CN100565108C - Circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope - Google Patents
Circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope Download PDFInfo
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- CN100565108C CN100565108C CNB2008100324749A CN200810032474A CN100565108C CN 100565108 C CN100565108 C CN 100565108C CN B2008100324749 A CNB2008100324749 A CN B2008100324749A CN 200810032474 A CN200810032474 A CN 200810032474A CN 100565108 C CN100565108 C CN 100565108C
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Abstract
The circle in a kind of MEMS (micro electro mechanical system) field and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope, constitute by last stator, rotor and following stator, rely on the cylindrical and multi-ring shaped axial and radial magnetizing permanent magnetism body in the upper and lower stator to provide suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, utilize charge relaxation, do not need rotating speed to detect and both can realize the permanent high-speed rotation of rotor.Utilize simultaneously the axial detection of upper and lower stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor to improve axial rigidity, lateral rigidity and the impact resistance of little gyro again, strengthen the stable suspersion performance, reduced playing a process and playing a control difficulty of rotor, do not need complicated control gear can realize self-stabilization, power consumption is little, realization is convenient, size is little, can detect simultaneously to comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.
Description
Technical field
What the present invention relates to is a kind of minisize gyroscopes of field of micro electromechanical technology, specifically is a kind of circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope.
Background technology
Inertial navigation system is a kind of self-aid navigation technology, directly calculates the navigational parameters such as position, course and attitude of carrier according to newton law of inertia.In the course of the work, neither to extraneous emitted energy, do not obtain information from the outside yet, have interference-free, can use anywhere, distinct advantages such as dynamic property is good, navigation output information is abundant, obtained using widely in fields such as Aeronautics and Astronautics and navigations, the appearance of MEMS (Micro-electromechanical Systems, MEMS (micro electro mechanical system)) technology impels inertial navigation system to develop to direction low-cost, microminiaturized, low-power consumption.The suspension rotor micro gyro that utilizes the MEMS technical design to make does not have the machinery friction, both had high-precision advantage, have again that size is little, mass, characteristics that cost is low, on the military and civilian equipment in modern and future, be with a wide range of applications, can satisfy the demand of the portable autonomous navigation of microminiature platform especially.
Since the nineties in 20th century, the suspension rotor gyro that declines causes the extensive concern of industry member, academia, and some research institutions of states such as English, U.S., order have carried out the research of a large amount of suspension rotor micro gyros, and have obtained certain achievement in research.Domestic also have unit to carry out this respect tracking exploration.
Find by literature search, in Chinese patent 200410018474.5 " electrostatic suspension rotor micro-inertia sensor and manufacture method thereof ", a kind of electrostatic suspension rotor micro-inertia sensor has been proposed, this micro-inertia sensor comprises substrate layer down, intermetallic metal structural sheet and last substrate layer, the intermetallic metal structural sheet is by metallic rotator and peripheral radial electrode, down, last substrate layer respectively with radial electrode mutually bonding form rotor chamber, the metallic rotator of colyliform is in the center of rotor chamber, with following, form axial electrode gap and radial electrode gap between axial electrode on the last substrate and the peripheral radial electrode respectively.There is following deficiency in this technology, the suspension supporting of rotor needs 5 degree of freedom of control, has increased the requirement that rotor has been suspended and propped up greatly, owing to adopt variable capacitance to make the rotor high-speed rotation, must separative electrode on the rotor or be equivalent to the land-based area of electrode, complex structure.In order to guarantee the permanent high-speed rotation of rotor, must detect the relative position of rotor and the voltage of determinant electrode in real time and apply order simultaneously, the permanent high speed detection control loop of special rotor must be arranged.
Summary of the invention
The objective of the invention is at above-mentioned deficiency of the prior art, a kind of circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope are provided, in the dependence, cylindrical and multi-ring shaped axial and radial magnetizing permanent magnetism body in the following stator provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, achieve the stable suspension of diamagnetic sensitive mass, on utilizing again simultaneously, the axial detection of following stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor improves the axial rigidity of little gyro, lateral rigidity and impact resistance strengthen the stable suspersion performance.The present invention is before applying electrostatic potential, and rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatic suspension, has reduced playing a process and playing a control difficulty of rotor, does not need complicated control gear can realize self-stabilization.The present invention utilizes charge relaxation to make the permanent high-speed rotation of rotor, does not need to be provided with electrode on the rotor, thereby can make round square position, and structure and control are simple, have also made things convenient for processing; And the present invention can detect simultaneously and comprise along three axis accelerometers of X, Y, Z axle and around X, Y-axis two shaft angle acceleration.The present invention also have power consumption little, realize convenient, the characteristics that size is little.
The present invention is achieved through the following technical solutions, and the present invention is made of last stator, rotor and following stator three parts, and last stator tips upside down on down on the stator, make two end faces of stator and following stator relative, finish assembling, thereby form cavity, rotor then is suspended in this cavity.When assembling, the face over against rotor in the last stator structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor in the following stator structure also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
Described down stator comprise down stator side to detection and feedback electrode, down stator public capacitance pole plate, stator shaft orientation detects and FEEDBACK CONTROL electrode, stator matrix, stator cylindrical permanent magnet, a plurality of stator ring permanent magnet down, stator rotation drive electrode down down down down; Following stator cylindrical magnetic body profile is columniform and axial charging, and a plurality of stator ring permanent magnet profiles down are annular; On the end face of following stator matrix, distributing stator public capacitance pole plate, following stator rotation drive electrode, following stator shaft orientation detection and feedback electrode, following stator side to detection and feedback electrode from inside to outside successively, following stator side is to detecting and feedback electrode is distributed in down the outermost of the end face of stator matrix, and circumferentially; Bottom surface at following stator matrix, following stator cylindrical permanent magnet is positioned at the midline position of stator matrix surface geometry down, the midline position of the then following stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, cylindrical permanent magnet magnetizes vertically, two adjacent permanent magnets is followed successively by axial charging and radial magnetizing, the direction that magnetizes of two permanent magnets (promptly between two permanent magnets only every a permanent magnet) of being separated by is opposite, described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along cylindrical or annular how much axis (also being rotation) directions, and described radial magnetizing is meant and magnetizes along the radial direction of annular permanent magnet.
The described rotation of stator down drive electrode comprises that a plurality of stator A down rotate drive electrode mutually, stator B rotates drive electrode mutually down, stator C rotates drive electrode mutually down, following stator A rotates drive electrode mutually, stator B rotates drive electrode mutually down, following stator C rotates drive electrode mutually and abuts against together, forms a space distribution cycle.Can be on following stator surface circumference by a plurality of such A, B, the periodic distribution that C rotates drive electrode mutually.
Describedly go up that the stator primary structure comprises the stator matrix, goes up stator public capacitance pole plate and last stator shaft orientation detection and feedback electrode, goes up the stator cylindrical permanent magnet, a plurality ofly goes up the stator ring permanent magnet, upward stator rotates drive electrode; Last stator cylindrical magnetic body profile is columniform and axial charging, and a plurality of upward stator ring permanent magnet profiles are annular; Bottom surface at last stator matrix, last stator cylindrical permanent magnet is positioned at the midline position of stator matrix surface geometry, the midline position of the then above stator matrix surface of other annular permanent magnet geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of adjacent two annular permanent magnets, cylindrical permanent magnet closely is nested in the annular permanent magnet of annulus inside radius minimum, cylindrical permanent magnet magnetizes vertically, two adjacent permanent magnets is followed successively by axial charging and radial magnetizing, the direction that magnetizes of two permanent magnets (promptly between two permanent magnets only every a permanent magnet) of being separated by is opposite, described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along cylindrical or annular how much axis (also being rotation) directions, and described radial magnetizing is meant and magnetizes along the radial direction of annular permanent magnet.Last stator public capacitance pole plate and last stator shaft orientation detect and the annexation of feedback electrode is stator public capacitance pole plate on distributing successively from inside to outside on the end face of last stator matrix and detection of last stator shaft orientation and feedback electrode.
The described stator rotation drive electrode of going up comprises that a plurality of stator A of going up rotate drive electrode mutually, upward stator B rotates drive electrode mutually, upward stator C rotates drive electrode mutually, last stator A rotates drive electrode mutually, upward stator B rotates drive electrode mutually, last stator C rotates drive electrode mutually and abuts against together, forms a space distribution cycle.Can be on last stator surface circumference by a plurality of such A, B, the periodic distribution that C rotates drive electrode mutually.
Described rotor is five layers of disc-shaped structure, and the middle layer is a supporting layer, promptly anti-magnetic structure layer, and two surfaces are insulation course about it, adopt SiO
2Insulating material, insulation course are outward the charge relaxation layers, adopt the material with charge relaxation effect.In the middle of supporting layer was positioned at, the charge relaxation layer linked to each other with supporting layer by insulation course.
By rotate mutually at a plurality of down stator A drive electrode, down stator B rotate mutually drive electrode, down stator C rotate mutually drive electrode and a plurality of on stator A rotate mutually drive electrode, on stator B rotate mutually drive electrode, on stator C rotate drive electrode mutually and apply voltage, can form the capable ripple of rotational voltage at stator surface up and down, induce the voltage traveling wave of hysteresis at the charge relaxation layer of rotor, thereby drive the rotor high-speed rotation;
Last stator cylindrical permanent magnet and following stator cylindrical permanent magnet, last stator ring permanent magnet is identical with following stator ring permanent magnet size from inside to outside, promptly go up the diameter of stator circular permanent magnet and height with the diameter of following stator circular permanent magnet with highly equate, for stator up and down, from circular permanent magnet, annular permanent magnet from inside to outside is called first annular permanent magnet successively, second annular permanent magnet, by that analogy, then go up the ring interior diameter of first annular permanent magnet of stator, ring overall diameter and height should with the ring interior diameter of first annular permanent magnet of following stator, ring overall diameter and highly equal, the ring interior diameter of second annular permanent magnet of last stator, ring overall diameter and height should with the ring interior diameter of second annular permanent magnet of following stator, ring overall diameter and highly equal, and the like.
When last stator tips upside down on down on the stator, the opposite face of need to make going up stator and the corresponding permanent magnet of play stator vertical direction form N-N or S-S one to one pole polarity concern; The end face of last stator matrix needs face-to-face positioned opposite with the end face of following stator matrix, the end face of last stator matrix is distributed with stator and detects and feedback electrode, the end face of following stator matrix is distributed with down stator and detects and feedback electrode, and stator side is right to electrostatic attraction electrode under being distributed with on the end face outmost turns circumference of following stator matrix.
When last stator tips upside down on down on the stator, following stator public capacitance pole plate and last stator public capacitance pole plate, following stator rotation drive electrode and last stator rotation drive electrode, following stator shaft orientation detection and feedback electrode detect with last stator shaft orientation and feedback electrode should be corresponding up and down on the locus, avoid dislocation, promptly along the axis direction projection of device, following stator public capacitance pole plate and last stator public capacitance pole plate, following stator rotation drive electrode and last stator rotation drive electrode, following stator shaft orientation detection and feedback electrode detect with last stator shaft orientation and feedback electrode is overlapping perpendicular to the projection in the plane of axis.
Typical technology feature of the present invention is that rotor is to comprise under anti-magnetic structure layer in the middle of the insulation course on the rotor, rotor, the rotor on insulation course, the rotor five layers of round square position structure of charge relaxation layer under the electric charge relaxed layer and rotor; Following stator cylindrical permanent magnet is an axial charging, following stator ring permanent magnet is a plurality of, be respectively axial charging or radial magnetizing, the most close following stator ring permanent magnet of stator cylindrical permanent magnet down is a radial magnetizing, from inside to outside, adjacent following stator ring permanent magnet magnetizing direction is respectively axial charging or radial magnetizing, but can not be all radial magnetizing or be all axial charging; Last stator cylindrical permanent magnet is an axial charging, last stator ring permanent magnet is a plurality of, be respectively axial charging or radial magnetizing, the last stator ring permanent magnet of the most close last stator cylindrical permanent magnet is a radial magnetizing, from inside to outside, adjacent last stator ring permanent magnet magnetizing direction is respectively axial charging or radial magnetizing, but can not be all radial magnetizing or be all axial charging; Following stator rotation drive electrode has a plurality of, be and arrange in garden week, following stator public capacitance pole plate is circular, following stator shaft orientation detects and feedback electrode has a plurality of, be and arrange in garden week, following stator rotation drive electrode stator public capacitance pole plate and following stator shaft orientation down detect and feedback electrode between, following stator side is positioned at outside stator shaft orientation detection down and the feedback electrode to detecting and feedback electrode also is and arranges in garden week; Last stator public capacitance pole plate is circular, last stator rotation drive electrode has a plurality of, is and garden week arranges that last stator shaft orientation detects and feedback electrode has a plurality of, be and arrange in garden week, last stator rotation drive electrode last stator public capacitance pole plate, between stator shaft orientation detection and the feedback electrode.
Rotor rotation of the present invention: on stator rotation drive electrode, apply the sequential potential pulse, form the capable ripple of rotational voltage,, and then drive the permanent high-speed rotation of rotor because the charge relaxation effect induces the voltage traveling wave of hysteresis on rotor at stator surface.Belong to the asynchronous motor principle of work, do not need position probing and backfeed loop.
Position probing of the present invention: it is to realize by the capacitance that extracts between side direction detection and feedback electrode and the rotor that radial position detects.It is to realize by the capacitance between stator shaft orientation detection and feedback electrode and the rotor about the extraction that axial location detects.
Moment of the present invention applies: axial detection by stator up and down and feedback electrode, stator side is to detecting and the voltage of feedback electrode applies and realizes down.
The invention solves the deficiencies in the prior art, adopt cylindrical permanent magnet and many annular permanent magnets of axial and radial magnetizing to arrange, be highly susceptible to processing and magnetizing, up and down the annular permanent magnet in the stator both can radial magnetizing also can axial charging, they are with the cylindrical permanent magnet of axial charging, also can form diamagnetic substance stable suspersion required static magnetic field gradient and distribution, the new approaches and the new method that provide diamagnetic substance to suspend, and can form garden Zhou Fangxiang in theory and go up the no change static magnetic field, electromagnetic damping in the time of can effectively avoiding the rotor rotation, be the useful thinking and the scheme of a kind of magnet arrangement and the design of magnetizing, the rotor that is provided with diamagnetic substance like this is very easy in this static magnetic field realize that stable support suspends, and makes things convenient for to such an extent that realize stable suspersion to support the big technology important document that this suspension rotor micro gyro is wanted operate as normal.The rotor design has the charge relaxation material, can constitute asynchronous induction machine with the stator drive electrode, do not need to control and to realize stable rotation at a high speed, and electromagnetic damping can be effectively avoided in the magnet arrangement of the present invention and the arrangement of magnetizing, on the one hand making things convenient for to such an extent that realize rotor stability rotates another big technology important document that this suspension rotor micro gyro is wanted operate as normal, can improve rotating speed greatly on the other hand.
The present invention's cylindrical and multi-ring shaped axial magnetizing permanent magnetism body of stator up and down provides suspending power and lateral stability power to antimagnetic rotor, realizing not having control suspends from steady, utilize simultaneously the axial detection of upper and lower stator and feedback electrode and following stator side electrostatic force between detection and feedback electrode and rotor to improve axial rigidity, lateral rigidity and the impact resistance of little gyro, enhancing stable suspersion performance again.The present invention is before applying electrostatic potential, and rotor has been suspended in the equilibrium position because of diamagnetic effect, so compare general electrostatic suspension, has reduced playing a process and playing a control difficulty of rotor.The present invention is simple in structure, utilizes charge relaxation, by the capable ripple of stator surface rotational voltage, induces the voltage traveling wave of hysteresis on rotor, and then drives the permanent high-speed rotation of rotor, does not need rotating speed to detect and both can realize the permanent high-speed rotation of rotor.It can detect simultaneously and comprise along the linear acceleration of X, Y, Z axle and around X, Y-axis angular acceleration, and then can be used for object is accurately located, and is used to detect the attitude or the navigation of carrier.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention
Fig. 2 is stator Facad structure synoptic diagram under the present invention
Fig. 3 is stator structure synoptic diagram under the present invention
Fig. 4 is stator Facad structure synoptic diagram in the present invention
Fig. 5 is stator structure synoptic diagram in the present invention
Fig. 6 is a rotor structure synoptic diagram of the present invention
Fig. 7 is stator permanent magnet structural representation under the present invention
Fig. 8 is stator permanent magnet structural representation in the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, what present embodiment adopted is three-decker, is made of last stator 1, rotor 3 and following stator 2 three parts, last stator 1 tips upside down on down on the stator 2, makes 2 two end faces of stator 1 and following stator relative, finishes assembling, thereby the formation cavity, 3 of rotors are suspended in this cavity.When assembling, the face over against rotor 3 in last stator 1 structure all is referred to as end face, and corresponding another side then is referred to as the bottom surface, and same, the face over against rotor 3 in following stator 2 structures also all is referred to as end face, and corresponding another side then is referred to as the bottom surface.
As Fig. 2, Fig. 3, shown in Figure 7, described stator 2 down comprises that stator side (in the present embodiment is four groups to detection and feedback electrode 6 down, every group comprises two pole plates), down stator public capacitance pole plate 4, stator shaft orientation detects and FEEDBACK CONTROL electrode 5 (in the present embodiment be four groups, every group comprises two pole plates), stator matrix 7, stator cylindrical permanent magnet 8, a plurality of stator ring charging permanent magnet 9 down, stator rotation drive electrode 18 down down down down; On the end face of following stator matrix 7, distributing stator public capacitance pole plate 4, following stator rotation drive electrode 18, following stator shaft orientation detection and feedback electrode 5, following stator side to detection and feedback electrode 6 from inside to outside successively, following stator side is distributed in down the outermost of the end face of stator matrix to detection and feedback electrode 6, and circumferentially, following stator rotates drive electrode 18 circumferentially, and following stator shaft orientation detection and feedback electrode 5 are also circumferentially; Bottom surface at following stator matrix 7, following stator cylindrical permanent magnet 8 is positioned at the midline position of stator matrix 7 surface geometries down, the midline position of other the then following stator matrix surface of following stator ring permanent magnet 9 geometry is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that following stator 2 is adjacent, following stator cylindrical permanent magnet 8 closely is nested in the annular permanent magnet of annulus inside radius minimum, following stator cylindrical permanent magnet 8 magnetizes vertically, following stator 2 adjacent (near) two permanent magnets be followed successively by axial charging and radial magnetizing, the direction that magnetizes of two permanent magnets that following stator 2 is separated by (promptly between two permanent magnets only every a permanent magnet) is opposite, described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along cylindrical or annular how much axis (also being rotation) directions, and described radial magnetizing is meant and magnetizes along the radial direction of annular permanent magnet.
The described rotation of stator down drive electrode 18 comprises that a plurality of stator A down rotate drive electrode mutually, stator B rotates drive electrode mutually down, stator C rotates drive electrode mutually down, following stator A rotates drive electrode mutually, stator B rotates drive electrode mutually down, following stator C rotates drive electrode mutually and abuts against together, forms a space distribution cycle.Can be on following stator surface circumference by a plurality of such A, B, the periodic distribution that C rotates drive electrode mutually.
As Fig. 4, Fig. 5, shown in Figure 8, described stator 1 primary structure of going up comprises stator matrix 12, goes up stator public capacitance pole plate 10, goes up stator rotation drive electrode 19 and detection of last stator shaft orientation and feedback electrode 11 (in the present embodiment be four groups, every group comprises two pole plates), goes up stator cylindrical permanent magnet 14, goes up stator ring permanent magnet 13; Bottom surface at last stator matrix 12, last stator cylindrical permanent magnet 14 is positioned at the midline position of stator matrix 12 surface geometries, the midline position of other then above stator matrix 12 surface geometries of last stator ring permanent magnet 13 is that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that last stator 1 is adjacent, last stator cylindrical permanent magnet 14 closely is nested in the annular permanent magnet of annulus inside radius minimum, last stator cylindrical permanent magnet 14 magnetizes vertically, last stator 1 two adjacent permanent magnets are followed successively by axial charging and radial magnetizing, last stator 1 be separated by (near) the direction that magnetizes of two permanent magnets (promptly between two permanent magnets only every a permanent magnet) opposite, described axial charging is meant that the pole orientation of cylindrical and annular permanent magnet is along cylindrical or annular how much axis (also being rotation) directions, and described radial magnetizing is meant and magnetizes along the radial direction of annular permanent magnet.Last stator public capacitance pole plate 10 and last stator shaft orientation detect and the annexation of feedback electrode 11 is stator public capacitance pole plate on distributing successively from inside to outside on the end face of last stator matrix 12 10 and detection of last stator shaft orientation and feedback electrode 11.
The described stator rotation drive electrode 19 of going up comprises that a plurality of stator A of going up rotate drive electrode mutually, upward stator B rotates drive electrode mutually, upward stator C rotates drive electrode mutually, last stator A rotates drive electrode mutually, upward stator B rotates drive electrode mutually, last stator C rotates drive electrode mutually and abuts against together, forms a space distribution cycle.Can be on last stator surface circumference by a plurality of such A, B, the periodic distribution that C rotates drive electrode mutually.
Described rotor 3 is five layers of round square position structure, anti-magnetic structure layer 16 is arranged on the centre of rotor 3 in the middle of the rotor, anti-magnetic structure layer 16 upper surface are provided with insulation course 15 on the rotor in the middle of rotor, anti-magnetic structure layer 16 lower surface are provided with insulation course 17 under the rotor in the middle of rotor, in the outmost surface of rotor 3 charge relaxation layer 21 under the electric charge relaxed layer 20 and rotor is set on the rotor, electric charge relaxed layer 20 links to each other with anti-magnetic structure layer 16 in the middle of the rotor by insulation course on the rotor 15 on the rotor, and charge relaxation layer 21 links to each other with anti-magnetic structure layer 16 in the middle of the rotor by insulation course under the rotor 17 under the rotor.On the rotor under electric charge relaxed layer 20, the rotor charge relaxation layer 21 adopt material with charge relaxation effect, as annotating boron doped polycrystalline silicon materials; Insulation course 17 employing SiO under insulation course 15, the rotor on the rotor
2Insulating material; Anti-magnetic structure layer 16 can adopt diamagnetic material in the middle of the rotor, as pyrolytic graphite.
The physical dimension of the last stator circular permanent magnet 14 of last stator 1 and the following stator circular permanent magnet 8 of following stator 2 is identical, last stator 1 and following the stator 2 from inside to outside physical dimension of corresponding annular permanent magnet are identical, promptly play the diameter of stator circular permanent magnet 8 and height with the diameter of last stator circular permanent magnet 14 with highly equate, for last stator 1, from last stator circular permanent magnet 14, annular permanent magnet from inside to outside is called stator first annular permanent magnet successively, last stator second annular permanent magnet, by that analogy, for following stator 2, from following stator circular permanent magnet 14, annular permanent magnet from inside to outside is called stator first annular permanent magnet down successively, following stator second annular permanent magnet, by that analogy, then go up stator first annular permanent magnet diameter and the height should with the ring interior diameter of following stator first annular permanent magnet, ring overall diameter and highly equal, the ring interior diameter of last stator second annular permanent magnet, the ring overall diameter and the height should with the ring interior diameter of following stator second annular permanent magnet, ring overall diameter and highly equal, and the like.
When last stator 1 tips upside down on down on the stator 2, the end face of last stator matrix 12 needs face-to-face positioned opposite with the end face of following stator matrix 7, need make simultaneously stator 1 and play stator 2 corresponding axial chargings the permanent magnet opposite face vertical direction formation N-N or S-S one to one pole polarity concern, and it is identical with the direction of the radial magnetizing of the permanent magnet of following stator 2 corresponding radial magnetizings to go up stator 1, promptly going up stator cylindrical permanent magnet 14 and following stator cylindrical permanent magnet 8 is that axial charging and pole polarity are opposite, last stator first annular permanent magnet is that radial magnetizing and magnetizing direction are identical with following stator first annular permanent magnet, last stator second annular permanent magnet is that axial charging and pole polarity are opposite with following stator second annular permanent magnet, last stator the 3rd annular permanent magnet is that radial magnetizing and magnetizing direction are identical with following stator the 3rd annular permanent magnet, by that analogy.
When last stator 1 tips upside down on down on the stator 2, following stator public capacitance pole plate 4 and last stator public capacitance pole plate 10, following stator rotation drive electrode 18 and last stator rotation drive electrode 19, following stator shaft orientation detects and feedback electrode 5 detects with last stator shaft orientation and feedback electrode 11 should be corresponding up and down on the locus, avoid dislocation, promptly along the axis direction projection of device, following stator public capacitance pole plate 4 and last stator public capacitance pole plate 10, following stator rotation drive electrode 18 and last stator rotation drive electrode 19, following stator shaft orientation detects and feedback electrode 5 detects with last stator shaft orientation and feedback electrode 11 is overlapping perpendicular to the projection in the plane of axis.
During concrete enforcement, the number of the A phase rotation electrode of last stator rotation drive electrode, B phase rotation electrode, C phase rotation electrode can be adjusted as required, the number of the A phase rotation electrode of following stator rotation drive electrode 18, B phase rotation electrode, C phase rotation electrode can be adjusted as required, and last stator shaft orientation detects and feedback electrode 11, stator shaft orientation detects and FEEDBACK CONTROL electrode 5, stator side also is adjustable to the number of detection and feedback electrode 6 down down.
As Fig. 2-8, during present embodiment work, comprise following three aspects:
(1) when being used to detect the acceleration signal of vertical direction z axle input, apply same frequency for last stator shaft orientation detection and feedback electrode 11 and the detection of following stator shaft orientation and feedback electrode 5, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the z axle acceleration of input through the circuit aftertreatment, simultaneously by detect for last stator shaft orientation and feedback electrode plate group 11 and following stator shaft orientation detects and feedback electrode 5 to apply amplitude equal, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(2) when being used for the acceleration signal of detection level direction x axle input, under giving upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the x axle acceleration of input through the circuit aftertreatment, simultaneously under upper left one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and lower-left under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(3) when being used to detect the acceleration signal of vertical direction y axle input, under giving upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply same frequency respectively, the amplitude equal and opposite in direction, the high-frequency ac carrier wave of phase differential 180 degree, by last stator public capacitance pole plate 10 and following stator public capacitance pole plate 4 output differential capacitance signals, can detect the y axle acceleration of input through the circuit aftertreatment, simultaneously under upper right one group stator side to detect and one group of two capacitor plates of feedback electrode 6 and bottom right under stator detect and two capacitor plates of feedback electrode plate 6, apply amplitude and equate, opposite polarity DC feedback voltage is withdrawn into the equilibrium position to rotor 3;
(4) when detecting around X, during the input angular velocity of Y-axis, is identical because of detecting around X-axis with input angular velocity principle around Y-axis, the course of work that detects around the X-axis input angular velocity is only described herein, as around the X-axis input angular velocity time, gap between detection of corresponding stator shaft orientation down and feedback electrode 5 and the detection of last stator shaft orientation and feedback electrode 11 and the rotor 3 changes, thereby stator public electrode outgoing carrier modulation signal up and down, this signal is carried out modulation, and the output feedback voltage detects and feedback electrode 5 and detection of last stator shaft orientation and feedback electrode 11 to corresponding stator shaft orientation down, rotor is withdrawn into the equilibrium position, just can angle measurement speed according to the size of feedback moment, moment that Here it is is the method for balancing side angular velocity again.
The course of work of the present invention is as follows: because the bottom surface of last stator 1 and following stator 2 is provided with permanent magnet, and rotor 3 itself is a diamagnetic body, will form interaction force between rotor 3 and last stator 1 and the following stator 2 is that coercive force provides Z to (axially) suspending power for the suspension antimagnetic rotor, simultaneously also for rotor 3 provides lateral stability power along X, Y direction, and then rotor 3 has been realized that self-stabilization 2 of last stator 1 and play stators rises and has been propped up suspension; Simultaneously, by detecting for down stator shaft orientation and feedback electrode 5 and last stator shaft orientation detects and feedback electrode 11 applies voltage, following stator 2 and rotor 3, go up the electrostatic force of generation between stator 1 and the rotor 3, strengthened the axial rigidity of rotor 3; By applying FEEDBACK CONTROL voltage in the peripheral following stator side that distributes of stator on detection and feedback electrode 6, following stator side produces electrostatic force to electrostatic attraction electrode 6 and rotor 3, has strengthened the lateral rigidity of rotor 3.Last stator shaft orientation detect and feedback electrode 11, down stator shaft orientation detect and feedback electrode 5, down stator side to detect and feedback electrode 6 on apply carrier wave, when having axial and lateral deviation, by the signal that generates on last stator public capacitance pole plate 10 and the following stator public capacitance pole plate 4 is picked up, processing such as amplification, modulation, and judge, apply DC voltage on corresponding capacitance pole plate group or side direction electrostatic attraction electrode, the electrostatic force of generation is withdrawn into the equilibrium position with little rotor.Can improve like this be in inverse magnetic suspension state lower rotor part axially and lateral rigidity, improve the impact resistance of little gyro, ensure that rotor 3 is at 2 of last stator 1 and following stators stable suspersion more.Simultaneously, because before applying electrostatic potential, rotor 3 is compared the little gyro of general electrostatic suspension because diamagnetic effect has been suspended in the equilibrium position, reduced playing a process and playing a control difficulty of rotor 3.
Process using Micrometer-Nanometer Processing Technology of the present invention (MEMS technology) combines with Precision Machining, specifically: go up last stator public capacitance pole plate 10 on the stator 1, go up that stator shaft orientation detects and feedback electrode 11, go up stator rotation drive electrode 19, and down the following stator public capacitance pole plate 4 on the stator 2, stator shaft orientation detects and feedback electrode 5, stator side is to detecting and feedback electrode 6, stator rotation drive electrode 18 adopts the Micrometer-Nanometer Processing Technologies realizations down down down; Capacitor plate and side direction electrostatic attraction electrode material generally adopt electric conductivity to be preferably copper, the Micrometer-Nanometer Processing Technology that technology generally adopts photoetching to electroplate; Following stator cylindrical magnet piece and annular permanent magnet and last stator cylindrical permanent magnet and annular permanent magnet can adopt cobalt nickel manganese phosphorus (CoNiMnP), neodymium iron boron (NdFeB), by Precision Machining or little machine-shaping, and magnetize and obtain; 3 of rotors are to be earlier two surface sputtering Cr/Cu or Cr/Au of the middle anti-magnetic structure layer of rotor at substrate, obtain through fine electric spark processing then, what substrate adopted is diamagnetic material, as pyrolytic graphite, rotor charge relaxation layer 21 adopts the material with charge relaxation effect, as annotating boron doped polycrystalline silicon materials.
Claims (7)
1. circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope, constitute by last stator (1), rotor (3) and following stator (2), last stator (1) tips upside down on down on the stator (2), rotor (3) then is suspended in the cavity of stator (1) and following stator (2) formation, it is characterized in that:
Described stator (2) down comprises that stator side is to detecting and feedback electrode (6) down, following stator public capacitance pole plate (4), following stator shaft orientation detects and FEEDBACK CONTROL electrode (5), following stator matrix (7), following stator cylindrical permanent magnet (8), a plurality of stator ring permanent magnets (9) down, following stator rotation drive electrode (18) is distributing stator public capacitance pole plate (4) from inside to outside successively on the end face of following stator matrix (7), following stator rotation drive electrode (18), following stator shaft orientation detects and FEEDBACK CONTROL electrode (5), following stator side is to detecting and feedback electrode (6); Bottom surface at following stator matrix (7), following stator cylindrical permanent magnet (8) is positioned at the midline position of stator matrix (7) surface geometry down, a plurality of midline positions of the then following stator matrix surface of stator ring permanent magnet (9) geometry down are that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that following stator (2) is adjacent, following stator cylindrical permanent magnet (8) closely is nested in the annular permanent magnet of annulus inside radius minimum, following stator cylindrical permanent magnet (8) magnetizes vertically, two permanent magnets that following stator (2) is adjacent are followed successively by axial charging and radial magnetizing, and the direction that magnetizes of two permanent magnets that following stator (2) is separated by is different;
The described stator (1) of going up comprises stator matrix (12), last stator public capacitance pole plate (10) and last stator shaft orientation detect and feedback electrode (11), last stator cylindrical permanent magnet (14), last stator ring permanent magnet (13), last stator rotation drive electrode (19), bottom surface at last stator matrix (12), last stator cylindrical permanent magnet (14) is positioned at the midline position of stator matrix (12) surface geometry, a plurality of midline positions of going up the then above stator matrix of stator ring permanent magnet (13) (12) surface geometry are that the center of circle is from inside to outside arranged successively, the tight nested cooperation of two annular permanent magnets that last stator (1) is adjacent, last stator cylindrical permanent magnet (14) closely is nested in the annular permanent magnet of annulus inside radius minimum, last stator cylindrical permanent magnet (14) magnetizes vertically, last stator (1) two adjacent permanent magnets is followed successively by axial charging and radial magnetizing, the direction of the magnetic polarity of two permanent magnets that last stator (1) is separated by is different, is distributing successively from inside to outside to go up stator public capacitance pole plate (10) and detection of last stator shaft orientation and feedback electrode (11) on the end face of last stator matrix (12);
Described rotor (3) is five layers of round square position structure, comprise insulation course on the rotor (15), anti-magnetic structure layer (16) in the middle of the rotor, insulation course under the rotor (17), charge relaxation layer (21) under electric charge relaxed layer (20) and the rotor on the rotor, anti-magnetic structure layer (16) is arranged on the centre of rotor (3) in the middle of the rotor, anti-magnetic structure layer (16) upper surface is provided with insulation course on the rotor (15) in the middle of rotor, anti-magnetic structure layer (16) lower surface is provided with insulation course under the rotor (17) in the middle of rotor, in the outmost surface of rotor (3) charge relaxation layer (21) under the electric charge relaxed layer (20) and rotor is set on the rotor, electric charge relaxed layer (20) links to each other with anti-magnetic structure layer (16) in the middle of the rotor by insulation course on the rotor (15) on the rotor, and charge relaxation layer (21) links to each other with anti-magnetic structure layer (16) in the middle of the rotor by insulation course under the rotor (17) under the rotor.
2. circle according to claim 1 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope, it is characterized in that, the physical dimension of the following stator cylindrical permanent magnet (8) of described last stator cylindrical permanent magnet (14) that goes up stator (1) and following stator (2) is identical, and last stator (1) and following stator (2) the from inside to outside physical dimension of corresponding annular permanent magnet are identical.
3. circle according to claim 1 and 2 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope, it is characterized in that, the described face-to-face positioned opposite of end face that goes up end face with the following stator matrix (7) of stator matrix (12), the permanent magnet opposite face of going up simultaneously the corresponding axial charging of stator (1) and following stator (2) forms N-N or S-S pole polarity relation one to one at vertical direction, and the direction of the radial magnetizing of the permanent magnet of radial magnetizing is identical accordingly and go up stator (1) and following stator (2).
4. circle according to claim 1 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope, it is characterized in that, described stator side down is distributed in down the end face outermost of stator matrix to detection and feedback electrode (6), and circumferentially, following stator shaft orientation detect and FEEDBACK CONTROL electrode (5) also circumferentially.
5. circle according to claim 1 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope is characterized in that, on the described rotor under electric charge relaxed layer (20), the rotor charge relaxation layer (21) material be material with charge relaxation effect.
6. circle according to claim 1 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope is characterized in that, insulation course (17) material is SiO under insulation course on the described rotor (15), the rotor
2Insulating material.
7. circle according to claim 1 and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope is characterized in that, anti-magnetic structure layer (16) material is a diamagnetic material in the middle of the described rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100324749A CN100565108C (en) | 2008-01-10 | 2008-01-10 | Circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100324749A CN100565108C (en) | 2008-01-10 | 2008-01-10 | Circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
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| Publication Number | Publication Date |
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| CN101216310A CN101216310A (en) | 2008-07-09 |
| CN100565108C true CN100565108C (en) | 2009-12-02 |
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| CNB2008100324749A Expired - Fee Related CN100565108C (en) | 2008-01-10 | 2008-01-10 | Circle and multi-ring shaped axial and radial magnetizing permanent magnetism antimagnetic rotor charge relaxation rotating micro gyroscope |
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| CN109120185B (en) * | 2018-09-18 | 2019-09-13 | 哈尔滨工业大学 | Low rigidity magnetcisuspension suspension gravity compensator based on characteristic cancellation principle |
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