JP2006320855A - Paste applicator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve such a problem that a coating applicator having many coating heads is requested in order to coat a large-sized substrate at a high speed but when the number of the coating heads is increased, the numbers of a signal wire and an electrical wire are also increased and consequently the cleanliness and precision when the substrate is coated are deteriorated owing to generated dust. <P>SOLUTION: The paste applicator is constituted so that a double column type frame to be reciprocated to one direction and a plurality of coating heads to be moved to the longitudinal direction of the double column type frame are arranged, the substrate is placed on a table arranged to be opposed to a discharge port of a nozzle of each of coating heads and a paste pattern having a desired shape is formed on the substrate by changing the relative position of the substrate to the nozzle while discharging the paste packed in a paste housing cylinder onto the substrate from the discharge port. A power feeding line arranged straightly on the side of a rack is connected electrically to a power receiving core arranged on the side of the double column type frame by using a magnetic coupling to feed power to the double column type frame in a non-contact state. Optical wireless communication is arranged between the moving the double column type frame and the rack to transmit and receive a control signal. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a paste applicator for applying a paste pattern having a desired shape on a substrate in a manufacturing process of a flat panel, a printed circuit board, and a semiconductor assembly.

  As a conventional technique, as shown in Patent Document 1, a glass substrate is placed on a fixed table and mounted in a YZ axis direction attached to a portal frame that is movable in the X axis direction with respect to the main surface of the glass substrate. By facing the nozzle discharge port of the movable coating head and changing the relative positional relationship between the substrate and the nozzle while discharging the paste filled in the paste storage cylinder onto the substrate from the discharge port, A paste pattern having a desired shape is applied on the substrate. In this cited document 1, the glass substrate size is increasing, the coating range of the coating head is enlarged, and a plurality of coating heads are provided. As a result, electric wiring such as power lines and signal lines connected from the fixed external control panel to the portal frame and pneumatic piping are increased, and the number of cables following the portal frame is also increased.

  Further, as shown in Patent Document 2, when the power receiving section is divided into a plurality of power feeding sections in order to move the transportation vehicle without contacting the power wiring, and the receiving coil mounted on the transportation vehicle moves, It is disclosed that the feeding phases of adjacent feeding sections are fed with the same phase.

JP 2002-346252 A JP 2001-211501 A

  As a result, the number of cables that follow the portal frame increases because of the increase in electrical wiring such as power lines and signal lines connected from the fixed external control panel to the portal frame, and pneumatic piping, and the number of cables following the portal frame increases. Due to dust generation by rubbing between cables, it is not suitable for use in a clean environment.

  The purpose of the present invention is to increase the number of coating heads and to increase the length and number of cables connecting the external power supply and the external control unit to the portal frame, thereby reducing dust generation due to cable wear and cable rubbing. And providing a paste applicator.

  In the present invention, a motor driver for driving a coating head currently installed outside the apparatus is installed inside the coating head, and the motor driver is fed into a non-contact power feeding system using magnetic coupling. The paste application machine reduced the number of movable cables and reduced dust generation from the cables by optical and wireless communication of sensor signals and image signals from the camera for position correction image diagnosis.

  According to the present invention, when applying and drawing a paste pattern on the main surface of the substrate, the number of cables following the movement of the portal frame can be reduced. An applicator can be provided. Further, since the load applied to the moving body such as the portal frame and the coating head can be reduced by reducing the number of cables, high-precision coating can be performed because the positional accuracy of the coating head is improved. Further, the wiring work can be completed for each of the coating head portion, the portal frame portion, and each unit, and the cable length can be shortened, so that the number of wiring work steps can be reduced.

  In the present invention, a motor driver is installed on the gantry in order to reduce the power supply and signal wiring connected to the portal frame for power supply to the motor that drives the coating head section and sensor signals. The power supply method to the driver is a non-contact power supply method consisting of a power supply line laid in the portal movement direction and a power receiving pickup attached to the portal frame, and a signal line from the main control unit to the driver is an optical wireless communication system A method for reducing the movable cable following the portal frame, realizing low dust generation, and reducing the man-hour for wiring work will be described in detail in the following embodiments.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view of a paste applicator to which the present invention is applied. The extension direction of the portal frame is perpendicular to the X axis, the extension direction of the portal frame is the Y axis, and the vertical direction is the Z axis. The portal frame basically reciprocates linearly in the X-axis direction, and the coating head reciprocates in the Y-axis direction. Two portal frames 2A and 2B are provided on the apparatus base 1. In the figure, the right-side portal frame and the left-side portal frame that have the same number represent the same item, so that the suffix may be omitted.

  The two portal frames 2 can be moved in the X-axis direction by driving an X-axis linear motor (not shown). A cover 3 for covering the portal frame is provided on the upper portion of the portal frame. The portal frame 2 is provided with a primary power supply core 6, and a primary power supply line 5 is laid in the X-axis direction along the frame 1 so as to penetrate the core. The primary power supply line 5 is connected to a high frequency power supply 4, and a high frequency voltage is supplied from the power supply. The primary power supply core 6 is provided with a secondary power supply line 7 that also serves as a secondary side winding and a power supply line into the portal frame. The secondary power supply line 7A is wound around the primary power receiving core 6A and is laid in the Y-axis direction on the gate-type frame cover 3A. The secondary power supply line 7B is wound around the primary power receiving core 6B and is placed on the gate-type frame cover 3B. It is laid in the Y-axis direction.

  Four coating heads 8A to 8D are supported on the portal frame 2A, and four coating heads 8E to 8H are also supported on the portal frame 5B. As will be described in detail later, each coating head moves in the Y-axis direction by driving a Y-axis linear motor. Further, a part including a paste storage cylinder such as a coating nozzle provided in the coating head is moved in the Z-axis direction by a Z-axis servo motor. Each head is provided with a secondary power receiving coil 9, and a Z-axis servo motor or the like is driven by the received power.

  The main control unit 10 controls the position of each portal frame 2 and each coating head 8, processes various sensor signals and image signals, and controls power ON / OFF. Although not shown, the main control unit 10 includes a microcomputer and a RAM.

  Spatial optical communication devices 11 and 12 for transmitting and receiving control signals and the like are provided between the portal frame 2 and the gantry 1. This spatial light communication device is configured to transmit and receive light in the X-axis direction, and communicates between the optical communication means 11A and 11B provided on the gantry side and the optical communication means 12A and 12B provided on the portal frame side. Do. In addition, as shown in the figure, this spatial optical communication device is arranged vertically so that the optical communication means 11B on the gantry side is located below and the optical communication means 11A is located above. That is, the optical communication means on the portal frame 2B side is arranged on the lower side and the optical communication means on the portal frame 2A side is arranged on the upper side so that the light is not blocked even if arranged in the same direction. It is. Also, the modulation frequency is changed for each group so that interference does not occur.

  In order to reliably avoid the interference between the optical communication units 11A and 11B and the optical communication units 12A and 12B, the optical communication unit 11A is provided at the current position, and the optical communication unit 11B is provided at the opposite end, What is necessary is just to arrange | position the optical communication means 12B provided in the portal frame 2B in the opposite direction to the optical communication means 11B of the portal frame 2A.

  Further, the space optical communication devices 13 and 14 are provided between the portal frame and the coating head as many as the number of coating heads so that signals can be exchanged for each coating head. The optical communication means 13A to D are installed in the portal frame 2A, and the optical communication means 13E to H are installed in the portal frame 2B. The optical communication means 14A to H are installed on the coating heads 8A to H so as to face the optical communication means 13A to H on the portal frame side. The optical communication units 13A to 13H communicate with the opposing optical communication units 14A to 14H, respectively, and the communication direction is the Y-axis direction. Even in the communication between the spatial light communication devices 13 and 14, since the modulation frequency is changed for each group, no interference occurs.

  That is, in this embodiment, a non-contact power feeding system is used for feeding between the gantry and the gate frame, and the gate frame and the coating head, and a two-stage spatial light transmission system is used for signal exchange. It is.

  The substrate 16 is configured to be sucked and held by a substrate holding mechanism 15 provided on a moving table (not shown) provided on the gantry 1. The substrate holding mechanism 15 has a structure capable of correcting the inclination in the X and Y planes by rotationally driving a θ-axis servo motor (not shown). In addition, although the board | substrate movement stand is provided in order to install the board | substrate 16 between portal frames, and it can move to the X-axis direction in this figure, it is good also as a Y-axis direction.

  FIG. 2 is a view showing a portion of the coating head in FIG. FIG. 2A is a side view seen from the Y-axis direction, and FIG. 2B is an internal system diagram of the coating head. In order to avoid complications, the cable between the devices is not shown in FIG. FIG. 2 shows one coating head of the portal frame 2A as a representative example, but the other coating heads have the same configuration.

  In FIG. 2A, a magnet 2a1 is provided on the upper surface of the portal frame 2A, and a linear scale 2a2 is provided on one side surface of the portal frame 2A. The portal frame 2A is provided with a Y-axis limit sensor 2a3. Further, the portal frame 2A is provided with a linear guide 2a4 in such a manner that the magnet 2a1 is sandwiched between one location on the other side and two locations on the top surface.

  The coating head 8A is provided with a lower surface base 8a8 and an upper surface base 8a9 so as to sandwich the cover 3A, and the upper surface base and the lower surface base are connected by a nozzle support member 8ab. A secondary power receiving coil 9A is provided on the upper surface base 8a9.

  A guide is provided on the surface of the lower surface base 8a8 facing the portal frame so as to be movable along the linear guide 2a4. Also, a Y-axis armature coil 8a4 is provided so as to face the magnet provided on the upper surface of the portal frame of the lower surface base. In addition, a power receiving unit 8a1 that rectifies high-frequency power supplied from the secondary power receiving coil 9A through the coating head unit power supply line 9a1 and performs voltage adjustment is provided on the lower surface base 8a8. Further, on the upper surface side of the lower surface base 8a8, a Y-axis motor driver 8a2 for controlling the movement in the Y-axis direction by controlling a voltage applied to the Y-axis armature coil 8a4, and a Z-axis motor for controlling the Z-axis motor 8a5 A driver 8a3 is provided. Furthermore, a Y-axis position detector 8a6 is provided on the lower surface side of the lower surface base 8a8 at a position facing the linear scale 2a2 provided on the portal frame side.

  The nozzle support member 8ab is provided with a Z-axis guide 8a10. The Z-axis guide 8a10 is provided with a Z-axis table 8a11. The Z-axis motor 8a5 is driven to move the Z-axis table. The movement amount of the Z-axis table 8a11 is detected by the Z-axis position detector 8a7, and the detection result is used for control in the Z-axis motor driver 8a3. The Z-axis table 8a11 is provided with a paste storage cylinder 8a12 having a paste discharge nozzle 8a13, a distance meter 8a14 for measuring the distance between the substrate and the nozzle, and a position recognition camera 8a15 for detecting the position of the substrate. .

  In FIG. 2 (b), the secondary power receiving coil secondary winding / coating head power supply line 9a1 receives high-frequency power from the power receiving line 7A by the secondary power receiving coil 9A and transmits power to the power receiving unit 8a1. is there. A Y-axis motor driver power line 9a2 for transmitting power from the Y-axis motor driver power line 9a2 to the Y-axis motor driver 8a2 and a Z-axis motor driver power line 9a3 for transmitting power to the Z-axis motor driver 8a3 are connected from the power receiving unit 8a1. . The Y-axis motor driver 8a2 is provided with a Y-axis motor power line 9a4 connected to the Y-axis armature coil 8a4 and a Y-axis linear encoder signal line 14a5 for receiving a signal from the Y-axis position detector 8a6. A Z-axis motor power line 9a5 for supplying power to the Z-axis motor 8a5 and a Z-axis encoder signal line 14a6 for receiving a signal from an encoder provided in the Z-axis motor are connected from the Z-axis motor driver 8a3. Yes. The power receiving unit 8a1 is connected to a sensor driving power line 9a6 for supplying electric power to the distance meter 8a14 and the position recognition camera 8a15. Signal cables 14a1 to 14a4, 14a7, and 14a8 are connected from the spatial light communication means 14A to the Y-axis motor driver 8a2, the Z-axis motor driver 8a3, and the detection sensors. By wiring in this way, the movable part of the connection line is reduced and dust generation due to rubbing of the wiring or the like is prevented. In addition, in the exchange of signals, the modulation frequency is changed for each corresponding device, so that information can be reliably transmitted without interference.

  FIG. 3 is a detailed view of the primary power receiving coil section. The primary power receiving core 6 has a shape in which two windows are opened in a rectangular parallelepiped, and the primary power supply line 2 passes through the window. The primary power supply line is a reciprocating electric wire, passes from the high-frequency power source 1 through the first power supply line support member provided at the gantry end, passes through the window on one side of the primary power receiving core 6, and passes through the second at the opposite end of the gantry. The feed line support member is folded back, passes through the other window of the primary feed core 6, passes through the first feed line support member, and returns to the high frequency power source. The secondary winding serving as the secondary feeder 7 is wound around the upper part of the window of the primary power receiving core 6. As shown in the figure, one side of the window is wound clockwise and the other window is wound counterclockwise and connected in series so that the voltage induced in the windings of both windows is transmitted to the secondary feeder without canceling. I can do it. Further, by concentrating the coil on the upper part of the window as shown in FIG. 3, the space of the window can be widely used, and the risk of contact between the primary power supply line 2 and the primary power receiving core 6 can be reduced. The secondary power receiving coil 9 has the same shape as the primary power receiving coil. In FIG. 3, when 5 is read as 7 a and 7 a is read as 9 a 1, the secondary power receiving coil 9 is represented.

  The operation of the paste applicator will be described. FIG. 4 shows an operation flowchart of the apparatus in the present embodiment. In FIG. 4, first, power is turned on (step 100). Next, initial setting of the coating machine is executed (step 200). In this initial setting step, in FIG. 1, the motor for moving each axis and the Z-axis moving table 9 are driven by a command from each motor driver, and the substrate holding mechanism 15 is moved in the θ direction to a predetermined reference position. Position. Further, the nozzle 8a13 (FIG. 2) is set to a predetermined origin position so that the paste discharge port becomes a position where paste application starts (that is, a paste application start point). Furthermore, paste pattern data, substrate position data, and paste discharge end position data are set.

  Such data is input to the main control unit 10 (FIG. 1) from a keyboard (not shown), and is instructed to each motor driver by the main control unit. These data are input to the microcomputer in the main control unit 10. It is stored in the built-in RAM.

  When this initial setting step (step 200) is completed, the substrate 16 is then mounted and held on the substrate suction mechanism 15 (FIG. 1) (step 300). Subsequently, substrate preliminary positioning processing (step 400) is performed. In this process, the positioning mark provided on the substrate mounted on the substrate holding mechanism 15 is photographed by the image recognition camera 8a15, the center of gravity position of the positioning mark is obtained by image processing, and the inclination of the substrate 16 in the θ direction is determined. According to this detection, a θ-axis servo motor (not shown) is driven in accordance with this, and the inclination in the θ direction is corrected. Thus, the substrate preliminary positioning process (step 400) is completed.

  Next, paste pattern drawing processing (step 500) is performed. In this process, the discharge port of the nozzle 8a13 is moved to the substrate application start position, and the nozzle position is compared and adjusted. Next, the servo motor 8a5 and the Z-axis movement table 8a11 are operated to set the height of the nozzle 8a13 to the paste pattern drawing height. The nozzle 8a13 is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the substrate surface height is measured by the distance meter 8a14, and it is confirmed whether or not the tip of the nozzle 8a13 is set to a height at which the paste pattern is drawn. If the drawing height cannot be set, the nozzle 8a13 is lowered by a minute distance, and the above-described measurement of the surface of the substrate 16 and the minute distance descent operation of the nozzle 8a13 are repeated to determine the height of the tip of the nozzle 8a13 as the paste. The pattern is set so as to be applied and drawn.

  When the above processing is completed, the X and Y axis linear motor 8a4 is then driven based on the paste pattern data stored in the RAM of the microcomputer of the main control unit 10. Thereby, the paste discharge port of the nozzle 8a13 moves in the X and Y directions according to the paste pattern data in a state where the paste discharge port faces the substrate 7. At the same time, the set atmospheric pressure is applied to the paste storage cylinder 8a13, and the discharge of the paste from the paste discharge port of the nozzle 8a13 is started. Thereby, application of the paste pattern to the substrate 7 is started.

  As described above, the microcomputer of the main control unit 10 inputs the measured data of the distance between the paste discharge port of the nozzle 8a13 and the surface of the substrate 16 from the distance meter 8a14, and Waviness is measured, and the Z-axis servomotor 8a5 is driven according to the measured value, and the set height of the nozzle 8a13 from the surface of the substrate 7 is kept constant. Thereby, a paste pattern can be apply | coated with a desired application amount.

  As described above, the drawing of the paste pattern proceeds. If it is determined that the paste discharge port of the nozzle 8a13 is the end of the drawing pattern determined by the paste pattern data on the substrate 16, if it is not the end, the process again. Return to the measurement process of the surface waviness of the substrate. Then, the coating drawing is repeated until the paste pattern formation reaches the end of the drawing pattern. When the end of the drawing pattern is reached, the Z-axis servo motor 8a5 is driven to raise the nozzle 8a13, and the paste pattern drawing step (step 500) is completed.

  Next, the process proceeds to a substrate discharge process (step 600), the holding of the substrate 16 is released, and the substrate is discharged out of the apparatus. Then, it is determined whether or not to stop all the above processes (step 700). When the paste film is formed with the same pattern on a plurality of substrates, the process is repeated from the substrate mounting process (step 300). When such a series of processes for the substrate is completed, all the operations are completed (step 800).

  Now, the operation of the power system using non-contact power feeding will be described. 1 and 2, the high-frequency current flowing through the primary power supply line 5 generates a high-frequency magnetic field around the primary power supply line 5. The high-frequency magnetic field is concentrated in the high permeability primary power supply core 6a, and magnetic flux is generated in the core. This magnetic flux is linked to the secondary power supply line 7a wound around the primary power receiving core 6a. By electromagnetic induction, a high frequency voltage is induced in the secondary power supply line 7a, and a high frequency current is generated in the secondary power supply line 7a. Similarly, in the secondary power receiving coil 9a, a high frequency magnetic flux is generated in the power receiving core, and a high frequency voltage is induced in the secondary power receiving core winding / coating head power supply line 9a1 by electromagnetic induction, and a high frequency current is generated in 9a1. The supplied high frequency power is rectified and converted into direct current by the power receiving unit 8a1 provided in each coating head 8A, and the voltage is adjusted to the rated voltage range of the motor driver. The power receiving unit 8a1 supplies necessary power to the Y-axis motor driver 8a2 and the Z-axis motor driver 8a3 through the Y-axis motor driver power line 9a2 and the Z-axis motor driver power line 9a3. Each motor driver supplies necessary power to the Y-axis linear motor armature coil 8a4 and the Z-axis servo motor 8a5 through the Y-axis motor power line 9a4 and the Z-axis motor driver power line 9a5. Further, since the power supplied to the image recognition camera 8a14 and the laser distance meter 8a15 has a low required voltage, the power receiving unit 8a1 further lowers the voltage from the motor driver voltage and supplies it through the peripheral device power line 9a6. In this way, the power cables in the movable part between the gantry and the gate type and between the gate type and the coating head can be reduced in wiring.

  Next, a signal system using spatial light communication will be described. First, a signal from the main control unit 4 is sent to the gate-to-frame optical communication devices (mounting side) 11A and 11B via the control signal cable CC. Next, the signals are converted into optical signals by 11A and 11B, modulated, and projected onto the opposing gate-to-frame optical communication devices (gate-type side) 12A and 12B. In 12A and B, the received optical signal is demodulated and converted into an electrical signal, and motors are connected to the portal head-to-head optical communication devices (gate-type side) 13A to D and 13E to H through the normal signal cable in the portal frame. Send driver control signal. The electrical signals received by 13A to H are converted into optical signals and projected to the opposing head side optical communication devices 14A to 14H. The head-side optical communication device 14 demodulates the received optical signal, converts it into an electrical signal, and communicates with the motor drivers 8a4 and 8a5 in the coating head section through the motor driver signal lines 14a1 and 14a2. The main control unit 4 receives motor ready signals from the Y and Z axis motor drivers 8a3 and 8a4, control signals such as alarm signals, signals from the limit sensors 8a6 and 8a7, image signals from the position recognition camera 8a14, and distance signals from the distance meter 8a15. When returning to, it is transmitted to the main control unit 4 through a path opposite to the above path. In this way, it is possible to reduce the wiring of the signal cable in the communication part between the gantry and the gate type and between the gate type and the coating head.

  As described above, since the movable part of the paste coating apparatus moves linearly in the X-axis direction or the Y-axis direction, the power supply core can be moved substantially linearly, and the power supply core can move there. The number of cables to be used can be reduced, and signals can be transmitted without being interrupted even if the spatial optical communication device is arranged on the fixed part side and the movable part side instead of the signal line. For this reason, since power supply lines and signal lines can be significantly reduced, it is possible to prevent diffusion of dust generated by friction between cables and to prevent a decrease in position control accuracy due to the weight of the cable following the movable part. As a result, it is possible to realize highly accurate application without dust being mixed into the paste applied to the substrate surface. Furthermore, although the present invention is characterized in that power can be fed and communicated in a plurality of movable parts in a non-contact manner, it goes without saying that it can be applied to only one movable part in an apparatus having a plurality of movable parts.

It is a perspective view which shows one Embodiment of the paste coating device by this invention. It is the perspective view which shows the structure of the coating head in embodiment shown in FIG. 1, and the systematic diagram in a coating head. It is a detailed perspective view of a primary power receiving coil. 2 is a flowchart showing the overall operation in the embodiment shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Device mount, 2A, 2B ... Portal frame, 2a1 ... Magnet, 2a2 ... Linear scale, 2a3 ... Y axis limit sensor, 2a4 ... Linear guide, 3A, 3B ... Portal cover, 4 ... High frequency power supply, 5 ... Primary Power supply line, 6A, B ... primary power receiving core, 7A, B ... primary power receiving core winding and secondary power supply line, 8A-8H ... coating head, 8a1 ... power receiving unit, 8a2 ... Y-axis motor driver, 8a3 ... X-axis motor Driver, 8a4 ... Y-axis armature coil, 8a5 ... Z-axis motor, 8a6 ... Y-axis position detector, 8a7 ... Z-axis position detector, 8a8 ... Lower surface base, 8a9 ... Upper surface base, 8a10 ... Z-axis guide , 8a11 ... Z-axis table, 8a12 ... Paste storage cylinder, 8a13 ... Nozzle, 8a14 ... Distance meter, 8a15 ... Position recognition camera, 9A to 9H ... Secondary power receiving coil, 9a1 ... Secondary power receiving Wire winding / coating head feeding line, 9a2 ... Y-axis motor driver power line, 9a3 ... Z-axis motor driver power line, 9a4 ... Y-axis motor power line, 9a5 ... Z-axis motor power line, 9a6 ... power for peripheral devices Lines 10, main control unit 11, gate-frame-to-frame optical communication device (base side), 12 gate-to-frame optical communication device (gate-type side), 13 head-to-gate optical communication device ( Portal side), 14 ... head-to-gate type optical communication device (head side), 14a1 ... Y-axis motor driver signal line, 14a2 ... Z-axis motor driver signal line, 14a3 ... Y-axis position sensor signal line, 14a4 ... Z Axis position sensor signal line, 14a5 ... Y-axis encoder signal line, 14a6 ... Z-axis encoder signal line, 14a7 ... Distance meter signal line, 14a8 ... Position recognition camera signal line, 15 ... Substrate holding mechanism, 16 ... Substrate.

Claims (3)

A plurality of portal frames that can reciprocate in one direction and a plurality of coating heads that can move in the longitudinal direction of the portal frame are provided, and a tape provided so as to face the discharge port of the nozzle on which the coating head is provided. The substrate is placed on the bull, and the paste filled in the paste storage cylinder is ejected from the ejection port onto the substrate, and the relative positional relationship between the substrate and the nozzle is changed, so that a desired shape is formed on the substrate. In a paste application machine for applying the paste pattern of
In order to supply power to the portal frame, it is configured to perform non-contact power supply using magnetic coupling between a power supply line arranged linearly on the gantry side and a power receiving core provided on the portal frame side. A paste application machine provided with optical wireless communication for exchanging control signals with a frame. In the paste applicator according to claim 1,
A plurality of coating heads provided on the portal frame are provided with power receiving cores, power supply lines are arranged in the longitudinal direction of the portal frame, and electric power is supplied to each coating head by non-contact power feeding. A paste applicator comprising a spatial light communication device for exchanging signals between heads. In the paste applicator according to claim 1 or 2,
A paste applicator, wherein the power receiving core is provided with two windows extending therethrough, and a feed line is disposed through the window.

Images