CN101078850A - Optical coupling system for large power laser diode array - Google Patents

Optical coupling system for large power laser diode array Download PDF

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Publication number
CN101078850A
CN101078850A CN 200710036526 CN200710036526A CN101078850A CN 101078850 A CN101078850 A CN 101078850A CN 200710036526 CN200710036526 CN 200710036526 CN 200710036526 A CN200710036526 A CN 200710036526A CN 101078850 A CN101078850 A CN 101078850A
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China
Prior art keywords
prism
reshaper
laser diode
diode array
power laser
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CN 200710036526
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CN100507697C (en
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孟俊清
陆雨田
陈卫标
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HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO LTD
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The invention discloses an optical coupling system for large-power laser diode array, which comprises the following parts along luminous beam advancing direction from the large-power laser diode array: microcylinder lens, Bieham prism micropiece shaper, first column lens and second column lens, wherein the Bieham prism micropiece shaper is composed of tightly arranged Bieham prism slices with each optical axle of Bieham prism in consistency with the luminous beam advancing direction, which is rotated by 45 deg around optical axle; the focus of the first and second column lens coincide mutually. The invention can couple the laser of the large-power laser diode array into energy transmitting optical fiber and couple pump of solid laser, which is simple to manufacture and assemble with high coupling efficiency without changing the transmitting direction of luminous beam.

Description

The optical coupling system that is used for large power laser diode array
Technical field
The present invention relates to that a cover can be cut apart the light beam that large power laser diode array sends, the optical coupling system of rotation and shaping, can also can be used as the pumping coupled system of solid state laser with in the large power laser diode array emitting laser coupled into optical fibres.
Background technology
The light-emitting area of diode laser matrix mostly is 1 * 100 micron to 1 * 400 micron rectangle, and the laser beam of sending has the obstructed angle of divergence on both direction: be that alongst slow axis, the angle of divergence are generally 10 degree; The direction that is parallel to 1 micron is called fast axle, and the angle of divergence is generally 38 degree.Be linear array by discontinuous several such luminous zones again and form large power laser diode array, reach 1cm on the normal length direction.The Lagrange invariant of the large power laser diode array of being not difficult to calculate like this on both direction differs and can reach thousands of times, therefore be difficult to the direct scioptics group of this laser beam is converged to the small light spot with certain depth of focus, also be difficult to enter into energy transmission optical fibre with low numerical aperture (representative value is as 0.22).There are a lot of inventions and method to be used to the light beam of diode laser matrix output is carried out shaping for this reason, its basic principle is the Lagrange invariant that changes fast axle and slow axis, the Lagrange invariant of slow-axis direction is reduced, and the increase of fast axle, thereby output beam can enough lens combination be focused to have certain depth of focus than small light spot, by energy transmission optical fibre is transmitted or is directly used in pumped laser media.
Fig. 1 is a kind of typical diode laser matrix fiber coupling system, by people such as the Lu Yutian proposition of Shanghai optical precision optical machinery research institute of the Chinese Academy of Sciences.The laser beam that diode laser matrix 1 sends among Fig. 1 collimates through 2 pairs of quick shaft directions of microtrabeculae mirror, enter the reshaper of forming by several pieces microplate prisms 3 again, the Lagrange invariant of light beam on both direction after the process shaping is close to identical, is focused to very little hot spot through non-spherical lens group 4 and 5 again.The core component of this system is the reshaper 3 that is called the microplate edge glass stack, this reshaper by several pieces Dove prism thin slice inclination miter angles after stacked in parallel place and to constitute.After the line source of horizontal alignment enters this reshaper, be split into several sections little line sources, and after superrefraction and total reflection, become several sections little line source along continuous straight runs arrangements that are vertically oriented.This reshaper has simple in structure, easily processing, the characteristics that cost is low, shortcoming is that the Dove prism can be introduced serious astigmatism when non-parallel light is rotated, especially in this example owing to several pieces prisms light beam is cut apart, all can produce astigmatism to each the bundle light after cutting apart, and then have a strong impact on the size and the depth of focus of focal beam spot, reduce coupling efficiency.60% energy of the laser beam that the coupled system that therefore adopts this invention can only send the long high power laser diode of 1cm at present is coupled in the optical fiber of 0.6 millimeter of core diameter, numerical aperture 0.22.
Summary of the invention
The purpose of this invention is to provide the optical coupling system that a cover is used for large power laser diode array, overcome the shortcoming of above-mentioned prior art, improve coupling efficiency, keep low-cost, easy for installation simultaneously, advantage of simple structure.
Technical solution of the present invention is as follows:
A kind of optical coupling system that is used for large power laser diode array, the microtrabeculae lens that set gradually that comprise the working direction of the light beam that sends along large power laser diode array, reshaper, first cylindrical lens and second cylindrical lens, it is characterized in that described reshaper is the benhain prism microplate reshaper that is closely rearranged by the benhain prism thin slice, the optical axis of every benhain prism is consistent with the light beam working direction and rotate 45 ° of settings around optical axis, and the focus of described first cylindrical lens and second cylindrical lens overlaps.
The benhain prism sheet of described benhain prism microplate reshaper is several to be determined according to the equal principle of the Lagrange invariant of latter two direction of shaping.
Described second cylindrical lens can replace with spherical lens.
Technique effect of the present invention is because the present invention adopts benhain prism microplate reshaper, every benhain prism is made up of the prism of two symmetries, the astigmatism that produces when therefore emission takes place in prism non-parallel light can be compensated automatically, guarantees also that simultaneously emergent light advances along original direction.Overcome the astigmatism of above-mentioned prior art.
Description of drawings
Fig. 1 is that prior art uses Dove prism thin slice to constitute the Line beam reshaper synoptic diagram of core reshaper, and wherein 1 is line source, and 2 is the microtrabeculae lens, and 3 is the microplate reshaper, and 4 and 5 are and are non-spherical lens.
Fig. 2 is the structural representation that the present invention is used for the optical coupling system of large power laser diode array, wherein 1 is large power laser diode array, 2 is the microtrabeculae lens, 3 is benhain prism microplate reshaper, 4 and 5 are respectively the cylindrical lens of different focal, and 5 also can be spherical lens or non-spherical lens.
Fig. 3 is the structural representation of benhain prism, is made up of two parts symmetrical, and the refractive index n of glass is 1.517, and each parameter is respectively among Fig. 3:
A is a unit length, B=1.0824A, and C=1.2071A, a=0.2071A,
D=1.7071A,E=1.8284A
α=22.5°,β=45°,δ=112.5°
Fig. 4 and Fig. 5 are the structural representation of benhain prism microplate reshaper, and wherein Fig. 4 is a front elevation, promptly sees along the direction of light path; Fig. 5 is a vertical view.
Fig. 6 enters the index path that light beam behind the benhain prism that a slice places along optical axis rotation 45 degree becomes normal beam for the explanation horizontal light beam.
How Fig. 7 realizes explanation synoptic diagram that linear beam is cut apart and rotated for benhain prism microplate reshaper of the present invention.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.See also Fig. 2 earlier, Fig. 2 is the structural representation that the present invention is used for the optical coupling system of large power laser diode array, as seen from the figure, the present invention is used for the optical coupling system of large power laser diode array, the microtrabeculae lens 2 that set gradually that comprise the working direction of the light beam that sends along large power laser diode array 1, reshaper 3, first cylindrical lens 4 and second cylindrical lens 5, it is characterized in that described reshaper 3 is the benhain prism microplate reshapers that closely rearranged by the benhain prism thin slice, the optical axis of every benhain prism is consistent with the light beam working direction and rotate 45 ° of settings around optical axis, and the focus of described first cylindrical lens 4 and second cylindrical lens 5 overlaps.
The course of work of apparatus of the present invention:
Optical coupling system comprises the microtrabeculae lens 2 that the fast axle angle of divergence of the laser beam that high power laser diode 1 is sent is compressed, the benhain prism microplate reshaper 3 that the light beam that is linear horizontal distribution is cut apart and rotated, first cylindrical lens 4 and second cylindrical lens (or spherical lens) 5 that both direction is focused on successively.Core component of the present invention is a benhain prism reshaper 3, is made up of several thin slice prism along continuous straight runs is piled up.Fig. 4 and Fig. 5 are respectively the left view (seeing along optical path direction) and the vertical views of benhain prism reshaper 3, as can be seen from the figure each promptly is a benhain prism to the microplate prism, the direction of advancing with light beam is rotating shaft rotation 45 degree, and promptly the angle with horizontal direction is 45 degree.Because each benhain prism is made up of the prism of two symmetries, the astigmatism that produces when therefore emission takes place in prism non-parallel light can be compensated automatically, guarantees also that simultaneously emergent light advances along original direction.As can be seen from Figure 6, after the horizontal line shaped light beam entered and is the benhain prism that miter angle places with horizontal direction, light beam through behind several secondary reflections, had rotated 90 degree during outgoing in prism, become the linear beam of vertical direction.Can see clearly that from Fig. 7 a branch of along continuous straight runs is linear parallel beam and is split into the segment linear directional light vertical with horizontal direction that several are arranged in parallel after through microplate prism reshaper 3.
The sheet of the benhain prism in the described benhain prism microplate reshaper 3 is several to be determined according to the equal principle of the Lagrange invariant of latter two direction of shaping.The position of the degree of collimation and the benhain prism reshaper 3 of quick shaft direction being put with the microtrabeculae lens is relevant particularly.Because the angles of divergence of 10 degree are still arranged on the slow-axis direction, so reshaper should try one's best near the microtrabeculae lens, thereby guarantees that not wanting too many sheet number just can make all light all enter reshaper.For realizing coupling efficiently, the sheet number of benhain prism should match with the degree of collimation of microtrabeculae lens to the fast axle angle of divergence, makes that the Lagrange invariant of fast axle and slow axis both direction is suitable.The sheet number that sets Chinese prism is N, and the angle of divergence of quick shaft direction is θ behind microtrabeculae lens 1 collimation F', the yardstick of quick shaft direction is D, the angle of divergence of slow-axis direction is θ S, the yardstick of slow-axis direction is L, then the Lagrange invariant of slow-axis direction is L SS' L, the Lagrange invariant of quick shaft direction is L FF' D, the Lagrange invariant of slow-axis direction and quick shaft direction is respectively L after the shaping S'=θ F' L and L F'=θ SL/N then makes L according to the equal principle of the Lagrange invariant of latter two direction of shaping S'=L F', obtain through arrangement:
N = θ S θ F ′
Because quick shaft direction is nearly diffraction limit,, be not difficult its angle of divergence spent to be compressed to from about 40 to have only the several years at zero point even littler so quick shaft direction is collimated with the microtrabeculae lens.When for example lenticule reaches 80~100 times to the angle of divergence compression of fast axle, the angle of divergence is 0.4~0.5 degree, this moment, the yardstick of quick shaft direction correspondingly was increased to about 100 microns by 1 micron, can calculate to such an extent that the sheet number of corresponding benhain prism should be 20~25 according to above-mentioned principle.
Respectively both direction is focused on by first cylindrical lens 4 and second cylindrical lens (or spherical lens) 5 through the light beam after reshaper 3 shapings, the focus that the focal length of choose reasonable cylindrical mirror makes both direction is complementary at same position and with the numerical aperture of energy transmission optical fibre, so just can realize the efficient coupling of large power laser diode array to optical fiber, optimization by coupled system, the energy greater than 75% of the laser beam that large power laser diode array can be sent is coupled into 0.4 millimeter of core diameter, in the energy transmission optical fibre of numerical aperture 0.22.
Employing microtrabeculae lens are 1 centimetre large power laser diode array quick shaft direction collimation to length, adjust the distance between microtrabeculae lens and the light-emitting area, generally, be not difficult to make the angle of divergence that collimates the fast axle in back less than 0.5 degree, the angle of divergence of slow-axis direction will still remain unchanged at this moment.The yardstick of considering slow axis is along with beam propagation can increase, simultaneously, present most of large power laser diode array all is made up of about about 20 discontinuous luminous zone, therefore the benhain prism thin slice that adopts 20 0.5 millimeters thick is that rotating shaft rotation 45 degree closely rearrange benhain prism microplate reshaper 3 with the direction of beam propagation, and benhain prism microplate reshaper 3 only is 2 millimeters with the distance of microtrabeculae lens.Be not difficult to calculate this moment reshaper get about 14 millimeters of width, can guarantee that all get light on the horizontal direction all to enter reshaper.The focal length that light beam after the reshaper shaping successively enters first cylindrical lens 4 and second cylindrical lens, 5, the first cylindrical lenses 4 is 15 millimeters, and the focal length of second cylindrical lens 5 is 20 millimeters.And suitably adjust the position that first cylindrical lens 4 and second cylindrical lens 5 are placed, can make focus that the light beam of quick shaft direction and slow-axis direction focuses at same position, and have very little focal spot yardstick simultaneously.Be provided with and show, the result that apparatus of the present invention focus on can concentrate on 75% laser energy in 0.4 millimeter the zone, and wherein, about 70% gross energy concentrates in the zone of 0.2 millimeter of diameter.Place the energy transmission optical fibre of 0.4 millimeter of core diameter, numerical aperture 0.22 at the focus place, just can realize being coupled efficiently, soon 75% of this diode laser matrix energy is coupled in this optical fiber.

Claims (3)

1, a kind of optical coupling system that is used for large power laser diode array, the microtrabeculae lens (2) that set gradually that comprise the working direction of the light beam that sends along large power laser diode array (1), reshaper (3), first cylindrical mirror (4) and second cylindrical mirror (5), it is characterized in that described reshaper (3) is the benhain prism microplate reshaper that is closely rearranged by the benhain prism thin slice, the optical axis of every benhain prism is consistent with the light beam working direction and rotate 45 ° of settings around optical axis, and the focus of described first cylindrical lens (4) and second cylindrical lens (5) overlaps.
2, optical coupling system according to claim 1 is characterized in that the several principles that equate according to the Lagrange invariant of latter two direction of shaping of the benhain prism sheet of described benhain prism microplate reshaper determine.
3, optical coupling system according to claim 1 is characterized in that the available spherical mirror of described second cylindrical mirror (5) replaces.
CNB2007100365265A 2007-01-17 2007-01-17 Optical coupling system for large power laser diode array Active CN100507697C (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101834402B (en) * 2009-09-24 2012-06-27 西安炬光科技有限公司 Semiconductor laser side pump module
CN107479204A (en) * 2017-09-25 2017-12-15 深圳市皓龙激光设备有限公司 Laser facula apparatus for shaping and the laser lamp with the laser facula apparatus for shaping
CN108469680A (en) * 2018-03-30 2018-08-31 中国科学院长春光学精密机械与物理研究所 A kind of laser light source
CN110718842A (en) * 2018-07-12 2020-01-21 广东华快光子科技有限公司 Microchip laser device with reliable structure and convenient optical fiber output
CN112130264A (en) * 2020-10-16 2020-12-25 博创科技股份有限公司 Low-cost compact coupling assembly for photoelectric integrated chip
CN114654108A (en) * 2022-04-09 2022-06-24 法特迪精密科技(苏州)有限公司 MEMS probe silicon wafer cutting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4175825A (en) * 1978-03-06 1979-11-27 Hughes Aircraft Company Optical transmission system with a pechan prism for equalizing optical paths
JP2000249922A (en) * 1999-03-02 2000-09-14 Nikon Corp Observation optical device
CN1315666A (en) * 2000-03-30 2001-10-03 中山日荣塑料电子制品有限公司 Optical system of straight-tube telescope and its straight-tube telescope with ultralarge visual field
CN201054028Y (en) * 2007-01-17 2008-04-30 中国科学院上海光学精密机械研究所 Optical coupling device for large power laser diode array

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101834402B (en) * 2009-09-24 2012-06-27 西安炬光科技有限公司 Semiconductor laser side pump module
CN107479204A (en) * 2017-09-25 2017-12-15 深圳市皓龙激光设备有限公司 Laser facula apparatus for shaping and the laser lamp with the laser facula apparatus for shaping
CN108469680A (en) * 2018-03-30 2018-08-31 中国科学院长春光学精密机械与物理研究所 A kind of laser light source
CN110718842A (en) * 2018-07-12 2020-01-21 广东华快光子科技有限公司 Microchip laser device with reliable structure and convenient optical fiber output
CN112130264A (en) * 2020-10-16 2020-12-25 博创科技股份有限公司 Low-cost compact coupling assembly for photoelectric integrated chip
CN114654108A (en) * 2022-04-09 2022-06-24 法特迪精密科技(苏州)有限公司 MEMS probe silicon wafer cutting device
CN114654108B (en) * 2022-04-09 2023-06-23 法特迪精密科技(苏州)有限公司 MEMS probe silicon chip cutting device

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Owner name: HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO., LTD.

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Patentee before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences