CN101064115A - 用于减小温度引起的突出的磁写头 - Google Patents
用于减小温度引起的突出的磁写头 Download PDFInfo
- Publication number
- CN101064115A CN101064115A CNA2007101018676A CN200710101867A CN101064115A CN 101064115 A CN101064115 A CN 101064115A CN A2007101018676 A CNA2007101018676 A CN A2007101018676A CN 200710101867 A CN200710101867 A CN 200710101867A CN 101064115 A CN101064115 A CN 101064115A
- Authority
- CN
- China
- Prior art keywords
- coil
- magnetic
- layer
- utmost point
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 120
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 55
- 238000009413 insulation Methods 0.000 claims abstract description 21
- 238000007493 shaping process Methods 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 14
- 239000000696 magnetic material Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 5
- 230000008021 deposition Effects 0.000 claims 4
- 238000001259 photo etching Methods 0.000 claims 4
- 238000002955 isolation Methods 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 claims 1
- 239000000945 filler Substances 0.000 abstract description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 84
- 230000004907 flux Effects 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 5
- 238000009987 spinning Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 229910003321 CoFe Inorganic materials 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000002772 conduction electron Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000005290 antiferromagnetic effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
- G11B5/3136—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure for reducing the pole-tip-protrusion at the head transducing surface, e.g. caused by thermal expansion of dissimilar materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/411,590 | 2006-04-25 | ||
| US11/411,590 US7593183B2 (en) | 2006-04-25 | 2006-04-25 | Magnetic write head design for reducing temperature induced protrusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101064115A true CN101064115A (zh) | 2007-10-31 |
Family
ID=38619242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101018676A Pending CN101064115A (zh) | 2006-04-25 | 2007-04-25 | 用于减小温度引起的突出的磁写头 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7593183B2 (https=) |
| JP (1) | JP2007294088A (https=) |
| CN (1) | CN101064115A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112992192A (zh) * | 2019-11-29 | 2021-06-18 | 意法半导体股份有限公司 | 用于硬盘存储器系统的读/写设备以及对应的制造工艺 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7515381B2 (en) * | 2005-12-22 | 2009-04-07 | Hitachi Global Storage Technologies Netherlands B.V. | Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording |
| JP2008112545A (ja) * | 2006-10-31 | 2008-05-15 | Fujitsu Ltd | ヘッドスライダ支持機構の製造方法、ヘッドスライダおよび記憶装置 |
| JP2009157987A (ja) * | 2007-12-26 | 2009-07-16 | Hitachi Global Storage Technologies Netherlands Bv | ヘッド・スライダのリセス量を調整する方法及びディスク・ドライブ装置 |
| JP2010118099A (ja) * | 2008-11-11 | 2010-05-27 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド・スライダ及び磁気ヘッド・スライダの製造方法 |
| US8749920B1 (en) | 2011-12-16 | 2014-06-10 | Western Digital (Fremont), Llc | Magnetic recording head with dynamic fly height heating and having thermally controlled pole tip protrusion to control and protect reader element |
| US8670214B1 (en) * | 2011-12-20 | 2014-03-11 | Western Digital (Fremont), Llc | Method and system for providing enhanced thermal expansion for hard disk drives |
| US8861317B1 (en) | 2013-04-02 | 2014-10-14 | Western Digital (Fremont), Llc | Heat assisted magnetic recording transducer having protective pads |
| US9343098B1 (en) | 2013-08-23 | 2016-05-17 | Western Digital (Fremont), Llc | Method for providing a heat assisted magnetic recording transducer having protective pads |
| US9099116B2 (en) | 2013-08-28 | 2015-08-04 | HGST Netherlands, B.V. | Stiff discrete insert array for thermal PTR management with desired induced stress state that reduces tendency for write pole erasure |
| US9411234B2 (en) * | 2014-10-01 | 2016-08-09 | Seagate Technology Llc | Writer pole formation |
| US9478242B1 (en) | 2016-03-25 | 2016-10-25 | Western Digital (Fremont), Llc | Magnetic recording apparatus having a recessed additional pole segment |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07311912A (ja) * | 1994-05-16 | 1995-11-28 | Daido Steel Co Ltd | 薄膜コイルの製造方法 |
| US6226860B1 (en) | 1997-07-22 | 2001-05-08 | Seagate Technology, Inc. | Method of forming an inductive writer having a high conductor/insulator ratio |
| JP3523092B2 (ja) | 1998-11-18 | 2004-04-26 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP2001060307A (ja) * | 1999-08-24 | 2001-03-06 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2002298309A (ja) * | 2001-01-26 | 2002-10-11 | Alps Electric Co Ltd | 磁気ヘッド及びその製造方法 |
| US6728065B2 (en) * | 2001-03-29 | 2004-04-27 | Seagate Technology Llc | Single pole magnetic recording head for perpendicular magnetic recording |
| US6693769B2 (en) * | 2001-06-18 | 2004-02-17 | Hitachi Global Storage Technologies Netherlands B.V. | High data rate write head |
| US6757141B2 (en) * | 2002-01-18 | 2004-06-29 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular recording write head with a ferromagnetic shaping layer |
| JP3950789B2 (ja) * | 2002-07-17 | 2007-08-01 | アルプス電気株式会社 | 薄膜磁気ヘッドの製造方法 |
| US6989963B2 (en) * | 2002-09-13 | 2006-01-24 | Seagate Technology Llc | Writer core structures having improved thermal dissipation properties |
| US6804879B2 (en) | 2002-10-23 | 2004-10-19 | Hitachi Global Storage Technologies Netherlands, B.V. | Method of fabricating a magnetic transducer with a write head having a multi-layer coil |
| US20040085684A1 (en) | 2002-11-05 | 2004-05-06 | Basra Vijay K. | Magnetic read/write head |
| JP3842724B2 (ja) | 2002-11-29 | 2006-11-08 | アルプス電気株式会社 | 磁気ヘッドの製造方法 |
| US7031121B2 (en) * | 2003-07-30 | 2006-04-18 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular recording magnetic head with a write shield magnetically coupled to a first pole piece |
| US7199973B2 (en) * | 2003-09-26 | 2007-04-03 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording head with trailing shield throat height less than shaping layer distance from ABS |
| US7322095B2 (en) * | 2004-04-21 | 2008-01-29 | Headway Technologies, Inc. | Process of manufacturing a four-sided shield structure for a perpendicular write head |
| US7394621B2 (en) * | 2004-06-30 | 2008-07-01 | Headway Technologies, Inc. | Using bilayer lithography process to define neck height for PMR |
| US7292408B2 (en) * | 2004-07-30 | 2007-11-06 | Hitachi Global Storage Technologies Netherlands B.V. | Bilayer coil insulation for magnetic write heads to minimize pole recession |
| JP4286208B2 (ja) * | 2004-10-20 | 2009-06-24 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直記録用磁気ヘッドとその製造方法及びそれを用いた磁気ディスク装置 |
| JP4763264B2 (ja) * | 2004-10-25 | 2011-08-31 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直記録用磁気ヘッド |
| US7551396B2 (en) * | 2005-04-27 | 2009-06-23 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic write head having a studded trailing shield compatible with read/write offset |
| JP2007242131A (ja) * | 2006-03-08 | 2007-09-20 | Fujitsu Ltd | 磁気ヘッドの製造方法および磁気ヘッド |
| US7612963B2 (en) * | 2006-06-30 | 2009-11-03 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording head with photoresist dam between write coil and air bearing surface |
-
2006
- 2006-04-25 US US11/411,590 patent/US7593183B2/en not_active Expired - Fee Related
-
2007
- 2007-04-02 JP JP2007096452A patent/JP2007294088A/ja active Pending
- 2007-04-25 CN CNA2007101018676A patent/CN101064115A/zh active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112992192A (zh) * | 2019-11-29 | 2021-06-18 | 意法半导体股份有限公司 | 用于硬盘存储器系统的读/写设备以及对应的制造工艺 |
| US11482248B2 (en) | 2019-11-29 | 2022-10-25 | Stmicroelectronics S.R.L. | Read/write device for a hard-disk memory system, and corresponding manufacturing process |
| CN112992192B (zh) * | 2019-11-29 | 2023-01-13 | 意法半导体股份有限公司 | 用于硬盘存储器系统的读/写设备以及对应的制造工艺 |
| US11810604B2 (en) | 2019-11-29 | 2023-11-07 | Stmicroelectronics S.R.L. | Read/write device for a hard-disk memory system, and corresponding manufacturing process |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070247750A1 (en) | 2007-10-25 |
| JP2007294088A (ja) | 2007-11-08 |
| US7593183B2 (en) | 2009-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |