CN101122640A - Variable reflectivity mirror filming device and its filming method - Google Patents
Variable reflectivity mirror filming device and its filming method Download PDFInfo
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- CN101122640A CN101122640A CNA2007100462481A CN200710046248A CN101122640A CN 101122640 A CN101122640 A CN 101122640A CN A2007100462481 A CNA2007100462481 A CN A2007100462481A CN 200710046248 A CN200710046248 A CN 200710046248A CN 101122640 A CN101122640 A CN 101122640A
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Abstract
A coating device and method is used for the coated graded reflectance mirror in vacuum chamber of the prior coating machine. The coating device includes a mounting frame, a stepper motor, a substrate fixture, a baffle mounting disc, a baffle, a positioning component, a supporting component and a transmission component. The mounting frame is arranged in a vacuum chamber; the baffle is designed according to a variable thickness layer; the stepper motor and the transmission mechanism control the rotation of the substrate fixture and the baffle mounting disc; and the positioning component conducts the positioning of the baffle. The coating method includes the following steps: a substrate is arranged in the substrate fixture; the baffle is arranged in the baffle mounting disc; the stepper motor controls the substrate fixture to rotate uniformly; the stepper motor and the positioning component control the rotation and stop of the baffle mounting disc so as to arranged the baffle below the substrate. The invention characterized in simple and compact structure and easy operation can coat a uniform thickness layer and a variable thickness layer so as to get the graded reflectance mirror.
Description
Technical field
The present invention relates to plated film, particularly a kind of coating apparatus that is coated with variable reflectivity mirror and film plating process that is used for box electron gun evaporation coating machine.
Background technology
Box electron gun evaporation coating machine is the optical coating equipment of using always.This equipment mainly is made up of three parts: vacuum system, thermal evaporation system, thicknesses of layers control system.Coating process carries out in vacuum chamber.Fig. 1 is the structural drawing of vacuum chamber.Comprise electron beam evaporation source 1, baffle plate 2, anchor clamps erecting frame 3, baking resistance wire 4, monitoring piece rotating disc 5 in the vacuum chamber.Wherein electron beam evaporation source 1 is made up of electron gun and crucible, and the electron stream that electron gun sends is accelerated to be got in the crucible, the coating materials in the crucible is heated, thereby evaporate the coating materials particle.Anchor clamps erecting frame 3 can mounting spherical arch anchor clamps, and sphere arch anchor clamps can be placed the substrate that needs plated film.
Before plated film, allow vacuum system that vacuum chamber is extracted into certain vacuum tightness, utilize baking 4 pairs of vacuum chambers of resistance wire and substrate to heat; Rolling clamp erecting frame 3; Monitoring piece rotating disc 5 is transferred to suitable position.In the coating process, open the 1 pair of coating materials heating in electron gun evaporation source to evaporate the coating materials particle.Open baffle plate 2, the coating materials particle deposits on the substrate; After having deposited certain thickness rete, close baffle plate 2, close electron beam evaporation source 1.This just plates the skim that is over.Crucible is adjusted to the another location, repeat above-mentioned step then, to be coated with the rete of another material.After plated film finishes, treat temperature cooling back taking-up.It is even that the film plating process of this routine and equipment coat thicknesses of layers, so optical property is identical everywhere on the surface.
If the diaphragm that coats reflectivity diametrically is gradual change, then this diaphragm just is called variable reflectivity mirror.Gaussian curve distributes or this curve distribution of superelevation upwards having along the footpath generally to require reflectivity, so variable reflectivity mirror often is called as Gauss's mirror again, or this mirror of superelevation.Gauss's mirror, or the making of this mirror of superelevation require some rete or whole rete to have the variation in thickness of gradual change, and the rete of one deck variation in thickness is clipped in the middle of other retes.Being coated with of variation in thickness layer needs to use the baffle plate with given shape, and this is that conventional coating machine is not accomplished.Gauss's mirror, or this mirror of superelevation is mainly as the output coupler of astable cavity laser to improve output beam quality, also has the advantage of bigger model volume and higher model resolution.
Summary of the invention
The objective of the invention is to propose a kind of coating apparatus that is coated with variable reflectivity mirror and film plating process that is used for the electron gun evaporation coating machine.Characteristics simple in structure, compact, processing ease that this device should have can coat satisfactory variable reflectivity mirror under same vacuum environment, do not need to repeat to vacuumize.
Technical solution of the present invention is as follows:
A kind of coating apparatus that is coated with variable reflectivity mirror that is used for the electron gun evaporation coating machine, comprise erecting frame, it is characterized in that this erecting frame and a horizontal base plate are fixedly linked, on this substrate, connect a horizontal motor mounting plate by support bar, this motor mounting plate is provided with first stepper motor and second stepper motor, described first stepper motor is connected with the substrate turning axle with the baffle mounting disc turning axle respectively with second spring coupling by first spring coupling with second stepper motor, described substrate turning axle and baffle mounting disc turning axle are installed in respectively on the described substrate by bearing, the lower end of described substrate turning axle and baffle mounting disc turning axle is connected with baffle mounting disc with fixture mount respectively, described fixture mount is connected with the substrate fixture of placing for substrate to be coated, described baffle mounting disc is provided with the first measure-alike circular hole and second circular hole, first circular hole is used to install the baffle plate that is coated with the variable thickness layer, second circular hole is not installed baffle plate, also be provided with first small sircle hole and second small sircle hole on the edge of described baffle mounting disc, the center of circle of described first small sircle hole and first circular hole is on the same diameter of this baffle mounting disc, the center of circle of the center of circle of second small sircle hole and second circular hole is on another diameter of this baffle mounting disc, and this two diameter is vertical mutually;
One side of the below of described substrate is side plate fixedly, the installed inside one optoelectronic switch support of described side plate, one groove type optoelectronic switch is installed on the described optoelectronic switch support, when described baffle mounting disc is rotated by first step motor drive, when described first small sircle hole and second small sircle hole rotate to the groove of described optoelectronic switch, described optoelectronic switch will send positioning signal, make described baffle mounting disc location motionless by controller;
The described through hole that is coated with the baffle plate of variable thickness layer has specific shape, by the variable reflectivity mirror design decision that is coated with;
Described second stepper motor and first stepper motor are connected with outdoor stepper motor driver by the signaling interface in the vacuum chamber, and this stepper motor driver links to each other with controller, and described optoelectronic switch is connected with controller.
The structure of described erecting frame is identical with existing anchor clamps erecting frame.
Utilize the coating apparatus of above-mentioned variable reflectivity mirror to carry out the method for plated film, comprise the following steps:
1. utilize computer programming routinely and make the described baffle plate that is coated with the variable thickness layer;
2. described baffle plate is placed in first circular hole of described baffle mounting disc, described substrate to be coated places in the described substrate fixture, the erecting frame of the coating apparatus of described variable reflectivity mirror is installed in the position of anchor clamps erecting frame of the vacuum chamber of described electron gun evaporation coating machine;
3. start the power supply of described stepper motor driver and controller, control described stepper motor driver by controller, drive first stepper motor, make second circular hole of baffle mounting disc go to described substrate to be coated under, at this moment described optoelectronic switch sends positioning signal by described second small sircle hole, it is motionless to make described baffle mounting disc locate, and closes door for vacuum chamber and begin to vacuumize;
4. after plated film begins, control described stepper motor driver by controller and drive the second stepper motor uniform rotation, the substrate that drives in the substrate fixture is done uniform rotation, at first is coated with required uniform thickness rete according to a conventional method;
5. non-uniform thickness rete in the middle of being coated with: described controller drives the slowly rotation along clockwise direction of the first stepping driven by motor baffle mounting disc by stepper motor driver, rotating to substrate fixture until described baffle plate allows under the described substrate, at this moment first small sircle hole groove by optoelectronic switch just, optoelectronic switch sends signal and makes baffle mounting disc stop operating and lock, passing through the controller drives second stepper motor uniform rotation, drive substrate fixture and allow described substrate do uniform rotation, be coated with the non-uniform thickness rete;
6. be coated with remaining uniform thickness rete: described controller control step motor driver drives the slowly rotation in the counterclockwise direction of the first stepping driven by motor baffle mounting disc, under second circular hole goes to described substrate, at this moment optoelectronic switch sends signal and makes the baffle mounting disc locking, is coated with remaining required uniform thickness rete more according to a conventional method;
7. after finishing substrate coating, from vacuum chamber, take out and handle film plating substrate routinely.
Technique effect of the present invention;
1, the coating apparatus of variable reflectivity mirror of the present invention, connects signal wire and just can use as long as described device is installed in the vacuum chamber based on original optical coating system.
2, the present invention uses step motor drive substrate and baffle mounting disc.Stepper motor can be controlled substrate and at the uniform velocity rotate.By the segmentation of stepper motor driver, the corner of stepper motor can be accomplished very little, thereby accurately controls the corner of baffle mounting disc.
3, the present invention uses optoelectronic switch that baffle position is positioned.Two small sircle holes are set at the baffle mounting disc edge, and this small sircle hole is positioned on the same diameter of baffle mounting disc with the center of circle of two circular holes respectively.The butterfly mounting disc, when small sircle hole passed through the optoelectronic switch groove, optoelectronic switch sent signal, can locate baffle plate.
4, the upper-lower position of baffle mounting disc and substrate fixture can be adjusted among the present invention, so the distance between baffle plate and substrate can adjust.
5, the present invention can finish the whole plated film flow process of variable reflectivity mirror in a vacuum environment, does not need to repeat to vacuumize.
Description of drawings
Fig. 1 is the vacuum chamber structure synoptic diagram of box electron gun thermal evaporation coating machine
Fig. 2 is the stereographic map of the coating apparatus of variable reflectivity mirror of the present invention
Fig. 3 is the structural representation of the coating apparatus of variable reflectivity mirror of the present invention
Fig. 4 is the synoptic diagram of baffle mounting disc and baffle plate in apparatus of the present invention
Fig. 5 is the baffle shapes of the present invention process flow diagram of designing program
Fig. 6 is an embodiment baffle design shape
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 1, Fig. 2 and Fig. 3 earlier, Fig. 1 is the vacuum chamber structure synoptic diagram of existing electron gun thermal evaporation coating machine, and Fig. 2 is the stereographic map of the coating apparatus of variable reflectivity mirror of the present invention, and Fig. 3 is the structural representation of the coating apparatus of variable reflectivity mirror of the present invention.As seen from the figure, the coating apparatus of variable reflectivity mirror of the present invention, comprise erecting frame 11, this erecting frame 11 and a horizontal base plate 15 are fixedly linked, on this substrate 15, connect a horizontal motor mounting plate 6 by support bar 18, this motor mounting plate 6 is provided with first stepper motor 9 and second stepper motor 14, described first stepper motor 9 is connected with substrate turning axle 17 with baffle mounting disc turning axle 16 respectively with second spring coupling 27 by first spring coupling 28 with second stepper motor 14, described substrate turning axle 17 and baffle mounting disc turning axle 16 are installed in respectively on the described substrate 15 by bearing, the lower end of described substrate turning axle 17 and baffle mounting disc turning axle 16 is connected with baffle mounting disc 13 with fixture mount 7 respectively, described fixture mount 7 is connected with the substrate fixture of placing for substrate to be coated 12, described baffle mounting disc 13 is provided with the first measure-alike circular hole 20 and second circular hole 21, referring to Fig. 4, first circular hole 20 is used to install the baffle plate 26 that is coated with the variable thickness layer, second circular hole 21 is not installed baffle plate, also be provided with first small sircle hole 22 and second small sircle hole 23 on the edge of described baffle mounting disc 13, the center of circle of described first small sircle hole 22 and first circular hole 20 is on the same diameter of this baffle mounting disc 13, the center of circle of the center of circle of second small sircle hole 23 and second circular hole 21 is on another diameter of this baffle mounting disc 13, and this two diameter is vertical mutually;
One side of the below of described substrate 15 is side plate 10 fixedly, installed inside one optoelectronic switch support 8 referring to the described side plate 10 of Fig. 3, one groove type optoelectronic switch 19 is installed on the described optoelectronic switch support 8, when described baffle mounting disc 13 during by first stepper motor, 9 driven in rotation, when described first small sircle hole 22 and second small sircle hole 23 rotate to the groove of described optoelectronic switch 19, described optoelectronic switch 19 will send positioning signal, make described baffle mounting disc 13 location motionless;
The described through hole that is coated with the baffle plate 26 of variable thickness layer has specific shape, by the variable reflectivity mirror design decision that is coated with;
Described second stepper motor 14 and first stepper motor 9 are connected with outdoor stepper motor driver 24 by the signaling interface in the vacuum chamber, and this stepper motor driver 24 links to each other with controller 25, and described optoelectronic switch 19 is connected with controller 25.
The structure of described erecting frame 11 is identical with existing anchor clamps erecting frame 3.So that the installation of apparatus of the present invention.
Utilize the coating apparatus of variable reflectivity mirror of the present invention to carry out the method for plated film, it is characterized in that comprising the following steps:
1. utilize computer programming and make the described baffle plate 26 that is coated with the variable thickness layer;
2. described baffle plate 26 is placed in first circular hole 20 of described baffle mounting disc 13, described substrate to be coated places 12 li of described substrate fixtures, the erecting frame 11 of the coating apparatus of described variable reflectivity mirror is installed in the position of anchor clamps erecting frame 3 of the vacuum chamber of described electron gun evaporation coating machine;
3. start the power supply of described stepper motor driver 24 and controller 25, by the described stepper motor driver 24 of controller 25 controls, drive first stepper motor 9, make second circular hole 21 of baffle mounting disc 13 go to described substrate to be coated under, at this moment described optoelectronic switch 19 sends positioning signal by described second small sircle hole 23, it is motionless to make described baffle mounting disc 13 locate, and closes door for vacuum chamber and begin to vacuumize;
4. after plated film begins, drive 14 uniform rotation of second stepper motor by the described stepper motor driver 24 of controller 25 controls, the substrate that drives 12 li of substrate fixtures is done uniform rotation, at first is coated with required uniform thickness rete according to a conventional method;
5. non-uniform thickness rete in the middle of being coated with: described controller 25 drives first stepper motor 9 by stepper motor driver 24 and drives baffle mounting disc 13 slowly rotation along clockwise direction, rotating to substrate fixture 12 until described baffle plate 26 allows under the described substrate, at this moment first small sircle hole 22 passes through the groove of optoelectronic switch 19 just, optoelectronic switch 19 sends signal and makes baffle mounting disc 13 stop operating and lock, driving 14 uniform rotation of second stepper motor by controller 25, drive substrate fixture 12 and allow described substrate do uniform rotation, be coated with the non-uniform thickness rete;
6. be coated with remaining uniform thickness rete: described controller 25 control step motor drivers 24 drive first stepper motor 9 and drive baffle mounting disc 13 slowly rotation in the counterclockwise direction, under second circular hole 21 goes to described substrate, at this moment optoelectronic switch 19 sends signal and makes baffle mounting disc 13 lockings, is coated with remaining required uniform thickness rete more according to a conventional method;
7. after finishing substrate coating, from vacuum chamber, take out and handle film plating substrate routinely.
The shape of described baffle plate 26 can be by the program design of computing machine, and the process flow diagram of program as shown in Figure 5.The design of the shape of described baffle plate 26 is not a content of the present invention, is not described in detail so pardon me at this.At first the refractive index, optical maser wavelength and description reflectivity contour curve R (the r)=R that use coating materials
0Exp[-2 (r/ ω)
n] have in the loading routines such as related parameter and Unit Installation parameter.Utilizing the Computer Design baffle plate is not content of the present invention, only does simple declaration for an embodiment here.As use the refractive index of two kinds of coating materials to be respectively: 1.46 and 2.05; Optical maser wavelength is 1064nm; The center maximum reflectivity is 0.85; Gauss's radius w=8mm; Gaussian curve exponent number n=3; Evaporation source 1 is to substrate distance h=300mm, baffle plate to substrate apart from d=5mm.Working procedure can draw film system and the baffle shapes designed.The calculating of embodiment can draw (HL) ^3H of 7 tunics system, and wherein the 4th layer is the variable thickness layer.Usually before being coated with the 7 tunics system of design, also should be coated with 2 layers antireflective film, i.e. S+AR+ (HL) ^3H.The shape that calculates baffle plate as shown in Figure 6.
By the result who calculates, on flake aluminum, prune out the shape of the baffle plate 26 of design.Then this baffle plate 26 is placed on first circular hole 20 of baffle mounting disc 13.The substrate that needs plated film is placed on 12 li of substrate fixtures and is installed to 7 li of fixture mount.The coating apparatus of variable reflectivity mirror of the present invention is installed in the vacuum chamber of coating machine, connects the associated wiring of described stepper motor and optoelectronic switch 19 as requested.At first connect the power supply of optoelectronic switch 19, manually butterfly mounting disc 13, when optoelectronic switch 19 sends signal by second small sircle hole 23, the baffle mounting disc 13 of stopping the rotation.At this moment second circular hole 21 is under the substrate of wanting plated film.Open driver 24 and controller 25 power supplys, at this moment second stepper motor 14 and first stepper motor 9 pin motionless.Therefore the position of baffle mounting disc 13 and substrate fixture 12 also is lockable.Closing door for vacuum chamber vacuumizes then.
After being extracted into the vacuum tightness of appointment in the vacuum chamber.Utilizing controller 25 to drive second stepper motor, 14 control substrates at the uniform velocity rotates with certain speed.According to the film system of design, on substrate, plate the uniform thickness layer of 2 layers of antireflective film and 3 layers according to conventional method.Because which floor does not use baffle plate 26 for this, so baffle mounting disc 13 continues locking.According to routine operation, be coated with the uniform thickness layer of antireflective film and 3 layers, be coated with the 4th layer, just during the variable thickness layer, controller 25 output pulsed drive first stepper motor 9 allows baffle mounting disc 13 along slowly rotation clockwise, under baffle plate 26 rotated to substrate, at this moment the light that sends of optoelectronic switch 19 was by second small sircle hole 22, and optoelectronic switch 19 sends signal and makes baffle mounting disc 13 stop operating.With respect to the origin-location, baffle mounting disc 13 has been rotated 90 degree.At this moment baffle plate 26 just in time is positioned under the substrate to be coated.After being coated with the variable thickness layer,, do not use baffle plate because all the other 3 layers all be the uniform thickness layer.Therefore make controller 25 output pulsed drive first stepper motor 9 allow baffle mounting disc 13, second circular hole 21 of baffle mounting disc 13 is positioned under the substrate to be coated along being rotated counterclockwise 90 degree.After being coated with remaining 3 layers of uniform thickness layer, close the power supply of first stepper motor 9, second stepper motor 14 and optoelectronic switch 19.Take out substrate according to the routine operation flow process.
In sum, it is simple in structure, compact that the present invention has, and the characteristics of processing ease can coat satisfactory variable reflectivity mirror.
Claims (3)
1. coating apparatus that is coated with variable reflectivity mirror that is used for the electron gun evaporation coating machine, comprise erecting frame (11), it is characterized in that this erecting frame (11) and a horizontal base plate (15) are fixedly linked, on this substrate (15), connect a horizontal motor mounting plate (6) by support bar (18), this motor mounting plate (6) is provided with first stepper motor (9) and second stepper motor (14), described first stepper motor (9) is connected with substrate turning axle (17) with baffle mounting disc turning axle (16) respectively with second spring coupling (27) by first spring coupling (28) with second stepper motor (14), described substrate turning axle (17) and baffle mounting disc turning axle (16) are installed in respectively on the described substrate (15) by bearing, the lower end of described substrate turning axle (17) and baffle mounting disc turning axle (16) is connected with baffle mounting disc (13) with fixture mount (7) respectively, described fixture mount (7) is connected with the substrate fixture of placing for substrate to be coated (12), described baffle mounting disc (13) is provided with measure-alike first circular hole (20) and second circular hole (21), first circular hole (20) is used to install the baffle plate (26) that is coated with the variable thickness layer, second circular hole (21) is not installed baffle plate, also be provided with first small sircle hole (22) and second small sircle hole (23) on the edge of described baffle mounting disc (13), the center of circle of described first small sircle hole (22) and first circular hole (20) is on the same diameter of this baffle mounting disc (13), the center of circle of the center of circle of second small sircle hole (23) and second circular hole (21) is on another diameter of this baffle mounting disc (13), and this two diameter is vertical mutually;
One side of the below of described substrate (15) is side plate (10) fixedly, the installed inside one optoelectronic switch support (8) of described side plate (10), described optoelectronic switch support (8) is gone up a groove type optoelectronic switch (19) is installed, when described baffle mounting disc (13) during by first stepper motor (9) driven in rotation, when described first small sircle hole (22) or second small sircle hole (23) rotate to the groove of described optoelectronic switch (19), described optoelectronic switch (19) will send positioning signal by described first small sircle hole (22) or second small sircle hole (23), make described baffle mounting disc (13) location motionless;
The described through hole that is coated with the baffle plate (26) of variable thickness layer has specific shape, by the design decision of the variable reflectivity mirror that is coated with;
Described second stepper motor (14) and first stepper motor (9) are connected with outdoor stepper motor driver (24) by the signaling interface in the vacuum chamber, this stepper motor driver (24) links to each other with controller (25), and described optoelectronic switch (19) is connected with controller (25).
2. the coating apparatus of variable reflectivity mirror according to claim 1 is characterized in that the structure of described erecting frame (11) is identical with existing anchor clamps erecting frame (3).
3. a coating apparatus that utilizes the described variable reflectivity mirror of claim 1 carries out the method for plated film, it is characterized in that comprising the following steps:
1. utilize computer programming and make the described baffle plate (26) that is coated with the variable thickness layer;
2. described baffle plate (26) is placed in first circular hole (20) of described baffle mounting disc (13), described substrate to be coated places described substrate fixture (12) lining, the erecting frame (11) of the coating apparatus of described variable reflectivity mirror is installed in the position of anchor clamps erecting frame (3) of the vacuum chamber of described electron gun evaporation coating machine;
3. start the power supply of described stepper motor driver (24) and controller (25), control described stepper motor driver (24) by controller (25), drive first stepper motor (9), make second circular hole (21) of baffle mounting disc (13) go to described substrate to be coated under, at this moment described optoelectronic switch (19) sends positioning signal by described second small sircle hole (23), it is motionless to make described baffle mounting disc (13) locate, and closes door for vacuum chamber and begin to vacuumize;
4. after plated film begins, control described stepper motor driver (24) by controller (25) and drive second stepper motor (14) uniform rotation, the substrate to be coated that drives substrate fixture (12) lining is done uniform rotation, at first is coated with required uniform thickness rete according to a conventional method;
5. non-uniform thickness rete in the middle of being coated with: described controller (25) drives first stepper motor (9) by stepper motor driver (24) and drives baffle mounting disc (13) slowly rotation along clockwise direction, rotating to substrate fixture (12) until described baffle plate (26) allows under the described substrate to be coated, at this moment first small sircle hole (22) passes through the groove of optoelectronic switch (19) just, optoelectronic switch (19) sends signal and makes baffle mounting disc (13) stop operating and lock, driving second stepper motor (14) uniform rotation by controller (25), drive substrate fixture (12) and allow described substrate to be coated do uniform rotation, be coated with the non-uniform thickness rete;
6. be coated with remaining uniform thickness rete: described controller (25) control step motor driver (24) drives first stepper motor (9) and drives baffle mounting disc (13) slowly rotation in the counterclockwise direction, under second circular hole (21) goes to described substrate to be coated, at this moment optoelectronic switch (19) sends signal and makes baffle mounting disc (13) locking, is coated with remaining required uniform thickness rete more according to a conventional method;
7. after finishing substrate coating, from vacuum chamber, take out and handle film plating substrate routinely.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100462481A CN100507607C (en) | 2007-09-21 | 2007-09-21 | Variable reflectivity mirror filming device and its filming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100462481A CN100507607C (en) | 2007-09-21 | 2007-09-21 | Variable reflectivity mirror filming device and its filming method |
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| Publication Number | Publication Date |
|---|---|
| CN101122640A true CN101122640A (en) | 2008-02-13 |
| CN100507607C CN100507607C (en) | 2009-07-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100462481A Expired - Fee Related CN100507607C (en) | 2007-09-21 | 2007-09-21 | Variable reflectivity mirror filming device and its filming method |
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| CN (1) | CN100507607C (en) |
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| CN105607173A (en) * | 2016-01-07 | 2016-05-25 | 西安工业大学 | Circular radial-gradient neutral density filter and preparation method and apparatus for the same |
| CN108193167A (en) * | 2017-12-11 | 2018-06-22 | 中国航空工业集团公司洛阳电光设备研究所 | The planet coating clamp shutter and production method that plated film thicknesses of layers arbitrarily changes |
| CN108570653A (en) * | 2018-04-27 | 2018-09-25 | 福建省石狮市通达电器有限公司 | A kind of preparation method of gradual change PET film |
| CN108624840A (en) * | 2017-03-22 | 2018-10-09 | 浙江师范大学 | A kind of coating machine |
| CN109207950A (en) * | 2018-10-23 | 2019-01-15 | 宁波工程学院 | A kind of film plating process of non-homogeneous plural layers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7173956B2 (en) * | 2003-02-12 | 2007-02-06 | Northrop Grumman Corporation | Electrically controlled uniform or graded reflectivity electro-optic mirror |
| CN201110900Y (en) * | 2007-09-21 | 2008-09-03 | 中国科学院上海光学精密机械研究所 | Film coating apparatus of gradual change reflection index lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105607173A (en) * | 2016-01-07 | 2016-05-25 | 西安工业大学 | Circular radial-gradient neutral density filter and preparation method and apparatus for the same |
| CN105607173B (en) * | 2016-01-07 | 2018-09-14 | 西安工业大学 | Round radial gradual neutral-density filter and preparation method thereof and device |
| CN108624840A (en) * | 2017-03-22 | 2018-10-09 | 浙江师范大学 | A kind of coating machine |
| CN108193167A (en) * | 2017-12-11 | 2018-06-22 | 中国航空工业集团公司洛阳电光设备研究所 | The planet coating clamp shutter and production method that plated film thicknesses of layers arbitrarily changes |
| CN108193167B (en) * | 2017-12-11 | 2019-10-25 | 中国航空工业集团公司洛阳电光设备研究所 | The planet coating clamp shutter and production method that plated film thicknesses of layers arbitrarily changes |
| CN108570653A (en) * | 2018-04-27 | 2018-09-25 | 福建省石狮市通达电器有限公司 | A kind of preparation method of gradual change PET film |
| CN109207950A (en) * | 2018-10-23 | 2019-01-15 | 宁波工程学院 | A kind of film plating process of non-homogeneous plural layers |
| CN109207950B (en) * | 2018-10-23 | 2020-09-11 | 宁波工程学院 | Coating method of non-uniform multilayer film |
| CN110863186A (en) * | 2019-12-09 | 2020-03-06 | 济南晶众光电科技有限公司 | Laser Gaussian lens coating tool and coating method |
| CN110863186B (en) * | 2019-12-09 | 2020-07-14 | 济南晶众光电科技有限公司 | Laser Gaussian lens coating tool and coating method |
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| CN100507607C (en) | 2009-07-01 |
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