KR20060120484A - Paste applicator - Google Patents

Abstract

A paste applicator is provided to reduce a load applied to a moving body such as a door-type frame and an application head by reducing a size and a number of cables. In a paste applicator, door-type frames(2A,2B) are movable in one direction to reciprocate. A plurality of application heads(8A,8B,8C,8D,8E,8F,8G,8H) is mounted to move along a length direction of the door-type frames(2A,2B). A substrate(16) is settled at a table, facing a discharging port of a nozzle at which the application heads(8A,8B,8C,8D,8E,8F,8G,8H) are formed. A paste charged in a paste container is discharged at the substrate(16) through the discharging hole, wherein a designated paste pattern is applied at the substrate(16) by varying a relative position of the substrate(16) and the nozzle. Optical wireless communication units(12A,12B) are configured to feed the door type frames(2A,2B) by using a magnetic combination without a contact, placed between a feed line arranged at a stand like a straight line shape and a power receiving core installed at the door type frames(2A,2B) and receives and transfers a control signal with the moving door type frames(2A,2B).

Description

Paste Applicator {PASTE APPLICATOR}

1 is a perspective view showing one embodiment of a paste applicator according to the present invention;

2 is a perspective view showing the structure of the coating head in the embodiment shown in FIG. 1, a system diagram in the coating head,

3 is a detailed perspective view of the primary faucet coil;

FIG. 4 is a flowchart showing the overall operation in the embodiment shown in FIG. 1. FIG.

※ Explanation of code for main part of drawing

1: Device mount 2A, 2B: Door type frame

2a1: Magnet 2a2: Linear Scale

2a3: Y axis limit sensor 2a4: Linear guide

3A, 3B: Door type cover 4: High frequency power supply

5: Primary feeder 6A, 6B: Primary faucet core

7A, 7B: primary faucet core winding and secondary feeder

8A to 8H: Coating head 8a1: Power receiving unit

8a2: Y axis motor driver 8a3: X axis motor driver

8a4: Armature coil for Y axis 8a5: Z axis motor

8a6: Y-axis position detector 8a7: Z-axis position detector

8a8: Lower surface foundation 8a9: Upper surface foundation

8a10: Z axis guide 8a11: Z axis table

8a12: paste container 8a13: nozzle

8a14: Rangefinder 8a15: Position Recognition Camera

9A-9H: secondary power receiving coil,

9a1: secondary power receiving coil winding and coating head feeder

9a2: Y axis motor driver power line 9a3: Z axis motor driver power line

9a4: Y axis motor power line 9a5: Z axis motor power line

9a6: Power line for peripheral device 10: Main control part

11: door type-inter-gap optical communication unit

12: door type-inter-gap optical communication device (door type side)

13: Head-door type optical communication device (door type side)

14: Head-door type optical communication device (head side)

14a1: Y axis motor driver signal line 14a2: Z axis motor driver signal line

14a3: Y axis position sensor signal line 14a4: Z axis position sensor signal line

14a5: Y-axis encoder signal line 14a6: Z-axis encoder signal line

14a7: Signal line for rangefinder 14a8: Signal line for position recognition camera

15 substrate holding mechanism 16 substrate

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste applicator for applying a paste pattern of a desired shape onto a substrate in the manufacturing process of a flat panel or a printed board and semiconductor assembly.

As a conventional technique, as shown in Patent Literature 1, the nozzle discharge port of the coating head is mounted on a fixed table and movable in the Y and Z-axis directions provided in a door-shaped frame movable in the X-axis direction with respect to the main surface of the glass substrate. The paste pattern having a desired shape is applied onto the substrate by changing the relative positional relationship between the substrate and the nozzle while discharging the paste filled in the paste container from the discharge port onto the substrate. In this reference 1, the enlargement of the size of a glass substrate is advanced, the application range of an application | coating head also expands, and it is set as the structure which provides a some application | coating head. As a result, electric wiring such as power lines and signal lines connected to the door frame from the fixed external control panel, or pneumatic piping increases, and the number of tables along the door frame increases.

In addition, as shown in Patent Literature 2, in order to move the transport vehicle with non-contact of electric power wiring, the feed section is divided into a plurality of sections, and the connecting portion feeds the adjacent feed section between the feeder coils mounted on the transport vehicle. It is disclosed to feed a phase at the same phase.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 2002-346452

[Patent Document 2]

Japanese Patent Application Laid-Open No. 2001-211501

As a result, electric wiring and pneumatic piping, such as power lines and signal lines, connected to the door-type frame from the fixed external control panel increase, and the number of cables along the door-type frame also increases, which causes oscillation due to cable wear and grazing of cables. This situation is not suitable for use in a clean environment.

An object of the present invention is a paste which increases the number of application heads and the number of cables connecting an external power supply, an external control unit and a door-shaped frame to a long one, and also increases the number of cables, thereby reducing the wear of the cables and the oscillation caused by grazing between the cables. It is to provide an applicator.

The present invention provides a coating head drive motor driver provided outside the developing apparatus inside the coating head, and feeds the motor driver in a non-contact power feeding method by magnetic coupling. The paste applicator was made by reducing the number of movable cables and reducing oscillation from the cable by optically communicating the image signals from the position-corrected image diagnosis camera.

The present invention is to install a motor driver on the gantry (gantry) in order to omit the power supply to the motor for driving the coating head portion, the wiring of the feeder or signal wiring connected to the door frame for the sensor signal, The power feeding method according to the door frame is made by the non-contact power feeding method consisting of the feeder line installed in the door type moving direction and the power receiving pickup installed in the door type frame, and the signal line from the main control part to the driver using the optical wireless communication method. The method for realizing a low oscillation and reducing the number of wiring work steps will be described in detail in the following examples.

(Example 1)

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described using drawing.

1 is a perspective view of a paste applicator to which the present invention is applied. The X-axis is the vertical direction of the door frame, the Y-axis is the extension direction of the door frame, and the Z-axis is the vertical direction. The door frame is basically a linear reciprocating in the X-axis direction, and the application head is a reciprocating in the Y-axis direction. On the apparatus mount 1, two door frames 2A and 2B are provided. In the figure, the same numerals in the right door frame and the left door frame represent the same parts, so that subscripts may be omitted.

The two door frames 2 are each movable in the X-axis direction by driving an X-axis linear motor (not shown). The cover 3 which covers the door frame is provided in the upper part of the door frame. The door feed frame 2 is provided with a primary feed core 6, and a primary feed line 5 is provided along the mount 1 in the X-axis direction so as to penetrate the core. This primary feed line 5 is connected to the high frequency power supply 4, and a high frequency voltage is supplied from this power supply. In addition, the primary feed core 6 is provided with secondary feed lines 7 serving as feed lines in the secondary winding and the door frame, respectively. The secondary feed line 7A is wound around the primary faucet core 6A and laid on the door-type frame cover 3A in the Y-axis direction, and the secondary feed line 7B is wound around the primary faucet core 6B. On the door frame cover 3B in the Y-axis direction.

Four application heads 8A to 8D are supported by the door frame 2A, and four application heads 8E to 8H are similarly supported to the door frame 5B. Each application head is explained in full detail behind, but moves to a Y-axis direction by driving a Y-axis linear motor. Moreover, a part containing paste storage cylinders, such as a coating nozzle provided in an application head, moves in a Z-axis direction by a Z-axis servo motor. Moreover, each head is provided with the secondary power receiving coil 9, and this Z-powered servo motor etc. are driven by this received power supply.

The main control part 10 performs position control of each door-shaped frame 2 and each application head 8, processing various sensor signals, image signals, and controlling on / off of a power supply. Although not shown, the main control unit 10 includes a microcomputer and a RAM.

Between the door frame 2 and the mount 1, spatial optical communication devices 11 and 12 for transmitting and receiving control signals and the like are provided. The spatial optical communicator is configured to transmit and receive light in the X-axis direction, and communicates between the optical communication means 11A and 11B provided on the side of the mount and the optical communication means 12A and 12B provided on the door frame side. Is done. As shown in the figure, the spatial optical communicator is arranged up and down so that the optical communication means 11A is positioned above the optical communication means 11B on the side of the mount. That is, the optical communication means on the door frame 2B side is disposed below the optical communication means on the door frame 2A side so as not to block the light even when arranged in the same direction. In addition, the modulation frequency is changed for each set so as not to interfere with each other.

In addition, in order to reliably avoid interference with the optical communication means 11A and 11B and the optical communication means 12A and 12B, the optical communication means 11A is placed at the development position, and the optical communication means 11B is provided at the opposite end, and the door The optical communication means 12B provided in the mold frame 2B may be disposed in the opposite direction to the optical communication means 11B of the door frame 2A.

In addition, between the door frame and the application head, the spatial optical communicators 13 and 14 are provided as many as the number of application heads so as to transmit and receive signals for each application head. The optical communication means 13A to 13D are provided in the door frame 2A, and the optical communication means 13E to 13H are provided in the door frame 2B. Moreover, the optical communication means 14A-14H are provided in each coating head 8A-8H facing the optical communication means 13A-13H of the door frame side. The optical communication means 13A to 13H communicate with opposing optical communication means 14A to 14H, respectively, and the communication direction is the Y axis direction. Even in the communication between the spatial optical communicators 13 and 14, since the modulation frequency is changed for each set, no interference occurs.

That is, in this embodiment, the non-contact power feeding method is adopted in two stages of power supply between the mount and the door-type frame, the door-type frame and the application head, and the spatial light transmission system of two stages is also adopted.

The board | substrate 16 is comprised by the board | substrate holding mechanism 15 provided on the movable stand (not shown) provided on the mount 1, and is comprised. The substrate holding mechanism 15 has a structure capable of correcting the inclination in the X and Y planes by rotating the θ-axis servo motor (not shown). In addition, the moving table of the board | substrate is provided in order to install the board | substrate 16 between door-shaped frames, and in this figure, it is able to move to an X-axis direction, You may make it the Y-axis direction.

It is a figure which shows the part of the application | coating head in FIG. Fig. 2 (a) is a side view seen from the Y-axis direction, and Fig. 2 (b) is a system diagram of the coating head. In order to avoid the trouble, (a) does not show the cable between the devices. Fig. 2 shows one application head of door-shaped frame 2A as a representative example, but the same configuration is applied to other application heads.

In Fig. 2A, a magnet 2a1 is provided on the upper surface of the door frame 2A, and a linear scale 2a2 is provided on one side of the door frame 2A. The door frame 2A is provided with a Y-axis limit sensor 2a3. In addition, the linear guide 2a4 is provided in the door frame 2A in such a way that the magnet 2a1 is inserted into one part on the other side and two parts on the upper surface.

The base 8a8 and the upper base 8a9 are provided in the application head 8A by fitting the cover 3A. The upper base and the lower base are connected by the nozzle support member 8ab. The secondary power receiving coil 9A is provided on the upper surface foundation base 8a9.

Guides are provided on the surface facing the door frame of the base frame 8a8 so as to move along the linear guide 2a4. Moreover, the armature coil 8a4 for Y-axis is provided so that the magnet provided in the upper surface of the door frame of the base frame may be opposed. Moreover, the power receiving unit 8a1 which rectifies the high frequency electric power supplied from the secondary power receiving coil 9A via the application | coating head feed line 9a1 from the secondary power receiving coil 9A1, and performs voltage adjustment is provided. In addition, on the upper surface side of the lower base 8a8, the Y-axis motor driver 8a2 for controlling the movement in the Y-axis direction by controlling the voltage flowing to the Y-axis armature coil 8a4, and Z for controlling the Z-axis motor 8a5. The shaft motor driver 8a3 is provided. Moreover, the Y-axis position detector 8a6 is provided in the position which opposes the linear scale 2a2 provided in the door frame side at the lower surface side of the lower base 8a8.

The Z-axis guide 8a10 is provided on the nozzle support member 8ab, and the Z-axis guide 8a10 is provided with a Z-axis table 8a11. The Z-axis table is driven by driving the Z-axis motor 8a5. Is moved. The movement amount of this Z-axis table 8a11 is detected by the Z-axis position detector 8a7, and this detection result is used for the control in the Z-axis motor driver 8a3. The Z-axis table 8a11 includes a paste container 8a12 having a paste discharge nozzle 8a13, a distance meter 8a14 for measuring the distance between the substrate and the nozzle, and a position recognition camera for detecting the position of the substrate. (8a15) is provided.

In FIG. 2 (b), the secondary power receiving coil secondary side winding and application head feed line 9a1 receives the high frequency power from the feed line 7A at the secondary power receiving coil 9A and transmits the power to the power receiving unit 8a1. will be. From the power receiving unit 8a1, the Y-axis motor driver power line 9a2 transmits power from the Y-axis motor driver power line 9a2 to the Y-axis motor driver 8a2, and the Z-axis motor driver transmits power to the Z-axis motor driver 8a3. The power line 9a3 is connected. From the Y-axis motor driver 8a2, the Y-axis linear encoder signal line 14a5 is connected to receive the signals from the Y-axis motor power line 9a4 and the Y-axis position detector 8a6 connected to the Y-axis armature coil 8a4. It is installed. Z-axis motor power line 9a5 for supplying power to Z-axis motor 8a5 from Z-axis motor driver 8a3, and Z-axis encoder signal line 14a6 for receiving signals from encoders provided in the Z-axis motor. ) Is connected. Moreover, the sensor drive power line 9a6 which supplies electric power to the rangefinder 8a14 and the position recognition camera 8a15 is connected from the power receiving unit 8a1. Signal cables 14a1 to 14a4, 14a7 and 14a8 are connected from the spatial optical communication means 14A to the Y-axis motor driver 8a2, the Z-axis motor driver 8a3 and the respective detection sensors. By wiring in this way, the movable part of a connection line is reduced and oscillation by the grazing of wiring etc. is prevented. In addition, signal transmission and reception are also carried out by changing the modulation frequency for each corresponding device, thereby eliminating interference, so that information can be transmitted reliably.

3 is a detailed view of the primary power receiving coil unit. The primary power receiving core 6 has a shape in which two windows are opened in a rectangular parallelepiped, and the primary feed line 2 penetrates the window portion. The primary feeder is a reciprocating wire, passes from the high frequency power supply 1 through the first feeder support member provided at the end of the mount, through one window of the primary power receiving core 6, and the first end of the opposite end of the mount. The second feeder support member is folded back to pass through another window of the primary feed core 6, passes through the first feeder support member, and returns to the high frequency power source. The secondary winding, which is the secondary feed line 7, is wound around the window of the primary faucet core 6. As shown in the figure, one window is wound in the right direction, and the other window is wound in a left winding to be connected in series so that the voltage induced in the windings of both windows can be transmitted to the secondary feed line without offsetting. In addition, as shown in FIG. 3, the space of the window portion can be widely used by concentrating and winding the upper portion of the window, thereby reducing the risk of contact between the primary feed line 2 and the primary power receiving core 6. The secondary power receiving coil 9 also has the same shape as the primary power receiving coil, and when the 5 is replaced with 7a and 7a as 9a1 in FIG. 3, the secondary power receiving coil 9 is shown.

The operation of the paste applicator will be described. 4 shows an operation flowchart of the apparatus in this embodiment. In FIG. 4, power is first turned on (step 100). Next, the initial setting of the applicator is executed (step 200). In this initial setting step, the motor for moving each axis and the Z-axis moving table 9 in Fig. 1 are driven by instructions from each motor driver, and the substrate holding mechanism 15 is moved in the θ direction to be positioned at a predetermined reference position. Decide Moreover, the nozzle 8a13 (FIG. 2) is set in the predetermined origin position so that the paste discharge port may become the position (namely, paste application start point) which starts paste application | coating. In addition, the paste pattern data, the substrate position data, and the paste ejection end position data are set.

Such data is inputted to the main controller 10 (FIG. 1) from a keyboard (not shown) and instructed by each motor driver or the like in the main controller, and these data are stored in a microcomputer in the main controller 10. It is stored in RAM.

When this initial setting process (step 200) is completed, the board | substrate 16 is mounted and maintained in the board | substrate adsorption mechanism 15 (FIG. 1) next (step 300). Subsequently, the substrate prepositioning process (step 400) is performed. In this process, the positioning mark provided on the substrate mounted on the substrate holding mechanism 15 is photographed by the image recognition camera 8a15, and the center position of the positioning mark is obtained by image processing to obtain? The inclination in the direction is detected, and the inclination in the θ direction is corrected by driving the θ-axis servomotor (not shown). By the above, the board | substrate prepositioning process (step 400) is complete | finished.

Next, a paste pattern drawing process (step 500) is performed. In this process, the discharge port of the nozzle 8a13 is moved to the application start position of a board | substrate, and a comparison and adjustment movement of a nozzle position is performed. Next, the servo motor 8a5 and the Z-axis movement table 8a11 are operated to set the height of the nozzle 8a13 to the paste pattern drawing height. The nozzle 8a13 is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the substrate surface height is measured by the rangefinder 8a14 to confirm whether the tip of the nozzle 8a13 is set to the height at which the paste pattern is drawn. If the height is not set to the drawing height, the nozzle 8a13 is lowered by a small distance, and the above-described measurement of the surface of the substrate 16 and the operation of lowering the small distance of the nozzle 8a13 are repeated to increase the height of the tip of the nozzle 8a13. It sets so that it may become a position which apply | coats a paste pattern.

After the above processing is finished, the X and Y axis linear motors 8a4 are driven based on the paste pattern data stored in the RAM of the microcomputer of the main control unit 10. Thereby, in the state which the paste discharge port of the nozzle 8a13 opposes the board | substrate 7, it moves to X and Y directions according to this paste pattern data. At the same time, the air pressure set in the paste container 8a13 is applied to start the discharge of the paste from the paste discharge port of the nozzle 8a13. Thereby, application | coating of the paste pattern to the board | substrate 7 is started.

As described above, the microcomputer of the main control unit 10 inputs the measured data of the gap between the paste ejection opening of the nozzle 8a13 from the distance meter 8a14 and the surface of the substrate 16 to provide the surface of the substrate 16. The undulation is measured and the Z-axis servo motor 8a5 is driven in accordance with this measured value to keep the set height of the nozzle 8a13 from the surface of the substrate 7 constant. Thereby, a paste pattern can be apply | coated with a desired coating amount.

As described above, drawing of the paste pattern proceeds, but if it is not the end by judging whether or not the paste ejection outlet of the nozzle 8a13 is the end of the drawing pattern determined by the paste pattern data on the substrate 16, It returns to the measurement process of the surface curvature of a board | substrate. The above application drawing is repeated, and the process is continued until the paste pattern formation reaches the end of the drawing pattern. When the end of the drawing pattern is reached, the Z-axis servo motor 8a5 is driven to raise the nozzle 8a13, thereby completing the paste pattern drawing process (step 500).

Subsequently, the substrate discharge process (step 600) is performed to release the substrate 16 and discharge it out of the apparatus. Then, it is determined whether or not to stop all the above steps (step 700), and in the case where the paste film is formed on the plurality of substrates in the same pattern, it is repeated from the substrate mounting process (step 300) and a series of related processes for all the substrates. When is completed, the operation is all finished (step 800).

Next, operation of the power system using non-contact power feeding will be described. 1 and 2, a high frequency current flowing through the primary feed line 5 causes a high frequency magnetic field around the primary feed line 5. The high frequency magnetic field is concentrated in the high permeability primary feed core 6a to generate magnetic flux in the core. This magnetic flux links the secondary feed line 7a wound around the primary power receiving core 6a. The high frequency voltage is induced in the secondary feed line 7a by the electromagnetic induction, and a high frequency current is generated in the secondary feed line 7a. Similarly, in the secondary power receiving coil 9a, high frequency magnetic flux is generated in the power receiving core, and high frequency voltage is induced in the secondary power receiving core winding and coating head feed line 9a1 by electromagnetic induction so that a high frequency current is generated in 9a1. The supplied high frequency electric power is rectified by the power receiving unit 8a1 provided in each coating head 8A, converted into direct current, and the voltage is adjusted to the rated voltage range of the motor driver. The electric power required from the power receiving unit 8a1 is supplied to the Y-axis motor driver 8a2 and the Z-axis motor driver 8a3 via the Y-axis motor driver power line 9a2 and the Z-axis motor driver power line 9a3. The necessary power is supplied from the respective motor driver to the Y-axis linear motor armature coil 8a4 and the Z-axis servo motor 8a5 via the Y-axis motor power line 9a4 and the Z-axis motor driver power line 9a5. In addition, since the power required to supply the image recognition camera 8a14 and the laser rangefinder 8a15 is low, the power receiving unit 8a1 lowers the voltage further than the driver voltage and supplies it to the peripheral power line 9a6. In this way, the wiring of the power cable in the movable portion between the mount-door type and the door type-application head can be omitted.

Next, a signal system using spatial optical communication will be described. First, the signal from the main control part 4 is sent to the door type-to-mount optical communication apparatus (mount side) 11A, 11B via the control signal cable CC. Next, the signals are converted into optical signals by 11A and 11B, modulated, and transmitted to opposing door-to-gap optical communicators (door-type sides) 12A and 12B. The optical signal received at 12A and 12B is demodulated and converted into an electrical signal, and the motor driver control signal is transmitted to the optical communication device (door type side) 13A to 13D and 13E to 13H between the door heads using a normal signal cable in the door frame. send. The electrical signals received at 13A to 13H are converted into optical signals and are projected to the opposing head side optical communicators 14A to 14H. The optical signal received by the head-side optical communicator 14 is demodulated and converted into an electrical signal to communicate with the motor drivers 8a4 and 8a5 in the coating head portion through the motor driver signal lines 14a1 and 14a2. Motor ready signals from the Y and Z-axis motor drivers 8a3 and 8a4, control signals such as alarm signals, signals from the limit sensors 8a6 and 8a7, image signals from the position recognition camera 8a14, and the rangefinder 8a15. When the distance signal is returned to the main controller 4, it is transmitted to the main controller 4 via a path opposite to the above path. In this way, the wiring of the signal cable in the communication portion between the mount-door type and the door type-applicant head can be omitted.

As described above, since the movable portion of the paste coating device can arrange the feed line approximately linearly in order to linearly move in the X-axis direction or the Y-axis direction, and the feed core can move there, the number of cables along the movable portion can be reduced. At the same time, the spatial optical communicator can be transmitted without interrupting the signal even if the spatial optical communicator is arranged on the stationary side and the movable side instead of the conventional signal line. For this reason, since a power supply line and a signal line can be reduced significantly, the spread | diffusion of the dust which arises by the friction of cables can be prevented, and the fall of the position control precision by the weight of a cable according to a movable part can be prevented. Thereby, application | coating with high precision can be implement | achieved, without dust mixing in the paste apply | coated to a board | substrate surface. In addition, the present invention is characterized in that a plurality of movable parts can be fed and communicated in a non-contact manner, but of course, the apparatus having a plurality of movable parts can be applied to only one movable part.

According to the present invention, when the paste pattern is applied to the main surface of the substrate, the number of cables due to the movement of the door frame can be reduced, so that the paste applicator with low dust generation and low wear of the cables can be provided. . Moreover, since the load on moving objects, such as a door frame and an application head, can be reduced by reducing a cable, since the positional accuracy of an application head improves, high precision application | coating can be performed. In addition, since the wiring work can be completed for each of the coating head portion, the door-shaped frame portion, and each unit, and the cable length can be shortened, the number of wiring work steps can be reduced.

Claims (7)

A door-type frame reciprocating in one direction and a plurality of coating heads movable in the longitudinal direction of the door-type frame are provided, and a substrate is placed on a table provided so as to face a discharge port of a nozzle in which the coating head is provided. In the paste applicator which applies the paste pattern of a desired shape on the said board | substrate by changing the relative positional relationship of the said board | substrate and the said nozzle, discharging the paste filled in the storage container from the said discharge port on the said board | substrate, In order to feed the door frame, a non-contact power supply is made by using magnetic coupling between a feeder line arranged in a straight shape on the mount side and a power receiving core provided on the door frame side. A paste applicator characterized in that an optical wireless communication means for exchanging a door frame with a control signal is provided. The method of claim 1, A power receiving core is installed in a plurality of coating heads installed in the door-type frame, and a feed line is arranged in the longitudinal direction of the door-type frame to supply electric power to each coating head by non-contact feeding, and between the door-type frame and the coating head. A paste applicator, comprising optical and wireless communication means for transmitting and receiving signals. The method according to claim 1 or 2, The paste applicator is provided so that two holes may penetrate through the said power receiving core, and a feeder line penetrates the inside of the said hole. A table provided on a mount, a door frame reciprocating in one direction so as to span the table, and a plurality of application heads movable in the longitudinal direction of the door frame are provided, A substrate is placed on the table provided to face each other, and a paste pattern having a desired shape is formed on the substrate by changing a relative positional relationship between the substrate and the nozzle while discharging a paste filled in a paste container from the discharge port onto the substrate. In the paste applicator to apply, A first feeder line is disposed on the mount in a straight line, and the first feeder core has a through hole through which the first feeder line penetrates to receive a power in a non-contact manner from the first power receiving core provided with a power receiving winding. A second feed line for feeding electric power received from the power receiving core in a straight line in the longitudinal direction of the door-shaped frame, and each winding head has a through hole through which the second feed line passes, and a winding for receiving power is provided; 2 A paste applicator comprising a power receiving core. The method of claim 4, wherein Paste applicator, characterized in that the optical communication means for transmitting and receiving signals in the mount frame and the door-shaped frame, respectively, and the optical communication means for receiving signals between the door-shaped frame and the respective application heads are provided. . The method of claim 4, wherein Two said through-holes are provided in the said power receiving core, The feed applicator characterized in that the feeder line is penetrated through each said hole. The method of claim 5, And said door frame is reciprocated in one direction by a linear motor drive, and said plurality of application heads are configured to reciprocate by linear motor drive in a longitudinal direction of the door frame.

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