CN201141921Y - Inclined deposition coating device - Google Patents
Inclined deposition coating device Download PDFInfo
- Publication number
- CN201141921Y CN201141921Y CNU200820054561XU CN200820054561U CN201141921Y CN 201141921 Y CN201141921 Y CN 201141921Y CN U200820054561X U CNU200820054561X U CN U200820054561XU CN 200820054561 U CN200820054561 U CN 200820054561U CN 201141921 Y CN201141921 Y CN 201141921Y
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- anchor clamps
- wedge
- erecting frame
- stepper motor
- spherical
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- 230000008021 deposition Effects 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 title claims abstract description 32
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 230000008020 evaporation Effects 0.000 claims abstract description 21
- 238000001704 evaporation Methods 0.000 claims abstract description 21
- 238000007747 plating Methods 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 22
- 238000009826 distribution Methods 0.000 claims description 3
- 230000011664 signaling Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract 2
- 238000000151 deposition Methods 0.000 description 27
- 239000010408 film Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013401 experimental design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
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- 239000002699 waste material Substances 0.000 description 1
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Abstract
An inclined deposition coating device for coating sculpture films in an electron gun evaporation coating machine comprises an installation frame, a spherical crown-shaped clamp, a wedge block, a sleeve, a stepping motor driver and a computer, wherein the installation frame is used for installing the device in a vacuum chamber of the coating machine; the wedge-shaped block is designed according to the inclination angle; the detachable sleeve is used for connecting the stepping motor and the spherical cap-shaped clamp; the stepping motor is used for controlling the spherical crown-shaped fixture to rotate at a constant speed; the stepping motor is connected with the driver through a cable, the driver is connected with the computer through a cable, and the computer controls the rotating speed of the clamp through an existing program. The utility model discloses the base inclination is introduced in the initiative, once can plate the sculpture film at the different inclinations of multi-disc, has simple structure, and is compact, characteristics easy to operate.
Description
Technical field
The utility model relates to plated film, particularly a kind ofly is used for the inclined deposition plating apparatus that the electron gun evaporation coating machine is coated with the sculpture film.
Background technology
Box electron gun evaporation coating machine is the optical coating equipment of using always.This equipment mainly is made up of three parts: vacuum system, thermal evaporation system, thicknesses of layers control system.Coating process carries out in vacuum chamber.Fig. 1 is the structural drawing of the vacuum chamber of this box electron gun evaporation coating machine.Comprise electron beam evaporation source 1, baffle plate 2, anchor clamps erecting frame 3, baking resistance wire 4, monitoring piece rotating disc 5 in the vacuum chamber.Wherein electron beam evaporation source 1 is made up of electron gun and crucible, and the electron stream that electron gun sends is accelerated to be got in the crucible, the coating materials in the crucible is heated, thereby evaporate the coating materials particle.Anchor clamps erecting frame 3 can mounting spherical arch anchor clamps, and sphere arch anchor clamps can be placed the substrate that needs plated film.
Before plated film, allow vacuum system that vacuum chamber is extracted into certain vacuum tightness, utilize baking 4 pairs of vacuum chambers of resistance wire and substrate to heat; Rolling clamp erecting frame 3; Monitoring piece rotating disc 5 is transferred to suitable position.In the coating process, open the 1 pair of coating materials heating in electron gun evaporation source to evaporate the coating materials particle.Open baffle plate 2, the coating materials particle deposits on the substrate; After having deposited certain thickness rete, close baffle plate 2, close electron beam evaporation source 1.This just plates the skim that is over.Crucible is adjusted to the another location, repeat above-mentioned step then, to be coated with the rete of another material.After plated film finishes, treat temperature cooling back taking-up.It is even that the film plating process of this routine and equipment coat thicknesses of layers, so optical property is identical everywhere on the surface.
The sculpture film is a kind of deposit film that depends on the inclined deposition technology, in deposition process, the angle of inclination and the rotational speed of control substrate, can obtain the film of different-shape and performance, as optical anisotropic film, birefringent films etc., this film all have at optical device and function element and use prospect widely.The inclined deposition technology can prepare the favor that the technology with special nanostructured is subjected to vast nanometer fan as a kind of again simultaneously.At present, the inclined deposition plating apparatus of using is by two step motor control, because the needs of three-dimensional motion, substrate must be fixed, and can only place a slice substrate at every turn, this is for groping different preparation technologies, and the technological parameter between the experiment of homogeneous is not frequent owing to stabilization of equipment performance and repeated influence, so that comparability is often not ideal enough.A vacuum can only be coated with a slice substrate simultaneously, for the man power and material all is great waste, in addition, owing in vacuum chamber, be in the stepper motor of three-dimensional motion, be subjected to the restriction (being lower than 135 ℃) of the serviceability temperature of stepper motor own, deposition process can not add baking, has limited scope of experiment greatly.Therefore, how shortening the research and development cycle of film, accelerate the industrialization process of new film product, is the problem that thin film work person relatively is concerned about.
Summary of the invention
The purpose of this utility model is to overcome the difficulty of above-mentioned existing inclined deposition technology, a kind of inclined deposition plating apparatus that is used for being coated with in the electron gun evaporation coating machine sculpture film is provided, to realize that vacuum can be coated with the sculpture film of different mode of deposition, the utility model device should have simple in structure, compactness, maneuverable characteristics.
Design philosophy of the present utility model is: utilize the wedge of initiatively introducing to constitute the condition of substrate coating inclined deposition; Guarantee not block mutually between each substrate by spherical design of Clamping Apparatus, increase single and be coated with substrate quantity; Introduce the synchronous rotation that stepper motor guarantees to be coated with substrate, guaranteeing to reduce stepper motor quantity when original three-dimensional motion characteristic and shortening are coated with the cycle.
Technical solution of the present utility model is as follows:
A kind of inclined deposition plating apparatus that is used for being coated with in the electron gun evaporation coating machine sculpture film, its characteristics are to comprise erecting frame, spherical anchor clamps and wedge: the through hole that an end of described erecting frame has on the anchor clamps erecting frame in the vacuum chamber of a pair of through hole and electron gun evaporation coating machine is corresponding, be used for being fixedly linked wire casing and two offside wire casings in the middle of this erecting frame is provided with along its length with the anchor clamps erecting frame; There is a central through hole on the top of described spherical anchor clamps, and the center is provided with four through holes symmetrically around this central through hole, is distributed with a plurality of wire casings on these spherical anchor clamps also radially; Described wedge is that both ends of the surface are the tri-prismoid structure of right-angle triangle, its side is made of two right angle faces and an inclined-plane, all be provided with screw on the described two right angle faces, described wedge passes screw on the arbitrary right angle of the described wedge face by screw and the appropriate location of the arbitrary wire casing on the spherical anchor clamps is fixed on the spherical anchor clamps, and the inclined-plane of this wedge is used to paste substrate to be plated; Described spherical anchor clamps and erecting frame directly pass the central through hole of spherical anchor clamps by nut and the middle wire casing of erecting frame is fixed.
Described inclined deposition plating apparatus, comprise outside erecting frame, spherical anchor clamps and the wedge, also have sleeve, stepper motor, stepper motor driver and computing machine, the expansion end face of described cover letter has the through hole of four centrosymmetric distributions corresponding with four through holes of described spherical anchor clamps, is used for being connected of sleeve and spherical anchor clamps; There is screw the side of described sleeve, and described sleeve passes described erecting frame central authorities wire casing and entangles the rotating shaft of stepper motor and fix by screw; Described stepper motor is connected with outdoor stepper motor driver by the signaling interface in the vacuum chamber, and this stepper motor driver links to each other with described computing machine.
Evaporation source in the described electron gun evaporation coating machine is positioned at the sphere center position of described spherical anchor clamps.
Described wedge has polylith, and the angle of wedge of this polylith wedge has multiple angles.
Technique effect of the present utility model:
1, the coating apparatus of the utility model inclined deposition, is installed in the utility model device in the vacuum chamber as long as take off original conventional anchor clamps based on original optical coating system, connects signal wire and just can use.
2, the utility model uses the rotation of the spherical anchor clamps of step motor drive, by the segmentation of stepper motor driver, can accurately control the rotational speed of spherical anchor clamps.
3, owing to be distributed with the wedge that a plurality of wire casings and polylith have the multiple angle angle of wedge on the spherical anchor clamps of the present utility model radially, can establish polylith substrate to be plated by card, the inclination angle of substrate is can be by the wedge of different angle selected in advance and regulate; In a vacuum environment, finish the plated film of different angle, do not need to repeat to vacuumize.
The wire casing that different spacing is arranged on 4 erecting frames of the present utility model can be suitable for the loading and unloading of many moneys motor and the adjustment of relative position.
Use this device when 5, spherical anchor clamps do not rotate, not only can guarantee inclined deposition but also can add baking, increased the Experimental design dirigibility.
6, the cost of the utility model device is lower, and is workable.
7, in the utility model, utilize and initiatively introduce tilt condition, adopt spherical anchor clamps to add the composite design of wedge, can improve conventional efficient greatly, shorten the R﹠D cycle of film.
Description of drawings
Fig. 1 is the vacuum chamber structure synoptic diagram of existing box electron gun thermal evaporation coating machine
Fig. 2 is the synoptic diagram of the utility model inclined deposition plating apparatus embodiment 1 during not with stepper motor
Synoptic diagram when Fig. 3 is the utility model inclined deposition plating apparatus embodiment 2 band stepper motors
Fig. 4 is the vertical view of the utility model inclined deposition plating apparatus medium-height trestle embodiment
Fig. 5 is front elevation and the vertical view of the utility model inclined deposition plating apparatus middle sleeve embodiment
Fig. 6 is vertical view and the front elevation of spherical anchor clamps embodiment in the utility model inclined deposition plating apparatus
Fig. 7 is the stereographic map of wedge embodiment in the utility model inclined deposition plating apparatus
Fig. 8 is the stereographic map that has the wedge of the different angles of wedge in the utility model inclined deposition plating apparatus
Embodiment:
See also Fig. 2 earlier, Fig. 2 is that the utility model inclined deposition plating apparatus embodiment 1 is not with the synoptic diagram of stepper motor, as seen from the figure, the utility model is used for being coated with in the electron gun evaporation coating machine inclined deposition plating apparatus of sculpture film, comprises erecting frame 6, spherical anchor clamps 8 and wedge 9:
Referring to Fig. 4, one end of described erecting frame 6 have a pair of through hole 15 with 16 with the vacuum chamber of electron gun evaporation coating machine in anchor clamps erecting frame 3 on through hole corresponding, be used for being fixedly linked wire casing 19 and two offside wire casings 18,20 and 17,21 in the middle of this erecting frame 6 is provided with along its length with anchor clamps erecting frame 3;
Referring to Fig. 6, there is a central through hole 29 on the top of described spherical anchor clamps 8, and the center is provided with four through holes 28 symmetrically around this central through hole 29, is distributed with 8 wire casings 27 on these spherical anchor clamps 8 also radially;
Referring to Fig. 7, described wedge 9 is that both ends of the surface are the tri-prismoid structure of right-angle triangle, and its side is made of right angle face 30 and right angle face 31 and inclined-plane 10, and screw 32 and screw 33 are arranged respectively on described right angle face 30 and the right angle face 31;
Described wedge 9 passes the screw that the arbitrary wire casing 27 on the spherical anchor clamps 8 is screwed on these wedge 9 arbitrary right angle faces by screw and fixes, and the inclined-plane 10 of this wedge 9 is used to paste substrate to be plated;
Described spherical anchor clamps 8 directly pass the central through hole 29 of spherical anchor clamps 8 by nut 7 with erecting frame 6 and the middle wire casing 19 of erecting frame 6 is fixed.
Referring to Fig. 3, Fig. 3 is the synoptic diagram of the utility model inclined deposition plating apparatus embodiment 2 band stepper motors, as seen from the figure, the utility model inclined deposition plating apparatus, be made of erecting frame 6, spherical anchor clamps 8, wedge 9, sleeve 11, stepper motor 12, stepper motor driver 13 and computing machine 14, the utility model is to be placed in the vacuum chamber of coating machine by erecting frame 6, spherical anchor clamps 8, removable sleeve 11, stepper motor 12, wedge 9.
Referring to Fig. 4, one end of described erecting frame 6 have a pair of through hole 15 with 16 with the vacuum chamber of electron gun evaporation coating machine in anchor clamps erecting frame 3 on through hole corresponding, be used for being fixedly linked wire casing 19 and two offside wire casings 18,20 and 17,21 in the middle of this erecting frame 6 is provided with along its length with anchor clamps erecting frame 3;
Referring to Fig. 6, there is a central through hole 29 on the top of described spherical anchor clamps 8, and the center is provided with four through holes 28 symmetrically around this central through hole 29, is distributed with 8 wire casings 27 on these spherical anchor clamps 8 also radially;
Referring to Fig. 7, described wedge 9 is that both ends of the surface are the tri-prismoid structure of right-angle triangle, and its side is made of right angle face 30 and right angle face 31 and inclined-plane 10, and screw 32 and screw 33 are arranged respectively on described right angle face 30 and the right angle face 31; Described wedge 9 passes the screw that the arbitrary wire casing 27 on the spherical anchor clamps 8 is screwed on these wedge 9 arbitrary right angle faces by screw and fixes, and the inclined-plane 10 of this wedge 9 is used to paste substrate to be plated;
The expansion end face of described sleeve 11 has the through hole 23,24,25,26 of four centrosymmetric distributions corresponding with four through holes 28 of described spherical anchor clamps 8, is used for being connected of sleeve 11 and spherical anchor clamps 8; The side of described sleeve 11 also has screw 21,22, and described sleeve 11 passes described erecting frame 6 central wire casings 19 and entangles the rotating shaft of stepper motor 12 and pass through screw 21,22 fixing; Described stepper motor 12 is connected with outdoor stepper motor driver 13 by the signaling interface in the vacuum chamber, and this stepper motor driver 13 links to each other with described computing machine 14.
Evaporation source 1 in the described electron gun evaporation coating machine is positioned at the sphere center position of described spherical anchor clamps 8.
The utility model Unit Installation process and effect are as follows:
The first step: with erecting frame 6 by the through hole on it 15 and 16 and vacuum chamber in anchor clamps mounting disc 3 on through hole fix by nut, form cantilever is installed, the wire casing 17,18,20,21 of different spacing is used to adjust the relative position of stepper motor 12 and spherical anchor clamps 8 and evaporation source 1 on this erecting frame 6.
Second step: select to have the wedge 9 of the angle of wedge that meets the requirements, by the appropriate location of nut, to guarantee the angle of inclination of evaporant and substrate with the wire casing 27 on these wedge 9 fixing spherical again anchor clamps 8; Glass substrate is sticked to high-temp glue on wedge 9 inclined-planes 10 of the different angles of wedge, form the inclined deposition condition.
The 3rd step: send pulse signal by computing machine 14 and give stepper motor driver 13, by the cable transmission signal, and then the rotating speed of control step motor 12.By the substrate inclination angle of initiatively introducing and the rotation of stepper motor, can guide sculpture growth for Thin Film process with the most economical and the most practical mode.
Described wedge 9 is of the present utility model one big characteristics, referring to Fig. 7.Fig. 7 is the stereographic map of wedge embodiment in the utility model inclined deposition plating apparatus, described wedge 9 is that both ends of the surface are the tri-prismoid structure of right-angle triangle, its side is made of right angle face 30 and right angle face 31 and inclined-plane 10, this wedge, leg-of-mutton inclination angle is respectively 40 ° and 50 °, screw 32 and 33 are arranged on the right angle face 30 and 31, this wedge 9 is fixing by screw on arbitrary right angle face and the arbitrary wire casing on the spherical anchor clamps 8 27, because spherical anchor clamps 8 are to be the part of the sphere of the centre of sphere with evaporation source 1, when select 40 ° of angles right right angle face and groove milling fixedly the time, this right angle face is equivalent to a point for bigger spherical radius, therefore the inclination angle of evaporant vapor stream and substrate formation is 50 °, otherwise so analogizes.
Described wedge 9 has polylith, and the angle of wedge of this polylith wedge 9 has multiple angles.As shown in Figure 8.Fig. 8 is the stereographic map that has the wedge embodiment of the different angles of wedge in the utility model inclined deposition plating apparatus, also is that several typical wedges are given an example.Do not enumerate one by one at this.
In sum, the utility model device is initiatively introduced substrate by spherical anchor clamps and wedge The inclination angle once can be coated with the sculpture film of multi-disc different angle, have simple in structure, compactness, Maneuverable characteristics.
Claims (4)
1, a kind of inclined deposition plating apparatus that is used for being coated with in the electron gun evaporation coating machine sculpture film is characterized in that comprising erecting frame (6), spherical anchor clamps (8) and wedge (9):
The through hole that one end of described erecting frame (6) has on the anchor clamps erecting frame (3) in the vacuum chamber of a pair of through hole (15,16) and electron gun evaporation coating machine is corresponding, be used for being fixedly linked wire casing (19) and two offside wire casings (18,20,17,21) in the middle of this erecting frame (6) is provided with along its length with anchor clamps erecting frame (3);
There is a central through hole (29) on the top of described spherical anchor clamps (8), and the center is provided with four through holes (28) symmetrically around this central through hole (29), and these spherical anchor clamps (8) are gone up and are distributed with a plurality of wire casings (27) also radially;
Described wedge (9) is that both ends of the surface are the tri-prismoid structure of right-angle triangle, and its side is made of two right angle faces (30,31) and an inclined-plane (10), and screw (32,33) is respectively arranged respectively on the described right angle face (30,31);
Described wedge (9) is fixed with the screw on the arbitrary right angle of described wedge (9) face by arbitrary wire casing (27) that screw passes on the spherical anchor clamps (8), and the inclined-plane (10) of this wedge (9) is used to paste substrate to be plated;
Described spherical anchor clamps (8) directly pass the central through hole (29) of spherical anchor clamps (8) by nut (7) with erecting frame (6) and the middle wire casing (19) of erecting frame (6) is fixed.
2, inclined deposition plating apparatus according to claim 1, it is characterized in that sleeve (11), stepper motor (12), stepper motor driver (13) and computing machine (14) in addition, the expansion end face of described sleeve (11) has the through hole (23,24,25,26) of four centrosymmetric distributions corresponding with four through holes (28) of described spherical anchor clamps (8), is used for being connected of sleeve (11) and spherical anchor clamps (8); The side of described sleeve (11) also has screw (21,22), and described sleeve (11) passes the central wire casing of described erecting frame (6) (19) and entangles the rotating shaft of stepper motor (12) and pass through screw (21,22) fixing; Described stepper motor (12) is connected with outdoor stepper motor driver (13) by the signaling interface in the vacuum chamber, and this stepper motor driver (13) links to each other with described computing machine (14).
3, inclined deposition plating apparatus according to claim 2 is characterized in that the evaporation source (1) in the described electron gun evaporation coating machine is positioned at the sphere center position of described spherical anchor clamps (8).
4, inclined deposition plating apparatus according to claim 2 is characterized in that described wedge (9) has polylith, and the angle of wedge of this polylith wedge (9) has multiple angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820054561XU CN201141921Y (en) | 2008-01-09 | 2008-01-09 | Inclined deposition coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820054561XU CN201141921Y (en) | 2008-01-09 | 2008-01-09 | Inclined deposition coating device |
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| Publication Number | Publication Date |
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| CN201141921Y true CN201141921Y (en) | 2008-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNU200820054561XU Expired - Lifetime CN201141921Y (en) | 2008-01-09 | 2008-01-09 | Inclined deposition coating device |
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| CN (1) | CN201141921Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101216567B (en) * | 2008-01-09 | 2010-06-02 | 中国科学院上海光学精密机械研究所 | Inclined deposition coating device |
| CN110331374A (en) * | 2019-07-23 | 2019-10-15 | 清华大学 | A kind of sample stage being prepared on a large scale surface enhanced Raman substrate |
-
2008
- 2008-01-09 CN CNU200820054561XU patent/CN201141921Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101216567B (en) * | 2008-01-09 | 2010-06-02 | 中国科学院上海光学精密机械研究所 | Inclined deposition coating device |
| CN110331374A (en) * | 2019-07-23 | 2019-10-15 | 清华大学 | A kind of sample stage being prepared on a large scale surface enhanced Raman substrate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20081029 Effective date of abandoning: 20080109 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20081029 Effective date of abandoning: 20080109 |