CN1505250A - 带有功率控制的电感耦合等离子体自激式射频发生器 - Google Patents
带有功率控制的电感耦合等离子体自激式射频发生器 Download PDFInfo
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- CN1505250A CN1505250A CNA021536325A CN02153632A CN1505250A CN 1505250 A CN1505250 A CN 1505250A CN A021536325 A CNA021536325 A CN A021536325A CN 02153632 A CN02153632 A CN 02153632A CN 1505250 A CN1505250 A CN 1505250A
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- power
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
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Claims (2)
- 权利要求:1、在高频箱内,电子管FU-5S经L1L2C1R1C2组成的振荡电路和L1C3C4组成的阻抗匹配电路。在负载匹配箱内由L4C5C6C7C10组成的负载匹配调谐电路,两者通过50欧姆同轴电缆连接。
- 2、同轴电缆靠近高频箱处,装有功率耦合器,功率耦合器的规格为铝盒,两端用L27-50KF插座连接,中心轴为∮6×3.5紫铜管耦合片一头通过200欧姆无感电阻接地,另一头用聚四氟棒支撑与检波二极管2AP30连接,二极管另一头接0.01μ电容滤波,并通过1K电阻接到BNC-50KF插座上。
Priority Applications (1)
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CNB021536325A CN1314191C (zh) | 2002-12-03 | 2002-12-03 | 带有功率控制的电感耦合等离子体自激式射频发生器 |
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CNB021536325A CN1314191C (zh) | 2002-12-03 | 2002-12-03 | 带有功率控制的电感耦合等离子体自激式射频发生器 |
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CN1505250A true CN1505250A (zh) | 2004-06-16 |
CN1314191C CN1314191C (zh) | 2007-05-02 |
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CNB021536325A Expired - Lifetime CN1314191C (zh) | 2002-12-03 | 2002-12-03 | 带有功率控制的电感耦合等离子体自激式射频发生器 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007134363A1 (en) * | 2006-05-22 | 2007-11-29 | Varian Australia Pty Ltd | Power generator for spectrometry |
CN101073085B (zh) * | 2004-10-15 | 2010-05-12 | 朗姆研究公司 | 用于改进对等离子体负载的rf功率传输稳定性的方法 |
CN101529551B (zh) * | 2006-10-31 | 2011-06-22 | Mks仪器股份有限公司 | 防止射频等离子体处理中的不稳定性的方法和装置 |
CN102355205A (zh) * | 2011-06-24 | 2012-02-15 | 夏义峰 | 一种固态射频发生器 |
CN101156504B (zh) * | 2005-04-11 | 2012-07-18 | 洛尔等离子技术有限公司 | 等离子喷涂设备及方法 |
CN106358358A (zh) * | 2016-09-28 | 2017-01-25 | 北京锐光仪器有限公司 | 一种自激式固态射频发生器 |
CN113889396A (zh) * | 2020-07-01 | 2022-01-04 | 耶拿分析仪器有限公司 | 用于光谱测定的生成器 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2094826U (zh) * | 1991-05-09 | 1992-01-29 | 倪新力 | 多功能电子控制器 |
CN1033449C (zh) * | 1991-10-05 | 1996-12-04 | 石家庄市电子加工技术研究所 | 碳化硅纤维高频热反应装置 |
TW214598B (en) * | 1992-05-20 | 1993-10-11 | Diablo Res Corp | Impedance matching and filter network for use with electrodeless discharge lamp |
JPH06176860A (ja) * | 1992-05-25 | 1994-06-24 | I Ii:Kk | 真空管を用いた自励発振式高周波処理装置 |
DE4431381C2 (de) * | 1994-08-26 | 1997-12-18 | Siemens Ag | Einen selbsterregten Hochfrequenzgenerator bildende elektronische Schaltungsanordnung |
CN2241339Y (zh) * | 1996-02-07 | 1996-11-27 | 夏义峰 | 电感耦合等离子体激发光源 |
CN2418132Y (zh) * | 2000-03-18 | 2001-02-07 | 保定红星高频设备有限公司 | 一种新型高频感应加热设备 |
-
2002
- 2002-12-03 CN CNB021536325A patent/CN1314191C/zh not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101073085B (zh) * | 2004-10-15 | 2010-05-12 | 朗姆研究公司 | 用于改进对等离子体负载的rf功率传输稳定性的方法 |
CN101156504B (zh) * | 2005-04-11 | 2012-07-18 | 洛尔等离子技术有限公司 | 等离子喷涂设备及方法 |
WO2007134363A1 (en) * | 2006-05-22 | 2007-11-29 | Varian Australia Pty Ltd | Power generator for spectrometry |
US7852471B2 (en) | 2006-05-22 | 2010-12-14 | Varian Australia Pty Ltd | Power generator for spectrometry |
CN101529551B (zh) * | 2006-10-31 | 2011-06-22 | Mks仪器股份有限公司 | 防止射频等离子体处理中的不稳定性的方法和装置 |
CN102355205A (zh) * | 2011-06-24 | 2012-02-15 | 夏义峰 | 一种固态射频发生器 |
CN102355205B (zh) * | 2011-06-24 | 2014-05-07 | 夏义峰 | 一种固态射频发生器 |
CN106358358A (zh) * | 2016-09-28 | 2017-01-25 | 北京锐光仪器有限公司 | 一种自激式固态射频发生器 |
CN106358358B (zh) * | 2016-09-28 | 2020-06-23 | 北京锐光仪器有限公司 | 一种自激式固态射频发生器 |
CN113889396A (zh) * | 2020-07-01 | 2022-01-04 | 耶拿分析仪器有限公司 | 用于光谱测定的生成器 |
US12022603B2 (en) | 2020-07-01 | 2024-06-25 | Analytik Jena Gmbh+Co. Kg | Generator for spectrometry |
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Publication number | Publication date |
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CN1314191C (zh) | 2007-05-02 |
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Owner name: JIANGSU TIANRUI INFORMATION TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: XIA YIFENG Effective date: 20080704 |
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Effective date of registration: 20080704 Address after: Tian Rui mansion, No. 1666, Reed City South Road, Kunshan, Jiangsu Patentee after: Shenzhen Skyray Instrument Co.,Ltd. Address before: Beijing City, Changping District Huilongguan district two District No. 9 cloud Qu Yuan Building 1 301 Patentee before: Xia Yifeng |
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C56 | Change in the name or address of the patentee |
Owner name: JIANGSU TIANRUI INSTRUMENT CO., LTD. Free format text: FORMER NAME: JIANGSU TIANRUI INFORMATION TECHNOLOGY CO., LTD. |
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Address after: Tian Rui mansion, No. 1666, Reed City South Road, Kunshan, Jiangsu Patentee after: JIANGSU SKYRAY INSTRUMENT Co.,Ltd. Address before: Tian Rui mansion, No. 1666, Reed City South Road, Kunshan, Jiangsu Patentee before: Shenzhen Skyray Instrument Co.,Ltd. |
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