CN101093872A - 相变存储器元件及其制造方法 - Google Patents
相变存储器元件及其制造方法 Download PDFInfo
- Publication number
- CN101093872A CN101093872A CN 200610094044 CN200610094044A CN101093872A CN 101093872 A CN101093872 A CN 101093872A CN 200610094044 CN200610094044 CN 200610094044 CN 200610094044 A CN200610094044 A CN 200610094044A CN 101093872 A CN101093872 A CN 101093872A
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- Prior art keywords
- phase change
- columnar electrode
- electrode
- lower half
- memory component
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- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 238000000034 method Methods 0.000 claims abstract description 31
- 239000004020 conductor Substances 0.000 claims description 27
- 150000004770 chalcogenides Chemical class 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000012782 phase change material Substances 0.000 claims description 14
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 13
- 229910052718 tin Inorganic materials 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- 229910010037 TiAlN Inorganic materials 0.000 claims description 6
- 239000003870 refractory metal Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052745 lead Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 229910052717 sulfur Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 238000001259 photo etching Methods 0.000 abstract description 12
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 157
- 238000003860 storage Methods 0.000 description 27
- 230000007704 transition Effects 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- 238000010438 heat treatment Methods 0.000 description 14
- 229910052581 Si3N4 Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000000377 silicon dioxide Substances 0.000 description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- WABPQHHGFIMREM-BKFZFHPZSA-N lead-212 Chemical compound [212Pb] WABPQHHGFIMREM-BKFZFHPZSA-N 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910017629 Sb2Te3 Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- Semiconductor Memories (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100940440A CN100524877C (zh) | 2006-06-22 | 2006-06-22 | 相变存储器元件及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100940440A CN100524877C (zh) | 2006-06-22 | 2006-06-22 | 相变存储器元件及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101093872A true CN101093872A (zh) | 2007-12-26 |
CN100524877C CN100524877C (zh) | 2009-08-05 |
Family
ID=38991983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2006100940440A Expired - Fee Related CN100524877C (zh) | 2006-06-22 | 2006-06-22 | 相变存储器元件及其制造方法 |
Country Status (1)
Country | Link |
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CN (1) | CN100524877C (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101872788A (zh) * | 2009-04-27 | 2010-10-27 | 旺宏电子股份有限公司 | 集成电路3d存储器阵列及其制造方法 |
CN102214638A (zh) * | 2010-04-06 | 2011-10-12 | 旺宏电子股份有限公司 | 集成电路三维存储器阵列及制造方法 |
CN101872778B (zh) * | 2009-04-27 | 2012-05-02 | 旺宏电子股份有限公司 | 集成电路3d相变存储器阵列及制造方法 |
CN101789491B (zh) * | 2010-02-08 | 2012-05-09 | 中国科学院上海微系统与信息技术研究所 | 相变存储单元结构、其制备方法及相变存储阵列制备方法 |
CN103094201A (zh) * | 2011-11-04 | 2013-05-08 | 旺宏电子股份有限公司 | 存储器装置及其制造方法 |
CN105405971A (zh) * | 2015-12-04 | 2016-03-16 | 宁波时代全芯科技有限公司 | 相变化记忆体及其制造方法 |
-
2006
- 2006-06-22 CN CNB2006100940440A patent/CN100524877C/zh not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101872788A (zh) * | 2009-04-27 | 2010-10-27 | 旺宏电子股份有限公司 | 集成电路3d存储器阵列及其制造方法 |
CN101872778B (zh) * | 2009-04-27 | 2012-05-02 | 旺宏电子股份有限公司 | 集成电路3d相变存储器阵列及制造方法 |
CN101789491B (zh) * | 2010-02-08 | 2012-05-09 | 中国科学院上海微系统与信息技术研究所 | 相变存储单元结构、其制备方法及相变存储阵列制备方法 |
CN102214638A (zh) * | 2010-04-06 | 2011-10-12 | 旺宏电子股份有限公司 | 集成电路三维存储器阵列及制造方法 |
CN103094201A (zh) * | 2011-11-04 | 2013-05-08 | 旺宏电子股份有限公司 | 存储器装置及其制造方法 |
CN103094201B (zh) * | 2011-11-04 | 2015-05-06 | 旺宏电子股份有限公司 | 存储器装置及其制造方法 |
CN105405971A (zh) * | 2015-12-04 | 2016-03-16 | 宁波时代全芯科技有限公司 | 相变化记忆体及其制造方法 |
CN105405971B (zh) * | 2015-12-04 | 2018-02-06 | 江苏时代全芯存储科技有限公司 | 相变化记忆体及其制造方法 |
CN107833967A (zh) * | 2015-12-04 | 2018-03-23 | 江苏时代全芯存储科技有限公司 | 相变化记忆体及其制造方法 |
Also Published As
Publication number | Publication date |
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CN100524877C (zh) | 2009-08-05 |
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Effective date of registration: 20100702 Address after: Hsinchu County of Taiwan Patentee after: Industrial Technology Research Institute Address before: Hsinchu County, Taiwan, China Co-patentee before: Powerchip Semiconductor Corp. Patentee before: Industrial Technology Research Institute Co-patentee before: Nanya Sci. & Tech. Co., Ltd. Co-patentee before: Maode Science and Technology Co., Ltd. Co-patentee before: Huabang Electronics Co., Ltd. |
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Granted publication date: 20090805 Termination date: 20150622 |
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