CN100573050C - Double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope - Google Patents
Double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope Download PDFInfo
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- CN100573050C CN100573050C CNB2007100423010A CN200710042301A CN100573050C CN 100573050 C CN100573050 C CN 100573050C CN B2007100423010 A CNB2007100423010 A CN B2007100423010A CN 200710042301 A CN200710042301 A CN 200710042301A CN 100573050 C CN100573050 C CN 100573050C
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Abstract
A kind of field of micro electromechanical technology double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope.The present invention is by last stator, rotor and following stator constitute, last stator tips upside down on down on the stator, two fronts of last stator and following stator are relative, thereby formation cavity, rotor then are suspended in this cavity, and described its matrix front of stator of going up is provided with stator electrostatic rotary capacitor plate group, the back side is provided with stator cross separation structure and last stator permanent magnet piece, is adhering on four zones that last stator cross separation structure is separated into and is going up the stator permanent magnet piece; It is right to electrostatic attraction electrode with following stator side that described its matrix front of stator down is provided with down stator electrostatic rotary capacitor plate group, the back side is provided with down stator cross separation structure and following stator permanent magnet piece, is adhering to the stator permanent magnet piece on four zones that following stator cross separation structure is separated into.The present invention has reduced playing a process and playing a control difficulty of rotor, has also just reduced process complexity and control difficulty, can detect the acceleration of a plurality of degree of freedom simultaneously.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope.
Background technology
As everyone knows, the micro-mechanical inertia instrument comprises micro-inertia sensor (micro-acceleration gauge and gyroscope) and Micro Inertial Measurement Unit (MIMU is made of micro-inertia sensor, micro-control circuit etc.), is the important MEMS (micro electro mechanical system) of a class.Along with the development of MEMS technology, the inertia sensing device becomes the most successful in the past few years, one of most widely used mems device.Mainly be subjected to the driving of auto industry, little processing oscillatory type mechanical gyroscope has obtained extensive studies in the past few years, and performance significantly improves.Meanwhile, be the outstanding symmetrical structure that overcomes the vibrating micromechanical gyro instrument and mode coupling susceptibility to manufacturing defect, temperature variation etc., both can carry out the vibrating micro-gyroscope structural design improves, attempt little gyro of development new structure method on the other hand again, therefore suspension rotor micro gyro has obtained the attention of U.S., day, Ying Dengguo, set about research in early 1990s, and obtained certain achievement in research.
Find through literature search prior art, people such as Takao MURAKOSHI are at " Jpn.J.Appl.Phys. " (Vol.42.2003, the 2468-2472 page or leaf) delivers " Electrostatically LevitatedRing-Shaped Rotational-Gyro/Accelerometer " on, propose the little gyro/micro-acceleration gauge of a kind of disk type rotor electrostatic suspension in this article.Its weak point is: rotor radially in the outside, be provided with the radially control electrode that is used to control rotor radial (X, Y direction) position, on the glass substrate of upper and lower layer, be provided with the axial control electrode that is used to realize rotor Z axial location Suspension Control, like this, the suspension supporting of rotor needs 5 degree of freedom of control, has increased the requirement that rotor has been suspended and propped up greatly, and technology is more complicated also.
Summary of the invention
The objective of the invention is at above-mentioned deficiency of the prior art, a kind of double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope is provided, it has selectable double mode suspension mode of operation, first inverse magnetic suspension mode of operation, and it two is that anti-magnetic adds the electrostatic suspension mode of operation.Rely on upper and lower stator to provide suspending power and lateral stability power just can realize suspending from steady to antimagnetic rotor, can utilize simultaneously electrostatic suspension principle and following stator lateral electrodes to improve axial rigidity, lateral rigidity and the impact resistance of little gyro again, strengthen stable suspersion, make and add under the electrostatic suspension mode of operation at anti-magnetic, before applying electrostatic potential, rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatically sus pended gyroscope, reduced playing a process and playing a control difficulty, easier realization on the technology of rotor.And the present invention can detect simultaneously and comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.
The present invention is achieved through the following technical solutions.What the present invention adopted is three-decker, and by last stator, rotor and following stator constitute.Last stator tips upside down on down on the stator, makes two fronts of stator and following stator relative, finishes assembling, thereby forms cavity, and rotor then is suspended in this cavity.When assembling, the face over against rotor in all structures of last stator all is referred to as the front, and corresponding another side then is referred to as the back side, and same, the face over against rotor in following all structures of stator also all is referred to as the front, and corresponding another side then is referred to as the back side.
The described stator of going up, comprise: go up stator electrostatic rotary capacitor plate group, go up the stator matrix, go up stator cross separation structure and last stator permanent magnet piece, the front of last stator matrix is provided with stator electrostatic rotary capacitor plate group, the back side of last stator matrix is provided with stator cross separation structure and last stator permanent magnet piece, is adhering on four zones that last stator cross separation structure is separated into and is going up the stator permanent magnet piece.
Described stator down, comprise: following stator electrostatic rotary capacitor plate group, down stator side to electrostatic attraction electrode to, stator matrix, stator cross separation structure and following stator permanent magnet piece down down, it is right to electrostatic attraction electrode with following stator side that the front of following stator matrix is provided with down stator electrostatic rotary capacitor plate group, the back side of following stator matrix is provided with down stator cross separation structure and following stator permanent magnet piece, is adhering to the stator permanent magnet piece on four zones that following stator cross separation structure is separated into.
Described rotor is a disc-shaped structure, and the upper and lower surface of anti-magnetic structure layer is covered with rotor upper surface Ti layer and rotor lower surface Ti layer respectively in the middle of rotor.The fan-shaped hole of rotor evenly distributes with certain circumference, is embedded in the rotor.
The described stator of going up also is provided with stator public capacitance pole plate, goes up stator detection and FEEDBACK CONTROL capacitor plate group; In the front of last stator matrix, distributing successively from inside to outside and going up stator public capacitance pole plate, last stator electrostatic rotary capacitor plate group, last stator detection and FEEDBACK CONTROL capacitor plate group.
The described back side of going up the stator matrix is adhering to the last stator permanent magnet piece that is made of four permanent magnetism sheets on four zones that last stator cross separation structure is separated into, the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different.
Described stator down also is provided with down stator public capacitance pole plate, following stator detection and FEEDBACK CONTROL capacitor plate group; Following stator public capacitance pole plate, down stator electrostatic rotary capacitor plate group, down stator detect and FEEDBACK CONTROL capacitor plate group, down stator side to electrostatic attraction electrode to being distributed in down the front of stator matrix from inside to outside successively.
The back side of described down stator matrix, following stator cross separation structure be separated into adhering on four zones by four permanent magnetism sheets constitute following stator permanent magnet piece, the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different.
The present invention has two kinds of mode of operations, can be chosen under one of them pattern and work: under the inverse magnetic suspension mode of operation, the back side of last stator matrix comprises by the different last stator permanent magnet piece that constitutes of the electromagnetism polarity of four permanent magnetism sheets and the same end face of adjacent permanent magnet piece, the back side of following stator matrix comprises by the different following stator permanent magnet piece that constitutes of the electromagnetism polarity of four permanent magnetism sheets and the same end face of adjacent permanent magnet piece, when last stator tips upside down on down on the stator, need to make the opposite face of going up stator and following stator to form the N-S opposite relation of pole polarity one to one at vertical direction; Anti-magnetic adds under the electrostatic suspension mode of operation, the front of last stator matrix is distributed with stator and detects and FEEDBACK CONTROL capacitor plate group, the front of following stator matrix is distributed with down that stator detects and FEEDBACK CONTROL capacitor plate group, and it is right to electrostatic attraction electrode also to be distributed with down stator side on the positive outmost turns circumference of following stator matrix.
Rotor rotation of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually it is three-phase that the electrostatic rotary capacitor plate that will go up stator is divided into three groups, correspondingly playing the electrostatic rotary capacitor plate of stator also to be divided into three groups is three-phase, phase differential is 120 degree, adopt the three-phase dc voltage to drive, on, the homophase electrostatic capacitance pole plate of following stator applies the driving DC voltage of equivalent contrary sign, then when rotor during in the equilibrium position, the clean axial driving force and the clean radial drive power that act on rotor all are zero, but tangential driving force produces the driving torque to rotor, drives rotor with certain rotating speed rotation.By the FEEDBACK CONTROL of subsequent conditioning circuit, make rotor keep permanent high-speed rotation, produce gyroscopic effect.
The invention solves the deficiencies in the prior art, adopt selectable double mode work, in the dependence, following stator provides suspending power and lateral stability power to antimagnetic rotor, also can utilize simultaneously electrostatic suspension principle and following stator side to electrostatic attraction electrode to improving little gyro axial rigidity, lateral rigidity, and then improved impact resistance, realize stable suspersion, technology is simple relatively, add under the electrostatic suspension mode of operation at anti-magnetic simultaneously, because before applying electrostatic potential, rotor is compared general electrostatically sus pended gyroscope because diamagnetic effect has been suspended in the equilibrium position, has reduced playing a process and playing a control difficulty of rotor.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is stator Facad structure synoptic diagram in the present invention
Fig. 3 is stator structure synoptic diagram in the present invention
Fig. 4 is stator Facad structure synoptic diagram under the present invention
Fig. 5 is stator structure synoptic diagram in the present invention
Fig. 6 is a rotor structure synoptic diagram of the present invention
Embodiment
Below in conjunction with accompanying drawing one embodiment of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention; provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, what present embodiment adopted is three-decker, is made of last stator 1, rotor 3 and following stator 2.Last stator 1 tips upside down on down on the stator 2, makes two fronts of stator and following stator relative, finishes assembling, thereby forms cavity, and 3 of rotors are suspended in this cavity.When assembling, the face over against rotor 3 in last stator 1 all structures all is referred to as the front, and corresponding another side then is referred to as the back side, and same, the face over against rotor 3 in following stator 2 all structures also all is referred to as the front, and corresponding another side then is referred to as the back side.
Shown in Fig. 2,3, last stator 1 comprises stator public capacitance pole plate 4, goes up stator electrostatic rotary capacitor plate group 5, goes up stator detection and FEEDBACK CONTROL capacitor plate group 6, goes up stator matrix 7, last stator cross separation structure 8, last stator permanent magnet piece 9; In the front of last stator matrix 7, distributing successively from inside to outside and going up stator public capacitance pole plate 4, last stator electrostatic rotary capacitor plate group 5, last stator detection and FEEDBACK CONTROL capacitor plate group 6; At the back side of last stator matrix 7, last stator cross separation structure 8 distributes along the midline position of last stator matrix 7 surface geometries, and the backside space of last stator matrix 7 is separated into four zones, is adhering to stator permanent magnet piece 9 on these four zones.
Shown in Fig. 4,5, following stator 2 comprise down stator public capacitance pole plate 10, down stator electrostatic rotary capacitor plate group 11, down stator detect and FEEDBACK CONTROL capacitor plate group 12, down stator side to electrostatic attraction electrode to 13, stator matrix 14, stator cross separation structure 15, stator permanent magnet piece 16 down down down; In the following front of stator matrix 14, distributing successively play from inside to outside stator comprise down stator public capacitance pole plate 10, down stator electrostatic rotary capacitor plate group 11, down stator detect and FEEDBACK CONTROL capacitor plate group 12, following stator side to electrostatic attraction electrode to 13; At the back side of following stator matrix 14, following stator cross separation structure 15 is along the midline position distribution of stator matrix 14 surface geometries down, and the backside space of falling stator matrix 14 is separated into four zones, is adhering to stator permanent magnet piece 16 on these four zones.
As shown in Figure 6, rotor 3 is disc-shaped structures, comprises rotor upper surface Ti layer 17, the middle anti-magnetic structure layer 18 of rotor, rotor lower surface Ti layer 19, the fan-shaped hole 20 of rotor; The upper and lower surface of anti-magnetic structure layer 18 is covered with rotor upper surface Ti layer 17 and rotor lower surface Ti layer 19 respectively in the middle of rotor.The fan-shaped hole 20 of rotor evenly distributes with certain circumference, is embedded in the rotor 3.The circumferential edges of rotor 3 is with last stator detection and FEEDBACK CONTROL capacitor plate group 6 and following stator detects and the external arc edge in the vertical direction of FEEDBACK CONTROL capacitor plate group 12 aligns, and perhaps rotor 3 external diameters equate with the external diameter of last stator detection and FEEDBACK CONTROL capacitor plate group 6 and detection of following stator and FEEDBACK CONTROL capacitor plate group 12.The external diameter of the fan-shaped hole 20 of rotor equates with the external diameter of last stator electrostatic rotary capacitor plate group 5 and following stator electrostatic rotary capacitor plate group 11.
As Fig. 3,5, at the back side of following stator matrix 14, following stator cross separation structure 15 is separated into the following stator permanent magnet piece 16 that is adhering on four zones and is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different; Equally, at the back side of last stator matrix 7, last stator cross separation structure 8 is separated into the last stator permanent magnet piece 9 that is adhering on four zones and also is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of adjacent permanent magnet piece is different; When last stator 1 tips upside down on down on the stator 2, need to make the opposite face of going up stator 1 and following stator 2 to form the N-S opposite relation of pole polarity one to one at vertical direction, then the attractive force between them makes that the joint of going up stator and following stator is tightr.
Double mode being of the present invention: first inverse magnetic suspension mode of operation, because the back side of last stator 1 and following stator 2 all is stained with the permanent magnetism sheet, and rotor 3 itself is a diamagnetic body, will form interaction force between rotor 3 and last stator 1 and the following stator 2 is that coercive force provides Z to (axially) suspending power for the anti-magnetic stator that suspends, simultaneously also for rotor provides lateral stability power along X, Y direction, and then rotor 3 has been realized the self-stabilization suspension 2 of last stator 1 and following stators.It two is that anti-magnetic adds the electrostatic suspension mode of operation, by applying voltage for last stator detection and FEEDBACK CONTROL capacitor plate group 6 and the detection of following stator and FEEDBACK CONTROL capacitor plate group 12, the electrostatic force that produces between last stator 1 and rotor 3, following stator 2 and the rotor 3, strengthened the axial rigidity of rotor 3, by applying FEEDBACK CONTROL voltage to electrostatic attraction electrode on to 13 in the peripheral following stator side that distributes of stator, following stator side produces electrostatic force to 13 with rotor 3 to electrostatic attraction electrode, has strengthened the lateral rigidity of rotor 3.Detect and FEEDBACK CONTROL capacitor plate group 6, stator detects and FEEDBACK CONTROL capacitor plate group 12, stator side applies carrier wave to electrostatic attraction electrode on to 13 down down at last stator, when having axial and lateral deviation, by the signal that generates on last stator public capacitance pole plate 4 and the following stator public capacitance pole plate 10 is picked up, processing such as amplification, modulation, and judge, increase voltage on corresponding capacitance pole plate group or side direction electrostatic attraction electrode, the electrostatic force of generation is withdrawn into the equilibrium position with little rotor.Can improve like this be in inverse magnetic suspension state lower rotor part 3 axially and lateral rigidity, improve the impact resistance of little gyro, ensure that rotor 3 is at 2 of last stator 1 and following stators stable suspersion more.Simultaneously, add under the electrostatic suspension mode of operation,, reduced playing a process and playing a control difficulty of rotor 3 because before applying electrostatic potential, rotor 3 is compared general electrostatically sus pended gyroscope because diamagnetic effect has been suspended in the equilibrium position at anti-magnetic.
Rotor rotation of the present invention: adopt power transformation to hold the electrostatic rotary drive principle, usually will going up stator electrostatic rotary capacitor plate group 5, to be divided into three groups be three-phase, correspondingly playing stator electrostatic rotary capacitor plate group 11 also to be divided into three groups is three-phase, phase differential is 120 degree, adopt the three-phase dc voltage to drive, on, the homophase electrostatic capacitance pole plate of following stator applies the driving DC voltage of equivalent contrary sign, then when rotor 3 during in the equilibrium position, the clean axial driving force and the clean radial drive power that act on rotor 3 all are zero, but tangential driving force produces the driving torque to rotor 3, drives rotor with certain rotating speed rotation.By the FEEDBACK CONTROL of subsequent conditioning circuit, make rotor 3 keep permanent high-speed rotation, produce gyroscopic effect.
As Fig. 2,3,4,5,6, little gyro comprises following three aspects when working:
(1) when being used to detect the acceleration signal of vertical direction z axle input, apply same frequency for last stator detection and FEEDBACK CONTROL capacitor plate group 6 and the detection of following stator and FEEDBACK CONTROL capacitor plate group 12, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 4 and following stator public capacitance pole plate 10 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detect for last stator and FEEDBACK CONTROL capacitor plate group 6 and play stator detects and FEEDBACK CONTROL capacitor plate group 12 to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(2) when being used for the acceleration signal of detection level direction x axle input, detect for last stator and FEEDBACK CONTROL capacitor plate group 6 upper left two capacitor plates and play stator detects and two capacitor plates in FEEDBACK CONTROL capacitor plate group 12 lower-lefts and go up that stator detects and two capacitor plates in FEEDBACK CONTROL capacitor plate group 6 bottom rights and the detection of following stator and FEEDBACK CONTROL capacitor plate group 12 upper right two capacitor plates apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 4 and following stator public capacitance pole plate 10 output differential capacitance signals, can detect the x axle acceleration of input through the circuit aftertreatment, simultaneously by detecting for last stator and FEEDBACK CONTROL capacitor plate group 6 upper left two capacitor plates and play stator detect and two capacitor plates in FEEDBACK CONTROL capacitor plate group 12 lower-lefts, and go up that stator detects and two capacitor plates in FEEDBACK CONTROL capacitor plate group 6 bottom rights and the detection of play stator and FEEDBACK CONTROL capacitor plate group 12 upper right two capacitor plates to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(3) when being used to detect the acceleration signal of vertical direction y axle input, detect for last stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 6 lower-lefts and the detection of following stator and FEEDBACK CONTROL capacitor plate group 12 upper left two capacitor plates, and last stator detects and FEEDBACK CONTROL capacitor plate group 6 upper right two capacitor plates detect with following stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 12 bottom rights apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 4 and following stator public capacitance pole plate 10 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detecting for last stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 6 lower-lefts and play stator detect and FEEDBACK CONTROL capacitor plate group 12 upper left two capacitor plates, and go up that stator detects and FEEDBACK CONTROL capacitor plate group 6 upper right two capacitor plates and the detection of play stator and two capacitor plates in FEEDBACK CONTROL capacitor plate group 12 bottom rights to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3.
Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: the last stator public capacitance pole plate 4 in the elder generation on the stator 1, go up stator electrostatic rotary capacitor plate group 5, go up that stator detects and FEEDBACK CONTROL capacitor plate group 6, go up stator cross separation structure 8, and down the following stator public capacitance pole plate 10 on the stator 2, down stator electrostatic rotary capacitor plate group 11, down stator detect and FEEDBACK CONTROL capacitor plate group 12, down stator side to electrostatic attraction electrode to 13, stator cross separation structure 15 adopts Micrometer-Nanometer Processing Technologies to realize down; Capacitor plate and following stator side generally adopt electric conductivity to be preferably copper to electrode pair 13 materials, the Micrometer-Nanometer Processing Technology that technology generally adopts photoetching to electroplate; The negative glue of material that insulation that last stator cross separation structure 8 and following stator cross separation structure 15 can adopt and magnetic conduction are indifferent such as SU8 is by getting rid of the Micrometer-Nanometer Processing Technology of thick glue and photoetching; Last stator permanent magnet piece 9 and following stator permanent magnet piece 16 employing permanent magnetic materials are as cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB) Precision Machining and magnetize and obtain; 3 of rotors are to be earlier two surface sputtering Ti of the middle anti-magnetic structure layer 18 of rotor at substrate, obtain through fine electric spark processing then, and what substrate adopted is diamagnetic material, as pyrolytic graphite (Pyrolytic graphite).
Claims (7)
1. double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope, constitute by last stator (1), rotor (3) and following stator (2), last stator (1) tips upside down on down on the stator (2), (2) two fronts of last stator (1) and following stator are relative, thereby formation cavity, rotor (3) then is suspended in this cavity, it is characterized in that:
The described stator (1) of going up, comprise: go up stator public capacitance pole plate (4), last stator electrostatic rotary capacitor plate group (5), last stator detects and FEEDBACK CONTROL capacitor plate group (6), last stator matrix (7), last stator cross separation structure (8) and last stator permanent magnet piece (9), the front of last stator matrix (7) is provided with stator electrostatic rotary capacitor plate group (5), the back side of last stator matrix (7) is provided with stator cross separation structure (8) and last stator permanent magnet piece (9), adhering on four zones that last stator cross separation structure (8) is separated into and going up stator permanent magnet piece (9), distributing successively from inside to outside in the front of last stator matrix (7) and going up stator public capacitance pole plate (4), last stator electrostatic rotary capacitor plate group (5), last stator detects and FEEDBACK CONTROL capacitor plate group (6);
Described stator (2) down, comprise: following stator public capacitance pole plate (10), following stator electrostatic rotary capacitor plate group (11), following stator detects and FEEDBACK CONTROL capacitor plate group (12), following stator side to electrostatic attraction electrode to (13), following stator matrix (14), following stator cross separation structure (15) and following stator permanent magnet piece (16), the front of following stator matrix (14) be provided with down stator electrostatic rotary capacitor plate group (11) and following stator side to electrostatic attraction electrode to (13), the back side of following stator matrix (14) is provided with down stator cross separation structure (15) and following stator permanent magnet piece (16), adhering to stator permanent magnet piece (16) on four zones that following stator cross separation structure (15) is separated into, following stator electrostatic rotary capacitor plate group (11), following stator detects and FEEDBACK CONTROL capacitor plate group (12), following stator side is distributed in down the front of stator matrix (14) from inside to outside successively to (13) to electrostatic attraction electrode;
The described opposite face of going up stator (1) and following stator (2) forms the N-S opposite relation of pole polarity one to one at vertical direction.
2. double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope according to claim 1 is characterized in that, the described stator permanent magnet piece (9) of going up is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of its adjacent permanent magnet piece is different.
3. double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope according to claim 1 is characterized in that, described stator permanent magnet piece (16) down is made of four permanent magnetism sheets, and the electromagnetism polarity of the same end face of its adjacent permanent magnet piece is different.
4. double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope according to claim 1, it is characterized in that, described rotor (3) is a disc-shaped structure, comprise rotor upper surface Ti layer (17), the middle anti-magnetic structure layer (18) of rotor and rotor lower surface Ti layer (19), the upper and lower surface of anti-magnetic structure layer (18) is covered with rotor upper surface Ti layer (17) and rotor lower surface Ti layer (19) respectively in the middle of rotor.
5. according to claim 1 or 4 described double-mode inverse magnetic rotor electrostatic rotating micro-gyroscopes, it is characterized in that, described rotor (3), its circumferential edges detects with last stator and the external arc edge in the vertical direction of FEEDBACK CONTROL capacitor plate group (6) and detection of following stator and FEEDBACK CONTROL capacitor plate group (12) aligns, and perhaps rotor (3) external diameter equates with the external diameter of last stator detection and FEEDBACK CONTROL capacitor plate group (6) and detection of following stator and FEEDBACK CONTROL capacitor plate group (12).
6. according to claim 1 or 4 described double-mode inverse magnetic rotor electrostatic rotating micro-gyroscopes, it is characterized in that described rotor (3) which is provided with the fan-shaped hole of rotor (20), the fan-shaped hole of rotor (20) evenly distributes with circumference, and is embedded in the rotor (3).
7. double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope according to claim 6, it is characterized in that, the fan-shaped hole of described rotor (20), its external diameter equates with the external diameter of last stator electrostatic rotary capacitor plate group (5) and following stator electrostatic rotary capacitor plate group (11).
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100423010A CN100573050C (en) | 2007-06-21 | 2007-06-21 | Double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100423010A CN100573050C (en) | 2007-06-21 | 2007-06-21 | Double-mode inverse magnetic rotor electrostatic rotating micro-gyroscope |
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| CN100573050C true CN100573050C (en) | 2009-12-23 |
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