The specific embodiment
The present invention saves to the motor that drives the applicator head part to carry out power supply or be connected to feed line on the type frame in order to transmit sensor signal or the technology of signal routing.Promptly, motor driver is arranged on the pallet (ガ Application ト リ), feeding classification to this driver is made as by at the feed line that lays on the door type moving direction be installed in the noncontact feeding classification that constituted by electric pick-up (being subjected to electric fuse) on the type frame, the feed pick-up head also is set in each applicator head equally, makes to be subjected to from the feed line that is routed on the type frame.And then making from main control unit is the light wireless communication mode to the holding wire of driver.Thus, reduce and follow a moving cable of type frame, thereby realized low dust and reduced the wiring the number of working processes.Below, explain its structure and action with embodiment.
Below, use description of drawings one embodiment of the present of invention.
Fig. 1 is an oblique view of having used glue spreader of the present invention.With the perpendicular direction of the bearing of trend of door type frame as X-axis, the bearing of trend of door type frame as Y-axis, above-below direction as the Z axle.Door type frame moves back and forth point-blank along X-direction basically, and applicator head moves back and forth along Y direction.On stand 1, be provided with two door type frame 2A, 2B.Among this figure,, so omit footnote sometimes and describe because in the door type frame 2B in the door type frame 2A on right side and left side, the part of same numbers is represented identical parts.
By driving not shown X-axis linear electric machine, two door type frame 2A, 2B can be moved respectively along X-direction.Be provided with cover 3A, the 3B that covers door type frame on the top of door type frame 2A, 2B.The footing of the side of door type frame 2A, 2B partly is provided with the primary side that possesses 2 through holes and is subjected to electric fuse 6A, 6B.Not contact the mode of fuse in the through hole on being arranged on this fuse, lay primary side feed line 5 towards X-direction along stand 1.This primary side feed line 5 uses the line that has covered wire in order to flow through high frequency electric.In addition, primary side feed line 5 is connected with the high frequency electric source 4 that is arranged on ground one side, provides high frequency voltage by this power supply.In addition, be subjected among electric fuse 6A, the 6B, be respectively arranged with and doublely do secondary side winding and secondary side feed line 7A, the 7B of the feed line of feed in door type frame at primary side.Secondary side feed line 7A has the primary side of being wrapped in to be subjected to lay along Y direction on the cover 3A of door type frame 2A on the electric fuse 6A, and to the structure that is installed in the equipment feed on the type frame 2A.Equally, secondary side feed line 7B has the primary side of being wrapped in to be subjected on the electric fuse 6B, on the cover 3B of door type frame 2B along the Y direction linear lay and the structure of the equipment feed in being installed in a type frame 2B.
At 4 applicator head 8A~8D of door type frame 2A upper support, support 4 applicator head 8E~8H too on the door type frame 2B.Each applicator head will be described in detail in the back, move along Y direction by driving the Y-axis linear electric machine.In addition, the glue receiving cartridge that comprises that is arranged on coating nozzle on the applicator head etc. drives by the Z spindle motor in an interior part and moves in Z-direction.
In addition, in each applicator head 8A~8H, be respectively arranged with secondary side and be subjected to electric fuse 9A~9H, to be subjected to the feed line on electric fuse 9A~9H to be subjected to the voltage of electricity to drive Z spindle motor or gap sensor etc. by being wrapped in this secondary side.In addition, be subjected among electric fuse 9A~9H at secondary side, lay secondary side feed line 7A, the 7B (it is corresponding secondary side feed line 7A that secondary side is subjected to electric fuse 9A~9D, and it is corresponding secondary side feed line 7B that secondary side is subjected to electric fuse 9E~9H) that narrated the front in the mode that connects each fuse along Y direction.The high frequency voltage that provides from secondary side feed line 7A, 7B is provided is subjected to the feed line that is twined on electric fuse 9A~9H to be subjected to electric structure by being separately positioned on each secondary side.
Main control unit 10 carries out the Position Control of each type frame 2A, 2B and each applicator head 8A~8H, the processing of perhaps various sensor signals and picture signal, and the ON of power supply, OFF control.In addition, though do not illustrate, possess microcomputer and RAM in the inside of main control unit 10.
In the opposite side footing of door type frame 2A, 2B part, be provided with respectively between door type frame and stand 1, send and receive control signal etc. at the optical communication element 11A~11J of stand one side (fixing a side) with at optical communication element 12A, the 12B of door type frame one side (12B that is arranged in this figure among the type frame 2B not have diagram) and at the optical communication element 14A~14H (the optical communication element 14E~14H of door type frame 2B one side does not have to illustrate in this figure) of each applicator head.
Fig. 5 represents a corresponding enlarged drawing of applicator head 8A with optical communication element.Fix optical communication element 12A, 12B on each type frame of optical communication element 11I, the 11J of a side and a movable side and have structure (structure) with the transmitted light that uses half-reflecting mirror 13A, 13B along X-direction transmitting-receiving light.In addition, the optical communication element 14A~14H of each applicator head is for along Y direction transmitting-receiving light, take to use and the optical communication element 11A~11H of ground one side between the catoptrical structure of the half-reflecting mirror 13A, the 13B that are provided with.Promptly, between optical communication element 12A, 12B that optical communication element 11I, 11J that stand one side is provided with and door type frame one side are provided with, and between the optical communication element 11A~11H of stand one side setting and optical communication element 14A~14H that each applies first side, communicate.
In addition, as shown in Figure 1, this communication unit is positioned at the bottom with optical communication element 11E~11H, the 11J of stand one side, is configured up and down in the superposed mode of optical communication element 11A~11D, 11I.That is, be positioned at downside by being configured to an optical communication element of type frame 2B one side, door type frame 2A one sidelight communication unit is positioned at upside, also can shading light along the equidirectional configuration even make.In addition, to every group of change modulating frequency, so that the phase mutual interference can not take place.
In addition, 4 group communication machines communicate between equidirectional shown in the drawing, if but the optical communication element 11A~11D of stand one side is divided into part that is arranged on stand front one side and the part that is arranged on the stand back side one side, and the optical communication element of being arranged to apply first side also communicates with front one side, back one side, then two groups of optical communication elements can be set on same straight line, thereby can save installing space.
In addition, as mentioned above, at optical communication element 12A, the 12B of the optical communication element 11A~11J of stand one side setting and the one side setting of door type frame and respectively apply between the communication unit 14A~14H of first side and be provided with half-reflecting mirror 13A, 13B.By this half-reflecting mirror, in optical signal from the optical communication element 11A~11J that fixes a side, optical communication element 11I, 11J make and directly advance sensitization on the photo-sensitive cell that light (transmitted light) incides optical communication element 12A, 12B, and the emergent light of the optical communication element 11A~11H that fixes a side is incided among the optical communication element 14A~14H that is provided with on each applicator head by the reverberation that half-reflecting mirror produces.Otherwise perhaps, have the light that the emergent light from the optical communication element 12A, the 12B that are arranged on a type frame directly advances along half-reflecting mirror 13A, 13B and incide optical communication element 11I, the 11J that fixes a side, by half-reflecting mirror 13A, 13B reflection, send to the structure of the communication unit 11A~11H that fixes a side from the emergent light that is arranged on the optical communication element 14A~14H on each applicator head.
In addition, in order to avoid optical communication element 11A~11D reliably, 11I and 11E~11H, between the 11J, and optical communication element 12A, 14A~14D and 12B, interference between 14E~14H, can make optical communication element 11A~11D, 11I is positioned at current position, optical communication element 11E~11H, 11J is arranged on the end of the opposite side of stand, and the optical communication element 12B that is arranged on the type frame 2B is opposite to configuration with the optical communication element 12A of door type frame 2A, and, via half-reflecting mirror 13A, 13B is at each type frame 2A, the optical communication element 14A of the applicator head of the last setting of 2B~14H sends.
Promptly, in the present embodiment, feed between stand and door type frame, door type frame and the applicator head is divided into two-stage, adopt the noncontact feeding classification, and directly transmission manner has also been adopted between the optical communication element that is configured at the optical communication element of ground one side with via half-reflecting mirror on each position in the exchange of signal.That is, fixing the optical communication element 11A~11J of a side, and optical communication element 12A, the 12B of door type frame one side and respectively apply between the optical communication element 14A~14H of first side and be provided with half-reflecting mirror 13A, 13B.According to this structure, need not be arranged to optical communication element respectively to fix 2 optical communication elements that a side is used and first side is used, thereby can seek the miniaturization of device in door type frame one side.
Have on the substrate 16 by the travelling carriage (not shown) that is arranged on the stand 1 and go up the structure that set substrate holding mechanism 15 adsorbs maintenance.This substrate holding mechanism 15 has by the not shown θ axle servomotor of rotation driving, can revise the structure of the inclination in X, Y plane.In addition, for substrate 16 is moved on the substrate holding mechanism 15, be provided with not shown travelling carriage, it moves into direction both can be X-direction, also can be Y direction.
The figure of the part of the applicator head in Fig. 2 presentation graphs 1.Fig. 2 (a) is the side view of watching from Y direction, and Fig. 2 (b) is applicator head built-in system figure.For fear of numerous and diverse, in (a), there is not the cable between the devices illustrated.Fig. 2 illustrates the applicator head 8A of a type frame 2A as representational example, and also is identical structure about other applicator head.
In Fig. 2 (a), on door type frame 2A, magnet 2a1 is set, the side of door type frame 2A is provided with linear scale (ニ リ ァ ス ケ one Le) 2a2.In addition, door type frame 2A is provided with Y-axis limiting sensor 2a3.And then, in door type frame 2A, a position of another side, above two positions on, be provided with linear guides 2a4 in the mode of clamping magnet 2a1.
In applicator head 8A, with clamp the cover 3A mode, be provided with following base station 8a8 and top base station 8a9, above base station (Japanese: base station) be connected with nozzle support member 8ab with following base station.Base station 8a9 is provided with secondary side and is subjected to electric fuse 9A in the above.So that connect the mode that this secondary side is subjected to electric fuse 9A, secondary side feed line 7A is set, be subjected to twine on the electric fuse 9A feed line 9a1 at secondary side.This feed line 9a1 is connected to and is subjected on the electric unit 8a1.
The guide rail that can move along linear guides 2a4 is set on the face faced of the door type frame of base station 8a8 below.In addition, be provided with the set relative sub-electric coil 8a4 of Y-axis of magnet 2a1 above the door type frame with base station 8a8 below.In addition, the top of chassis 8a8 below, what be provided with that the RF power that the feed line 9a1 that is subjected to electric fuse 9A via the applicator head part from secondary side is provided carries out rectification and carry out the voltage adjustment is subjected to electric unit 8a1.And then the top side of chassis 8a8 is provided with control to the voltage that the sub-electric coil 8a4 of Y-axis flows below, is controlled at y-axis motor driver 8a2, the Z spindle motor driver 8a3 of control Z spindle motor 8a5 that Y direction moves.And then the following side of chassis 8a8 on the position relative with the linear scale 2a2 of door type frame one side setting, is provided with Y-axis position detector 8a6 below.In addition, the optical communication element 14A of first side is arranged on the position that can receive the flashlight of the optical communication element 11A that fixes a side on the following chassis 8a8.
Nozzle support member 8ab is provided with Z axis rail 8a10, and this Z axis rail 8a10 is provided with Z pillow block 8a11, drives Z spindle motor 8a5 and comes mobile Z pillow block 8a11.The amount of movement of this Z pillow block 8a11 is detected by Z shaft position detector 8a7, and its testing result is used in the control of Z spindle motor driver 8a3.On this Z pillow block 8a11, be provided with glue receiving cartridge 8a12, the rangefinder 8a14 that measures the interval of substrate and nozzle that possesses glue injection nozzle 8a13, the location recognition camera 8a15 that is used to detect substrate position.
In Fig. 2 (b), be wrapped in secondary side and be subjected to the hold concurrently feed line 9a1 of applicator head part of secondary side winding on the electric fuse 9A to be used for being subjected to electric fuse 9A to accept RF power, and send electricity to give to be subjected to electric unit 8a1 from secondary side feed line 7A by secondary side.Send the line of electricity and the Z spindle motor driver power line 9a3 that send electricity to Z spindle motor driver 8a3 from be connected with via y-axis motor driver power line 9a2 by electric unit 8a1 to y-axis motor driver 8a2.Be provided with the y-axis motor power line 9a4 that connects to the sub-electric coil 8a4 of Y-axis, be used to receive Y-axis linear encoder holding wire 14a5 from y-axis motor driver 8a2 from the signal of Y-axis position detector 8a6.Be connected with Z spindle motor power line 9a5, be used to receive the Z shaft encoder signals line 14a6 of signal of the encoder of comfortable Z spindle motor 8a5 setting from Z spindle motor driver 8a3 to Z spindle motor 8a5 power supply.In addition, drive and use power line 9a6 from being subjected to electric unit 8a1 to be connected with sensor to rangefinder 8a14 or location recognition camera 8a15 power supply.In addition, be connected with y-axis motor driver signal line 14a1, Z spindle motor driver signal line 14a2, Y-axis position sensor signal line 14a3, Z shaft position sensor holding wire 14a4, rangefinder holding wire 14a7, the location recognition camera holding wire 14a8 etc. that goes to y-axis motor driver 8a2, Z spindle motor driver 8a3 and unaccounted each detecting sensor from optical communication element 14A.By such wiring, reduce the moving part of connecting line, prevent to cause dust by the friction of wiring etc.In addition, the exchange of signal also by respectively to changing modulating frequency in each corresponding equipment, thereby can transmit information reliably by interference-free.
Fig. 3 is the details drawing that the primary side of a side is subjected to electric fuse 6A part.It also is roughly the same structure that the primary side of opposite side is subjected to electric fuse 6B.Primary side is subjected to electric fuse 6A for offered the shape of two windows (openings) on cuboid, connects primary side feed line 5 along its window portion.Primary side feed line 5 is reciprocal electric wire, have from high frequency electric source 4 by being arranged on the 1st feed line supporting member 19a of stand end, and be subjected to the window of the side of electric fuse 6A by primary side, the 2nd feed line supporting member 19b at the stand other end turns back then, the perforation primary side is subjected to the opposite side window of electric fuse 6A, by the 1st feed line supporting member 19a, turn back to the such structure of high frequency electric source then.The secondary side winding that becomes secondary side feed line 7A is wrapped in the window top that primary side is subjected to electric fuse 6A.As shown in the figure, by twining along the window dextrorotation of a side, along the mode of the left-handed winding of window of opposite side, winding is connected in series, and can have the voltage of being responded in the winding of 2 windows not to be delivered on the secondary side feed line with offsetting.In addition, as shown in Figure 3, wind the line, can use the space of window portion widely, can also reduce primary side feed line 5 and be subjected to the contacted danger of electric fuse 6A with primary side by concentrating on window top.Secondary side is also made with primary side by electric fuse 9A, 9B and is subjected to electric fuse 6A, shape that 6B is identical, among Fig. 3, if replace to 7A to 5,7A is replaced to 9a1, then becomes the figure that the expression secondary side is subjected to electric fuse 9A.In addition, the arrow among the figure is represented the flow direction of electric current.
The following describes the action of glue spreader.The motion flow of the device among Fig. 4 in the expression present embodiment.Among Fig. 4, at first insert power supply (step 100).Then, carry out the initial setting (step 200) of coating machine.In this initial setting process, on Fig. 1, drive the motor and the Z spindle motor of each mobile usefulness by instruction from each motor driver, substrate holding mechanism 15 is moved along the θ direction, navigate to the place, reference position of regulation.In addition, the origin position nozzle 8a13 (Fig. 2) is set in regulation makes its glue jet be positioned at the position (that is gluing starting point) of beginning gluing.And then, set glue pattern data or substrate position data, glue injection end position data etc.
The never illustrated keyboard of this data input is input to (Fig. 1) in the main control unit 10, indicates to each motor driver etc. from main control unit, and these data are stored among the RAM in the microcomputer that is built in the main control unit 10.
If this initial setting operation (step 200) finishes, then then substrate 16 is carried in the substrate holding mechanism 15 (Fig. 1) that absorption keeps and make its maintenance (step 300).Then, carry out substrate preparation localization process (step 400).In this is handled, take set location mark in the substrate that carries on substrate holding mechanism 15 with image recognition camera 8a15, obtain the position of centre of gravity of location by the image processing with mark, detect the inclination of substrate 16 then in the θ direction, according to this inclination, drive not shown θ axle servomotor, revise inclination in this θ direction.By above action, finish substrate preparation localization process (step 400).
Then, carry out glue pattern and describe to handle (step 500).In this is handled, make the jet of nozzle 8a13 be displaced to the coating starting position of substrate, carry out the comparison of nozzle location and adjust and move.Then, making Z spindle motor 8a5 and Z pillow block 8a11 action, is the height setting of nozzle 8a13 that glue pattern is described height.According to the initial movable range data of nozzle, make nozzle 8a13 decline initial movable apart from size.In follow-up action, measure the substrate surface height by rangefinder 8a14, confirm whether the top of nozzle 8a13 sets the height of describing glue pattern for.Then, failing to set under the situation of describing height, make nozzle 8a13 decline slight distance, carry out the action of above-mentioned substrate 16 surperficial instrumentations and nozzle 8a13 decline slight distance repeatedly, the height setting one-tenth coating on nozzle 8a13 top is described the position of glue pattern.
When above processing finishes, then, drive X, Y-axis linear electric machine then according to the glue pattern data among the RAM of the microcomputer that is kept at main control unit 10.Thus, the glue jet of nozzle 8a13 according to these glue pattern data, moves on X, Y direction under the state relative with substrate 16.Simultaneously, on glue receiving cartridge 8a12, apply the air pressure of setting, begin to spray glue from the glue jet of nozzle 8a13.Thus, beginning is to substrate 16 coating glue patterns.
Then, as in front, the microcomputer input of main control unit 10 is from the measured data at the interval between glue jet rangefinder 8a14, nozzle 8a13 and substrate 16 surfaces, and the ripple (Japanese: ぅ ね り) on mensuration substrate 16 surfaces, drive Z spindle motor 8a5 according to this measured value, be maintained the setting height from the surface of substrate 16 to nozzle 8a13 constant.Thus, can be according to desirable coating amount coating glue pattern.
Whether, according to the glue jet of nozzle 8a13 be the judgement that be in by the end of the generating writing pattern of above-mentioned glue pattern data decision substrate 16 on, the mensuration that then turns back to the substrate surface ripple if not terminal is once more handled if as described above, carrying out glue pattern and describing.Then, carry out above-mentioned spraying repeatedly and describe, last till that glue pattern forms till the end that arrives generating writing pattern.If arrive the end of generating writing pattern, then drive Z spindle motor 8a5 nozzle 8a13 is risen, glue pattern is described operation and is finished (step 500).
Then, enter into substrate and discharge disposal (step 600), remove the maintenance of substrate 16, be discharged to beyond the device.Judge then and whether stop above whole operations (step 700), forming under the situation of glued membrane with identical figure on the multi-piece substrate, carry processing (step 300) beginning repeatedly from substrate, if for all substrates, these a series of processing all are through with, then operation will be all over (step 800).
The action of the dynamical system of having used the noncontact feed is described then.In Fig. 1, Fig. 2, the high frequency electric that flows in primary side feed line 5 produces high frequency magnetic field around primary side feed line 5.The primary side that this high frequency magnetic field concentrates on high magnetic permeability is subjected to produce magnetic flux among the electric fuse 6A in fuse.This magnetic flux be wrapped in primary side and be subjected to secondary side feed line 7A interlinkage on the electric fuse 6A.By electromagnetic induction, in secondary side feed line 7A, induce high frequency voltage, thereby in secondary side feed line 7A, produce high frequency electric.Be subjected to be subjected to too among the electric fuse 9A to produce in the electric fuse magnetic flux of high frequency at secondary side,, in secondary side is subjected to the feed line 9a1 of the applicator head part of twining on the electric fuse 9A, induce high frequency voltage, in feed line 9a1, produce high frequency electric by electromagnetic induction.By the electric unit 8a1 that is subjected to that possesses on the applicator head 8A RF power rectifying conversion that is provided is become direct current, and voltage is adjusted in the range of nominal tension of each motor driver.Be subjected to electric unit 8a1 to y-axis motor driver 8a2, Z spindle motor driver 8a3 from this, provide necessary electric power by y-axis motor driver power line 9a2, Z spindle motor driver power line 9a3.To the sub-electric coil 8a4 of Y-axis, Z spindle motor 8a5, provide necessary electric power from each motor driver by y-axis motor power line 9a4, Z spindle motor power line 9a5.In addition, offer location recognition and offer the electric power of rangefinder 8a14 because needed voltage is low with the electric power of camera 8a15 or with laser, therefore reduce by being subjected to electric unit 8a1 that the electricity consumption of voltage ratio motor-driven is pressed further, being driven by sensor provides with power line 9a6.Like this, can save at the moving part medium power cable distribution between stand-Men type, between door type-applicator head.
Secondly, the signal system of having used optical communication element is described.At first, the optical communication element 11A~11J that sends to stand one side from the signal of main control unit 10 via the control signal cable.Then, by 11I, 11J above-mentioned signal is transformed into optical signal and modulates,, throw it and directly advance light (transmitted light) to being arranged on optical communication element 12A, 12B on the relative door type frame via half-reflecting mirror 14A, 14B.In optical communication element 12A, 12B, sensitization to optical signal be transformed into the signal of telecommunication, be sent to y-axis motor drivers such as being used for driving gate type frame etc.In addition, by main control unit 10,, transmit the light that reflects by half-reflecting mirror 14A, 14B to optical communication element 13A~D, 13E~H of first side from stand one sidelight communication unit 11A~11H.In the optical communication element 13A~13H of first side, the optical signal that demodulation sensitization is arrived is transformed into the signal of telecommunication, by Y-axis and Z spindle motor driver signal line 14a1,14a2, and Y-axis in the applicator head part and Z spindle motor driver 8a2,8a3 communication.Under the signal that returns control signal, Y-axis position detector 8a6 and Z shaft position detector 8a7 such as the ready signal of motor from Y-axis, Z spindle motor driver 8a2,8a3, alarm signal to main control unit 10, situation, send to main control unit 10 by the path opposite with above-mentioned path from the distance signal of the picture signal of location recognition camera 8a15 and rangefinder 8a14.Like this, can save between stand-Men type frame, the wiring of signal cable in the communications portion between door type frame-applicator head.
As mentioned above, the moving part of glue spreading apparatus roughly disposes feed line in order to move along X-direction or Y direction straight line point-blank and have, the structure that the feed fuse can move thereon.Thereby, can reduce the cable radical of following moving part.And then, have the holding wire that replacement was used in the past, optical communication element is configured in the structure of standing part one side and moving part one side via half-reflecting mirror.Thus, transmitting optical signal by the configuration half-reflecting mirror, need and not apply 2 optical communication elements that first side is used in movable frame one side configuration standing part one side usefulness, thereby can seek the miniaturization of device effectively.Thereby, owing to can reduce power line, holding wire significantly, therefore can prevent the dust diffusion that takes place by the friction between the cable, and can prevent the decline of the position control accuracy that causes by the cable weight of following moving part.Thus, sneak into dust and the good coating of precision in the glue that can realize can on real estate, not applying.And then the present invention is can being feature with noncontact mode feed, communication in a plurality of moving parts, but in having the device of a plurality of moving parts, also can be applied to certainly only is the situation of a moving part.
And then, in addition in explanation hereto, has in transmitted light to the optical communication element transmitting-receiving half-reflecting mirror of door type frame from the light of the optical communication element of ground one side, receive and dispatch catoptrical structure to the optical communication element of applicator head, certainly also can pass through the configuration of the optical communication element of change ground one side, to the transmitted light of the optical communication element transmission half-reflecting mirror that applies first side, to the optical communication element transmission reverberation of door type frame.
The figure of the fuse part when expression makes the supporting way of feed line be alternate manner among Fig. 6.
In Fig. 3, the interior feed line 5 of openings that connects fuse is not only expanded into tension force contact with fuse.To this, in the present embodiment, linear rigid body supporting member (the 3rd feed supporting member) 17 is set, fixing (binding) support feed line on its 3rd feed line supporting member 17.
Fig. 6 (a) is the details drawing that the primary side of a side is subjected to electric fuse 6B part.Fig. 6 (b) be expression for fuse, feed line and be subjected to the configuration of electric wire and the profile of the shape of the 3rd feed line supporting member 17.It also is roughly the same structure that the primary side of opposite side is subjected to electric fuse 6A.In addition, the feed line that is arranged on the type frame also has same structure with the electric fuse that is subjected to that is arranged in each.Primary side feed line 5 is fixed with line 18 with fixing on a plurality of positions being formed by insulator and have on the 3rd bar-shaped feed line supporting member 17 of desirable rigidity.The 3rd feed line supporting member 17 has the structure on the 1st and the 2nd feed line supporting member 19a, the 19b that is provided with on two ends of moving direction of the door type frame 2A, the 2B that are fixed by bolts on the stand 1.The the 1st and the 2nd feed line supporting member 19a, 19b also are made of insulating materials.Like this, by fixing primary side feed line on the 3rd feed line supporting member 17, make its perforation be arranged on primary side and be subjected to space in the window in the electric fuse, some vibrate even primary side is subjected to electric fuse 6A to move adding, primary side feed line 5 can not contact with being subjected to electric fuse 6B yet, be not subjected to electric fuse to destroy the situation that insulation causes short circuit thereby do not exist the primary side feed line to touch primary side, can carry out stable feed.In addition, shown in Fig. 6 (b), the shape of the 3rd feed line supporting member 17 is not cylindrical but possesses the quadrangle of recess, makes feed line can be housed in the recess by forming, and can stably support feed line yet.
In addition, primary side is subjected to electric fuse 6A to have the shape of opening two windows on cuboid, and primary side feed line 5 connects this window portion.Primary side feed line 5 becomes reciprocal electric wire, have from high frequency electric source 4 by being arranged on the 1st feed line supporting member 19a of stand end, be subjected to the side window mouth of electric fuse 6A then by primary side, turn back in the 2nd feed line supporting member 19b place at the stand opposite end, connect primary side then and be subjected to another window of electric fuse 6A, by the 1st feed line supporting member 19a, turn back to the structure of high frequency electric source again.The secondary side winding that becomes secondary side feed line 7A is wrapped in the window top that primary side is subjected to electric fuse 6A.As shown in the figure,, twine at the left-handed canoe of the window of opposite side and to be connected in series, thereby pass to the secondary side feed line with can not offsetting the voltage that in the winding of two windows, induces by twining in the window dextrorotation of a side.In addition, shown in Fig. 6 (b), by the primary side feed line is fixed on the bar-shaped supporting member 17, can focus on window side partly twines, can make winding and feed line shorten both distances non-contiguously, can improve from the power supplying efficiency of primary side feed line 5 to the secondary side feed line.Secondary side is also made with primary side by electric fuse 9A, 9B and is subjected to electric fuse 6A, shape that 6B is identical, among Fig. 6, for 7A, if 7A is replaced to 9a1, then becomes the figure that the expression secondary side is subjected to electric fuse 9A.In addition, the arrow among the figure is represented the direction that electric current flows.