The specific embodiment
Supply with power in order to save the motor that is used for to driving the applicator head part, sensor signal and be connected supply lines on the type framework, signal routing, and motor driver is arranged on the door frame (ガ Application ト リ), method of supplying power to this driver adopts feed line that comprises on the type moving direction that is laid in and the non-contact power mode that is subjected to electric pick-up that is installed on the type framework, the holding wire of assigning to driver from master control part adopts the light wireless communication mode, follow a moving cable of type framework thereby reduce, realize low airborne dust, reduce the wiring work procedures, the present invention is elaborated to above-mentioned implementation method by the following examples.
[embodiment 1]
Below, use accompanying drawing that embodiments of the invention are described.
Fig. 1 is the oblique view that has been suitable for paste applicator of the present invention.With with the perpendicular direction of the bearing of trend of door type framework be X-axis, be Y-axis with the bearing of trend of door type framework, with upper and lower to being the Z axle.Door type framework moves reciprocatingly on X-direction basically point-blank, and applicator head moves reciprocatingly on Y direction.Device pallet 1 is provided with 2 door type framework 2A, 2B.In this figure, because identical numeral is with a part of on the door type framework in the door type framework on right side and left side, omission is sometimes added word and is described.
By driving not shown X-axis linear electric machine, 2 door type framework 2A, 2B can move on X-direction respectively.Be provided with the lid 3 that covers door type framework on the top of door type framework.Door type framework 2A, 2B are provided with elementary feed core 6A, 6B, and elementary feed line 5 is laid in the mode that connects this core on X-direction along pallet 1.This elementary feed line 5 is connected on the high frequency electric source 4, provides high frequency voltage by this power supply.And, in elementary feed core 6A, 6B, be respectively arranged with secondary feed line 7A, the 7B of double as to the feed line of primary side winding and door type framework inside.Secondary feed line 7A is wrapped in elementary being subjected on the electric core 6A, lays in door type frame cover 3A upper edge Y direction, and secondary feed line 7B is wrapped in elementary being subjected on the electric core 6B, lays in door type frame cover 3B upper edge Y direction.
On door type framework 2A, there are 4 applicator head 8A~8D supported, on door type framework 2B, have 4 applicator head 8E~8H supported too.Can be described in detail each applicator head in the back, on Y direction, move by driving the Y-axis linear electric machine.And a part that comprises the paste accommodation tube that is arranged on coating nozzle on the applicator head etc. can move on Z-direction by Z axle servomotor.And each applicator head is provided with secondary electric coil (coil) 9A~H that is subjected to, and is subjected to the power supply of electricity to drive Z axle servomotor etc. by this.
Main control part 10 is carried out the processing of the Position Control of each type framework 2, each applicator head 8A~H, various sensor signal, picture signal and the switch control of power supply.Though not shown, be provided with microcomputer and RAM in the inside of main control part 10.
Between door type framework 2A, 2B and pallet 1, be provided with the transmission of carrying out control signal etc. and space optical communication machine 11A, the 11B of reception, 12A, 12B.Constituting on X-direction of this space optical communication machine sends and receives light, optical communication apparatus 11A that is arranged at the pallet side and 11B and be arranged at the optical communication apparatus 12A of a type frame side and 12B between communicate.And this space optical communication machine is configured to up and down as shown in the figure: below the optical communication apparatus 11B of pallet side is configured in, above optical communication apparatus 11A is positioned at.That is,, on equidirectional, be configured also not shading even if make by at the optical communication apparatus of downside configuration door type framework 2B side, at the optical communication apparatus of upside configuration door type framework 2A side.And, change modulating frequency by every group, make not produce interference mutually.
And, in order positively to avoid the interference of optical communication apparatus 11A and 11B and optical communication apparatus 12A and 12B, also can make optical communication apparatus 11A be positioned at the position of present situation, optical communication apparatus 11B is arranged on the end of opposition side, an optical communication apparatus 11B who is arranged on optical communication apparatus 12B and door type framework 2A on the type framework 2B is oppositely disposed.
And, between door type framework and applicator head, space optical communication machine 13A~H, 14A~H only are provided with the number of applicator head, so that also can carry out the exchange of signal by each applicator head.Optical communication apparatus 13A~D is arranged on the type framework 2A, and optical communication apparatus 13E~H is arranged on the type framework 2B.And the optical communication apparatus 14A~H and the optical communication apparatus 13A~H of door type framework one side relatively are arranged on each applicator head 8A~H.Optical communication apparatus 13A~H communicates with relative optical communication apparatus 14A~H respectively, and communication direction is a Y direction.Owing to also change modulating frequency in the communication between space optical communication machine 13A~H and 14A~H, so do not produce interference by every group.
That is, in the present embodiment, for take between pallet and door type framework, door type framework and the applicator head 2 grades, the non-contact power mode powers, 2 grades spatial light transmission means is also taked in the exchange of synchronous signal.
Substrate 16 is by 15 absorption of the substrate holding mechanism on the travelling carriage (not shown) that is arranged on the pallet 1 and maintenance.This substrate holding mechanism 15 drives not shown θ axle servomotor by rotation, thus but the inclination in the modified chi, Y plane.And, for substrate 16 being arranged between the type framework and the travelling carriage of substrate is set, it can be moved on X-direction, yet makes it removable also passable on Y direction.
Fig. 2 is the figure that shows the part of the applicator head among Fig. 1.The side view of Fig. 2 (a) for seeing from Y direction, Fig. 2 (b) is applicator head built-in system figure.Loaded down with trivial details for removing from, the cable of not shown equipment room in (a).Fig. 2 shows the applicator head of a type framework 2A as typical example, yet other applicator head has same formation.
In Fig. 2 (a), on door type framework 2A, be provided with magnet 2a1, be provided with linear graduation (scale) 2a2 in the side of door type framework 2A.And door type framework 2A is provided with Y-axis limiting sensor 2a3.And position, another side of door type framework 2A is provided with linear steering device 2a4, is provided with linear steering device 2a4 with the form that accompanies magnet 2a1 on 2 positions on door type framework 2A.
On applicator head 8A with accompany the form of covering 3A be provided with below base station 8a8 and above base station 8a9, above base station be connected by nozzle holding components 8ab with following base station.Base station 8a9 is provided with the secondary electric coil 9A that is subjected in the above.
The face faced of the door type framework of base station 8a8 is provided with the guide that can move along linear steering device 2a4 below.And, relatively be provided with Y-axis armature coil 8a4 with the magnet that is arranged on above the type framework on the base station below.And the top of base station 8a8 is provided with and is subjected to electric unit 8a1 below, and this is subjected to electric unit to carrying out rectification from the secondary electric coil 9A that is subjected to by the RF power that applicator head part feed line 9a1 supplies with, and carries out the voltage adjustment.And the upper face side of base station 8a8 is provided with voltage, the y-axis motor driver 8a2 that moves of control Y direction and the Z spindle motor driver 8a3 of control Z spindle motor 8a5 that control flows to Y-axis armature coil 8a4 below.And, the following side of base station 8a8 below, the position relative with linear graduation 2a2 on being arranged on a type frame side is provided with Y-axis position detector 8a6.
Nozzle holding components 8ab is provided with Z axle guider 8a10, and this Z axle guider 8a10 is provided with Z pillow block 8a11, drives Z spindle motor 8a5 and mobile Z pillow block.Detect the amount of movement of this Z pillow block 8a11 by Z shaft position detector 8a7, this testing result is used for the control of Z spindle motor driver 8a3.The location recognition of position that this Z pillow block 8a11 is provided with the paste accommodation tube 8a12 that possesses paste discharge nozzle 8a13, measure the distance table 8a14 at substrate and the interval of nozzle and be used to detect substrate is according to the 8a15 that makes a video recording.
In Fig. 2 (b), secondary be subjected to electric coil primary side winding hold concurrently applicator head part feed line 9a1 be used for secondary be subjected to electric coil 9A by feed line 7A receive RF power, to sent by electric unit 8a1.Be subjected to be connected with the Z spindle motor driver power line 9a3 that is subjected to electric unit to send electric y-axis motor driver power line 9a2 and send electricity to Z spindle motor driver 8a3 from this on the electric unit 8a1 to y-axis motor driver 8a2.On y-axis motor driver 8a2, be connected with from this y-axis motor driver and be connected to the y-axis motor feed line 9a4 of Y-axis armature coil 8a4 and be used to receive Y-axis linear encoder holding wire 14a5 from the signal of Y-axis position detector 8a6.On Z spindle motor driver 8a3, be connected with from this Z spindle motor driver to the Z spindle motor power line 9a5 of Z spindle motor 8a5 power supply and be used to receive Z shaft encoder signals line 14a6 from the signal that is arranged on the encoder on the Z spindle motor.And, be subjected to be connected with the sensor driving power line 9a6 that powered to distance table 8a14, location recognition video camera 8a15 by electric unit from this on the electric unit 8a1.And, be connected with signal cable 14a1~14a4,14a7,14a8 to y-axis motor driver 8a2, Z spindle motor driver 8a3 and each detecting sensor from space optical communication device 14A.By such wiring, reduce the moving part of connecting line, prevent the airborne dust that causes by the friction of wiring etc.And,, make that the exchange of signal is not disturbed respectively yet, positively transmit information by changing modulating frequency by each corresponding device.
Fig. 3 is the elementary details drawing that is subjected to the electric coil part.Elementaryly be subjected to electric core 6A to be presented on the shape that has 2 windows on the cuboid, elementary feed line 5 connects these window portions.Elementary feed line is reciprocal electric wire, pass the first feed line holding components that is arranged on the pallet end from high frequency electric source 4, pass the elementary one-sided window portion that is subjected to electric core 6A, the second feed line holding components at the pallet other end turns back, connect the opposing party's of elementary feed core 6A window portion, pass the first feed line holding components, return high frequency electric source then.The primary side winding that becomes secondary feed line 7A is wound on the elementary window portion top that is subjected to electric core 6.Such as shown, the window portion by the window portion of the side of reeling dextrorsely, the left-handed ground opposite side of reeling, in series connect, thereby can not offset the voltage that on the winding of 2 window portions, induces, can pass to secondary feed line.And, as shown in Figure 3, wind the line by concentrating on window portion top, can be extensive use of the space of window portion, can reduce elementary feed line 5 and the elementary danger that contacts that is subjected to electric core 6A.The secondary electric coil 9A~H that is subjected to also has and the elementary identical shape of electric coil that is subjected to, if will 5 be changed to 7A, 7A is changed to 9a1 in Fig. 3, then becomes the secondary figure that is subjected to electric coil 9A~H of expression.
The action of paste applicator is described.Figure 4 illustrates the flow chart of the action of the device in the present embodiment.In Fig. 4, at first connect power supply (step 100).Then, carry out the initial setting (step 200) of coating machine.In this initial setting operation, in Fig. 1, drive the motor and the Z axle travelling carriage 9 of each mobile usefulness according to instruction from each motor driver, moving substrate maintaining body 15 on the θ direction is on the reference position that is positioned to stipulate.And, nozzle 8a13 (Fig. 2) is set on the origin position of regulation, make this paste outlet be positioned at the position (that is paste coating starting point) of beginning paste coating.Then, carry out the setting of paste pattern data, substrate position data, paste discharge end position data.
The input of data is by not shown keyboard input main control part 10 (Fig. 1), indicates and carries out to each motor driver etc. from the main control part, and these data are stored in the RAM that is built in the microcomputer in the main control part 10.
After this initial setting operation (step 200) finishes, then, substrate 16 is equipped on substrate adsorbing mechanism 15 (Fig. 1) upward keeps (step 300).Then, carry out substrate preparation localization process (step 400).In this is handled, take the location mark that is arranged on the substrate that is equipped on substrate holding mechanism 15 with image recognition video camera 8a15, utilize image to handle and obtain the position of centre of gravity of location with mark, detect the inclination of substrate 16 on the θ direction, drive not shown θ axle servomotor according to this result, revise the inclination of this θ direction.According to above processing, finish substrate preparation localization process (step 400).
Below, carry out the paste pattern plotter and handle (step 500).In this is handled, the outlet of nozzle 8a13 is displaced to the coating starting position of substrate, carry out the relatively adjustment of nozzle location and move.Then, making servomotor 8a5 and Z axle travelling carriage 8a11 action, is paste pattern plotter height with the height setting of nozzle 8a13.Based on the initial movable range data of nozzle, make nozzle 8a13 decline initial movable distance measurements.In ensuing action, measure the substrate surface height by distance table 8a14, confirm whether the top of nozzle 8a13 is set to the height of describing the paste pattern.Then, do not describe height if be set to, then make nozzle 8a13 decline slight distance, carry out the action of 16 surface measurements of above-mentioned substrate and nozzle 8a13 decline slight distance repeatedly, the height setting on nozzle 8a13 top is described the position of paste pattern for coating.
After above processing finishes, then,, drive Y-axis linear electric machine 8a4 based on the paste pattern data among the RAM of the microcomputer that is stored in main control part 10.Like this, the paste outlet of nozzle 8a13 according to this paste pattern data, moves on X, Y direction under the state relative with substrate 7.Simultaneously, apply the air pressure of setting on paste accommodation tube 8a13, nozzle 8a13 begins to discharge paste from the paste outlet.Like this, beginning is to the coating of the paste pattern of substrate 7.
Then, as explanation just now, the microcomputer input of main control part 10 is from the measured data at the interval on the surface of paste outlet distance table 8a14, nozzle 8a13 and substrate 16, measure the waveform on the surface of substrate 16, drive Z axle servomotor 8a5 according to this measured value, will be maintained necessarily from the setting height of the nozzle 8a13 on the surface of substrate 7.Like this, can be with the coating amount coating paste pattern of hope.
More than carry out describing of paste pattern, and whether be the judgement of the terminal of describing pattern that is determined by the aforesaid paste pattern data on the substrate 16 according to the paste outlet of nozzle 8a13, if not terminal, then return the mensuration of the waviness of the surface of substrate once more and handle.Then, carry out above-mentioned coating repeatedly and describe, continue to reach the terminal of describing pattern until the formation of paste pattern.When reaching the terminal of describing pattern, drive Z axle servomotor 8a5 nozzle 8a13 is risen, finish paste pattern plotter operation (step 500).
Then, advance to substrate and discharge processing (step 600), remove the maintenance of substrate 16, be discharged to outside the device.Then, judge whether to stop above all process steps (step 700), when on many pieces of substrates, forming the paste film, carry from substrate and to handle (step 300) beginning repeatedly according to same pattern, when all substrate is finished a series of processing, operation be all over (step 800).
The action of the dynamical system of having used non-contact power is described so.In Fig. 1,2, the high frequency electric of circulation in elementary feed line 5 produces high frequency magnetic field around elementary feed line 5.This high frequency magnetic field concentrates on the elementary feed core 6A of high permeability, produces magnetic flux at in-core.This magnetic flux be wound on the elementary secondary feed line 7A interlinkage that is subjected on the electric core 6A.Utilize electromagnetic induction, on secondary feed line 7A, induce high frequency voltage, on secondary feed line 7A, generate high frequency electric.,, held concurrently by electric core winding to induce high frequency voltage on the applicator head part feed line 9a1, in 9a1, generate high frequency electric similarly being subjected to electric in-core to generate high frequency magnetic flux for the secondary electric coil 9A that is subjected to secondary by electromagnetic induction.The RF power of being supplied with is subjected to electric unit 8a1 rectification and is transformed to direct current by what have on each applicator head 8A, adjusts voltage in the range of nominal tension of motor driver.Be subjected to electric unit 8a1 to provide necessary electric power to y-axis motor driver 8a2, Z spindle motor driver 8a3 from this by y-axis motor driver power line 9a2, Z spindle motor driver power line 9a3.Provide necessary electric power by y-axis motor power line 9a4, Z spindle motor driver power line 9a5 to Y-axis linear motor armature coil 8a4, Z axle servomotor 8a5 by each motor driver.And, because necessary electric power is low, compare further reduction with motor driver with voltage by being subjected to electric unit 8a1 with the electric power of video camera 8a14, laser distance table 8a15 offering image recognition, provide with power line 9a6 by surrounding devices.Can save the wiring of the power cable on the moving part between pallet-door type, between door type-applicator head like this.
Then the signal system of space optical communication has been used in explanation.The signal of autonomous control section 4 sends optic communication machine between type-pallet (pallet side) 11A, 11B to via control signal cable CC at first, in the future.Then, above-mentioned signal is transformed to optical signal, modulation, optic communication machine between relative door type-pallet (door type side) 12A, 12B light projector by 11A, B.In 12A, B, demodulation is subjected to the optical signal of light, is transformed to electric signal, utilizes optic communication machine (door type side) 13A~D, the 13E~H of common signal cable on door type framework in the door type framework to send the motor driver control signal.To be transformed to optical signal by the electric signal that 13A~H receives, to relative applicator head sidelight communication equipment 14A~H light projector.Optical signal by applicator head sidelight communication equipment 14A~H demodulation receives is transformed to electric signal, communicates by motor driver holding wire 14a1,14a2 motor driver 8a4, the 8a5 in the applicator head part.When the signal of the control signal that makes motor ready signal from Y, Z spindle motor driver 8a3,8a4, caution signal etc., limiting sensor 8a6,8a7, when turning back to main control part 4, by sending to main control part 4 with the reverse path of above-mentioned path from the distance signal of the picture signal of location recognition video camera 8a14, distance table 8a15.Can save like this between pallet-Men type, the wiring of the signal cable in the communications portion between door type-applicator head.
As mentioned above, the moving part of paste coating apparatus moves for straight line on X-direction or Y direction, roughly dispose feed line point-blank and the feed core is removable at this place, so can reduce the cable radical of following moving part, simultaneously, though replace in the past holding wire, the space optical communication machine is configured in the standing part side and the moving part side can not transmitted under the situation of obstruction signal yet.Therefore, can reduce power line, holding wire in a large number, prevent the diffusion of the dust that produces owing to the friction between cable, can prevent to follow the decline of the position control accuracy that the cable weight of moving part causes simultaneously.Like this, can be implemented in and can not sneak into dust, the good coating of precision in the paste that applies on the real estate.And, the invention is characterized in for a plurality of moving parts and power, communicate, yet should understand in the noncontact mode, for device, also can be only applicable to a moving part with a plurality of moving parts.