CN100510626C - Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope - Google Patents
Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope Download PDFInfo
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- CN100510626C CN100510626C CNB200510110656XA CN200510110656A CN100510626C CN 100510626 C CN100510626 C CN 100510626C CN B200510110656X A CNB200510110656X A CN B200510110656XA CN 200510110656 A CN200510110656 A CN 200510110656A CN 100510626 C CN100510626 C CN 100510626C
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Abstract
The micro gyro includes following structure: electrode layer, two layers of insulation support layer, magnetic dielectric material layer, and ring coil layer are setup at the upper stator; two layers of insulation support layer are setup at upper and lower surfaces of the magnetic dielectric material layer respectively; the electrode layer is setup at external surface of one layer of insulation support layer, and the ring coil layer is setup at external surface of another layer of insulation support layer; common electrode is setup at center of the electrode layer, and moment added electrode for detecting sector and fan shaped rotating electrode are setup from inner to outer. Structure of the lower stator is same as to structure of the upper stator. The rotor is a rotor with external teeth or rotor containing inner teeth. The micro gyro possesses characters of high precision of gyro of suspend rotor, low cost of MEMS micro gyro and batch production.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, the little gyro of particularly a kind of magnetic field controllable dimagnetic stable suspersion rotor.
Background technology
Micromechanical gyro is the product that MEMS (MEMS (micro electro mechanical system)) technology and gyro technology combine, and oscillatory type and suspension rotor formula two big classes are arranged.The vibration gyro that declines utilizes Coriolis effect work, and size is in several millimeters, and the decline detection quality of gyro of vibration links to each other by physical construction with substrate, and some difficulties in the limitation of itself and the little processing are hanged down precision level during drift accuracies is in.Suspension rotor micro gyro utilizes electromagnetic force or electrostatic force that the little rotor of detection is separated with substrate, and its drift accuracies can reach the inert stage level.
Find through literature search prior art, the Joe Nhut Ho of Washington, DC university etc. delivers the article of a piece of writing " Diamagnetic Levitating Rotor " (Jie's magnetic suspension rotor) by name on ProgressIn Electromagnetics Research Symposium 2005 (electromagnetic suspension research meeting), this article provides a kind of Jie's of utilization magnetic to realize the design that rotor suspends and rotates, rotor is an equilateral triangle, three permanent magnets (totally six permanent magnets) are arranged at three angles of its upper and lower surface respectively, arrange two Jie's magnetic materials in rotor upper and lower surface a distance, a suspension permanent magnet (Suspending magnet) is arranged in the outer a distance of Jie's magnetic material of rotor upper surface.Two groups of the layouts of peritrochanteric upper and lower a distance symmetry rotation drive coil, every group of rotation drive coil comprises 9 coils, the axis of each drive coil spatially is certain angle with the upper and lower surface of rotor.The suspension of this design is that the power that relies on the interattraction of suspension permanent magnet and epitrochanterian six permanent magnets to produce balances out the effect of gravity and realizes, the stability of this design (referring to that rotor under certain disturbance, can be returned to the ability of equilibrium position) relies on the repulsive force of Jie's magnetic material and epitrochanterian six permanent magnets to realize.The alternating current of logical certain phase differential just can produce rotary electromagnetic field in the revolving coil, drives epitrochanterian three permanent magnets rotation.
Though the suspension rotor design proposal of the Joe Nhut Ho of Washington, DC university etc. can realize the suspension and the rotation of rotor, but become gyro, particularly use little gyro of micro-processing technology, several deficiencies and shortcoming are arranged: 1) this design proposal does not have sensor, can not constitute gyrosensor in essence.2) electromagnetic field effect is all adopted in suspension and rotation, and therefore suspension and rotation interfere with each other, and suspend and the rotational stabilization variation, become gyro and have the principle defective.3) rotor adopts the equilateral triangle structure, and an Atria place, summit arranges permanent magnet, this kind structure, to the realization gyro drive, to detect, add the square function very unfavorable.4) this design comprises the drive coil of complex arrangement on the space, is not easy to little processing and realizes that mass is restricted with reducing cost.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, provide a kind of magnetic field controllable dimagnetic stable suspersion rotor little gyro, make it utilize the energising toroid winding to realize that rotor suspends, it is suspending stabilized to utilize Jie's magnetic material to realize, utilize electrostatic interaction to realize that rotor high-speed running and detection add little gyro of square, magnetic field and electrostatic field disturb few, use the MEMS technology to make and realize in addition, solved the problem in the above-mentioned background technology, but integrated big suspension rotor Gyro Precision is high and the characteristics of the low mass of the little gyro cost of MEMS.
The present invention realizes by following technical solution, the present invention includes: go up stator, rotor, following stator, support ring.Last stator, following stator and support ring constitute a chamber, and rotor is arranged in this chamber.
Electrode layer, two-layer insulation support layer, Jie's flux material layer, toroid ring layer are set on the last stator.Two-layer insulation support layer is arranged on the upper and lower surface of Jie's flux material layer, and electrode layer is arranged on the outside surface of an insulation support layer, and the toroid ring layer is arranged on the outside surface of another insulation material layer.The toroid ring layer sets gradually four toroid windings from inside to outside.The electrode layer center is provided with public electrode, from inside to outside designs 8 fan-shaped detections of along the circumferential direction evenly arranging successively and adds square electrode, 18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging.
Electrode layer, two-layer insulation support layer, Jie's flux material layer, toroid ring layer are set on the following stator.Two-layer insulation support layer is arranged on the upper and lower surface of Jie's flux material layer, and electrode layer is arranged on the outside surface of an insulation support layer, and the toroid ring layer is arranged on the outside surface of another insulation support layer.The toroid ring layer sets gradually four toroid windings from inside to outside.The electrode layer center is provided with public electrode, from inside to outside designs 8 fan-shaped detections of along the circumferential direction evenly arranging successively and adds square electrode, 18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging.
Rotor has two kinds of frame modes, and a kind of structure is provided with two-layer insulation support layer, permanent magnet, and two-layer insulation support layer is arranged on the upper and lower surface of epitrochanterian permanent magnet.20 teeth are evenly arranged in the excircle of rotor; Another kind of structure is provided with two-layer insulation support layer, permanent magnet, and two-layer insulation support layer is arranged on the upper and lower surface of epitrochanterian permanent magnet.20 scallop holes are evenly arranged in the excircle of rotor, and 20 fan-shaped land-based areas are evenly arranged between 20 scallop holes.
Entire device adopts the method manufacturing based on micro-processing technology, the permanent magnet of rotor can adopt the high-performance rare-earth alloy permanent magnetic material of moulding, be processed into needed shape with methods such as fine electric spark, super grinding, then, epitrochanterian two-layer insulation support layer adopts insulating material, sputter at the upper and lower surface of the permanent magnet of rotor, thickness
When contacting with stator, rotor can play insulating effect.
Jie's flux material layer on two stators adopts Jie magnetic material B i or pyrolytic graphite up and down, uses the ultraprecise micro-processing method that the materials processing of Jie's magnetic is become required shape.Insulation support layer on each stator adopts insulating material, sputters at Jie's flux material layer upper and lower surface, thickness 1000
Two stators respectively have four toroid windings up and down, and four toroid windings on each stator respectively have a breach, from inside to outside are arranged in the outside surface of the insulation support layer of stator, and manufacture method adopts photoetching, electric plating method.18 fan-shaped rotation electrodes are distributed on 8 fan-shaped detections by circumferencial direction and add outside the square electrode, are distributed on outside the public electrode by circumferencial direction and 8 fan-shaped detections add the square electrode, and public electrode is positioned at the center of the outside surface of insulation support layer.
Support ring can adopt the ultraprecise processing method manufacturing.Last stator, support ring connect together by gluing method or additive method, the side that the electrode layer of last stator is linking to each other with support ring.Rotor is put into the chamber of stator and support ring formation.Following stator links to each other with support ring, the side that the electrode layer of following stator is linking to each other with support ring.
Stator and following stator and rotor center line are axis in the definition, and then the direction of magnetization of permanent magnet or permanent magnet should be parallel with the direction of axis.Can guarantee like this four toroid windings of stator or down four toroid windings of stator switch on simultaneously or when having only one group of energising with epitrochanterian permanent magnet generation magnetic field between the acting force maximum.
On the fan-shaped rotation electrode of stator up and down, apply the three-phase dc square-wave voltage, form power transformation with epitrochanterian tooth interaction and hold synchronous motor, adjacent arbitrarily two rotation drive electrodes apply high-frequency carrier signal on stator, by public electrode feedback rotor rotation state, guarantee the permanent high-speed rotation of rotor.Thereby has a gyroscopic effect.
Fan-shaped detection adds one group in twos at square electrode, apply the different frequency high-frequency carrier signal respectively, processing such as public different high-frequency carrier signals of drawing amplify by being arranged on, the filtering situation that just can detection rotor deflects, add the square electrode with the corresponding two groups of fan-shaped detections of yawing moment and apply DC voltage, make rotor that the precession opposite with yawing moment take place, the rotor playback.This DC voltage is demarcated,, just can measure the angular velocity of extraneous input according to moment equilibrium principle again.
Compared with prior art, toroid winding generates an electromagnetic field and the rotor permanent magnet interaction on the stator of the present invention, and rotor is suspended, and the diamagnetic effect of Jie's magnet produces repulsion to be made suspending stabilized.Realize rotor high-speed rotation driving, detect and add square that by the electrostatic interaction between rotor and the stator rotor is the disk shape, drives, detects, adds square and all realize easily.Rotate, detect and add square and adopt electrostatic field, adopt magnetic field and suspend, disturb between electrostatic field and the magnetic field and lack, when using on the ground, as long as go up the toroid winding energising of stator, under the weightlessness of space situation, the toroid winding of two stators no power all up and down under special environment, the invention provides the mechanism that stator ring coil is up and down switched on simultaneously, thereby bigger range of application is arranged, can solve disadvantages of background technology.Use the MEMS technology to make and realize, but integrated suspension rotor Gyro Precision greatly is high and the characteristics of the low mass of the little gyro cost of MEMS in addition.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is stator structure synoptic diagram in the present invention
Fig. 3 is stator ring coil arrangement synoptic diagram in the present invention
Fig. 4 arranges synoptic diagram for stator electrode in the present invention
Fig. 5 is stator structure synoptic diagram under the present invention
Fig. 6 is stator ring coil arrangement synoptic diagram under the present invention
Fig. 7 arranges synoptic diagram for stator electrode under the present invention
Fig. 8 is an external tooth rotor structure figure of the present invention
Fig. 9 includes the tooth rotor structure figure for the present invention
Embodiment
As shown in Figure 1, the present invention includes: go up stator 1, rotor 2, following stator 3, support ring 4.Last stator 1, following stator 3 and support ring 4 constitute a chamber, and rotor 2 is arranged in this chamber.
Shown in Fig. 2-4, first electrode layer 6, first insulation support layer 5, first Jie's flux material layer 9, second insulation support layer 8, the first toroid ring layer 7 are set on the last stator 1.The upper and lower surface that second insulation support layer 8 of last stator 1, first insulation support layer 5 are arranged on first Jie's flux material layer 9, first electrode layer 6 is arranged on the outside surface of first insulation support layer 5, the first toroid ring layer 7 is arranged on the outside surface of insulation material layer 8, and the first toroid ring layer 7 sets gradually Fourth Ring shape coil 13, the 3rd toroid winding 12, first toroid winding 10, second toroid winding 11 from inside to outside.First electrode layer, 6 centers are provided with first public electrode 16, from inside to outside set gradually 8 fan-shaped detections of along the circumferential direction evenly arranging and add 14,18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging 15 of square electrode.
Shown in Fig. 5-7, the second electrode lay 18, the 3rd insulation support layer 17, second Jie's flux material layer 21, the 4th insulation support layer 20, the second toroid ring layer 19 are set on the following stator 3.The upper and lower surface that the 3rd insulation support layer 17 of following stator 3, the 4th insulation support layer 20 are arranged on second Jie's flux material layer 21, the second electrode lay 18 is arranged on the outside surface of the 3rd insulation support layer 17, the second toroid ring layer 19 is arranged on the outside surface of the 4th insulation support layer 20, and the second toroid ring layer 19 sets gradually the 8th toroid winding 25, the 7th toroid winding 24, five rings shape coil 22, the 6th toroid winding 23 from inside to outside.The second electrode lay 18 centers are provided with second public electrode 28, from inside to outside set gradually 8 fan-shaped detections of along the circumferential direction evenly arranging and add 26,18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging 27 of square electrode.
Rotor 2 has two kinds of frame modes, i.e. external tooth rotor and include the tooth rotor.
As shown in Figure 8, be the external tooth rotor structure: rotor 2 is provided with the upper and lower surface that pentasyllabic quatrain edge supporting layer 29, first permanent magnet 30, the 6th insulation support layer 31, the pentasyllabic quatrain edge supporting layers 29, the 6th insulation support layer 31 are arranged on first permanent magnet 30.20 teeth 32 are evenly arranged in the excircle of rotor 2.
As shown in Figure 9, for including the tooth rotor, rotor 2 is provided with the upper and lower surface that four-line poem with seven characters to a line edge supporting layer 33, second permanent magnet 34, the 8th insulation support layer 35, the four-line poem with seven characters to a line edge supporting layers 33, the 8th insulation support layer 35 are arranged on second permanent magnet 34.20 scallop holes 36 are evenly arranged in the excircle of rotor 2, and 20 fan-shaped land-based areas 37 are evenly arranged between 20 scallop holes 36.
Entire device adopts the method manufacturing based on micro-processing technology, first permanent magnet 30 of rotor 2 or second permanent magnet 34 can adopt the high-performance rare-earth alloy permanent magnetic material of moulding, be processed into needed shape with methods such as fine electric spark, super grinding, then, the 6th insulation support layer 31, pentasyllabic quatrain edge supporting layer 29 adopt insulating material, sputter at the upper and lower surface of first permanent magnet 30, thickness
Four-line poem with seven characters to a line edge supporting layer 33, the 8th insulation support layer 35 adopt insulating material, sputter at the upper and lower surface of second permanent magnet 34, thickness 500
When contacting with stator, rotor can play insulating effect.
First Jie's flux material layer 9 on the stator 1,3, second Jie's flux material layer 21 adopt Jie magnetic material B i or pyrolytic graphite, use the ultraprecise micro-processing method that the materials processing of Jie's magnetic is become required shape.First insulation support layer 5, second insulation support layer 8 adopt insulating material, sputter at first Jie's flux material layer, 9 upper and lower surfaces, thickness 1000
, the 3rd insulation support layer 17, the 4th insulation support layer 20 adopt insulating material, sputter at the upper and lower surface of second Jie's flux material layer 21, thickness 1000
Fourth Ring shape coil 13, the 3rd toroid winding 12, first toroid winding 10, second toroid winding 11 respectively have a breach, from inside to outside are arranged in the outside surface of second insulation support layer 8, and manufacture method adopts photoetching, electric plating method.On the outside surface of first insulation support layer 5,18 fan-shaped rotation electrodes 15 are distributed on 8 fan-shaped detections by circumferencial direction and add outside the square electrode 14, be distributed on outside first public electrode 16 by circumferencial direction and 8 fan-shaped detections add square electrode 14, first public electrode 16 is positioned at the center of the outside surface of first insulation support layer 5.The 8th toroid winding 25, the 7th toroid winding 24, five rings shape coil 22, the 6th toroid winding 23 respectively have a breach, from inside to outside are arranged in the outside surface of the 4th insulation support layer 20, and manufacture method adopts photoetching, electric plating method.On the outside surface of the 3rd insulation support layer 17,18 fan-shaped rotation electrodes 27 are distributed on 8 fan-shaped detections by circumferencial direction and add outside the square electrode 26, be distributed on outside second public electrode 28 by circumferencial direction and 8 fan-shaped detections add square electrode 26, second public electrode 28 is positioned at the center of the outside surface of the 3rd insulation support layer 17.
Support ring 4 can adopt the ultraprecise processing method manufacturing.Last stator 1, support ring 4 connect together by gluing method or additive method, notice that first electrode layer 6 of last stator 1 is in a side that links to each other with support ring 4.Rotor 2 is put into the chamber of stator 1 and support ring 4 formations.Following stator 3 links to each other with support ring 4, and the second electrode lay 18 of following stator 3 will be in a side that links to each other with support ring 4.
In concrete the enforcement, also have a key problem in technology, as shown in Figure 1, stator 1 and following stator 3 and rotor 2 lines of centres are axis in the definition, and then the direction of magnetization of first permanent magnet 30 or second permanent magnet 34 should be parallel with the direction of axis.Can guarantee first toroid winding 10, second toroid winding 11, the 3rd toroid winding 12, Fourth Ring shape coil 13 or five rings shape coil 22, the 6th toroid winding 23, the 7th toroid winding 24 like this, the 8th toroid winding 25 is switched on simultaneously or have only acting force maximum between one group of when energising and first permanent magnet 30 or second permanent magnet, 34 generation magnetic fields.
During work, one group of Fourth Ring shape coil 13 at last stator 1, the 3rd toroid winding 12, first toroid winding 10, one group of the 8th toroid winding 25 of second toroid winding 11 and following stator 3, the 7th toroid winding 24, five rings shape coil 22, switch on simultaneously for one group or two groups of the 6th toroid winding 23, just can form electromagnetic field, this electromagnetic field and first permanent magnet 30 or second permanent magnet 34 interact, rotor 2 is suspended, at this moment, rotor 2 can't stable suspersion, and rotor 2 suspending stabilized is that the repulsive interaction by first Jie's flux material layer 9 and 21 pairs first permanent magnets 30 of second Jie's flux material layer or second permanent magnet 34 realizes.So far, rotor can be realized suspending, and stable suspension, and has the ability of opposing external environmental interference.
On fan-shaped rotation electrode 15, fan-shaped rotation electrode 27, apply the three-phase dc square-wave voltage, with tooth 32 or the land-based area 37 interactions formation power transformation appearance synchronous motor on the rotor 2, adjacent arbitrarily two rotation drive electrodes 15,27 apply high-frequency carrier signal on stator, by first public electrode 16 and second public electrode, 28 feedback rotor rotation states, guarantee the permanent high-speed rotation of rotor.Thereby has a gyroscopic effect.
Fan-shaped detection adds one group in twos at square electrode 14,26, apply the different frequency high-frequency carrier signal respectively, processing such as the different high-frequency carrier signals of drawing by first public electrode 16, second public electrode 28 amplify, the filtering situation that just can detection rotor deflects, add square electrode 14,26 with the corresponding two groups of fan-shaped detections of yawing moment and apply DC voltage, make rotor that the precession opposite with yawing moment take place, the rotor playback.This DC voltage is demarcated,, just can measure the angular velocity of extraneous input according to moment equilibrium principle again.
Claims (11)
1, the little gyro of a kind of magnetic field controllable dimagnetic stable suspersion rotor, comprise: go up stator (1), rotor (2), following stator (3), support ring (4), it is characterized in that, first electrode layer (6) is set on the last stator (1), first insulation support layer (5), second insulation support layer (8), first Jie's flux material layer (9), the first toroid ring layer (7), first insulation support layer (5), second insulation support layer (8) is arranged on the upper and lower surface of first Jie's flux material layer (9), first electrode layer (6) is arranged on the outside surface of first insulation support layer (5), the first toroid ring layer (7) is arranged on the outside surface of second insulation support layer (8), the first toroid ring layer (7) sets gradually second toroid winding (11) from outside to inside, first toroid winding (10), the 3rd toroid winding (12) and Fourth Ring shape coil (13), first electrode layer (6) center is provided with first public electrode (16), from inside to outside sets gradually 8 fan-shaped detections of along the circumferential direction evenly arranging and adds square electrode (14), 18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging (15); Following stator (3) is provided with the second electrode lay (18), the 3rd insulation support layer (17) and the 4th insulation support layer (20), second Jie's flux material layer (21), the second toroid ring layer (19), the 3rd insulation support layer (17) and the 4th insulation support layer (20) are arranged on the upper and lower surface of second Jie's flux material layer (21), the second electrode lay (18) is arranged on the outside surface of the 3rd insulation support layer (17), the second toroid ring layer (19) is arranged on the outside surface of the 4th insulation support layer (20), the second toroid ring layer (19) sets gradually the 6th toroid winding (23) from outside to inside, five rings shape coil (22), the 7th toroid winding (24) and the 8th toroid winding (25), the second electrode lay (18) center is provided with second public electrode (28), from inside to outside sets gradually 8 fan-shaped detections of along the circumferential direction evenly arranging and adds square electrode (26), 18 fan-shaped rotation electrodes of along the circumferential direction evenly arranging (27); Rotor (2) is for the external tooth rotor or include the tooth rotor.
2, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1 is characterized in that, last stator (1), support ring (4) connect together, and first electrode layer (6) of last stator (1) is in a side that links to each other with support ring (4); Following stator (3) links to each other with support ring (4), and the second electrode lay (18) of following stator (3) is in a side that links to each other with support ring (4).
3, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1, it is characterized in that, described external tooth rotor, comprise pentasyllabic quatrain edge supporting layer (29), first permanent magnet (30), the 6th insulation support layer (31), the 6th insulation support layer (31) and pentasyllabic quatrain edge supporting layer (29) are arranged on the upper and lower surface of first permanent magnet (30), and 20 teeth (32) are evenly arranged in the excircle of rotor (2).
4, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 3, it is characterized in that, the direction of magnetization of first permanent magnet (30) should be parallel with the direction of axis, and described axis is that last stator (1) and following stator (3) and rotor (2) line of centres are axis.
5, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 4 is characterized in that, the 6th insulation support layer (31), pentasyllabic quatrain edge supporting layer (29) sputter at the upper and lower surface of first permanent magnet (30), thickness
6, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1, it is characterized in that, the described tooth rotor that includes, comprise four-line poem with seven characters to a line edge supporting layer (33), second permanent magnet (34), the 8th insulation support layer (35), four-line poem with seven characters to a line edge supporting layer (33) and the 8th insulation support layer (35) are arranged on the upper and lower surface of second permanent magnet (34), 20 scallop holes (36) are evenly arranged in the excircle of rotor (2), and 20 fan-shaped land-based areas (37) are evenly arranged between 20 scallop holes (36).
7, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 6 is characterized in that, the direction of magnetization of second permanent magnet (34) should be parallel with the direction of axis.
8, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 6 is characterized in that, four-line poem with seven characters to a line edge supporting layer (33) and the 8th insulation support layer (35) sputter at the upper and lower surface of second permanent magnet (34), thickness
9, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1 is characterized in that, first insulation support layer (5) and second insulation support layer (8) sputter at first Jie's flux material layer (9) upper and lower surface, thickness
The 3rd insulation support layer (17), the 4th insulation support layer (20) sputter at the upper and lower surface of second Jie's flux material layer (21), thickness
10, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1, it is characterized in that, second toroid winding (11), first toroid winding (10), the 3rd toroid winding (12) and Fourth Ring shape coil (13) respectively have a breach, be arranged in the outside surface of second insulation support layer (8) from outside to inside, on the outside surface of first insulation support layer (5), 18 fan-shaped rotation electrodes (15) are distributed on 8 fan-shaped detections by circumferencial direction and add outside the square electrode (14), be distributed on outside first public electrode (16) by circumferencial direction and 8 fan-shaped detections add square electrode (14), first public electrode (16) is positioned at the center of the outside surface of first insulation support layer (5).
11, the little gyro of magnetic field controllable dimagnetic stable suspersion rotor as claimed in claim 1, it is characterized in that, the 6th toroid winding (23), five rings shape coil (22), the 7th toroid winding (24) and the 8th toroid winding (25) respectively have a breach, be arranged in the outside surface of the 4th insulation support layer (20) from outside to inside, on the outside surface of the 3rd insulation support layer (17), 18 fan-shaped rotation electrodes (27) are distributed on 8 fan-shaped detections by circumferencial direction and add outside the square electrode (26), be distributed on outside second public electrode (28) by circumferencial direction and 8 fan-shaped detections add square electrode (26), second public electrode (28) is positioned at the center of the outside surface of the 3rd insulation support layer (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200510110656XA CN100510626C (en) | 2005-11-24 | 2005-11-24 | Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB200510110656XA CN100510626C (en) | 2005-11-24 | 2005-11-24 | Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope |
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| CN1776365A CN1776365A (en) | 2006-05-24 |
| CN100510626C true CN100510626C (en) | 2009-07-08 |
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| CNB200510110656XA Expired - Fee Related CN100510626C (en) | 2005-11-24 | 2005-11-24 | Magnetic field controllable dimagnetic stable suspersion rotor micro gyroscope |
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| CN108322082B (en) * | 2018-02-10 | 2019-08-06 | 西安建筑科技大学 | A kind of single-phase capacitance type variable electrostatic motor |
| CN114371308B (en) * | 2022-01-14 | 2022-08-30 | 上海大学 | Magnetic suspension absolute speed sensor |
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2005
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Non-Patent Citations (4)
| Title |
|---|
| Diamagnetic Levitating Rotor. Joe Nhut Ho,Wei-Chih Wang.Progress In Electromagnetics Research Symposium 2005. 2005 |
| Diamagnetic Levitating Rotor. Joe Nhut Ho,Wei-Chih Wang.Progress In Electromagnetics Research Symposium 2005. 2005 * |
| Diamagnetic levitation:Flying frogs and floating magnets. M.D.Simon,A.K.Geim.Journal of Applied Physics,Vol.87 No.9. 2000 |
| Diamagnetic levitation:Flying frogs and floating magnets. M.D.Simon,A.K.Geim.Journal of Applied Physics,Vol.87 No.9. 2000 * |
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