CN101073085B - 用于改进对等离子体负载的rf功率传输稳定性的方法 - Google Patents

用于改进对等离子体负载的rf功率传输稳定性的方法 Download PDF

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Publication number
CN101073085B
CN101073085B CN2005800419122A CN200580041912A CN101073085B CN 101073085 B CN101073085 B CN 101073085B CN 2005800419122 A CN2005800419122 A CN 2005800419122A CN 200580041912 A CN200580041912 A CN 200580041912A CN 101073085 B CN101073085 B CN 101073085B
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value
group
plasma
frequency signal
signal generator
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CN101073085A (zh
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阿瑟·M·霍瓦尔德
安德拉斯·库蒂
安德鲁三世·D·贝利
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Lam Research Corp
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Lam Research Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H03H7/40—Automatic matching of load impedance to source impedance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
CN2005800419122A 2004-10-15 2005-10-12 用于改进对等离子体负载的rf功率传输稳定性的方法 Expired - Fee Related CN101073085B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/966,549 2004-10-15
US10/966,549 US7480571B2 (en) 2002-03-08 2004-10-15 Apparatus and methods for improving the stability of RF power delivery to a plasma load
PCT/US2005/037125 WO2006044722A2 (fr) 2004-10-15 2005-10-12 Appareil et procedes pour ameliorer la stabilite du debit de puissance rf vers une charge de plasma

Publications (2)

Publication Number Publication Date
CN101073085A CN101073085A (zh) 2007-11-14
CN101073085B true CN101073085B (zh) 2010-05-12

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CN2005800419122A Expired - Fee Related CN101073085B (zh) 2004-10-15 2005-10-12 用于改进对等离子体负载的rf功率传输稳定性的方法

Country Status (6)

Country Link
US (1) US7480571B2 (fr)
JP (1) JP5290579B2 (fr)
KR (1) KR101116587B1 (fr)
CN (1) CN101073085B (fr)
TW (1) TWI403220B (fr)
WO (1) WO2006044722A2 (fr)

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US20060005928A1 (en) 2006-01-12
JP5290579B2 (ja) 2013-09-18
KR20070094886A (ko) 2007-09-27
WO2006044722A2 (fr) 2006-04-27
US7480571B2 (en) 2009-01-20
TW200628636A (en) 2006-08-16
KR101116587B1 (ko) 2012-03-19
WO2006044722A3 (fr) 2006-06-29
JP2008517429A (ja) 2008-05-22
TWI403220B (zh) 2013-07-21
CN101073085A (zh) 2007-11-14

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