaqiang Creative Industry Park, Biyan Community, Guangming Street, Guangming District, Shenzhen City, Guangdong Province, 518000 Applicant after: Shenzhen Jinmei New Material Technology Co.,Ltd. Address before: Anhui Huainan city Shouxian County Xinqiao International Industrial Park Xinqiao avenue to the east of the New Bridge Avenue, the north side of the Chuang Kai Tech Park 3 R & D building Applicant before: ANHUI JINMEI NEW MATERIAL TECHNOLOGY CO.,LTD. |
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CB02 | Change of applicant information | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180626 |
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RJ01 | Rejection of invention patent application after publication |